Journal of Vacuum Science & Technology an Official Journal of the American Vacuum Society B, Microelectronics Processing and Phenomena

1.6(top 50%)

impact factor

12.2K(top 2%)

papers

244.2K(top 2%)

citations

143(top 5%)

h-index

1.6(top 50%)

impact factor

12.2K

all documents

252.7K

doc citations

229(top 5%)

g-index

Top Authors (by articles)

#	Author	Articles	Citations	R ARank	R CRank
1	Stephen J Pearton	67	1,959	8	4
2	Stella Pang	57	1,451	1	1
3	J Alexander Liddle	42	579	1	3
4	Shin-Ichi Kanemaru	26	549	2	1
5	Andrew J Steckl	25	432	3	7
5	Stephen Y Chou	25	4,433	2	2
7	Hideki Hasegawa	22	1,742	3	1
8	Randall Feenstra	20	1,451	3	4
8	Seiji Samukawa	20	432	4	5
10	Edward T Yu	19	439	3	4
10	Kenneth A Goldberg	19	315	2	3
10	Masayoshi Nagao	19	378	2	1
13	Kevin L Jensen	18	526	2	2
13	Valeriu Filip	18	252	1	2
13	Dietrich R.T. Zahn	18	403	10	8
16	Gary W Rubloff	17	210	2	21
17	Steven Brueck	16	459	4	6
17	David A Ritchie	16	115	14	37
19	Evangelos Gogolides	14	480	2	5
20	Tetsuji Yasuda	13	303	6	5
20	Lucia Sorba	13	183	7	10
20	Ralf K Heilmann	13	304	2	1
20	Roland Wiesendanger	13	259	11	20
20	Gottlieb S Oehrlein	13	424	8	6
20	Keh-Yung Cheng	13	115	2	3
20	Babu R Chalamala	13	403	1	3
27	Brian Bennett	12	299	5	8
27	Karen L Kavanagh	12	216	4	9
27	Mikhail Baklanov	12	936	6	2
27	K L Wang	12	214	5	5
31	Ernst Meyer	11	522	8	14
31	David E Aspnes	11	140	7	14
31	Sankar Das Sarma	11	284	7	12
31	Paul Chu	11	204	39	72
31	Uwe Rossow	11	194	6	6
31	Takashi Matsukawa	11	161	3	4
31	Alex L De Lozanne	11	174	2	6
38	I-Nan Lin	10	117	7	9
38	Hiroshi Hiroshima	10	236	4	2
38	David Ferry	10	151	7	9
38	Francesco La Via	10	102	7	12
38	Norbert Esser	10	250	6	6
43	Alexander Y Polyakov	9	116	6	11
43	Panagiotis Argitis	9	173	2	9
43	George K Celler	9	95	2	8
43	Mohamed Henini	9	165	19	17
43	S Ravi P Silva	9	180	11	30
43	Fernando A. Ponce	9	355	5	6
43	Nikolai B Smirnov	9	116	6	8
43	Yukio Hasegawa	9	212	4	6
43	L J Brillson	9	221	6	8
43	Alberta Bonanni	9	46	4	13
43	Rachel Goldman	9	91	3	5
43	Srinivasan Anand	9	180	2	4
56	Mark A Reed	8	378	6	11
56	Maximo Lopez-Lopez	8	50	6	7
56	Joan R Morante	8	101	22	55
56	Seoung Gil Yoon	8	90	9	15
56	Martin Kamp	8	116	12	26
56	D Frank F Ogletree	8	453	4	14
56	Xu Jianbin	8	68	9	62
56	Soonil Lee	8	119	2	5
65	Robert M Wallace	7	218	13	23
65	Katsuhisa Murakami	7	122	4	3
65	Fan Ren	7	136	12	21
65	Lars Montelius	7	243	4	7
65	Hideo Ohno	7	760	16	15
65	Carlton Grant Willson	7	197	4	6
65	Hajime Okumura	7	179	10	8
65	steven Denbaars	7	268	18	21
65	David J Smith	7	108	17	28
65	Zhi Liu	7	304	9	15
65	Christophe Cardinaud	7	233	5	5
65	Darrell G Schlom	7	168	17	32
65	Nitin Samarth	7	57	7	22
65	Egbert Oesterschulze	7	211	2	2
65	Tanemasa Asano	7	74	3	5
65	D G Hasko	7	131	4	7
81	Kenji Yamazaki	6	531	2	1
81	Alexander Zunger	6	123	9	26
81	Yuh-Lin Wang	6	90	5	16
81	Wei Wu	6	613	5	5
81	Alan C Seabaugh	6	80	4	14
81	Jun Chen	6	86	12	27
81	Terry Alford	6	87	6	6
81	Shirley Chiang	6	365	5	5
81	Clive J Roberts	6	161	12	26
81	Clivia M Sotomayor Torres	6	293	16	14
81	Gregory N Parsons	6	253	10	11
81	Gvido Bratina	6	110	4	6
81	Peter Beton	6	94	10	25
81	Shane Johnson	6	111	3	3
81	Won Jong Yoo	6	51	8	23
81	Michael L Simpson	6	226	4	8
81	Chris G. Van de Walle	6	484	9	14
81	Robert F Davis	6	185	16	17
81	Kathy Lüdge	6	82	4	8
81	Francesca Peiro	6	34	11	37
81	Charles Tu	6	65	4	5
81	R Jürgen Behm	6	194	28	37
81	Eray S Aydil	6	161	9	24
81	Seong-Ju Park	6	202	5	8
81	Geok Ing Ng	6	36	7	15
81	Paul Mirkarimi	6	132	2	6
81	Mark Hagmann	6	70	2	4
81	Stefan Heun	6	105	5	9
81	Arun Persaud	6	121	2	3
81	Takayuki Hoshino	6	340	3	1
81	Mark J Hagmann	6	110	2	2
81	Eric K Lin	6	143	6	9
81	Gary H Bernstein	6	94	4	10
114	David J Smith	5	77	22	45
114	Douglas J Paul	5	52	9	23
114	Marius Grundmann	5	229	32	23
114	John F Currie	5	39	3	8
114	Po-Tsun Liu	5	165	12	8
114	Gregory L Snider	5	70	6	12
114	Shigefusa Chichibu	5	357	9	5
114	Jeffrey A Hopwood	5	410	5	6
114	Tadatomo T Suga	5	174	14	12
114	Tien Khee Ng	5	54	9	29
114	Xuegong Deng	5	125	2	3
114	Philip M Williams	5	149	2	11
114	Christopher L Soles	5	137	6	11
114	Johann P Reithmaier	5	55	17	20
114	Rebecca Cheung	5	97	3	8
114	Lars Hultman	5	126	26	44
114	Beng Kang Tay	5	84	18	42
114	Philippe Boucaud	5	47	10	19
114	Jeffrey Bokor	5	108	7	19
114	Yoon-Ho Song	5	48	1	5
114	Stan Veprek	5	480	7	4
114	Ole Hansen	5	186	11	20
114	Yves Chabal	5	451	16	18
114	María Teresa Cuberes	5	102	2	4
114	Mark A Wistey	5	46	5	13
114	Oliver Brandt	5	144	14	13
114	Steven George	5	202	17	32
114	Patrick J Fay	5	31	7	24
114	Derrick C Mancini	5	105	2	3
114	Alexei O Orlov	5	70	4	9
114	Jamie D Phillips	5	38	5	16
114	Wei-Jun Fan	5	54	7	8
114	Gyula Eres	5	50	5	25
114	Dario Pisignano	5	34	11	50
114	Jong-Lam Lee	5	21	9	31
114	Paul K Chu	5	136	61	79
114	Wen-Li Wu	5	102	7	11
114	M Pepper	5	36	17	33
114	Paul Ruchhoeft	5	111	1	2
153	Bharat Bhushan	4	598	36	21
153	H Kumar Wickramasinghe	4	200	4	8
153	Wilfried Vandervorst	4	179	3	1
153	Luis F Vazquez	4	54	11	36
153	Detlev A Grützmacher	4	159	14	15
153	John Robertson	4	2,059	18	7
153	Albert Chin	4	94	13	10
153	Zbig R Wasilewski	4	117	11	14
153	Cheng-fu Chen	4	24	1	6
153	Akinori Saeki	4	247	21	15
153	Zexiang Shen	4	35	34	87
153	Marc Cahay	4	39	7	8
153	Lourdes G Salamanca-Riba	4	149	9	8
153	Chris Jacobsen	4	204	12	19
153	Richard E Palmer	4	62	27	34
153	Jose Menendez	4	98	13	12
153	Hisao Makino	4	70	13	13
153	Filippo Giannazzo	4	116	17	16
153	Mikhail Lebedev	4	113	5	3
153	Takayuki Uchihashi	4	56	12	35
153	Giuseppe Gigli	4	28	15	78
153	Paul Berger	4	148	7	6
153	Shangjr Gwo	4	50	15	27
153	Yordan M Georgiev	4	172	1	1
153	Akihiro Ohtake	4	61	7	6
153	Vincent LaBella	4	55	2	4
153	Heh-Nan Lin	4	67	4	11
153	Sanjay Krishna	4	65	15	26
153	Ivan Kostic ̌	4	25	3	6
153	Kun-Wei Lin	4	22	7	11
153	Richard Mirin	4	40	10	22
153	H N Chapman	4	117	24	37
153	Takashi Hanada	4	57	10	10
153	Luca Businaro	4	32	4	24
153	Xue-Sen Wang	4	52	6	10
153	Alessandro Carpentiero	4	45	2	4
153	Fabio Beltram	4	59	16	39
153	Martin Feldman	4	19	2	1
153	Ho Won Jang	4	22	29	111
153	Friedrich Schäffler	4	75	14	20
153	William Palmer	4	166	1	1
153	Wataru Mizutani	4	79	7	8
153	David Cumming	4	75	9	21
153	Joerg Neugebauer	4	339	16	16
153	Manuel Ignacio Marques	4	23	6	10
153	Thomas E Murphy	4	119	7	15
153	Timothy S. Fisher	4	61	16	41
153	Radhakrishnan K	4	35	11	16
153	Patrik Schmuki	4	21	38	112
153	Jiro Matsuo	4	62	12	14
153	Ivan Maximov	4	195	7	5
153	Xing Cheng	4	333	4	2
153	Yasuo Takahashi	4	294	4	4
153	María Alonso	4	61	3	3
153	Takeyoshi Sugaya	4	28	7	16
153	David A J Moran	4	65	3	5
153	Chih-Hao Chang	4	131	3	5
153	John Bowers	4	32	24	71
153	Massimiliano Labardi	4	50	5	12
153	Barry C Arkles	4	105	3	4
153	Leonidas E Ocola	4	98	6	12
153	Ronald L Jones	4	96	2	10
153	Masahiko Ishida	4	217	2	4
216	Bernd Jenichen	3	15	10	21
216	Giovanni Bruno	3	29	9	24
216	Jabez J Mcclelland	3	77	7	11
216	Alois Lugstein	3	78	6	9
216	Jian Chen	3	12	11	62
216	Sang Ho Oh	3	54	9	23
216	Nuria Barniol	3	32	10	17
216	Qing Ji	3	48	2	2
216	Edmund H Linfield	3	28	25	42
216	Irina A Buyanova	3	23	25	32
216	Bharat Bhushan	3	541	45	24
216	Lewis Johnson	3	149	1	1
216	John S Villarrubia	3	111	4	8
216	Reuben Collins	3	2	10	36
216	Frederic Houze	3	7	2	25
216	Greg Bridges	3	36	5	14
216	Young Joon Yoon	3	22	4	11
216	Gerd Bacher	3	32	17	23
216	Dale K Hensley	3	140	8	9
216	Jun Nakamura	3	13	10	14
216	Yasuhide Ohno	3	42	4	10
216	André Vantomme	3	41	19	31
216	Anders Gustafsson	3	53	9	11
216	François Rochet	3	23	9	19
216	Andreas D Wieck	3	27	31	45
216	Ingo Manke	3	37	30	54
216	Hongxing Jiang	3	47	12	18
216	Martin Stutzmann	3	355	35	19
216	Steven J Eppell	3	53	3	10
216	Vaclav Holy	3	53	22	25
216	Astushi Takahara	3	43	33	52
216	Noritaka Usami	3	11	21	49
216	Armin Gölzhäuser	3	108	12	15
216	Hiroshi Fukuda	3	49	4	4
216	Hal Edwards	3	29	3	7
216	Omar Teschke	3	45	10	14
216	Sung-Ho Hahm	3	40	6	4
216	Juan Jose Saenz	3	184	16	14
216	Ivo W Rangelow	3	75	8	11
216	Euijoon Yoon	3	21	13	18
216	Chulmin Joo	3	77	6	5
216	Brian J Skromme	3	52	7	7
216	Futoshi Iwata	3	29	2	7
216	Seiji Akita	3	147	14	11
216	Soon-Ku Hong	3	79	11	9
216	Nobuyoshi Koshida	3	70	6	3
216	W Gero Schmidt	3	110	14	9
216	Xinglong Wu	3	139	61	45
216	Ivan G Petrov	3	33	17	43
216	Peter B Lerner	3	111	3	3
216	Stefan Malzer	3	24	5	13
216	Falco C M J M Van Delft	3	153	3	3
216	Takahito Inoue	3	34	3	9
216	Feng Zhang	3	53	26	60
216	Eli Rotenberg	3	31	19	32
216	Paolo Visconti	3	58	8	8
216	Alessandra Alberti	3	28	9	18
216	Mauritius C M Van De Sanden	3	184	30	19
216	Hiroshi Masuhara	3	103	30	29
216	D Andrew Evans	3	37	6	7
216	Jung-Hee Lee	3	40	10	12
216	Joe Bennett	3	73	3	4
216	David D Nolte	3	32	14	23
216	Jueinai Kwo	3	199	8	8
216	Kazumasa Okamoto	3	78	7	5
216	Seth Bank	3	39	6	14
216	Yongqi Fu	3	69	2	6
216	Yasushi Maeda	3	38	4	10
216	Jason D Fowlkes	3	137	14	12
216	Weimin M Chen	3	23	28	42
216	Hisato Yamaguchi	3	25	4	19
216	Basilio J García	3	13	4	9
216	Mario Dagenais	3	25	10	24
216	Choi, Hw	3	64	8	11
216	Gyu Chul Yi	3	84	14	23
216	Gil U Lee	3	142	6	8
216	Seongil Im	3	68	13	16
216	Maria Losurdo	3	29	8	28
216	Samit K Ray	3	111	22	15
216	Chang-Koo Kim	3	47	3	9
216	Eric Tournié	3	62	13	15
216	Richard Forbes	3	241	8	6
216	Yoshihiko Hirai	3	238	4	1
216	Dario Anselmetti	3	76	9	21
216	Vincent Ch Lee	3	82	30	46
216	Bruce W Wessels	3	74	11	16
216	Eric S Hellman	3	79	6	4
216	Victor Y Aristov	3	36	10	15
216	Giancarlo Salviati	3	10	21	79
216	Galia Pozina	3	10	17	35
216	Philip J Moriarty	3	72	10	10
216	Philip D Rack	3	103	20	27
216	Jerry Bernholc	3	88	9	19
216	Itaru Kamiya	3	113	11	7
216	Shunji Goto	3	32	4	10
216	Alexei Gruverman	3	323	18	20
216	Michael S Shur	3	118	35	31
216	Javier Jiménez-Leube	3	11	1	7
216	Michael David Dickey	3	115	14	33
216	Tony F Heinz	3	123	20	29
216	John P Lafemina	3	99	6	6
216	Bruce A Davidson	3	14	4	16
216	Jingyu Lin	3	47	11	19
216	Randall A Laviolette	3	13	4	11
216	Yia-Chung Chang	3	37	18	24
216	G Andrew D Briggs	3	147	27	23
216	Paul M Thibado	3	28	3	8
216	Lars Samuelson	3	16	22	59
216	Frank Peiris	3	10	4	9
216	Ulf Gennser	3	51	9	8
216	Elisabetta Comini	3	58	20	39
216	Masataka Higashiwaki	3	27	11	20
216	Takatoshi Yamada	3	37	10	12
216	Alberto Vomiero	3	42	15	53
216	Winfried Mönch	3	581	4	2
216	Chun-Yuan Huang	3	14	5	20
216	Detlef Hommel	3	45	24	26
216	Shujuan Huang	3	142	19	18
216	Robert J Nemanich	3	79	17	26
216	Robert J Hamers	3	151	22	36
216	Paul F Nealey	3	83	18	27
216	Fred Roozeboom	3	115	12	15
216	Peter I Belobrov	3	91	1	1
216	Hiroshi Itoh	3	64	4	4
216	Alexander A Demkov	3	156	13	8
216	Marjorie A Olmstead	3	143	4	3
216	Hidenori Mimura	3	30	4	6
216	Mark L Leadbeater	3	31	8	13
216	Chris J Palmstrøm	3	34	9	19
216	S Y Tong	3	132	9	7
216	Richard J Colton	3	211	5	8
216	C Grant Willson	3	149	8	12
216	Clifford L Henderson	3	17	7	19
216	Thomas Kailath	3	12	5	15
216	Patrick Naulleau	3	31	4	7
216	Shoso Shingubara	3	142	5	3
216	Hei Wong	3	92	10	8
216	Ilesanmi Adesida	3	145	3	4
356	Valeri V Afanas'ev	2	58	23	18
356	Dhananjay Kumar	2	9	5	28
356	Orlando Auciello	2	29	11	26
356	Tom J Smy	2	5	3	4
356	David Eon	2	45	8	13
356	Paul S Weiss	2	65	25	34
356	Masao Morita	2	22	7	14
356	Moon-Hyung Jang	2	11	4	17
356	Lin Zhou	2	49	12	24
356	Yimin Zou	2	42	22	33
356	Maciej Sawicki	2	78	21	14
356	Jin-Hua Huang	2	16	2	9
356	Jonathan Pelz	2	51	3	3
356	Sean L Rommel	2	64	5	4
356	Steven J Koester	2	18	13	30
356	Patrizio Candeloro	2	31	7	24
356	Paul A Kohl	2	30	22	34
356	Demetre J Economou	2	146	9	7
356	Cees Dekker	2	133	28	33
356	Jinn-Kong Sheu	2	53	21	21
356	Li-Chyong Chen	2	60	42	53
356	Theodosia Gougousi	2	27	8	14
356	Won-Jun Lee	2	34	11	11
356	Agustina Asenjo	2	25	14	26
356	C-S Lee	2	101	79	72
356	Sebastiano Trusso	2	33	13	20
356	Nils G Weimann	2	37	13	12
356	佐久間芳樹	2	54	11	10
356	Joe C Campbell	2	12	14	22
356	Vincenc Nemanic	2	4	5	17
356	Christoph Grein	2	36	5	4
356	María U González	2	23	9	27
356	Daisuke Fujita	2	43	20	22
356	Shih-Yen Lin	2	11	14	21
356	Toshishige Yamada	2	18	7	16
356	Alexander A Shklyaev	2	14	13	19
356	Ioannis Kymissis	2	119	13	8
356	Igor V Shvets	2	32	22	30
356	Myeong Hoon Jeong	2	5	1	24
356	Emanuele Pelucchi	2	13	16	31
356	Toyoaki Eguchi	2	10	13	23
356	Keiji Ikeda	2	8	5	14
356	Massimo Tormen	2	23	4	17
356	Thorsten Hesjedal	2	41	20	18
356	Stephen Garoff	2	76	14	16
356	Pedro A Serena	2	9	8	20
356	Yasuo Koide	2	22	24	37
356	Whikun Yi	2	26	5	6
356	Christopher N Bowman	2	21	38	73
356	Rajesh Shukla	2	28	6	5
356	Andre Stesmans	2	58	13	15
356	Alireza Nojeh	2	61	6	6
356	Roberto Mosca	2	6	9	33
356	Guanzhou Zhu	2	61	15	40
356	Jung Ho Je	2	16	24	44
356	J David Carey	2	69	9	10
356	Luiz G Jacobsohn	2	5	11	31
356	Tatsuro Maeda	2	9	11	21
356	Weiyi Li	2	83	2	2
356	Juan C Gonzalez	2	24	9	18
356	Meyya Meyyappan	2	36	39	70
356	Samuel Granjeaud	2	43	10	21
356	Hideo Hosono	2	58	89	102
356	Igor S Nefedov	2	13	14	25
356	Antonella Poggi	2	11	7	20
356	Stanisław Mitura	2	15	5	11
356	Dimitrios Maroudas	2	29	12	26
356	Harry A Atwater	2	24	40	61
356	David N Mcilroy	2	37	9	18
356	George M Whitesides	2	164	30	42
356	Philippe Allongue	2	61	14	16
356	Petr Formanek	2	64	12	14
356	Anders S Kristensen	2	108	23	20
356	Carlos Zaldo	2	26	29	33
356	Sy-Hann Chen	2	9	5	14
356	Thirumalai Venkatesan	2	12	42	89
356	Henning Sirringhaus	2	40	31	43
356	Wolf-Dieter Schneider	2	23	13	34
356	Wladyslaw	2	195	24	13
356	Craig S Lent	2	344	11	5
356	Ai Qun Liu	2	56	20	31
356	Satoshi Yamasaki	2	31	18	24
356	Andrey V Zotov	2	24	16	16
356	L Jay Guo	2	208	23	19
356	Axel Lorke	2	48	21	23
356	Toshimasa Fujisawa	2	32	11	17
356	Peter Guttmann	2	5	19	63
356	Katsumi Midorikawa	2	61	29	27
356	Luana Persano	2	10	16	36
356	Tim D Veal	2	43	16	20
356	Fred L Terry	2	50	10	15
356	Ataç İmamoğlu	2	60	15	20
356	Elena Cianci	2	9	9	35
356	Enrique Vasco	2	26	8	7
356	Jiyoul Lee	2	34	10	16
356	Luiz Cury	2	8	13	28
356	Seunghwan Lee	2	26	10	29
356	Beatrice Bonanni	2	8	5	13
356	Anupam Madhukar	2	21	8	14
356	Vitaly I Konov	2	48	32	21
356	Paul A Crowell	2	50	5	10
356	Leo Miglio	2	46	21	18
356	Greg Hughes	2	83	10	5
356	Kristiaan Temst	2	19	22	34
356	Kijung Yong	2	4	20	55
356	Uzi Landman	2	164	29	22
356	Steven David Johnson	2	17	6	17
356	Alain Cappy	2	36	13	13
356	Brian Gorman	2	49	15	21
356	Philipp Ebert	2	43	8	8
356	Fredy R Zypman	2	22	11	7
356	Marek Skowronski	2	277	15	5
356	Sam Fong-Yau Li	2	18	29	80
356	Gerhard Hobler	2	17	6	16
356	Akhlesh Lakhtakia	2	49	60	64
356	Peter A Dowben	2	37	28	40
356	Victor Ralchenko	2	42	18	17
356	Jeong In Han	2	26	20	31
356	Satoru Fujisawa	2	39	4	6
356	Maria C Salvadori	2	9	12	43
356	Baoqing Zeng	2	17	6	22
356	Yasuhito Gotoh	2	7	6	8
356	Nobuyuki N Matsuzawa	2	51	5	6
356	Enrico Napolitani	2	10	17	29
356	Matthew J Goeckner	2	28	8	13
356	Seungbum Hong	2	82	15	9
356	Nicholas Winograd	2	20	23	47
356	Maurizio De Crescenzi	2	22	22	35
356	David J Lockwood	2	31	13	20
356	Hui Huang	2	15	10	29
356	John J Boland	2	43	22	34
356	Andrey S Baturin	2	22	9	7
356	Euclydes Marega Jr	2	78	14	9
356	Kaiyang Zeng	2	15	25	80
356	Miguel Angel Vidal Borbolla	2	11	9	14
356	Elaine D Haberer	2	54	4	4
356	Yves Huttel	2	17	9	29
356	Jonas O Tegenfeldt	2	75	10	18
356	Christopher K Ober	2	37	37	60
356	David Eason	2	26	4	7
356	Mark Blamire	2	25	21	33
356	Gilles Patriarche	2	23	47	66
356	Takanori Ichiki	2	72	9	10
356	Leigh M Smith	2	48	11	10
356	Masahiko Tomitori	2	12	14	16
356	Matteo Ferroni	2	39	13	31
356	Hirofumi Tanaka	2	65	11	10
356	Fabio Iacona	2	48	12	14
356	Yoshihiro Aiura	2	105	13	8
356	Kunihiro Sakamoto	2	21	14	15
356	Abdulmecit Turut	2	59	27	29
356	Rajesh Menon	2	64	10	12
356	Dimitri A Antoniadis	2	47	5	9
356	Ignacio Mártil	2	19	11	18
356	Ning Wang	2	101	31	35
356	Francisco Gamiz	2	1	15	33
356	Roya Maboudian	2	799	33	5
356	Chun-Li Bai	2	42	9	15
356	Andre Anders	2	186	20	18
356	Shu Ping Lau	2	15	34	82
356	Jeff T H Tsai	2	35	3	7
356	Ji-Myon Lee	2	76	6	4
356	Eui-Tae Kim	2	21	9	15
356	Daniel E Bürgler	2	62	13	11
356	Siegfried Selberherr	2	15	32	47
356	Valeriy Sukharev	2	89	8	5
356	Christian Schönenberger	2	147	23	24
356	Hubert Brueckl	2	37	3	4
356	Andrew Wee	2	30	58	77
356	Xavier Aymerich	2	17	19	25
356	Toshihide Nabatame	2	27	19	26
356	D Greg Walker	2	30	6	18
356	Hansjoerg Scherer	2	40	8	8
356	Ray Duffy	2	19	12	17
356	Massimo Longo	2	32	8	10
356	Gabriel Abadal	2	129	11	5
356	Hiroyuki Sugimura	2	27	10	16
356	Peter E Schiffer	2	6	13	47
356	Chee Wee Liu	2	19	17	21
356	Jeffrey Lince	2	50	8	11
356	Yuuki Ishida	2	119	10	5
356	Karsten Hinrichs	2	34	21	29
356	Mark Freeman	2	55	13	17
356	Stefano Salvatori	2	20	9	15
356	J-M Chauveau	2	49	9	6
356	Michael L Myrick	2	8	15	40
356	Shoou Jinn Chang	2	17	31	38
356	Jonathan Bird	2	5	22	37
356	Anthony Levi	2	41	7	9
356	Richard J Blaikie	2	36	13	17
356	Joseph H Thywissen	2	48	6	7
356	Yehuda Braiman	2	6	5	13
356	Ricardo Garcia	2	11	21	44
356	Giuseppina Padeletti	2	8	7	26
356	Christian Heyn	2	4	17	32
356	Jose Ignacio Pascual	2	60	14	21
356	Yihong Wu	2	22	10	15
356	Chi-Sun Hwang	2	14	9	16
356	Markus Pristovsek	2	57	14	9
356	Zlatko Sitar	2	21	14	28
356	Konstantinos P Giapis	2	16	4	13
356	Yf Zheng	2	83	63	81
356	Jose Manuel G Tijero	2	11	10	20
356	Nikolai B Zhitenev	2	40	9	15
356	Jin Jang	2	13	20	42
356	Jose Maria Gomez Rodriguez	2	41	10	18
356	Alexander B Zorin	2	40	11	12
356	Marc Gailhanou	2	46	6	13
356	Julia W P Hsu	2	134	19	14
356	Joan M Redwing	2	76	24	28
356	Shunri Oda	2	42	14	16
356	Ilan Shalish	2	20	5	9
356	Andrea Locatelli	2	65	24	23
356	Jeong Young Park	2	16	39	71
356	Andreas Markwitz	2	17	21	38
356	Hong Lu	2	39	16	19
356	Wolfgang Fritzsche	2	10	19	71
356	Kazuhito Hashimoto	2	45	53	99
356	Kazuhiro Ohkawa	2	20	15	23
356	A L David Kilcoyne	2	40	25	51
356	Peter J Heard	2	48	12	16
356	Nickolai I Klyui	2	42	9	7
356	Richard Martel	2	54	22	30
356	Ganesh Balakrishnan	2	17	13	26
356	K-H Chen	2	60	53	58
356	Giorgio Rossi	2	56	17	14
356	Alfred Forchel	2	39	14	22
356	Sergii V Mamykin	2	5	2	16
356	Shin-Pon Ju	2	22	18	21
356	Salvatore Mirabella	2	5	21	37
356	Omer Nur	2	17	29	59
356	Ronaldo D Mansano	2	26	10	11
356	Olivier J F Martin	2	36	22	35
356	Salia Cherifi-Hertel	2	65	5	6
356	Gregory Rohrer	2	41	29	39
356	Cheng-Liang Huang	2	25	15	15
356	Valery Ray	2	10	1	1
356	Artem S Trifonov	2	15	5	21
356	Stephen Donnelly	2	11	18	32
356	Mantu Hudait	2	25	16	24
356	Vincent L Bouchiat	2	67	11	17
356	Lionel Buchaillot	2	11	8	20
356	Jae-Min Myoung	2	32	16	22
356	Anja Mz Boisen	2	149	31	25
356	Akira Ishibashi	2	18	8	7
356	Andrew L Rohl	2	15	15	39
356	Giorgio Sberveglieri	2	38	30	64
356	R Stanley Williams	2	43	26	44
356	Edward H Sargent	2	52	51	65
356	Giacomo Torzo	2	30	6	9
356	Sven Achenbach	2	55	2	2
356	Vladimir A Krupenin	2	25	6	7
356	Stephen Giugni	2	10	2	3
356	Jürgen P Rabe	2	96	36	42
356	Michael Spencer	2	9	7	17
356	Marco Lazzarino	2	14	9	38
356	Guillaume Micouin	2	73	1	1
356	Hyunjung Shin	2	82	23	27
356	Seiya Kasai	2	44	8	7
356	Kin M Yu	2	14	35	52
356	Isabelle Berbezier	2	33	17	23
356	Michael Kneissl	2	17	24	35
356	Chennupati Jagadish	2	29	54	66
356	Ming-Chieh Lin	2	44	5	1
356	Juan Bautista Roldan Aranda	2	1	17	37
356	Matthias Schreck	2	33	11	24
356	Stephen R Leone	2	22	20	42
356	Annamaria Gerardino	2	23	12	30
356	Hyunsang Hwang	2	86	13	17
356	Bruce D Terris	2	4	7	32
356	Chang Q Sun	2	42	44	67
356	Giovanni Mannino	2	43	11	13
356	Yogesh B Gianchandani	2	65	7	6
356	Lin Zhou	2	49	18	22
356	James Tobin	2	12	9	15
356	Patrick W Leech	2	11	8	17
356	Won-Bin Im	2	43	25	31
356	Ryszard Czajka	2	6	11	26
356	S Ashok	2	20	6	6
356	Evgen Prokhorov	2	9	11	36
356	Toyoko Arai	2	31	7	7
356	Young-Ho Kim	2	38	7	7
356	Nathan Newman	2	85	14	10
356	Jiangyan Wang	2	18	2	4
356	Miroslav Micovic	2	39	8	11
356	Hajime Takano	2	55	4	18
356	Luciana Di Gaspare	2	13	6	18
356	Gary J Mankey	2	16	10	15
356	Romuald Houdré	2	55	20	21
356	Jacques Ghijsen	2	17	11	24
356	Jong-Ho Lee	2	19	14	17
356	Mark S Hybertsen	2	37	14	31
356	Joel L Plawsky	2	12	10	19
356	Lothar Bischoff	2	23	7	15
356	Marya Lieberman	2	199	9	5
356	Hartmut G Roskos	2	10	25	65
356	Jesus A Del Alamo	2	29	11	18
356	Bert Müller	2	97	20	18
356	Günter Müller	2	30	4	8
356	Emmerich Bertagnolli	2	57	9	9
356	Ferenc Riesz	2	28	6	7
356	Raul Gago	2	9	14	39
356	Max C Lemme	2	77	22	26
356	Shuang Zhang	2	31	26	38
356	Yuri A Pashkin	2	21	8	16
356	Helmut Ermert	2	5	9	33
356	Gleason Kk	2	44	32	65
356	Eugene A Fitzgerald	2	82	10	6
356	Masaru Hori	2	15	8	22
356	Bruno Gayral	2	47	13	14
356	Y C Kao	2	53	4	3
356	Sharadha Sambasivan	2	36	2	8
356	W G Sloof	2	13	6	15
356	Sigurd Wagner	2	26	9	29
356	Masatoshi Kotera	2	16	4	3
356	Will Conley	2	42	2	4
356	Seth R Bank	2	28	8	16
356	Tsuyoshi Moriya	2	57	2	3
356	K Hane	2	25	15	12
356	P Soukiassian	2	21	12	16
356	Eric Gullikson	2	22	2	5
356	Shoou-Jinn Chang	2	22	27	46
356	Scott S Perry	2	29	8	18
356	Todd L Williamson	2	94	2	1
356	M Holland	2	28	3	8
356	R K Nahar	2	17	2	4
356	Igor L Kuskovsky	2	22	3	5
356	J D Gillaspy	2	87	8	9
356	W Walukiewicz	2	195	12	12
356	H M Pollock	2	192	3	4
356	L A Coldren	2	26	6	17
356	S J C Irvine	2	30	7	10
356	Sue Ann Bidstrup Allen	2	30	6	8
356	E Di Fabrizio	2	99	4	11
697	Dong-Joo Kim	1	9	27	49
697	Yue Ying Lau	1	13	11	17
697	Taketomo Sato	1	14	7	8
697	Trevor Anderson	1	55	4	2
697	Tsutomu Minegishi	1	22	38	49
697	Yong Lei	1	23	42	67
697	Colin Humphreys	1	14	28	46
697	Francesco Barreca	1	20	2	9
697	Michael E Flatté	1	5	24	39
697	Wen-Yen Chiu	1	13	25	30
697	Alberto Garcia	1	99	10	10
697	Jayne Wu	1	11	29	44
697	Guilhem Larrieu	1	13	13	15
697	Richard M Crooks	1	15	26	37
697	Dimitris Tsoukalas	1	13	30	35
697	Alessandra Catellani	1	1	18	42
697	Dong Qin	1	43	17	23
697	Hendrik C Swart	1	159	85	26
697	Andrew Bettiol	1	13	22	35
697	Mary Ellen Zvanut	1	6	7	8
697	Eduard Belas	1	1	19	33
697	Yuzuru Takamura	1	19	32	44
697	Masami Aono	1	14	11	11
697	Faramarz	1	3	4	11
697	Da-Bing Li	1	37	19	20
697	Sergei V. Kalinin	1	35	60	72
697	Theo Siegrist	1	13	45	63
697	Luis Alves	1	13	30	39
697	Hans-Juergen Butt	1	26	66	86
697	Daniel K Schwartz	1	42	39	40
697	Pascal Vincent	1	8	9	18
697	Kyu Chang Park	1	10	14	14
697	Ichiko Misumi	1	4	9	10
697	Maria Luisa Polignano	1	6	18	20
697	Kentaro Totsu	1	40	4	4
697	Dominique Thierry	1	9	20	39
697	Helge Weman	1	9	16	24
697	Yang-Kyu Choi	1	70	45	26
697	Eva Monroy	1	26	39	32
697	Xiao Wang Zhou	1	12	13	30
697	Александр Балмашнов	1	0	5	9
697	Mingxing Wang	1	11	34	43
697	Franco Marabelli	1	11	20	32
697	Jaroslaw Z Domagala	1	59	32	11
697	Maciej Gutowski	1	251	24	12
697	Piotr Perlin	1	51	25	9
697	Hyung-Ho Park	1	9	76	100
697	Zhongfan Liu	1	11	66	93
697	Ignacio Jimenez	1	7	14	30
697	Masayuki Abe	1	9	19	29
697	Nikolaj Moll	1	0	16	32
697	Kanji Yasui	1	4	14	19
697	Nicholas X. Fang	1	44	42	41
697	Jeremie Grisolia	1	2	16	26
697	Eric Ganz	1	33	22	24
697	Kyohei Okubo	1	51	10	5
697	Wei-Hua Liu	1	13	14	18
697	Carmen Coya	1	2	8	26
697	Byung-Teak Lee	1	13	10	10
697	Yong Ding	1	27	32	60
697	Markku Leskela	1	25	98	115
697	Enzo Di Fabrizio	1	13	16	45
697	Takahiro Mori	1	0	12	28
697	Uwe R Kortshagen	1	14	31	51
697	David G Cahill	1	10	22	43
697	Pieter Kruit	1	13	17	25
697	Forest Shih-Sen Chien	1	7	12	21
697	Jongsuck Bae	1	76	8	4
697	Paul Muralt	1	1	38	77
697	Shige H Yoshimura	1	49	14	18
697	Taku T Suzuki	1	1	19	30
697	Ka Lun Michael Man	1	22	7	12
697	Jiro Nishinaga	1	0	10	22
697	Hisato Ogiso	1	4	10	16
697	Zoltán L Horváth	1	78	6	3
697	Guglielmo G Condorelli	1	8	31	57
697	Mohamed Abdel-Rahman	1	6	10	14
697	Chong S Yoon	1	6	43	58
697	Ignacio Garcia	1	2	11	27
697	Bojan Zajec	1	4	7	16
697	Michael S Fuhrer	1	78	27	27
697	Aleksandr A Ezhov	1	9	20	32
697	Kai Henrik Nordlund	1	57	50	36
697	Wolfgang Husinsky	1	56	9	10
697	Karen L Carleton	1	30	14	31
697	José María Kenny	1	34	86	104
697	Alex K Zettl	1	41	41	43
697	Hiroaki Imai	1	25	52	59
697	Ki Tae Nam	1	22	39	61
697	Noriyuki Uchida	1	2	15	29
697	Bing-Hung Chen	1	19	20	35
697	Andrew G Norman	1	6	21	47
697	Artur Erbe	1	6	23	45
697	Klaus Wittmaack	1	14	26	32
697	Thomas P Russell	1	8	87	122
697	Saluru B Krupanidhi	1	16	52	54
697	Zhanguo Wang	1	31	27	20
697	Jean M J Fréchet	1	0	63	117
697	Charles Michael Greenlief	1	34	10	14
697	Yasumoto Tanaka	1	1	22	31
697	William Alan Doolittle	1	32	14	11
697	Hongqi Xu	1	0	36	60
697	Qiang Wang	1	63	6	6
697	Vasilios Deligiannakis	1	8	8	6
697	Terry G Ireland	1	147	14	4
697	Tibor Grasser	1	7	29	41
697	José Cotrino Bautista	1	19	20	34
697	Evgenia Valcheva	1	1	19	37
697	Ioan Lucian Prejbeanu	1	20	12	20
697	Julian Sweet	1	13	2	8
697	Alexander A Saranin	1	7	19	25
697	Fabio Biscarini	1	12	53	87
697	Xuemei Cheng	1	5	10	22
697	C Robert Kao	1	2	26	50
697	Irena Knezevic	1	4	12	18
697	Nikolai B Gorev	1	4	11	10
697	Hidetaka Shimawaki	1	10	1	2
697	Aldo Di Carlo	1	48	84	85
697	Yoshiyuki Miyamoto	1	24	18	18
697	Mounir Laroussi	1	10	12	21
697	A Paul Alivisatos	1	92	42	53
697	Jackie Y Ying	1	5	57	107
697	Tse Nga Ng	1	43	18	24
697	Ant Ural	1	46	10	11
697	Sadao Masamune	1	41	7	6
697	Suresh Valiyaveettil	1	21	43	63
697	Arthur P Baddorf	1	35	16	25
697	James G Kempf	1	19	8	10
697	Luc G. Fréchette	1	23	13	19
697	Hyunsoo Kim	1	75	18	5
697	James Kolodzey	1	20	6	5
697	Joseph W Lyding	1	4	9	20
697	Cheng-Liang Hsu	1	12	20	34
697	Lucian D Filip	1	10	5	9
697	Ernst Bauer	1	6	49	69
697	John Conley	1	314	6	1
697	Mark J Kushner	1	31	10	16
697	L Howald	1	65	21	20
697	Alex Hamilton	1	6	24	33
697	Matthias Bode	1	17	24	29
697	Zhong Chen	1	5	99	195
697	Thomas Schuelke	1	23	5	9
697	Liming Dai	1	4	80	171
697	Celestino Padeste	1	23	15	24
697	Shojiro Miyake	1	35	21	12
697	S Joe Qin	1	5	38	72
697	Christophe Detavernier	1	0	52	108
697	Anthony Peaker	1	10	28	33
697	Tadashi Iwamatsu	1	33	3	1
697	Spencer J Sherwin	1	1	32	73
697	Jordan C Poler	1	26	8	5
697	Brunello Tirozzi	1	3	22	36
697	Erik Janzen	1	13	38	47
697	David Joseph Singh	1	3	41	70
697	Stefan Zollner	1	106	15	7
697	Mark M Banaszak Holl	1	39	31	50
697	Brian P Borovsky	1	33	3	4
697	Stephen Buckman	1	23	22	25
697	Jörg Schmiedmayer	1	9	31	47
697	Zhenhong Dai	1	1	10	23
697	Xavier Bouju	1	7	15	28
697	Ji-Jung Kai	1	10	29	43
697	Shu Seki	1	13	59	75
697	Luke Hanley	1	64	21	16
697	Fernando Calle	1	26	28	28
697	Jeffrey Terry	1	19	13	22
697	Ana Conde	1	2	21	51
697	Marek Malac	1	6	9	30
697	Linards Skuja	1	21	14	15
697	Do-Heyoung Kim	1	18	20	42
697	Achim Trampert	1	34	29	24
697	Tatsuo Yoshinobu	1	20	22	27
697	Thibaut Devolder	1	28	18	18
697	Nobuyuki Sugii	1	20	20	16
697	Alexander N Obraztsov	1	38	28	17
697	Salim Ciraci	1	6	17	29
697	Philippe Lambin	1	16	39	50
697	Fernando J Lahoz	1	1	28	46
697	Isabelle Sagnes	1	19	54	51
697	Carl-Mikael G Zetterling	1	34	13	10
697	Zhi Li Dong	1	10	46	81
697	Koji Ishibashi	1	32	20	9
697	Kazuhiro Kirihara	1	11	14	25
697	Roger Smith	1	11	28	39
697	Jen-Inn Chyi	1	7	35	44
697	Tsung-Hsun Yang	1	7	14	21
697	Ana I Teixeira	1	57	3	8
697	Bernd Rauschenbach	1	13	16	37
697	Damiano Giubertoni	1	4	16	22
697	Kiwamu Ashida	1	2	7	17
697	Zhifeng Ren	1	14	47	73
697	Mark D Stiles	1	39	13	17
697	Ching-Ting Lee	1	21	42	34
697	B J Hickey	1	5	13	20
697	Hong Zhao	1	4	5	14
697	Won Il Park	1	22	30	33
697	Araiza, J J	1	13	4	7
697	Herve P Toulhoat	1	7	22	39
697	Johan Hoefnagels	1	21	25	27
697	Wilhelmus J Geerts	1	1	6	14
697	Patrick Mounaix	1	16	23	36
697	Lujiang Huangfu	1	13	1	1
697	Takashi Koida	1	2	17	27
697	Donald E Savage	1	41	23	19
697	Kyoung-Tae Kim	1	5	10	15
697	Miguel Garcia-Rocha	1	1	7	18
697	Julio Gomez-Herrero	1	30	33	44
697	Andy Thomas	1	20	14	19
697	Tongjun Yu	1	20	18	20
697	Wolfgang H Krautschneider	1	2	3	8
697	Yong Soo Kim	1	5	21	50
697	Hans Sigg	1	3	25	57
697	Jack Silver	1	147	37	13
697	Franck Bassani	1	8	20	26
697	Petr Zeman	1	36	10	12
697	Manfred Radmacher	1	29	19	38
697	Fausto Sirotti	1	17	34	38
697	Susan Earles	1	11	2	3
697	Nagahiro Saito	1	14	56	70
697	Tobin J Marks	1	15	61	86
697	Carmen Ocal	1	60	24	23
697	Vivek M Prabhu	1	6	10	25
697	Evgeny V Zavedeev	1	13	11	10
697	Marcelo Davanco	1	18	11	16
697	Shu Yang	1	14	42	88
697	Kohei Uosaki	1	19	55	80
697	Maria Vasilopoulou	1	12	19	34
697	Jeramy D Zimmerman	1	37	9	14
697	Vidar Gudmundsson	1	1	22	37
697	Andrzej A Wawro	1	8	23	28
697	Inna F Kodzhespirova	1	4	8	8
697	Chris A Mack	1	2	5	11
697	Ping Sheng	1	22	51	69
697	Veroniki P Vidali	1	12	5	11
697	Paul J Kelly	1	19	7	14
697	Dai-Viet N Vo	1	8	79	139
697	Vilson Rosa Almeida	1	18	9	9
697	Sidong Lei	1	17	37	47
697	Enza Fazio	1	20	39	54
697	Per Persson	1	69	37	36
697	Massimo Catalano	1	3	13	54
697	Jyh-Ming Wu	1	31	21	22
697	Javier Tejada	1	56	34	28
697	Shuichi Noda	1	10	5	8
697	Jun-ichi Shirakashi	1	5	9	13
697	Likun Pan	1	33	54	71
697	Shingo Hirose	1	5	1	3
697	Antonietta Taurino	1	3	19	53
697	Alexey B Pavolotsky	1	22	9	11
697	Hermis Iatrou	1	26	15	29
697	Brian J Rodriguez	1	35	28	45
697	Yoshishige Suzuki	1	1	35	57
697	Hiroaki Usui	1	3	16	24
697	Hyung-Tak Seo	1	35	32	30
697	Carla Andreani	1	5	34	53
697	M W Holtz	1	21	13	15
697	Jyoti Mohanty	1	37	14	13
697	Bert Voigtländer	1	7	15	23
697	Makoto Miyoshi	1	41	15	6
697	Michael J Aziz	1	24	33	46
697	Guang-Rong Li	1	27	15	20
697	Jenn Gwo Hwu	1	3	24	28
697	Odette Chaix	1	10	21	38
697	Yuri L Lyubchenko	1	23	25	45
697	Adekunle Adeyeye	1	1	15	29
697	De-Quan Yang	1	4	14	24
697	Olivier Schneegans	1	4	8	18
697	Klavs Hansen	1	25	17	24
697	Pietro A Siciliano	1	3	32	68
697	Francesco Quochi	1	14	21	34
697	Christian A Zorman	1	25	23	36
697	Bashkim Ziberi	1	13	6	14
697	Miguel Angel Meléndez-Lira	1	2	6	23
697	Massimiliano Cavallini	1	12	31	52
697	Evelyn K F Yim	1	98	15	13
697	Scott A Barnett	1	78	27	25
697	Chang-Jiu Li	1	27	33	38
697	Shane A Cybart	1	2	5	14
697	Steve Arscott	1	16	17	22
697	Ivana Vobornik	1	42	26	20
697	Yuan Yao	1	6	20	42
697	Bruce E Koel	1	53	41	36
697	Wenhao Huang	1	12	14	20
697	Sotirios E Kakabakos	1	25	16	18
697	Kin Leong Pey	1	2	21	40
697	Tsuyoshi Horikawa	1	9	13	18
697	Themis Matsoukas	1	13	16	22
697	Imshik Lee	1	15	8	20
697	Ting Yu	1	1	43	81
697	Sinisa Dj Mesarovic	1	1	10	29
697	Pupa U P A Gilbert	1	4	28	66
697	Luca Lozzi	1	34	27	34
697	Kunihiko Oka	1	32	18	11
697	Wensyang Hsu	1	19	13	10
697	Massimo Piotto	1	3	14	29
697	Thomas F Kuech	1	9	19	32
697	Mattias Beck	1	9	28	38
697	Yael Nemirovsky	1	66	14	8
697	Brian D Gerardot	1	41	19	25
697	Ratno Nuryadi	1	59	5	2
697	Mathieu G Silly	1	15	23	31
697	Yasin Ekinci	1	50	23	21
697	Nilson C. Cruz	1	5	19	43
697	Mark E Law	1	1	8	13

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Journal of Vacuum Science & Technology an Official Journal of the American Vacuum Society B, Microelectronics Processing and Phenomena

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