Journal of Vacuum Science & Technology B

1.3(top 50%)

impact factor

2.2K(top 10%)

papers

32.6K(top 10%)

citations

60(top 10%)

h-index

1.3(top 50%)

extended IF

2.2K

all documents

33.3K

doc citations

103(top 10%)

g-index

Top Authors (by article citations)

#	Author	Articles	Citations	R ARank	R CRank
1	John Notte	2	248	1	1
1	Yuval Greenzweig	1	184	1	1
1	Shida Tan	1	184	1	1
4	Karl K Berggren	6	397	1	1
4	Huigao Duan	2	203	1	1
4	Sung-Wook Nam	3	195	1	2
4	Joel K W Yang	5	366	1	1
9	Y Q Fu	1	119	3	2
9	Jikui Luo	1	119	2	2
9	Andrea C Ferrari	1	119	5	8
9	Andrew Flewitt	1	119	3	2
13	Emile Van Veldhoven	1	116	1	1
14	Przemyslaw W Wachulak	1	96	3	1
15	M K Mondol	1	95	1	1
15	David C Bell	2	117	1	5
17	Porod Wolfgang	1	92	1	1
17	Patrick J Fay	2	142	1	1
17	Badri Tiwari	2	142	1	1
17	Gary H Bernstein	2	142	1	1
21	Marius Grundmann	9	176	1	3
21	Holger von Wenckstern	4	110	1	1
21	Michael Lorenz	8	164	1	3
24	Robert L Bruce	3	96	1	1
24	Gottlieb S Oehrlein	3	96	1	1
24	S U Engelmann	2	75	1	2
27	Jin Zou	1	48	12	14
27	John M Dell	1	48	2	3
27	Scott W Schmucker	1	48	1	1
27	Han Huang	1	48	2	3
27	Yueqin Wu	1	48	1	2
32	Mark A Wistey	1	47	2	2
33	Xiaomin Yang	1	45	1	3
34	Wei Wu	1	42	3	5
34	Francesco Ruffino	1	42	2	2
34	Fabrizio Roccaforte	1	42	4	4
34	Filippo Giannazzo	2	77	4	5
34	R Stanley Williams	1	42	7	10
39	Alica Rosová	1	40	1	1
39	Karol Frohlich	2	50	1	2
39	Milan Tapajna	1	40	1	1
42	Tianhong Cui	1	37	2	3
42	Dongjin Lee	1	37	2	2
44	Hiroshi Hiroshima	2	71	2	1
44	Allen Y Yi	1	36	1	3
46	Joshua Ryan Smith	1	35	1	1
46	Robert J Nemanich	1	35	2	3
48	Lars Montelius	1	34	2	4
48	Christelle N Prinz	1	34	1	3
48	Helmut Schift	1	34	1	1
48	Dmitry B Suyatin	1	34	1	2
48	Lars Samuelson	1	34	5	9
53	Cornelis W Hagen	2	31	1	5
53	Milos Toth	1	31	2	1
53	Patrice Gonon	1	31	1	1
56	Konstantins Jefimovs	1	30	2	4
56	Peter Fischer	1	30	2	6
56	Vincent Sallet	1	30	1	1
56	Julien Barjon	1	30	3	3
56	Roger T Bonnecaze	1	30	1	1
61	Karsten Henkel	2	35	1	2
61	Paulo C Lozano	1	29	1	1
63	Jun-ichi Shirakashi	1	28	1	2
63	Luca Lozzi	1	28	1	2
63	Can Bayram	2	39	3	2
63	Matthias Brandt	3	53	1	1
63	Ran Hao	1	28	1	2
63	Heon Lee	1	28	1	3
63	Juergen Schubert	1	28	5	6
63	Michael A Reshchikov	1	28	2	2
63	Ch Wenger	2	39	1	3
72	Hongqi Xu	1	27	3	6
72	Damien Thuau	1	27	1	1
72	Hsuan-Ching Lin	1	27	1	2
72	Yu-Hui He	1	27	1	1
72	Vasileios Koutsos	1	27	1	3
72	Paul R. Chalker	3	63	1	1
72	Rebecca Cheung	3	40	1	1
72	Jeong Young Park	1	27	1	7
72	Richard J Potter	1	27	1	2
72	Chung-Kwei Lin	1	27	2	2
72	Ted Liang	1	27	1	1
83	Eduardo Gracia-Espino	1	26	1	2
83	Morinobu Endo	1	26	11	13
83	Mauricio Terrones	1	26	6	16
83	Hiroyuki Muramatsu	1	26	2	5
83	Jing Kong	1	26	1	5
83	Jessica Campos-Delgado	1	26	2	4
83	Mario Hofmann	1	26	1	6
83	Yoong Ahm Kim	1	26	3	4
83	Xiaoting Jia	1	26	2	4
83	Seiji Samukawa	2	35	2	3
83	Takuya Hayashi	1	26	3	6
94	Heather Andrews	1	25	1	1
95	Jeong-Bong Lee	1	24	1	1
95	alok Rudra	1	24	1	2
95	Benjamin Dwir	1	24	1	2
95	Eli Kapon	1	24	1	3
95	Pascal Gallo	1	24	1	4
95	Krutarth Trivedi	1	24	1	2
101	Roland Wiesendanger	1	23	5	9
101	Chinnamuthan Periasamy	1	23	1	1
101	Maria C Salvadori	1	23	2	2
101	Jens Brede	1	23	1	2
101	Richard Forbes	1	23	1	2
101	Fernanda S Teixeira	1	23	2	2
101	Mathieu Linares	1	23	1	5
101	Alan E Rowan	1	23	2	9
101	Germar Hoffmann	1	23	1	3
101	Parthasarathi Chakrabarti	1	23	2	2
101	Ian Brown	1	23	2	2
112	Timothy D Sands	1	22	2	5
112	Kui Liu	1	22	1	1
112	Timothy S. Fisher	1	22	5	9
112	Charles M Marcus	1	22	4	7
112	Max C Lemme	4	76	1	4
112	Timothy S Fisher	1	22	3	6
118	Shin-Ichi Kanemaru	3	31	1	1
118	Soon-Ku Hong	3	47	1	1
118	Masayoshi Nagao	4	42	1	1
118	Vlado K Lazarov	1	21	1	3
118	Tomoya Yoshida	4	42	1	1
118	Karim Cherkaoui	2	41	2	4
118	Marc Zelsmann	1	21	2	3
118	Qingshun Bai	4	40	1	1
118	Scott Monaghan	1	21	3	6
118	Jung-Sub Wi	2	25	1	2
118	Masatomo Sumiya	2	35	1	1
118	Ivona Mitrovic	3	57	1	1
118	Bahman Raeissi	1	21	1	1
131	Masamichi Akazawa	1	20	1	1
131	Martin Möller	1	20	3	5
131	Matteo Palma	1	20	1	2
131	Jiangeng Xue	1	20	4	5
131	Susan B Sinnott	1	20	3	8
131	Hongjun Zeng	1	20	1	1
131	Jung-Hoon Song	1	20	1	2
131	Hyojin Kim	1	20	1	2
131	Dojin Kim	1	20	3	5
131	Choi, Hw	1	20	4	4
131	James C Hone	2	25	1	8
131	John A Carlisle	1	20	1	1
131	Jason D Myers	1	20	1	1
131	Ying Zheng	1	20	2	4
131	John Alexander	1	20	1	1
146	Armin Gölzhäuser	1	19	2	4
146	Christopher N Anderson	2	31	1	2
146	Byoung Hun Lee	1	19	3	4
146	Vincent Ch Lee	2	23	1	10
146	Andre Beyer	1	19	1	3
146	Rino Choi	1	19	4	3
146	Chadwin D Young	1	19	1	3
146	Andrey Turchanin	1	19	2	4
146	Muhammad Mustafa Hussain	1	19	1	1
146	Gustaaf Borghs	1	19	2	14
146	Stephen D Hersee	1	19	1	2
146	Liesbet Lagae	1	19	2	8
158	Joon-Hyung Lee	1	18	1	2
158	Markku Leskela	3	54	1	10
158	Stephen J Pearton	8	46	2	8
158	Hongzhong Liu	1	18	1	1
158	Aile Tamm	1	18	1	1
158	Cao Bingqiang	2	24	1	3
158	Helena Castán	2	36	1	1
158	H Castán	2	36	1	1
158	Kaupo Kukli	3	54	1	2
158	Mikko Ritala	3	54	1	9
158	Guoliang Liu	1	18	2	2
158	Yugang Duan	1	18	1	1
158	Shengxiang Ji	1	18	1	3
158	Hector Garcia	2	36	1	1
158	Erica A Douglas	1	18	2	2
158	Jaakko Niinistö	1	18	1	4
158	Bingqiang Cao	2	24	1	2
175	Bin Jiang	1	17	1	2
175	Domingo Garcia-Gutierrez	1	17	1	1
175	Peng Jiang	1	17	2	3
175	Andreas D Wieck	1	17	6	8
175	Davood Shahrjerdi	1	17	1	2
175	Jon F Ihlefeld	1	17	1	5
175	Alexander J Melville	1	17	1	3
175	Lane Martin	1	17	4	6
175	Darrell G Schlom	1	17	5	6
175	L J Brillson	3	39	1	2
175	Lothar Bischoff	1	17	1	2
175	Sanjay K Banerjee	1	17	1	2
175	R Ramesh	1	17	5	11
188	Narcís Mestres	2	31	1	3
188	Jordi Llobet	1	16	2	3
188	Anthony Peaker	1	16	3	2
188	Andrey Bakin	1	16	1	2
188	Francesc Perez-Murano	3	39	2	3
188	Xavier Borrisé	2	24	1	3
188	Smerino	3	27	1	1
188	Gemma Rius	2	31	2	3
196	Valeriy V Yashchuk	1	15	1	2
196	Jacson W Menezes	1	15	1	1
196	Janna - Douda	1	15	1	2
196	Ivan Prieto	1	15	2	3
196	Philippe Godignon	1	15	3	8
196	Luis Javier Martínez Rodríguez	1	15	2	3
196	Aristide Lemaitre	2	29	4	6
196	Wayne McKinney	1	15	1	2
196	Benito Alén	1	15	2	5
196	T V Torchynska	3	30	1	2
206	Mariona Coll	1	14	1	3
206	Isabelle Sagnes	1	14	7	9
206	Lambert Alff	1	14	1	2
206	Jörg Zimmermann	1	14	2	2
206	Paulo Felipe Jarschel	1	14	1	1
206	Kenneth A Goldberg	3	25	1	3
206	Felipe Vallini, Felipe Valini	2	27	1	1
206	Dun-Wen Zuo	1	14	1	2
206	Gilles Patriarche	2	25	3	7
206	Heinz von Seggern	1	14	3	6
216	Katsuhisa Murakami	3	29	1	1
216	Michael Mühlberger	1	13	2	2
216	Rainer Schöftner	1	13	2	2
216	Polychronis Tsipas	2	22	1	4
216	Oliver G Schmidt	1	13	8	17
216	Heinz Wanzenböck	1	13	1	1
216	Massimo Tallarida	1	13	2	1
216	Akinobu Teramoto	2	18	3	5
216	Tim J Echtermeyer	1	13	1	2
216	Marika Schleberger	1	13	2	3
216	Iacopo Mochi	2	18	1	2
216	Athanasios Dimoulas	2	22	2	7
228	Chao Wang	1	12	1	1
228	Nam-Hoon Kim	1	12	1	1
228	Rachid Sbiaa	1	12	4	3
228	Giovanni Bruno	1	12	2	8
228	Paul A Kohl	1	12	2	5
228	Devin K Brown	1	12	1	1
228	Masaki Tanemura	2	19	1	2
228	Matthias Schmidt	1	12	1	1
228	Marin Alexe	1	12	7	12
228	Seidikkurippu N Piramanayagam	1	12	4	4
228	Maria Losurdo	1	12	2	9
228	Henry Everitt	2	24	1	5
228	Jin-Woo Jeong	1	12	1	1
228	Francis Chi-Chung Ling	1	12	2	3
228	Leonidas E Ocola	1	12	2	4
228	Stephen Y Chou	1	12	2	2
228	Dietrich Hesse	1	12	1	4
247	Anne Henry	1	11	2	1
247	Alessandro Giussani	1	11	2	4
247	Erik Janzen	1	11	5	8
247	Tonmoy Chakraborty	1	11	1	2
247	Maria Pilar Segovia Cabrero	1	11	2	2
247	Luca Repetto	1	11	1	1
247	Beng Kang Tay	1	11	6	9
247	Cedrik Meier	1	11	1	1
247	Christoph Adelmann	2	11	2	6
247	Marlies Van Bael	1	11	2	6
247	Steven A Vitale	1	11	1	1
247	Maxime Darnon	1	11	1	1
247	Manijeh Razeghi	1	11	2	7
247	Enrico Mastropaolo	1	11	1	1
247	Francesco Buatier De Mongeot	1	11	1	5
247	Jorge A Kittl	2	11	3	7
247	Carsten Ronning	1	11	3	9
247	Enrique G Michel	1	11	2	3
265	Dumitru Luca	1	10	1	1
265	Marc Porti	4	16	1	2
265	Felicia Iacomi	1	10	1	2
265	Chris Sturm	2	16	1	3
265	Erwan Rauwel	1	10	1	5
265	Nicoleta Iftimie	1	10	1	1
265	Gerard Ghibaudo	4	24	2	7
265	Harutaka Mekaru	2	19	1	2
265	Romuald B Beck	1	10	1	1
265	Raphael Clerc	1	10	1	2
265	Ivan Kostic ̌	2	16	1	1
265	Xavier Aymerich	3	15	2	5
265	Robert Mroczyński	1	10	1	1
265	Mihaela Girtan	1	10	1	3
265	Tetyana Nychyporuk	1	10	1	2
265	Igor Matko	1	10	1	3
265	Montserrat Nafria	3	15	2	5
265	Rüdiger Schmidt-Grund	2	16	1	2
265	Nicola Pinna	1	10	2	12
265	Nicolas Grandjean	1	10	8	11
265	Jan Kuzmik	1	10	2	7
265	Mario Lanza	1	10	1	3
265	Diana Mardare	1	10	1	1
289	Yerassimos Panayiotatos	1	9	2	3
289	Harry J Whitlow	2	14	2	3
289	Nicholas X. Fang	1	9	1	6
289	Yuerui Lu	1	9	1	1
289	Butsurin Jinnai	1	9	1	2
289	G-L Luo	1	9	1	1
289	Alexander N Cartwright	1	9	1	5
289	Bryan D Huey	1	9	1	3
289	Gerhard Hobler	1	9	2	2
289	Sergey Gorelick	2	14	2	2
289	Sun Ung Kim	1	9	1	1
289	Takashi Ichii	2	16	1	2
289	Hiroyuki Sugimura	2	16	1	3
289	Chao-Hsin Chien	1	9	2	2
289	Kuniaki Murase	2	16	2	3
289	Rainer Hainberger	1	9	1	2
289	Vladimir Kolarik	1	9	1	1
289	Yao Feng Chang	1	9	1	2
289	Majid Tabbakhian	1	9	1	1
289	M El Kodadi	1	9	1	1
289	Timo Sajavaara	2	14	1	5
289	Ohmyoung Kwon	1	9	1	3
289	Sookyung Choi	1	9	1	2
312	Theo Siegrist	1	8	1	1
312	Ekkard Brinksmeier	1	8	3	6
312	Li-Chyong Chen	1	8	4	17
312	Jun Chen	1	8	2	4
312	Fei Liu	1	8	1	2
312	Takashi Toyofuku	2	12	1	2
312	Jia-Yush Yen	1	8	1	4
312	Olivier Aubry	1	8	1	3
312	David Mecerreyes	1	8	2	8
312	Lucia Romano	1	8	1	2
312	Chang Kwon Hwangbo	1	8	1	5
312	K-H Chen	1	8	4	17
312	Sun-Kyu Lee	1	8	1	3
326	Xin-Ping Qu	1	7	3	6
326	Ching-Ting Lee	1	7	2	8
326	Jun Nakamura	2	10	2	2
326	José Ortega	1	7	3	5
326	Seung-Beck Lee	1	7	1	2
326	Mathias Rommel	1	7	2	2
326	Jaegab Lee	1	7	1	3
326	Yasuhiko Hayashi	1	7	2	9
326	Yoshiaki Nakamura	1	7	2	3
326	Ole Hansen	1	7	3	7
326	Sohrab Ismail-Beigi	1	7	2	3
326	Hikaru Sano	1	7	1	4
326	Ryuji Katayama	1	7	1	1
326	Frederick J Walker	1	7	1	5
326	Kentaro Watanabe	1	7	1	1
326	Yan Yongda	4	11	1	4
326	Raphael Ramos	1	7	2	2
326	M Yusop	1	7	1	3
326	I Chorkendorff	1	7	2	8
326	David Andelman	1	7	2	6
326	Guido Groeseneken	2	10	4	8
326	Matthias Schaller	1	7	1	1
349	Paul J Simmonds	1	6	1	1
349	Fang Fang	1	6	1	2
349	Dazhi Sun	1	6	2	6
349	Bogusława Adamowicz	1	6	1	3
349	Gengmin Zhang	1	6	1	2
349	Jing Li	1	6	1	1
349	CChristopher Klepper	1	6	1	1
349	Stephen Matthew Lyth	1	6	1	4
349	Hung-Jue Sue	1	6	4	13
349	S Ravi P Silva	1	6	6	13
349	Katia Vutova	1	6	1	1
349	Ian Farrer	1	6	4	6
349	Ronald N Zuckermann	1	6	1	4
349	Stuart Holmes	1	6	2	3
349	Alexandra Joshi-Imre	1	6	1	5
349	Jeffrey Bokor	1	6	3	6
349	Alina Domanowska	1	6	1	1
349	Bo Gao	1	6	1	2
349	Jungwoo Lee	1	6	1	2
349	Takeshi Yoshimura	1	6	2	6
349	Andreas Markwitz	1	6	1	5
349	Michael Buettner	1	6	2	3
349	Bogdan Majkusiak	1	6	1	2
349	Norifumi Fujimura	1	6	2	3
349	David A Ritchie	1	6	8	15
349	Fengyuan Lu	1	6	1	3
349	Derrick C Mancini	1	6	1	1
349	Xing Cheng	2	9	1	3
349	Michael Pepper	1	6	2	3
349	Marya Lieberman	1	6	1	1
349	Jianwei Miao	1	6	1	3
349	M Pepper	1	6	3	5
349	G P Peterson	1	6	1	1
382	Qingliang Zhao	1	5	1	5
382	Zurong Qiu	1	5	1	1
382	Bartłomiej Cichy	1	5	1	1
382	Sy-Hann Chen	1	5	1	3
382	Michael Molinari	1	5	1	4
382	Ting Xu	1	5	1	3
382	Kunihiro Inomata	1	5	1	1
382	Hiro Tanaka	1	5	1	2
382	Xinghua Li	1	5	1	1
382	Emre Gür	1	5	1	6
382	Christopher K Ober	1	5	6	13
382	Michael O Thompson	1	5	1	2
382	Lucel Sirghi	1	5	2	8
382	Kadem Meral	1	5	1	3
382	Gavin R Bell	1	5	1	2
382	Tadaaki Nagao	1	5	1	2
382	Olivier M Rossier	1	5	1	2
382	Bertrand Vilquin	1	5	1	3
382	Scott A Trammell	1	5	2	3
382	John Kennedy	1	5	1	4
382	Abdallah Ougazzaden	1	5	2	2
382	Yoji Shibutani	1	5	1	2
382	Mario El Kazzi	1	5	1	3
382	Clement Merckling	1	5	3	3
382	Ching-Fuh Lin	2	10	1	9
382	Damien McGrouther	1	5	1	3
382	Chris H Clifford	1	5	1	1
382	Yi-Hao Chen	1	5	1	2
411	Nobuhiko Kobayashi	2	4	1	2
411	Takahiro Mori	1	4	1	2
411	Koji Ishibashi	1	4	2	3
411	Po-Hsun Huang	1	4	1	2
411	Nobuhiko P Kobayashi	2	4	1	4
411	Sailing He	1	4	12	20
411	Tobias Erlbacher	1	4	1	2
411	Hyun-Mi Kim	1	4	1	3
411	Seoung Gil Yoon	2	4	2	7
411	Audrey Berrier	1	4	1	3
411	Dong-Weon Lee	1	4	2	3
411	Julien Reboud	1	4	1	1
411	Michael Horn-von Hoegen	1	4	4	8
411	Hiroyuki Ishii	1	4	1	3
411	Giriraj Jnawali	1	4	1	3
411	Yosi Shacham-Diamand	1	4	3	13
411	Yasushi Takemura	1	4	1	4
411	Srinivasan Anand	1	4	1	3
430	Denis Flandre	1	3	3	9
430	Danilo Mustafa	1	3	1	1
430	J Emyr Macdonald	1	3	1	3
430	Gvidas Astromskas	1	3	1	1
430	M Serdar Onses	1	3	1	1
430	Annette Foelske	1	3	1	3
430	Ioannis Kymissis	1	3	1	4
430	Celestino Padeste	1	3	1	2
430	Gregory L Snider	1	3	1	1
430	Jianming Xue	2	5	2	7
430	Astushi Takahara	1	3	5	16
430	Reine L Wallenberg	1	3	1	4
430	Lars-Erik Wernersson	1	3	2	8
430	Leandro R Tessler	1	3	1	1
430	Walter R L Lambrecht	1	3	2	2
430	Jaewon Park	1	3	1	4
430	Keiji Takata	1	3	1	2
430	An-Ya Lo	1	3	1	4
430	Alberto Modelli	1	3	1	7
430	Arum R Han	1	3	2	6
430	Martin Elliott	1	3	1	2
430	Yoshiharu Enta	1	3	1	4
430	Chih-Chiang Weng	1	3	1	3
430	Yanwen Zhang	1	3	3	9
430	Michel Houssa	1	3	6	7
430	Alexei O Orlov	1	3	1	1
430	Ilya Sychugov	1	3	1	3
458	Tsutomu Minegishi	1	2	3	4
458	Robert M Wallace	1	2	5	9
458	Xue-lin Wang	1	2	1	3
458	Hui Tong Chua	1	2	1	1
458	Heli Jantunen	1	2	4	13
458	Yulia Karnet	1	2	1	1
458	Rungrueang Phatthanakun	1	2	1	1
458	Arthur Tay	1	2	1	6
458	Ines Pereyra	1	2	1	2
458	Chang-Chun Lee	2	2	1	3
458	Yee Cheong Lam	1	2	5	13
458	Steve Patitsas	1	2	1	1
458	Alessandro Paccagnella	3	4	2	7
458	Taiyong Wang	1	2	2	1
458	George Goussetis	1	2	1	2
458	Montree Sawangphruk	1	2	1	1
458	Nader Vahdati	2	2	2	3
458	Adisorn Tuantranont	1	2	3	9
477	Javier Martin	1	1	3	5
477	Robert W Pitz	1	1	3	3
477	Andrea Cester	1	1	1	1
477	Shih-Yen Lin	1	1	1	5
477	Jen-Inn Chyi	1	1	3	7
477	Esteve Amat	1	1	3	5
477	Harry A Atwater	1	1	4	6
477	Valeriu Filip	1	1	2	4
477	Meng-Chyi Wu	2	1	1	3
477	Jenshan Lin	1	1	3	8
477	Subramanian Krv	1	1	1	1
477	Xiankai Sun	1	1	3	4
477	Ion C Fulga	1	1	1	1
477	Ivan I Kravchenko	1	1	1	2
477	Hei Wong	1	1	2	4
477	Michael L Schuette	1	1	1	1
493	Pieter Kruit	1	0	1	3
493	Kyung-Jin Lee	1	0	4	11
493	Francesca Campabadal	1	0	2	4
493	Marco Mv Valenti	1	0	1	0
493	Mohammad Yeakub Ali	1	0	2	3
493	Richard Mirin	1	0	1	5
493	Valeriy Sukharev	1	0	2	3
493	Huikai Xie	1	0	1	5
493	Shengbai Zhang	1	0	2	5
493	Seiya Kasai	1	0	1	4
493	Joan Marc Rafí	1	0	3	5

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