Journal of Vacuum Science & Technology an Official Journal of the American Vacuum Society B, Microelectronics Processing and Phenomena

1.6(top 50%)

impact factor

12.2K(top 2%)

papers

244.2K(top 2%)

citations

143(top 5%)

h-index

1.6(top 50%)

impact factor

12.2K

all documents

252.7K

doc citations

229(top 5%)

g-index

Top Authors (by citations)

#	Author	Articles	Citations	R ARank	R CRank
1	Stephen Y Chou	25	4,433	2	2
2	John Robertson	4	2,059	18	7
3	Stephen J Pearton	67	1,959	8	4
4	Hideki Hasegawa	22	1,742	3	1
5	Randall Feenstra	20	1,451	3	4
5	Stella Pang	57	1,451	1	1
7	Mikhail Baklanov	12	936	6	2
8	Roya Maboudian	2	799	33	5
9	Hideo Ohno	7	760	16	15
10	Wei Wu	6	613	5	5
11	Bharat Bhushan	4	598	36	21
12	Winfried Mönch	3	581	4	2
13	J Alexander Liddle	42	579	1	3
14	Shin-Ichi Kanemaru	26	549	2	1
15	Bharat Bhushan	3	541	45	24
16	Kenji Yamazaki	6	531	2	1
17	Kevin L Jensen	18	526	2	2
18	Ernst Meyer	11	522	8	14
19	Chris G. Van de Walle	6	484	9	14
20	Evangelos Gogolides	14	480	2	5
20	Stan Veprek	5	480	7	4
22	Steven Brueck	16	459	4	6
24	D Frank F Ogletree	8	453	4	14
25	Yves Chabal	5	451	16	18
26	Edward T Yu	19	439	3	4
27	Andrew J Steckl	25	432	3	7
27	Seiji Samukawa	20	432	4	5
29	Gottlieb S Oehrlein	13	424	8	6
30	Jeffrey A Hopwood	5	410	5	6
31	Tu-Pei Chen	1	404	41	3
31	Andrea Notargiacomo	1	404	19	1
33	Dietrich R.T. Zahn	18	403	10	8
33	Babu R Chalamala	13	403	1	3
35	Mark A Reed	8	378	6	11
35	Masayoshi Nagao	19	378	2	1
37	Shirley Chiang	6	365	5	5
38	Shigefusa Chichibu	5	357	9	5
39	Martin Stutzmann	3	355	35	19
39	Fernando A. Ponce	9	355	5	6
41	Craig S Lent	2	344	11	5
42	Takayuki Hoshino	6	340	3	1
43	Joerg Neugebauer	4	339	16	16
45	Xing Cheng	4	333	4	2
46	Alexei Gruverman	3	323	18	20
47	Kenneth A Goldberg	19	315	2	3
48	John Conley	1	314	6	1
50	Ralf K Heilmann	13	304	2	1
50	Robert Carpick	1	304	29	15
50	Zhi Liu	7	304	9	15
50	Nicolas Agrait	1	304	27	12
54	Tetsuji Yasuda	13	303	6	5
55	Brian Bennett	12	299	5	8
56	Yves Caudano	1	298	7	1
57	Yasuo Takahashi	4	294	4	4
58	Clivia M Sotomayor Torres	6	293	16	14
59	Sankar Das Sarma	11	284	7	12
60	Marek Skowronski	2	277	15	5
61	steven Denbaars	7	268	18	21
62	Roland Wiesendanger	13	259	11	20
63	Gregory N Parsons	6	253	10	11
64	Valeriu Filip	18	252	1	2
65	Maciej Gutowski	1	251	24	12
66	Norbert Esser	10	250	6	6
67	Michael Zharnikov	1	249	28	14
68	Akinori Saeki	4	247	21	15
69	Lars Montelius	7	243	4	7
70	Richard Forbes	3	241	8	6
71	Yoshihiko Hirai	3	238	4	1
72	Hiroshi Hiroshima	10	236	4	2
73	Christophe Cardinaud	7	233	5	5
74	Marius Grundmann	5	229	32	23
75	Shuji Nakamura	1	227	15	7
76	Michael L Simpson	6	226	4	8
76	Roger T Howe	1	226	7	5
78	L J Brillson	9	221	6	8
79	Robert M Wallace	7	218	13	23
80	Masahiko Ishida	4	217	2	4
81	Karen L Kavanagh	12	216	4	9
83	K L Wang	12	214	5	5
84	Yukio Hasegawa	9	212	4	6
85	Egbert Oesterschulze	7	211	2	2
85	Richard J Colton	3	211	5	8
87	Gary W Rubloff	17	210	2	21
88	L Jay Guo	2	208	23	19
89	Chris Jacobsen	4	204	12	19
89	Paul Chu	11	204	39	72
91	Seong-Ju Park	6	202	5	8
91	Steven George	5	202	17	32
93	H Kumar Wickramasinghe	4	200	4	8
94	Jueinai Kwo	3	199	8	8
94	Marya Lieberman	2	199	9	5
96	Carlton Grant Willson	7	197	4	6
97	Wladyslaw	2	195	24	13
97	Ivan Maximov	4	195	7	5
97	W Walukiewicz	2	195	12	12
100	R Jürgen Behm	6	194	28	37
100	Uwe Rossow	11	194	6	6
102	H M Pollock	2	192	3	4
103	Andre Anders	2	186	20	18
103	Ole Hansen	5	186	11	20
105	Robert F Davis	6	185	16	17
106	Juan Jose Saenz	3	184	16	14
106	Mauritius C M Van De Sanden	3	184	30	19
108	Lucia Sorba	13	183	7	10
109	S Ravi P Silva	9	180	11	30
109	Srinivasan Anand	9	180	2	4
111	Wilfried Vandervorst	4	179	3	1
111	Hajime Okumura	7	179	10	8
113	Tadatomo T Suga	5	174	14	12
113	Alex L De Lozanne	11	174	2	6
115	Panagiotis Argitis	9	173	2	9
116	Yordan M Georgiev	4	172	1	1
118	Darrell G Schlom	7	168	17	32
119	William Palmer	4	166	1	1
120	Po-Tsun Liu	5	165	12	8
120	Mohamed Henini	9	165	19	17
122	George M Whitesides	2	164	30	42
122	Uzi Landman	2	164	29	22
124	Clive J Roberts	6	161	12	26
124	Eray S Aydil	6	161	9	24
124	Takashi Matsukawa	11	161	3	4
127	Hendrik C Swart	1	159	85	26
127	Detlev A Grützmacher	4	159	14	15
129	Kenneth A Dean	1	158	2	4
130	Alexander A Demkov	3	156	13	8
131	Falco C M J M Van Delft	3	153	3	3
131	Chung-Yen Chao	1	153	3	4
133	David Ferry	10	151	7	9
133	Jaroslav Fabian	1	151	13	12
133	Klaus Leifer	1	151	28	8
133	Robert J Hamers	3	151	22	36
137	Lewis Johnson	3	149	1	1
137	Lourdes G Salamanca-Riba	4	149	9	8
137	Philip M Williams	5	149	2	11
137	Saw Wai Hla	1	149	8	4
137	Anja Mz Boisen	2	149	31	25
137	C Grant Willson	3	149	8	12
143	Paul Berger	4	148	7	6
144	Terry G Ireland	1	147	14	4
144	Jack Silver	1	147	37	13
144	Seiji Akita	3	147	14	11
144	Christian Schönenberger	2	147	23	24
144	G Andrew D Briggs	3	147	27	23
149	Demetre J Economou	2	146	9	7
149	Daniel L Flamm	1	146	3	3
151	Ilesanmi Adesida	3	145	3	4
152	Oliver Brandt	5	144	14	13
153	Marjorie A Olmstead	3	143	4	3
153	Eric K Lin	6	143	6	9
155	Gil U Lee	3	142	6	8
155	Shujuan Huang	3	142	19	18
155	Shoso Shingubara	3	142	5	3
158	Shinji Okazaki	1	141	2	1
159	Dale K Hensley	3	140	8	9
159	David E Aspnes	11	140	7	14
161	Xinglong Wu	3	139	61	45
162	Christopher L Soles	5	137	6	11
162	Jason D Fowlkes	3	137	14	12
162	Maarten P De Boer	1	137	11	11
165	Fan Ren	7	136	12	21
165	Paul K Chu	5	136	61	79
167	David McKenzie	1	135	66	34
168	Julia W P Hsu	2	134	19	14
169	Cees Dekker	2	133	28	33
169	A Majumdar	1	133	13	15
169	James P Mcvittie	1	133	4	3
172	Richard A Register	1	132	23	14
172	Paul Mirkarimi	6	132	2	6
172	S Y Tong	3	132	9	7
175	Chih-Hao Chang	4	131	3	5
175	D G Hasko	7	131	4	7
177	Gabriel Abadal	2	129	11	5
178	Lars Hultman	5	126	26	44
178	Ralf B Wehrspohn	1	126	36	19
178	Kornelius Nielsch	1	126	62	31
181	Xuegong Deng	5	125	2	3
182	Alexander Zunger	6	123	9	26
182	Alexey Bezryadin	1	123	16	9
182	Tony F Heinz	3	123	20	29
182	A Bezryadin	1	123	9	6
186	Katsuhisa Murakami	7	122	4	3
187	Arun Persaud	6	121	2	3
188	Ioannis Kymissis	2	119	13	8
188	Yuuki Ishida	2	119	10	5
188	Thomas E Murphy	4	119	7	15
188	Soonil Lee	8	119	2	5
192	Michael S Shur	3	118	35	31
193	I-Nan Lin	10	117	7	9
193	Zbig R Wasilewski	4	117	11	14
193	H N Chapman	4	117	24	37
193	Junghoon Yeom	1	117	7	4
193	Tae-Yeon Seong	1	117	36	12
193	John C Selby	1	117	5	2
199	Alexander Y Polyakov	9	116	6	11
199	Filippo Giannazzo	4	116	17	16
199	Nikolai B Smirnov	9	116	6	8
199	Oliver Kühn	1	116	39	16
199	Martin Kamp	8	116	12	26
199	Martin Albrecht	1	116	35	19
205	David A Ritchie	16	115	14	37
205	Keh-Yung Cheng	13	115	2	3
205	Michael David Dickey	3	115	14	33
205	Fred Roozeboom	3	115	12	15
209	Mikhail Lebedev	4	113	5	3
209	Itaru Kamiya	3	113	11	7
211	Demir Akin	1	112	10	8
212	John S Villarrubia	3	111	4	8
212	Shane Johnson	6	111	3	3
212	Peter B Lerner	3	111	3	3
212	Samit K Ray	3	111	22	15
212	Paul Ruchhoeft	5	111	1	2
217	Gvido Bratina	6	110	4	6
217	W Gero Schmidt	3	110	14	9
217	Mark J Hagmann	6	110	2	2
220	Anders S Kristensen	2	108	23	20
220	Armin Gölzhäuser	3	108	12	15
220	Jeffrey Bokor	5	108	7	19
220	David J Smith	7	108	17	28
224	Stefan Zollner	1	106	15	7
225	David F Bocian	1	105	16	16
225	Daniel Gryko	1	105	58	34
225	Yoshihiro Aiura	2	105	13	8
225	Jonathan S Lindsey	1	105	32	24
225	Stefan Heun	6	105	5	9
225	Derrick C Mancini	5	105	2	3
225	Werner G Kuhr	1	105	13	13
225	Barry C Arkles	4	105	3	4
233	M S Hegde	1	104	22	16
234	Hiroshi Masuhara	3	103	30	29
234	Philip D Rack	3	103	20	27
236	Francesco La Via	10	102	7	12
236	María Teresa Cuberes	5	102	2	4
236	Wen-Li Wu	5	102	7	11
239	C-S Lee	2	101	79	72
239	Ning Wang	2	101	31	35
239	Joan R Morante	8	101	22	55
239	Hidetaka Asoh	1	101	21	8
243	Alberto Garcia	1	99	10	10
243	Wim M Arnoldbik	1	99	9	5
243	W M M Erwin Kessels	1	99	48	30
243	John P Lafemina	3	99	6	6
243	E Di Fabrizio	2	99	4	11
248	Jose Menendez	4	98	13	12
248	Evelyn K F Yim	1	98	15	13
248	Kam Leong	1	98	67	69
248	Leonidas E Ocola	4	98	6	12
252	Rebecca Cheung	5	97	3	8
252	Christos D Dimitrakopoulos	1	97	12	16
252	Bert Müller	2	97	20	18
255	Albert Polman	1	96	32	28
255	Susanne Stemmer	1	96	28	23
255	Michiel J A De Dood	1	96	11	5
255	Jürgen P Rabe	2	96	36	42
255	Ronald L Jones	4	96	2	10
260	George K Celler	9	95	2	8
261	Albert Chin	4	94	13	10
261	Peter Beton	6	94	10	25
261	Todd L Williamson	2	94	2	1
261	Gary H Bernstein	6	94	4	10
265	A Paul Alivisatos	1	92	42	53
265	Hei Wong	3	92	10	8
268	Jayr Amorim	1	91	21	3
268	Peter I Belobrov	3	91	1	1
268	Rachel Goldman	9	91	3	5
271	Yuh-Lin Wang	6	90	5	16
271	Seoung Gil Yoon	8	90	9	15
273	Valeriy Sukharev	2	89	8	5
274	Jerry Bernholc	3	88	9	19
275	Terry Alford	6	87	6	6
275	J D Gillaspy	2	87	8	9
277	Jun Chen	6	86	12	27
277	Simon Bending	1	86	20	11
277	Hyunsang Hwang	2	86	13	17
280	Nathan Newman	2	85	14	10
281	Beng Kang Tay	5	84	18	42
281	Gyu Chul Yi	3	84	14	23
283	Weiyi Li	2	83	2	2
283	Greg Hughes	2	83	10	5
283	Yf Zheng	2	83	63	81
283	Paul F Nealey	3	83	18	27
287	Seungbum Hong	2	82	15	9
287	Kathy Lüdge	6	82	4	8
287	Vincent Ch Lee	3	82	30	46
287	Hyunjung Shin	2	82	23	27
287	Eugene A Fitzgerald	2	82	10	6
292	Oleg Kolosov	1	81	23	15
293	Alan C Seabaugh	6	80	4	14
293	Stacey F Bent	1	80	41	40
293	Marcus Andre Worsley	1	80	32	30
293	Willi Volksen	1	80	8	6
297	Soon-Ku Hong	3	79	11	9
297	Wataru Mizutani	4	79	7	8
297	Eric S Hellman	3	79	6	4
297	Robert J Nemanich	3	79	17	26
301	Alois Lugstein	3	78	6	9
301	Maciej Sawicki	2	78	21	14
301	Zoltán L Horváth	1	78	6	3
301	Michael S Fuhrer	1	78	27	27
301	Scott A Barnett	1	78	27	25
301	Euclydes Marega Jr	2	78	14	9
301	Kazumasa Okamoto	3	78	7	5
301	Robert Sherman	1	78	1	2
309	Jabez J Mcclelland	3	77	7	11
309	David J Smith	5	77	22	45
309	Chulmin Joo	3	77	6	5
309	Nava Setter	1	77	23	23
309	Max C Lemme	2	77	22	26
314	Jongsuck Bae	1	76	8	4
314	Stephen Garoff	2	76	14	16
314	Ji-Myon Lee	2	76	6	4
314	Joan M Redwing	2	76	24	28
314	Dario Anselmetti	3	76	9	21
319	Hyunsoo Kim	1	75	18	5
319	Ivo W Rangelow	3	75	8	11
319	Jonas O Tegenfeldt	2	75	10	18
319	Friedrich Schäffler	4	75	14	20
319	David Cumming	4	75	9	21
319	Masaaki A Tanaka	1	75	21	15
326	Bruce W Wessels	3	74	11	16
326	Tanemasa Asano	7	74	3	5
328	Joe Bennett	3	73	3	4
328	Franz Giessibl	1	73	16	15
328	Guillaume Micouin	2	73	1	1
328	Joseph J Kopanski	1	73	3	2
332	Takanori Ichiki	2	72	9	10
332	Pedro Pablo González-Borrero	1	72	9	3
332	Philip J Moriarty	3	72	10	10
332	Ralph G Nuzzo	1	72	44	41
336	Jeffrey T Glass	1	71	19	11
337	Yang-Kyu Choi	1	70	45	26
337	Gregory L Snider	5	70	6	12
337	Hisao Makino	4	70	13	13
337	Nobuyoshi Koshida	3	70	6	3
337	Junji Kotani	1	70	1	1
337	Mark Hagmann	6	70	2	4
337	Ángel Rubio Secades	1	70	68	56
337	Alexei O Orlov	5	70	4	9
345	J David Carey	2	69	9	10
345	Per Persson	1	69	37	36
345	Hans G Högberg	1	69	20	12
345	Silvio Modesti	1	69	13	7
345	Yongqi Fu	3	69	2	6
345	Jens Birch	1	69	38	17
345	Per Eklund	1	69	35	34
352	Seongil Im	3	68	13	16
352	Xu Jianbin	8	68	9	62
352	Kok-Keong Lew	1	68	3	6
355	Heh-Nan Lin	4	67	4	11
355	Vincent L Bouchiat	2	67	11	17
357	Yael Nemirovsky	1	66	14	8
358	Paul S Weiss	2	65	25	34
358	L Howald	1	65	21	20
358	Andreas Fissel	1	65	24	9
358	Sanjay Krishna	4	65	15	26
358	Hirofumi Tanaka	2	65	11	10
358	Charles Tu	6	65	4	5
358	Andrea Locatelli	2	65	24	23
358	Salia Cherifi-Hertel	2	65	5	6
358	Yogesh B Gianchandani	2	65	7	6
358	David A J Moran	4	65	3	5
368	Sean L Rommel	2	64	5	4
368	Luke Hanley	1	64	21	16
368	Petr Formanek	2	64	12	14
368	Joel Cibert	1	64	35	17
368	Rajesh Menon	2	64	10	12
368	Choi, Hw	3	64	8	11
368	Hiroshi Itoh	3	64	4	4
375	Qiang Wang	1	63	6	6
375	Siegfried Hofmann	1	63	6	7
375	Allen J Bard	1	63	30	35
378	Richard E Palmer	4	62	27	34
378	Daniel E Bürgler	2	62	13	11
378	Eric Tournié	3	62	13	15
378	Jiro Matsuo	4	62	12	14
382	Alireza Nojeh	2	61	6	6
382	Guanzhou Zhu	2	61	15	40
382	Philippe Allongue	2	61	14	16
382	Katsumi Midorikawa	2	61	29	27
382	Akihiro Ohtake	4	61	7	6
382	Thilo Glatzel	1	61	21	18
382	Timothy S. Fisher	4	61	16	41
382	María Alonso	4	61	3	3
391	Li-Chyong Chen	2	60	42	53
391	Carmen Ocal	1	60	24	23
391	Ataç İmamoğlu	2	60	15	20
391	Yoich Uehara	1	60	18	7
391	Jose Ignacio Pascual	2	60	14	21
391	K-H Chen	2	60	53	58
391	Peter W T Yuen	1	60	11	5
399	Jaroslaw Z Domagala	1	59	32	11
399	Ratno Nuryadi	1	59	5	2
399	Markus Sauer	1	59	63	64
399	Abdulmecit Turut	2	59	27	29
399	Fabio Beltram	4	59	16	39
399	Janusz Sadowski	1	59	34	9
399	Nick Lavrik	1	59	30	25
399	Panos Datskos	1	59	17	21
399	Hiroyuki Tanaka	1	59	4	5
408	Valeri V Afanas'ev	2	58	23	18
408	Andre Stesmans	2	58	13	15
408	Hideo Hosono	2	58	89	102
408	Wen-Chi Liu	1	58	20	34
408	Miquel B Salmerón	1	58	27	31
408	Paolo Visconti	3	58	8	8
408	Elisabetta Comini	3	58	20	39
408	Miquel Salmeron	1	58	22	27
416	Kai Henrik Nordlund	1	57	50	36
416	Ana I Teixeira	1	57	3	8
416	Takashi Hanada	4	57	10	10
416	Markus Pristovsek	2	57	14	9
416	Arkady Krasheninnikov	1	57	36	36
416	Nitin Samarth	7	57	7	22
416	Emmerich Bertagnolli	2	57	9	9
416	Christopher J Murphy	1	57	30	29
416	Tsuyoshi Moriya	2	57	2	3
426	Wolfgang Husinsky	1	56	9	10
426	Javier Tejada	1	56	34	28
426	Ai Qun Liu	2	56	20	31
426	Takayuki Uchihashi	4	56	12	35
426	Nobuhiko P Kobayashi	1	56	37	24
426	A L Chuvilin	1	56	58	52
426	Xi-Cheng Zhang	1	56	51	44
426	Giorgio Rossi	2	56	17	14
426	Joan Esteve	1	56	13	12
426	Elena D Obraztsova	1	56	35	23
436	Trevor Anderson	1	55	4	2
436	Johann P Reithmaier	5	55	17	20
436	Yukinori Morita	1	55	16	10
436	Yunhwan Park	1	55	5	6
436	Vincent LaBella	4	55	2	4
436	Jerzy Kanicki	1	55	28	24
436	Masakazu Nakamura	1	55	21	15
436	Maritza Gj Veprek-Heijman	1	55	3	4
436	Mark Freeman	2	55	13	17
436	Masato Okano	1	55	3	2
436	Huanting Wang	1	55	62	69
436	Sven Achenbach	2	55	2	2
436	Hajime Takano	2	55	4	18
436	Romuald Houdré	2	55	20	21
436	John F Wager	1	55	15	16
451	Sang Ho Oh	3	54	9	23
451	Luis F Vazquez	4	54	11	36
451	佐久間芳樹	2	54	11	10
451	Tien Khee Ng	5	54	9	29
451	Elaine D Haberer	2	54	4	4
451	Richard Martel	2	54	22	30
451	Wei-Jun Fan	5	54	7	8
458	Jinn-Kong Sheu	2	53	21	21
458	Anders Gustafsson	3	53	9	11
458	Bruce E Koel	1	53	41	36
458	Steven J Eppell	3	53	3	10
458	Vaclav Holy	3	53	22	25
458	Feng Zhang	3	53	26	60
458	Roger H. French	1	53	26	26
458	Y C Kao	2	53	4	3
466	Douglas J Paul	5	52	9	23
466	Brian J Skromme	3	52	7	7
466	Xue-Sen Wang	4	52	6	10
466	Chad A Mirkin	1	52	64	64
466	Edward H Sargent	2	52	51	65
466	Andrew Y Kim	1	52	1	1
472	Piotr Perlin	1	51	25	9
472	Kyohei Okubo	1	51	10	5
472	Jonathan Pelz	2	51	3	3
472	Nobuyuki N Matsuzawa	2	51	5	6
472	Won Jong Yoo	6	51	8	23
472	Ulf Gennser	3	51	9	8
472	Walter Arnold	1	51	37	31
479	Yasin Ekinci	1	50	23	21
479	Fred L Terry	2	50	10	15
479	Paul A Crowell	2	50	5	10
479	Shangjr Gwo	4	50	15	27
479	Maximo Lopez-Lopez	8	50	6	7
479	Ting-Chang Chang	1	50	34	25
479	Jeffrey Lince	2	50	8	11
479	Steven L Rolston	1	50	17	21
479	Gyula Eres	5	50	5	25
479	Massimiliano Labardi	4	50	5	12
490	Lin Zhou	2	49	12	24
490	Shige H Yoshimura	1	49	14	18
490	Hiroshi Fukuda	3	49	4	4
490	Brian Gorman	2	49	15	21
490	Akhlesh Lakhtakia	2	49	60	64
490	J-M Chauveau	2	49	9	6
490	M Alexander Schneider	1	49	13	11
490	Lin Zhou	2	49	18	22
490	Alexander Bietsch	1	49	3	8
499	Qing Ji	3	48	2	2
499	Aldo Di Carlo	1	48	84	85
499	Axel Lorke	2	48	21	23
499	Vitaly I Konov	2	48	32	21
499	Angela Rizzi	1	48	6	4
499	Leigh M Smith	2	48	11	10
499	Fabio Iacona	2	48	12	14
499	Yoon-Ho Song	5	48	1	5
499	Joseph H Thywissen	2	48	6	7
499	Peter J Heard	2	48	12	16
499	Fabio Della Sala	1	48	34	27
510	Hongxing Jiang	3	47	12	18
510	Minjoo L Lee	1	47	22	22
510	Philippe Boucaud	5	47	10	19
510	Dimitri A Antoniadis	2	47	5	9
510	Chee Won Chung	1	47	12	5
510	Chang-Koo Kim	3	47	3	9
510	Heng-Yong Nie	1	47	14	7
510	Jingyu Lin	3	47	11	19
510	Bruno Gayral	2	47	13	14
519	Ant Ural	1	46	10	11
519	Leo Miglio	2	46	21	18
519	Marc Gailhanou	2	46	6	13
519	Mark A Wistey	5	46	5	13
519	Alexander A Balandin	1	46	36	41
519	Alberta Bonanni	9	46	4	13
525	David Eon	2	45	8	13
525	Omar Teschke	3	45	10	14
525	Alessandro Carpentiero	4	45	2	4
525	Kazuhito Hashimoto	2	45	53	99
525	Gwo-Ching Wang	1	45	19	16
525	Detlef Hommel	3	45	24	26
525	Niek F Van Hulst	1	45	48	53
525	R Ramesh	1	45	45	48
533	Nicholas X. Fang	1	44	42	41
533	David Tomanek	1	44	22	25
533	Seiya Kasai	2	44	8	7
533	Ming-Chieh Lin	2	44	5	1
533	Gleason Kk	2	44	32	65
538	Dong Qin	1	43	17	23
538	Tse Nga Ng	1	43	18	24
538	Daisuke Fujita	2	43	20	22
538	Samuel Granjeaud	2	43	10	21
538	Astushi Takahara	3	43	33	52
538	Tim D Veal	2	43	16	20
538	Philipp Ebert	2	43	8	8
538	John J Boland	2	43	22	34
538	Hiroshi Fukuda	1	43	4	2
538	R Stanley Williams	2	43	26	44
538	Roman R Sobolewski	1	43	29	13
538	Giovanni Mannino	2	43	11	13
538	John A Marohn	1	43	11	10
538	Younan Xia	1	43	54	84
538	Won-Bin Im	2	43	25	31
554	Daniel K Schwartz	1	42	39	40
554	Yimin Zou	2	42	22	33
554	Yasuhide Ohno	3	42	4	10
554	Ivana Vobornik	1	42	26	20
554	Sol Gruner	1	42	37	51
554	Victor Ralchenko	2	42	18	17
554	Chun-Li Bai	2	42	9	15
554	Shunri Oda	2	42	14	16
554	Nickolai I Klyui	2	42	9	7
554	Flavio Capotondi	1	42	18	17
554	Chang Q Sun	2	42	44	67
554	Alberto Vomiero	3	42	15	53
554	Will Conley	2	42	2	4
568	Alex K Zettl	1	41	41	43
568	Sadao Masamune	1	41	7	6
568	Thorsten Hesjedal	2	41	20	18
568	Donald E Savage	1	41	23	19
568	André Vantomme	3	41	19	31
568	Makoto Miyoshi	1	41	15	6
568	Brian D Gerardot	1	41	19	25
568	Gilles Ledoux	1	41	23	29
568	Jiwang Yan	1	41	47	32
568	Anthony Levi	2	41	7	9
568	Jose Maria Gomez Rodriguez	2	41	10	18
568	Gregory Rohrer	2	41	29	39
568	Michael Seibt	1	41	28	20
568	Hyun Wook Ro	1	41	10	12
568	A Zettl	1	41	17	20
583	Kentaro Totsu	1	40	4	4
583	Henning Sirringhaus	2	40	31	43
583	Sung-Ho Hahm	3	40	6	4
583	Louis F J Piper	1	40	33	40
583	Richard Mirin	4	40	10	22
583	Jung-Hee Lee	3	40	10	12
583	Hansjoerg Scherer	2	40	8	8
583	Nikolai B Zhitenev	2	40	9	15
583	Alexander B Zorin	2	40	11	12
583	A L David Kilcoyne	2	40	25	51
583	Yasumasa Tanishiro	1	40	16	11
583	Amar S Basu	1	40	4	6
583	S Simon Wong	1	40	8	10
583	Mingyao Zhu	1	40	8	7
583	Dennis M Manos	1	40	3	4
583	Feng-Chih Chang	1	40	29	36
600	Mark M Banaszak Holl	1	39	31	50
600	John F Currie	5	39	3	8
600	Marc Cahay	4	39	7	8
600	Mark D Stiles	1	39	13	17
600	Satoru Fujisawa	2	39	4	6
600	Matteo Ferroni	2	39	13	31
600	Seth Bank	3	39	6	14
600	Kug-Seung Lee	1	39	30	31
600	Hong Lu	2	39	16	19
600	Alfred Forchel	2	39	14	22
600	Amadeo L Vazquez De Parga	1	39	22	18
600	Yifeng Wu	1	39	1	6
600	Andrei Kabashin	1	39	27	39
600	Miroslav Micovic	2	39	8	11
615	Alexander N Obraztsov	1	38	28	17
615	Lloyd J Whitman	1	38	12	18
615	Yasushi Maeda	3	38	4	10
615	Giorgio Sberveglieri	2	38	30	64
615	O'Faolain Liam	1	38	18	18
615	Jamie D Phillips	5	38	5	16
615	Young-Ho Kim	2	38	7	7
615	Thomas F Krauss	1	38	33	39
615	D S Katzer	1	38	6	6
624	Da-Bing Li	1	37	19	20
624	Nils G Weimann	2	37	13	12
624	Jeramy D Zimmerman	1	37	9	14
624	David N Mcilroy	2	37	9	18
624	Jyoti Mohanty	1	37	14	13
624	Ingo Manke	3	37	30	54
624	Uthirakumar Periyayya	1	37	39	25
624	Peter A Dowben	2	37	28	40
624	Christopher K Ober	2	37	37	60
624	D Andrew Evans	3	37	6	7
624	Hubert Brueckl	2	37	3	4
624	Yia-Chung Chang	3	37	18	24
624	Takatoshi Yamada	3	37	10	12
624	Mark S Hybertsen	2	37	14	31
638	Christoph Grein	2	36	5	4
638	Greg Bridges	3	36	5	14
638	Petr Zeman	1	36	10	12
638	Meyya Meyyappan	2	36	39	70
638	Eleftherios Iliopoulos	1	36	12	9
638	Alain Cappy	2	36	13	13
638	John Hedley	1	36	7	9
638	Richard J Blaikie	2	36	13	17
638	Anirban Bhattacharyya	1	36	14	8
638	Olivier J F Martin	2	36	22	35
638	Victor Y Aristov	3	36	10	15
638	Geok Ing Ng	6	36	7	15
638	John M Girkin	1	36	20	25
638	Charles A Clifford	1	36	6	8
638	Jindrich Musil	1	36	22	22
638	Christophe Coupeau	1	36	20	10
638	Sharadha Sambasivan	2	36	2	8
638	M Pepper	5	36	17	33
657	Sergei V. Kalinin	1	35	60	72
657	Arthur P Baddorf	1	35	16	25
657	Zexiang Shen	4	35	34	87
657	Shojiro Miyake	1	35	21	12
657	Brian J Rodriguez	1	35	28	45
657	Hyung-Tak Seo	1	35	32	30
657	Keith P Johnston	1	35	49	65
657	Blake Alexander Simmons	1	35	57	77
657	Jeff T H Tsai	2	35	3	7
657	Olga E Glukhova	1	35	29	9
657	Jeong-Young Ji	1	35	10	8
657	Yangdo Kim	1	35	30	22
657	Radhakrishnan K	4	35	11	16
657	Joe Charest	1	35	4	8
657	Yang Lu	1	35	41	45
657	Manfred Buck	1	35	22	22
657	Hyeongtag Jeon	1	35	32	30
657	Wen-Chang Chen	1	35	57	53
657	Cheng-Tyng Yen	1	35	2	4
676	José María Kenny	1	34	86	104
676	Charles Michael Greenlief	1	34	10	14
676	Won-Jun Lee	2	34	11	11
676	Achim Trampert	1	34	29	24
676	Carl-Mikael G Zetterling	1	34	13	10
676	Luca Lozzi	1	34	27	34
676	Jiyoul Lee	2	34	10	16
676	Cristina Buzea	1	34	6	8
676	Shaoyun Huang	1	34	11	10
676	Takahito Inoue	3	34	3	9
676	Isodiana Crupi	1	34	19	18
676	Harold G Craighead	1	34	9	13
676	Francesca Peiro	6	34	11	37
676	Mikael Östling	1	34	31	33
676	Karsten Hinrichs	2	34	21	29
676	Giuseppe Nicotra	1	34	30	30
676	Martin Hegner	1	34	15	24
676	Luigi Mariucci	1	34	20	13
676	Mineharu Suzuki	1	34	9	8
676	Dario Pisignano	5	34	11	50
676	Chris J Palmstrøm	3	34	9	19
676	Ray Ashoori	1	34	7	10
676	Kevin Robbie	1	34	4	11
676	Robert D Allen	1	34	2	4
676	Tim Brown	1	34	1	3
701	Eric Ganz	1	33	22	24
701	Sebastiano Trusso	2	33	13	20
701	Tadashi Iwamatsu	1	33	3	1
701	Brian P Borovsky	1	33	3	4
701	Likun Pan	1	33	54	71
701	Yoshihiro Kobayashi	1	33	23	22
701	Ivan G Petrov	3	33	17	43
701	Amanda K Petford-Long	1	33	19	16
701	Paul koenraad	1	33	25	23
701	Rodney S Ruoff	1	33	57	88
701	Richard I Masel	1	33	39	46
701	Stefano Frabboni	1	33	26	20
701	Isabelle Berbezier	2	33	17	23
701	Matthias Schreck	2	33	11	24
701	Yizhong Huang	1	33	48	55
701	Sergio Lozano-Perez	1	33	30	22
717	Nuria Barniol	3	32	10	17
717	William Alan Doolittle	1	32	14	11
717	Igor V Shvets	2	32	22	30
717	Koji Ishibashi	1	32	20	9
717	Gerd Bacher	3	32	17	23
717	Kunihiko Oka	1	32	18	11
717	L I Goray	1	32	11	6
717	Toshimasa Fujisawa	2	32	11	17
717	Li-Jun Wan	1	32	59	75
717	Mats Eriksson	1	32	10	14
717	Benno Margesin	1	32	17	12
717	Daiju Tsuya	1	32	11	9
717	Dong Wang	1	32	24	32
717	Adele Sassella	1	32	30	25
717	Masayuki Shimojo	1	32	24	17
717	Ilana Bar	1	32	23	22
717	David D Nolte	3	32	14	23
717	Luca Businaro	4	32	4	24
717	Flavio Giacomozzi	1	32	14	10
717	Massimo Longo	2	32	8	10
717	Donato Vincenzi	1	32	10	10
717	Walter Meyer	1	32	18	12
717	Kimberley Elcess	1	32	4	4
717	Jae-Min Myoung	2	32	16	22
717	Tetsuya Ida	1	32	11	7
717	Shunji Goto	3	32	4	10
717	Meiyong Liao	1	32	35	38
717	Maria Angela Butturi	1	32	6	7
717	Qing-dao Zeng	1	32	31	29
717	John Bowers	4	32	24	71
717	Walter E Henderson	1	32	6	5
748	Patrizio Candeloro	2	31	7	24
748	Zhanguo Wang	1	31	27	20
748	Mark J Kushner	1	31	10	16
748	Jyh-Ming Wu	1	31	21	22
748	Satoshi Yamasaki	2	31	18	24
748	Antonio C Ting	1	31	21	18
748	Xiao Hu	1	31	64	76
748	David J Lockwood	2	31	13	20
748	Eric Stach	1	31	56	66
748	Chuan-Pu Liu	1	31	23	23
748	Eli Rotenberg	3	31	19	32
748	Karsten Fleischer	1	31	17	16
748	Patrick J Fay	5	31	7	24
748	Toyoko Arai	2	31	7	7
748	Shuang Zhang	2	31	26	38
748	Mark L Leadbeater	3	31	8	13
748	J E Rowe	1	31	8	12
748	Ding Ding	1	31	2	4
748	Patrick Naulleau	3	31	4	7
748	Zhian He	1	31	2	6
768	Paul A Kohl	2	30	22	34
768	Karen L Carleton	1	30	14	31
768	Julio Gomez-Herrero	1	30	33	44
768	Ketul C Popat	1	30	28	45
768	Andrew Wee	2	30	58	77
768	D Greg Walker	2	30	6	18
768	Javier Méndez	1	30	17	18
768	Christian Mitterer	1	30	41	35
768	Naomi J Halas	1	30	40	68
768	Carl E Bonner	1	30	12	12
768	Giacomo Torzo	2	30	6	9
768	Angelo Antonini	1	30	66	102
768	Jorge A Kittl	1	30	17	18
768	Günter Müller	2	30	4	8
768	Hidenori Mimura	3	30	4	6
768	G S Cargill Iii	1	30	4	4
768	N J Halas	1	30	8	15
768	Kenneth E Goodson	1	30	25	33
768	S J C Irvine	2	30	7	10
768	Sue Ann Bidstrup Allen	2	30	6	8
788	Orlando Auciello	2	29	11	26
788	Giovanni Bruno	3	29	9	24
788	Manfred Radmacher	1	29	19	38
788	Dimitrios Maroudas	2	29	12	26
788	Hal Edwards	3	29	3	7
788	Raymond Browning	1	29	3	4
788	Futoshi Iwata	3	29	2	7
788	Friedhelm Bechstedt	1	29	41	39
788	Bernard Hao-Chih Liu	1	29	14	10
788	Yoji Saito	1	29	12	5
788	Maria Losurdo	3	29	8	28
788	J Nathan Hohman	1	29	8	16
788	Robert Claude Woods	1	29	10	11
788	Sven Tougaard	1	29	19	20
788	Chennupati Jagadish	2	29	54	66
788	Jihoon Choi	1	29	17	19
788	Jennifer R Hampton	1	29	4	5
788	Jesus A Del Alamo	2	29	11	18
788	Marco Salerno	1	29	20	40
788	Hyeong Joon Kim	1	29	25	20
788	W Ted Masselink	1	29	9	6
788	Scott S Perry	2	29	8	18
811	Edmund H Linfield	3	28	25	42
811	Thibaut Devolder	1	28	18	18
811	Rajesh Shukla	2	28	6	5
811	Matthew J Goeckner	2	28	8	13
811	Giuseppe Gigli	4	28	15	78
811	Alessandra Alberti	3	28	9	18
811	Maxime Darnon	1	28	14	11
811	Tapio Mäkelä	1	28	6	12
811	Li-Xin Chen	1	28	20	27
811	Hideki Fujiwara	1	28	12	10
811	Paul M Thibado	3	28	3	8
811	Othmar Marti	1	28	30	38
811	Keiji Sasaki	1	28	30	32
811	Takeyoshi Sugaya	4	28	7	16
811	Ferenc Riesz	2	28	6	7
811	Dan M Goebel	1	28	8	12
811	Seth R Bank	2	28	8	16
811	M Holland	2	28	3	8
829	Yong Ding	1	27	32	60
829	Theodosia Gougousi	2	27	8	14
829	Guang-Rong Li	1	27	15	20
829	Andreas D Wieck	3	27	31	45
829	Chang-Jiu Li	1	27	33	38
829	Toshio Kamiya	1	27	38	51
829	David M Villeneuve	1	27	23	26
829	Francesca Iacopi	1	27	20	22
829	Toshihide Nabatame	2	27	19	26
829	Hiroyuki Sugimura	2	27	10	16
829	Guan-Jun Yang	1	27	33	41
829	Toshio Kamiya	1	27	61	65
829	William Goddard	1	27	71	87
829	Vladimir A Gritsenko	1	27	23	23
829	Jun-Young Park	1	27	21	26
829	Masataka Higashiwaki	3	27	11	20
845	Hans-Juergen Butt	1	26	66	86
845	Eva Monroy	1	26	39	32
845	Jordan C Poler	1	26	8	5
845	Fernando Calle	1	26	28	28
845	Whikun Yi	2	26	5	6
845	Hermis Iatrou	1	26	15	29
845	Carlos Zaldo	2	26	29	33
845	Enrique Vasco	2	26	8	7
845	Seunghwan Lee	2	26	10	29
845	Jeong In Han	2	26	20	31
845	Paul Maguire	1	26	24	30
845	David Eason	2	26	4	7
845	Shuo Chen	1	26	29	52
845	Sasa Bajt	1	26	41	49
845	Ronaldo D Mansano	2	26	10	11
845	Detlef Schmitz	1	26	11	10
845	Tetsuya Suemitsu	1	26	18	14
845	Victor Milman	1	26	28	34
845	Jun Kameoka	1	26	15	17
845	Noriaki Toyoda	1	26	7	8
845	Stephane Evoy	1	26	19	23
845	Songphol Kanjanachuchai	1	26	12	7
845	Sigurd Wagner	2	26	9	29
845	L A Coldren	2	26	6	17
845	Brent A Morgan	1	26	1	2
845	Z F Ren	1	26	15	26
871	Markku Leskela	1	25	98	115
871	Hiroaki Imai	1	25	52	59
871	Agustina Asenjo	2	25	14	26
871	Klavs Hansen	1	25	17	24
871	Christian A Zorman	1	25	23	36
871	Sotirios E Kakabakos	1	25	16	18
871	Daniel Erni	1	25	32	32
871	J Jussi Toppari	1	25	14	23
871	Koichi Awazu	1	25	23	24
871	Makoto Fujimaki	1	25	17	21
871	Peter Strasser	1	25	55	73
871	Mark Blamire	2	25	21	33
871	Xi Hui Liang	1	25	2	2
871	Takeru Amano	1	25	9	11
871	Ivan Kostic ̌	4	25	3	6
871	Mikko Ritala	1	25	62	80
871	Hisato Yamaguchi	3	25	4	19
871	Mario Dagenais	3	25	10	24
871	Philippe Sautet	1	25	44	54
871	C K Inoki	1	25	4	8
871	Hiroki Hibino	1	25	28	32
871	Cheng-Liang Huang	2	25	15	15
871	Mantu Hudait	2	25	16	24
871	Yeshaiahu Fainman	1	25	12	15
871	Mehran Mehregany	1	25	16	30
871	Cheol-Woong Yang	1	25	30	27
871	Vladimir A Krupenin	2	25	6	7
871	Jukka P Pekola	1	25	16	17
871	Bongkoo Kang	1	25	9	4
871	Dario L Goldfarb	1	25	3	4
871	K Hane	2	25	15	12
871	Chyong-Hua Chen	1	25	6	6
903	Yoshiyuki Miyamoto	1	24	18	18
903	Cheng-fu Chen	4	24	1	6
903	Juan C Gonzalez	2	24	9	18
903	Harry A Atwater	2	24	40	61
903	Michael J Aziz	1	24	33	46
903	Andrey V Zotov	2	24	16	16
903	Takahiko Sasaki	1	24	37	32
903	Marc Heyns	1	24	36	39
903	Nima Ghalichechian	1	24	9	9
903	Stefan Malzer	3	24	5	13
903	Sara Bals	1	24	52	73
903	Takashi Ikuno	1	24	9	10
903	Badreddine M Assouar	1	24	17	27
903	Victor Micheli	1	24	10	11
903	Chun-Yu Lin	1	24	3	8
903	Osamu Sugino	1	24	16	17
903	Juan Rubio-Zuazo	1	24	16	17
903	Omar Elmazria	1	24	20	19
903	Tolek Tyliszczak	1	24	29	46
922	Yong Lei	1	23	42	67
922	María U González	2	23	9	27
922	Luc G. Fréchette	1	23	13	19
922	Irina A Buyanova	3	23	25	32
922	Thomas Schuelke	1	23	5	9
922	Celestino Padeste	1	23	15	24
922	Stephen Buckman	1	23	22	25
922	Massimo Tormen	2	23	4	17
922	François Rochet	3	23	9	19
922	Yuri L Lyubchenko	1	23	25	45
922	Wolf-Dieter Schneider	2	23	13	34
922	Takahito Ono	1	23	41	43
922	Kenneth G H Baldwin	1	23	17	24
922	Jeffry A Kelber	1	23	20	21
922	Gilles Patriarche	2	23	47	66
922	Efthimios Kaxiras	1	23	38	64
922	Christoph Adelmann	1	23	40	34
922	Weimin M Chen	3	23	28	42
922	Fernando M Teran Arce	1	23	10	24
922	Xiaopeng Shi	1	23	6	8
922	Selmiye Alkan Gürsel	1	23	20	35
922	Joerg J Schneider	1	23	38	46
922	Manuel Ignacio Marques	4	23	6	10
922	David Keith	1	23	21	36
922	Ikuo Suemune	1	23	28	17
922	John Durrell	1	23	13	14
922	Serge Palacin	1	23	24	41
922	Annamaria Gerardino	2	23	12	30
922	Tilman Pfau	1	23	25	28
922	Michel J Rossi	1	23	25	28
922	Lothar Bischoff	2	23	7	15
922	John F Geisz	1	23	15	22
922	Hideki Sato	1	23	6	3
922	Richard Haight	1	23	7	16
956	Tsutomu Minegishi	1	22	38	49
956	Masao Morita	2	22	7	14
956	Ka Lun Michael Man	1	22	7	12
956	Ki Tae Nam	1	22	39	61
956	Young Joon Yoon	3	22	4	11
956	Won Il Park	1	22	30	33
956	Yasuo Koide	2	22	24	37
956	Ping Sheng	1	22	51	69
956	Alexey B Pavolotsky	1	22	9	11
956	Fredy R Zypman	2	22	11	7
956	Jodi M Szarko	1	22	8	15
956	Maurizio De Crescenzi	2	22	22	35
956	Andrey S Baturin	2	22	9	7
956	Kun-Wei Lin	4	22	7	11
956	Tobias Reich	1	22	17	28
956	Ken Okano	1	22	14	14
956	Theo Rasing	1	22	50	70
956	Ho Won Jang	4	22	29	111
956	Yihong Wu	2	22	10	15
956	Hajime Fujikura	1	22	5	6
956	James C Hone	1	22	48	58
956	Shin-Pon Ju	2	22	18	21
956	Jinkyoung Yoo	1	22	16	17
956	Xudong Xiao	1	22	15	17
956	Michael S Altman	1	22	4	5
956	Stephen R Leone	2	22	20	42
956	Javier Garrido	1	22	11	15
956	soo-hyun Kim	1	22	30	36
956	Wei-Kan Chu	1	22	7	6
956	Eric Gullikson	2	22	2	5
956	Shoou-Jinn Chang	2	22	27	46
956	Igor L Kuskovsky	2	22	3	5
956	Hanchen Huang	1	22	24	23
989	Suresh Valiyaveettil	1	21	43	63
989	Linards Skuja	1	21	14	15
989	Ching-Ting Lee	1	21	42	34
989	Johan Hoefnagels	1	21	25	27
989	Christopher N Bowman	2	21	38	73
989	M W Holtz	1	21	13	15
989	Andrey S Zubrilov	1	21	12	9
989	Steven De Feyter	1	21	46	52
989	Anupam Madhukar	2	21	8	14
989	Euijoon Yoon	3	21	13	18
989	Phan Ngoc Minh	1	21	11	14
989	Yiping Zhao	1	21	49	70

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Journal of Vacuum Science & Technology an Official Journal of the American Vacuum Society B, Microelectronics Processing and Phenomena

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