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exaly
›
Journals
›
Journal of Vacuum Science & Technology B
›
top-institutions
Journal of Vacuum Science & Technology B
1.3
(top 50%)
impact factor
2.2K
(top 10%)
papers
32.6K
(top 10%)
citations
60
(top 10%)
h
-index
1.3
(top 50%)
impact factor
2.2K
all documents
33.3K
doc citations
103
(top 10%)
g
-index
Top Institutions (by citations)
#
Institution
Articles
Citations
R ARank
R CRank
1
University of California
6
335
10.1K
6.4K
2
University of Texas at Dallas
14
247
288
644
3
Massachusetts Institute of Technology
13
242
1.4K
2.3K
4
Northwestern University
10
238
2.0K
2.5K
5
Ames Research Center
2
200
634
346
6
Korea University
16
184
669
1.3K
7
Delft University of Technology
7
153
1.4K
1.5K
8
University of Illinois at Urbana–Champaign
13
151
1.2K
2.6K
9
University of Florida
10
148
3.0K
4.1K
10
Lawrence Berkeley National Laboratory
7
143
587
880
11
Osaka University
4
129
3.0K
2.2K
12
National Yang Ming Chiao Tung University
13
128
79
107
13
North Carolina State University
6
125
2.2K
2.5K
13
Carl Zeiss SMT
2
125
4
2
15
Kavli Institute of Nanoscience
5
123
66
96
16
Heriot-Watt University
1
119
2.1K
786
17
University of New Mexico
4
110
2.0K
2.0K
18
University of Minnesota
5
109
5.2K
5.2K
19
Cornell University
3
108
4.7K
4.0K
20
National Cheng Kung University
11
105
862
1.6K
21
Tokyo Institute of Technology
4
102
2.0K
1.6K
22
Intel
8
101
174
324
23
Columbia University
7
100
3.5K
4.6K
24
University of California, Santa Barbara
4
95
861
1.2K
25
Technische Universität Ilmenau
2
91
431
238
25
IBM Research
2
91
555
454
27
University of Texas at Austin
8
88
3.7K
5.4K
28
National Institute of Standards and Technology
7
84
716
1.1K
29
University of Twente
1
82
3.0K
1.6K
30
Harvard University
2
81
5.5K
4.3K
31
University of Michigan
6
75
5.1K
6.4K
32
Tohoku University
3
71
3.4K
2.8K
33
ASML Holding
1
70
41
19
34
University of Seoul
3
68
409
398
34
University of California, San Diego
4
68
2.9K
3.6K
36
National Center for Scientific Research
3
67
6.3K
5.4K
37
University of Tübingen
3
65
2.8K
2.9K
38
University of Maryland
5
63
4.3K
5.4K
39
University of Tokyo
6
62
4.4K
5.1K
39
Duke University
2
62
4.6K
3.8K
41
Arizona State University
4
61
3.4K
3.9K
42
Kyoto University
3
60
4.8K
4.1K
43
Appalachian State University
1
59
1.2K
502
44
American University of Beirut
1
56
2.5K
1.3K
45
Chung-Ang University
2
55
1.6K
1.3K
46
University of California, Berkeley
3
54
2.8K
3.5K
46
Jeonbuk National University
1
54
655
210
48
Stanford University
9
52
3.0K
6.1K
49
Ohio State University
5
51
4.9K
6.3K
50
KAIST
1
50
2.5K
1.7K
50
McMaster University
2
50
5.1K
4.5K
52
Pohang University of Science and Technology
1
48
1.4K
1.0K
53
University of the Witwatersrand
1
47
4.1K
2.3K
53
Tokyo University of Agriculture and Technology
3
47
1.0K
1.1K
55
University of New South Wales
1
46
8.2K
5.6K
56
Slovak Academy of Sciences
1
44
2.2K
1.4K
56
Wrocław University of Science and Technology
1
44
1.3K
710
58
Chinese Academy of Sciences
7
43
4.2K
5.5K
59
Sun Yat-sen University
2
42
4.1K
3.6K
59
University of Wisconsin–Madison
3
42
6.7K
7.1K
61
VTT Technical Research Centre of Finland
1
41
1.1K
842
62
University of Glasgow
4
40
3.2K
4.5K
62
Louisiana State University
1
40
5.3K
3.7K
64
University of Münster
1
39
4.0K
3.0K
64
Brookhaven National Laboratory
1
39
1.3K
1.1K
64
Helmholtz-Zentrum Dresden-Rossendorf
1
39
546
400
64
Tyndall National Institute
2
39
184
240
68
National Taiwan University
3
38
3.5K
3.9K
68
University of Cincinnati
3
38
3.0K
3.8K
68
Osaka Prefecture University
3
38
1.1K
1.2K
68
Hongik University
1
38
698
436
68
Auburn University
2
38
2.8K
2.7K
73
Hanyang University
5
37
1.5K
2.5K
73
University of Alabama
2
37
3.7K
3.7K
73
National Yang-Ming University
1
37
2.0K
1.6K
76
Eindhoven University of Technology
1
36
2.7K
2.2K
77
Carnegie Mellon University
1
35
3.7K
3.1K
77
University of Virginia
3
35
3.8K
4.7K
77
Université de Rouen
1
35
721
651
80
University of Jyväskylä
2
34
1.6K
1.9K
81
Utrecht University
1
33
6.2K
5.1K
81
RIKEN
6
33
522
1.2K
81
CEA Grenoble
1
33
197
259
84
Russian Academy of Sciences
1
32
5.8K
3.8K
85
École polytechnique fédérale de Lausanne
1
30
2.4K
2.2K
85
Royal Institute of Technology
1
30
3.1K
2.6K
85
Mary Immaculate College
1
30
107
73
88
University of Surrey
4
29
1.6K
3.1K
88
Polish Academy of Sciences
1
29
4.5K
3.5K
90
University of Buenos Aires
1
28
4.5K
2.8K
90
National University of Singapore
3
28
4.9K
6.1K
90
Colorado State University
1
28
4.7K
4.0K
90
Beckman Institute for Advanced Science and Technology
1
28
194
280
94
University of Wuppertal
4
27
335
796
95
University of Cambridge
3
26
5.9K
7.4K
95
Texas Instruments
3
26
161
249
95
Kyung Hee University
1
26
3.1K
2.5K
95
Instituto Potosino de Investigación Científica y Tecnológica
1
26
201
190
95
University of Tsukuba
4
26
2.5K
3.6K
95
University of Arkansas
1
26
3.5K
2.8K
95
Shinshu University
1
26
2.0K
1.5K
102
NEC
3
25
212
328
102
Chiang Mai University
1
25
2.3K
1.9K
102
University of Colorado Colorado Springs
1
25
230
227
105
Pennsylvania State University
5
24
4.5K
7.7K
105
University of Texas Southwestern Medical Center
1
24
3.4K
3.0K
107
Universität Hannover
1
23
718
743
107
University of Hyogo
2
23
805
879
109
University of Bergen
1
22
4.1K
3.9K
109
University of North Carolina
3
22
3.9K
5.9K
109
Japan Atomic Energy Agency
1
22
696
587
112
University of Liverpool
1
21
6.2K
5.5K
113
Aalborg University
1
20
2.9K
2.8K
113
Aarhus University
1
20
6.1K
5.6K
113
University of Kentucky
5
20
2.7K
5.6K
113
University of Southern Denmark
1
20
3.2K
3.2K
117
National Tsing Hua University
6
19
880
2.2K
117
Leiden University
1
19
4.3K
4.0K
117
City University of Hong Kong
2
19
2.5K
3.2K
117
Lam Research
1
19
47
53
117
University at Albany
3
19
721
1.7K
122
Peking University
2
18
4.3K
5.0K
122
Rensselaer Polytechnic Institute
1
18
2.4K
2.4K
122
Kyungpook National University
1
18
3.2K
2.9K
122
Newcastle University
1
18
5.4K
5.1K
122
Nagoya University
2
18
3.5K
3.9K
122
Dublin City University
1
18
1.7K
1.8K
122
INSYS
2
18
9
13
129
University of Edinburgh
2
17
5.9K
7.0K
129
Dow Corning
1
17
128
176
129
SVTC Technologies
1
17
4
3
132
Aalto University
1
16
2.0K
2.2K
132
Chonnam National University
2
16
1.6K
2.2K
132
Argonne National Laboratory
2
16
1.2K
1.8K
132
Helsinki University of Technology
1
16
1.2K
1.5K
132
I-Shou University
2
16
634
1.1K
132
Nagaoka University of Technology
1
16
851
721
138
Fudan University
1
15
5.3K
5.0K
138
Tokyo University of Science
2
15
1.5K
1.9K
138
University of Houston
3
15
2.5K
4.4K
138
FEI Company
1
15
61
107
138
Academia Sinica
3
15
2.1K
3.5K
143
Waseda University
1
14
3.0K
2.8K
143
Paul Scherrer Institute
2
14
724
1.2K
143
Nippon Telegraph and Telephone
2
14
351
493
146
Johannes Kepler University Linz
1
13
1.6K
1.8K
146
University of Duisburg-Essen
1
13
3.4K
3.7K
146
National Taiwan University of Science and Technology
2
13
1.0K
1.4K
146
Technical University of Braunschweig
1
13
2.0K
2.2K
146
Chulalongkorn University
2
13
2.1K
3.2K
146
Hokkaido University
2
13
4.0K
4.8K
146
Kyushu University
2
13
4.5K
5.3K
146
Tulane University
1
13
3.2K
3.5K
146
NTT Basic Research Laboratories
1
13
202
217
146
École Nationale Supérieure d'Ingénieurs de Caen
1
13
300
359
156
ETH Zürich
1
12
4.7K
5.3K
156
Princeton University
3
12
2.7K
4.7K
156
University of Canterbury
2
12
2.0K
3.3K
156
Swiss Federal Laboratories for Materials Science and Technology
1
12
240
402
156
Kaohsiung Medical University
1
12
1.8K
2.1K
156
Taipei Medical University
1
12
1.9K
2.1K
156
National Academy of Sciences of Ukraine
1
12
2.0K
1.9K
156
Mie University
1
12
1.5K
1.6K
156
NXP Semiconductors
1
12
142
166
156
National Kaohsiung University of Applied Sciences
1
12
433
497
156
Taipei Medical University Hospital
1
12
555
764
156
National Physical Laboratory
1
12
683
805
168
Sungkyunkwan University
1
11
4.3K
4.3K
168
Panasonic Corporation
1
11
166
170
168
United Microelectronics Corporation
2
11
18
34
168
Rutgers University
1
11
7.5K
7.6K
168
Tunghai University
1
11
720
952
168
Katholieke Universiteit Leuven
1
11
7.2K
7.5K
168
Nara Institute of Science and Technology
1
11
851
1.0K
168
Kyushu Institute of Technology
1
11
1.2K
1.3K
168
Axcelis Technologies
2
11
7
9
177
Technical University of Berlin
1
10
3.0K
3.6K
177
University of Göttingen
1
10
4.3K
4.9K
177
Technische Universität Darmstadt
1
10
2.4K
2.8K
177
Pukyong National University
1
10
1.3K
1.5K
177
University of Arkansas at Little Rock
1
10
568
888
177
Georgia Institute of Technology
2
10
3.4K
5.1K
177
State University of New York
2
10
4.9K
7.1K
177
University of Akron
1
10
2.0K
2.4K
177
Hochschule Harz
1
10
17
27
177
Virginia Commonwealth University
1
10
4.7K
5.1K
177
Wright-Patterson Air Force Base
1
10
656
896
188
Yeungnam University
1
9
2.0K
2.4K
188
University of Manchester
1
9
8.5K
8.8K
188
RWTH Aachen University
1
9
4.3K
4.9K
188
City University of New York
2
9
3.5K
5.4K
188
Stony Brook University
1
9
4.3K
5.1K
188
Beijing University of Technology
1
9
1.9K
1.9K
188
Mazandaran University of Medical Sciences
1
9
851
1.1K
195
Autonomous University of Barcelona
1
8
5.0K
5.6K
195
University of Notre Dame
1
8
3.9K
4.6K
195
New Jersey Institute of Technology
1
8
1.4K
1.9K
198
Tel Aviv University
1
7
7.0K
7.7K
198
Nagoya Institute of Technology
1
7
1.2K
1.4K
198
Shizuoka University
1
7
1.6K
1.9K
198
University of Catania
1
7
3.6K
4.4K
198
Technical University of Denmark
1
7
3.4K
4.3K
198
Chiba University
2
7
2.5K
3.8K
198
Rowan University
1
7
720
1.2K
198
Wright State University
1
7
1.9K
2.7K
198
National Chiayi University
1
7
677
1.0K
198
Ming Chi University of Technology
1
7
261
372
198
University of Tennessee
1
7
6.2K
7.1K
209
Lund University
1
6
6.9K
8.1K
209
Kookmin University
1
6
738
1.1K
209
Ajou University
1
6
1.6K
2.2K
209
Applied Materials
1
6
37
75
209
Feng Chia University
1
6
984
1.3K
209
Florida International University
1
6
3.6K
4.6K
209
University of Science and Technology Beijing
1
6
1.8K
2.0K
209
Warsaw University of Technology
1
6
1.8K
2.1K
209
Nottingham Trent University
1
6
1.9K
2.8K
209
Tianjin University
2
6
2.4K
3.4K
209
California NanoSystems Institute
1
6
169
376
220
National Sun Yat-sen University
1
5
1.8K
2.6K
220
National Chiao Tung University
1
5
2.0K
2.7K
220
Niels Bohr Institute
1
5
300
475
220
University of South Florida
1
5
5.8K
7.0K
220
Emory University
1
5
5.2K
6.4K
220
Florida State University
1
5
4.5K
5.7K
220
Bilkent University
1
5
1.2K
1.8K
220
North Carolina Agricultural and Technical State University
1
5
202
501
220
National High Magnetic Field Laboratory
1
5
315
502
229
Rutherford Appleton Laboratory
1
4
515
757
229
Los Alamos National Laboratory
1
4
2.0K
2.7K
229
University of Ulsan
1
4
1.8K
2.5K
229
Lawrence Livermore National Laboratory
1
4
1.5K
2.1K
229
Nanjing University
1
4
3.7K
4.7K
229
Chien Hsin University of Science and Technology
2
4
75
307
229
Japan Advanced Institute of Science and Technology
1
4
565
872
229
International Christian University
1
4
227
390
229
Georgia State University
1
4
3.4K
4.7K
238
West Virginia University
1
3
4.3K
6.0K
238
Heidelberg University
1
3
5.3K
6.8K
238
Oak Ridge National Laboratory
2
3
1.8K
3.2K
238
Freescale Semiconductor
1
3
43
100
238
Ghent University
1
3
6.5K
8.4K
238
State University of New York at Albany
1
3
956
1.6K
238
Synopsys
1
3
52
109
238
Montana Technological University
1
3
121
259
238
University of Michigan–Flint
1
3
264
625
238
Yuan Ze University
1
3
764
1.2K
238
Canon Inc.
1
3
122
204
249
Tsinghua University
1
2
5.3K
6.7K
249
Alcatel-Lucent
2
2
86
299
249
Chalmers University of Technology
1
2
2.8K
4.2K
249
University of California, Los Angeles
1
2
5.5K
7.6K
253
Vanderbilt University
1
1
5.2K
7.5K
253
IBM
1
1
857
1.5K
253
University of Washington
1
1
10.2K
13.0K
253
Kunsan National University
1
1
556
987
253
University of Regensburg
1
1
2.8K
4.3K
253
University of Bucharest
1
1
1.4K
2.3K
253
National University of Tainan
1
1
309
651
253
National Central University
2
1
1.4K
3.0K
253
University of Massachusetts
1
1
5.6K
8.1K
253
University of Salento
1
1
1.6K
2.8K
253
Tata Chemicals
1
1
1
12
253
Changchun Institute of Optics, Fine Mechanics and Physics
1
1
419
668
265
Moscow State University
1
0
3.8K
5.3K
265
Ewha Womans University
1
0
2.3K
4.0K
265
Kochi University of Technology
1
0
406
755
265
Hoseo University
1
0
509
986
265
National Taiwan Normal University
1
0
1.4K
2.7K
265
SLAC National Accelerator Laboratory
1
0
410
699
265
University of Illinois at Chicago
1
0
5.8K
8.7K
265
University of Madras
1
0
1.2K
2.1K
265
Rochester Institute of Technology
1
0
1.2K
2.6K
265
Autonomous University of San Luis Potosí
1
0
824
1.7K
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