Journal of Vacuum Science & Technology B

1.3(top 50%)

impact factor

2.2K(top 10%)

papers

32.6K(top 10%)

citations

60(top 10%)

h-index

1.3(top 50%)

impact factor

2.2K

all documents

33.3K

doc citations

103(top 10%)

g-index

Top Schools (by citations)

#	School	Articles	Citations	R ARank	R CRank
1	Department of Mechanical Engineering	1	198	617	234
2	Department of Electrical Engineering	5	170	24	43
3	Department of Physics	1	97	81	40
4	Department of Electrical Engineering and Computer Science	1	82	435	367
4	Department of Materials Science and Engineering	1	82	364	278
6	Faculty of Applied Sciences	3	74	159	221
7	Institute of Applied Physics	2	62	17	27
8	Fitzpatrick Institute for Photonics	1	59	38	36
9	Department of Materials Science and Engineering	2	48	141	118
10	Department of Electrical Engineering and Computer Science	1	47	272	232
10	Center for Spintronics and Quantum Computation	1	47	11	18
10	School of Physics	1	47	131	88
13	Department of Electrical and Computer Engineering	2	42	223	273
14	Department of Electrical Engineering and Computer Science	3	41	242	423
15	Institute of Materials Physics	1	39	43	35
15	Department of Materials Science and Engineering	1	39	233	233
15	Institute of Ion Beam Physics and Materials Research	1	39	98	78
18	Department of Mechanical Engineering	2	36	117	184
18	Department of Chemistry and Biochemistry	1	36	220	262
18	Department of Physics	1	36	235	216
21	Department of Materials Science and Engineering	1	35	181	177
21	Department of Electrical and Computer Engineering	3	35	110	183
21	Department of Electrical and Computer Engineering	1	35	233	198
24	Department of Electrical and Computer Engineering	2	34	41	54
25	Institute for Research in Electronics and Applied Physics	2	30	60	97
26	Department of Materials Science and Engineering	2	29	103	155
27	Department of Materials Science and Engineering	3	28	159	302
27	Department of Materials Science and Engineering	1	28	30	49
27	Department of Chemistry	1	28	23	42
30	Department of Chemical and Biological Engineering	2	27	140	276
31	School of Chemistry and Chemical Engineering	1	26	341	370
31	Department of Electrical and Computer Engineering	1	26	139	141
31	Department of Electrical Engineering	1	26	108	108
34	School of Engineering and Applied Sciences	1	25	593	735
35	Department of Physics	1	24	254	262
36	Graduate School of Engineering	2	23	569	731
37	Department of Physics and Technology	1	22	138	139
38	Department of Chemical Engineering	1	20	181	236
38	Department of Electrical and Computer Engineering	1	20	270	285
38	Department of Physics and Nanotechnology	1	20	47	62
41	Department of Physics	1	19	287	318
42	School of Electrical Engineering and Computer Science	1	18	86	92
42	School of Materials Science and Engineering	1	18	59	64
42	Electrical Engineering Department	2	18	1	4
42	College of Nanoscale Science and Engineering	2	18	20	65
46	Department of Electrical and Computer Engineering	1	17	377	412
46	Department of Electronics and Electrical Engineering	1	17	133	181
48	School of Physics and Engineering	1	16	182	189
48	Center for Single Molecule Biophysics	1	16	9	15
50	School of Engineering and Electronics	1	15	96	177
51	School of Engineering	1	14	888	944
51	Electronics and Electrical Engineering Laboratory	1	14	15	28
51	Semiconductor Electronics Division	1	14	42	51
51	Department of Applied Electronics	1	14	68	67
51	Department of Electrical and Computer Engineering	4	14	19	113
56	Department of Chemistry	1	13	945	1.2K
56	Physics and Electronic Engineering	1	13	1	2
56	Department of Electrical and Computer Engineering	2	13	148	280
56	Department of Electrical Engineering	2	13	39	63
56	Department of Electrical and Computer Engineering	2	13	146	289
61	Department of Engineering	1	12	970	1.3K
61	Department of Chemistry	1	12	223	313
61	Department of Electronic Science and Engineering	1	12	132	147
61	Faculty of Applied Chemical Engineering	1	12	69	99
61	Graduate School of Engineering	1	12	195	181
61	Graduate School of Engineering	1	12	739	791
67	Department of Physics and Astronomy	1	11	196	247
68	Institute of Materials Science	1	10	133	183
68	Surface Science Division	1	10	29	48
68	Department of High Frequency Electronics	1	10	5	8
68	Department of Chemistry	1	10	119	203
68	Department of Physics and Astronomy	1	10	23	45
68	Department of Electrical and Computer Engineering	1	10	55	93
74	Department of Applied Physics and Applied Mathematics	1	9	199	318
74	Department of Mechanical Engineering	1	9	679	976
74	School of Chemistry	1	9	311	504
74	College of Electronic Information and Control Engineering	1	9	31	66
78	Department of Electrical Engineering	1	8	189	273
78	Department of Applied Chemistry	1	8	250	351
78	Department of Electrical and Computer Engineering	1	8	534	687
81	Department of Advanced Materials Science	1	7	154	221
81	Department of Applied Physics	1	7	252	313
81	Department of Electrical Engineering	3	7	226	691
81	School of Applied and Engineering Physics	1	7	176	321
81	Department of Electrical and Computer Engineering	1	7	89	161
81	Center for X-ray Optics	1	7	39	72
81	Department of Physics	1	7	257	399
81	Department of Electrical and Computer Engineering	1	7	23	66
89	Department of Chemical Engineering	1	6	31	67
89	Department of Electrical Engineering	1	6	155	244
89	Department of Electrical and Computer Engineering	1	6	118	216
92	Department of Applied Chemistry	1	5	197	308
92	Department of Electrical and Computer Engineering	1	5	513	771
92	Department of Physics	1	5	107	168
92	Department of Physics	1	5	203	298
96	Department of Chemical Engineering and Materials Science	1	4	408	629
96	Institute of Applied Physics	2	4	149	304
96	Graduate School of Information Science and Technology	1	4	266	425
96	Department of Physics	1	4	229	367
96	School of Materials Science and Engineering	1	4	378	520
101	Department of Electrical Engineering	1	3	286	491
101	Graduate Institute of Electronics Engineering	1	3	120	182
101	Department of Electrical Engineering	1	3	247	377
101	Lane Department of Computer Science and Electrical Engineering	1	3	90	202
101	Department of Electrical and Computer Engineering	1	3	289	500
101	Department of Materials Science and Engineering	1	3	229	402
101	Chemical Sciences and Engineering Division	1	3	159	243
101	Department of Electrical Engineering and Center for Solid State Electronics Research	1	3	31	51
101	College of Nanoscale Science and Engineering	1	3	8	23
101	Department of Computer Science	1	3	9	28
101	Research Center for Applied Sciences	1	3	158	273
112	Department of Electronic Engineering	1	2	157	242
112	School of Mechanical Engineering	1	2	280	486
112	Ministry of Education	1	2	237	448
115	Department of Chemical and Biomolecular Engineering	1	1	93	235
115	Department of Mechanical Engineering	1	1	305	668
115	Faculty of Physics	1	1	205	370
115	Department of Electrical Engineering	1	1	143	208
115	Department of Electronic Engineering	1	1	347	581
115	Fine Mechanics and Physics	1	1	376	594
121	Department of Chemistry	1	0	529	865
121	Department of Electrical and Computer Engineering	1	0	98	244

Scientometrics

Overviews

Citing Bodies

Journal of Vacuum Science & Technology B

Top Schools (by citations)