Journal of Vacuum Science & Technology B

1.3(top 50%)

impact factor

2.2K(top 10%)

papers

32.6K(top 10%)

citations

60(top 10%)

h-index

1.3(top 50%)

extended IF

2.2K

all documents

33.3K

doc citations

103(top 10%)

g-index

Top Authors (by articles)

#	Author	Articles	Citations	R ARank	R CRank
1	Stephen J Pearton	11	141	3	4
2	Seoung Gil Yoon	5	75	2	3
3	Stella Pang	4	80	1	2
3	Gottlieb S Oehrlein	4	126	1	1
3	Salvatore Mirabella	4	21	2	4
3	Max C Lemme	4	41	1	3
3	Hideki Hasegawa	4	115	1	1
8	Alexander Y Polyakov	3	46	1	3
8	Akinori Saeki	3	138	1	2
8	Valeriu Filip	3	17	1	2
8	Edward T Yu	3	63	1	3
8	S Ravi P Silva	3	33	2	9
8	Shin-Ichi Kanemaru	3	22	1	1
8	J Alexander Liddle	3	110	1	2
8	Enrico Napolitani	3	14	3	5
8	Nikolai B Smirnov	3	46	1	2
8	Arunava Majumdar	3	261	1	1
18	David Eon	2	64	1	1
18	Li-Chyong Chen	2	28	4	14
18	Wei Wu	2	13	1	3
18	William Alan Doolittle	2	33	1	3
18	Stephen P Obrien	2	74	1	9
18	Damiano Giubertoni	2	8	3	5
18	Anders S Kristensen	2	42	1	5
18	Kazuhito Tsukagoshi	2	22	3	5
18	Filippo Giannazzo	2	8	2	5
18	Andreas Fissel	2	52	2	3
18	Chien-Te Hsieh	2	50	1	1
18	Gary W Rubloff	2	27	1	3
18	Masayoshi Nagao	2	22	1	1
18	Yordan M Georgiev	2	17	1	1
18	Sung Bo Lee	2	2	1	5
18	Fabian Dortu	2	22	1	1
18	Maximo Lopez-Lopez	2	6	1	3
18	Takashi Hanada	2	19	1	3
18	Kazumasa Okamoto	2	120	2	2
18	Andrew Wee	2	44	4	11
18	Jens Bolten	2	17	1	1
18	Jenshan Lin	2	15	2	5
18	Chang-Soo Kim	2	18	1	4
18	K-H Chen	2	28	4	14
18	Christophe Cardinaud	2	37	1	2
18	Pagona Papakonstantinou	2	229	1	1
18	Se-Jin Yook	2	55	1	1
18	Soon Cheol Hong	2	17	2	1
18	Takatoshi Yamada	2	19	1	2
18	José Alexandre Diniz	2	11	1	1
18	Roger Loo	2	22	3	6
18	Kyeongtae Kim	2	63	1	1
18	Hidenori Mimura	2	27	1	1
18	Ohmyoung Kwon	2	63	1	1
18	Wen-Li Wu	2	68	1	1
18	Hei Wong	2	24	1	4
18	Christof Asbach	2	55	1	1
56	Frank E Kruis	1	15	1	1
56	Husam Niman Alshareef	1	0	3	6
56	Taketomo Sato	1	55	1	1
56	Silvia Rubini	1	3	3	6
56	M Pinar Menguc	1	33	1	1
56	Jaroslaw Z Domagala	1	29	2	2
56	Paul S Weiss	1	9	3	6
56	José A Aumentado	1	18	1	3
56	Joon-Hyung Lee	1	25	4	6
56	Giovanni Bruno	1	8	5	8
56	Monika Fleischer	1	6	1	1
56	Jabez J Mcclelland	1	15	2	3
56	Britta Jones	1	20	1	1
56	Massimo Fischetti	1	1	2	4
56	Katsuhisa Murakami	1	9	1	1
56	Brian A Lail	1	3	1	3
56	Lincoln J Lauhon	1	36	3	4
56	Li Tao	1	32	1	1
56	Jiro Nishinaga	1	10	1	1
56	Kai Henrik Nordlund	1	2	4	16
56	MA Barakat	1	39	1	2
56	Maria Aboy	1	6	1	4
56	Mark A Reed	1	30	3	6
56	Nathan A Moody	1	12	1	3
56	Devin K Brown	1	37	1	1
56	Hidetaka Shimawaki	1	21	1	1
56	Ichitaro Saito	1	7	1	1
56	Esteban Cruz-Hernandez	1	1	1	3
56	Thomas Gerber	1	8	2	3
56	Panagiotis Argitis	1	27	3	2
56	Randall Feenstra	1	43	1	2
56	Irina A Buyanova	1	15	4	4
56	Ching Lien Hsiao	1	22	2	3
56	Min Kyu Yang	1	45	1	1
56	Alexander A Shklyaev	1	5	1	2
56	Lucian D Filip	1	10	1	1
56	Paul H Mayrhofer	1	48	3	7
56	Karl K Berggren	1	19	1	5
56	Tsang-Lang Lin	1	8	2	2
56	Emanuele Pelucchi	1	3	3	7
56	Kurt Moen	1	3	1	1
56	Roger J Reeves	1	5	1	2
56	Shi-Dong Liang	1	9	2	3
56	Yifu Ding	1	22	1	2
56	Massimo Tormen	1	5	1	7
56	Mathis Riehle	1	5	4	6
56	Jen-Inn Chyi	1	0	3	6
56	Jinho Ahn	1	11	2	3
56	Masumi Yamaguchi	1	1	2	4
56	Araiza, J J	1	14	1	1
56	Yasuo Koide	1	14	2	3
56	Hartmut Wiggers	1	15	1	3
56	Chris Jacobsen	1	9	2	6
56	Michael V Lee	1	4	1	3
56	William P King	1	24	2	7
56	Reuel Liebert	1	7	1	1
56	Kevin L Jensen	1	12	2	3
56	Riikka L Puurunen	1	41	1	1
56	Vivek M Prabhu	1	8	1	5
56	Franz X Kärtner	1	18	2	3
56	Alfred J Crosby	1	16	1	6
56	Chia-Liang Sun	1	9	2	3
56	Jun Nakamura	1	9	2	3
56	Jeramy D Zimmerman	1	4	2	2
56	Luiz G Jacobsohn	1	14	2	3
56	Andreas Erdmann	1	3	2	1
56	André Vantomme	1	12	4	7
56	Meyya Meyyappan	1	198	3	2
56	Fan Ren	1	8	5	6
56	Wolfgang Donner	1	8	1	2
56	Hisao Makino	1	16	4	7
56	Joseph G Tischler	1	7	2	2
56	Stephen Matthew Lyth	1	6	1	2
56	Beomjoon Kim	1	9	1	3
56	M Jamal Deen	1	24	2	3
56	Sy-Hann Chen	1	7	1	1
56	Loretta L L Del Mercato	1	1	1	3
56	Andreas D Wieck	1	0	8	13
56	Klaus Bade	1	26	1	1
56	Kenneth A Goldberg	1	28	1	1
56	Clivia M Sotomayor Torres	1	21	1	7
56	Gregory N Parsons	1	4	2	2
56	Takahiro Kozawa	1	96	2	2
56	Izabella Grzegory	1	29	6	3
56	Y-L Chueh	1	23	2	5
56	Wensyang Hsu	1	7	1	4
56	Anne Charrier	1	6	1	2
56	Axel Lorke	1	15	3	4
56	Radik Mulyukov	1	7	1	2
56	Luana Persano	1	10	2	7
56	Ahmad M Mohammad	1	62	1	2
56	Heinz Wanzenböck	1	14	1	1
56	Karen J Kirkby	1	4	3	3
56	David Ferry	1	2	4	6
56	Cornelis W Hagen	1	19	1	1
56	Dhiren Kataria	1	4	2	2
56	Kenji Godo	1	3	1	1
56	Teng Qiu	1	1	4	8
56	Ru-Shi Liu	1	0	6	20
56	Dennis W Prather	1	1	1	2
56	Xiangang Luo	1	4	1	1
56	Apparao M Rao	1	33	2	3
56	Kijung Yong	1	56	1	2
56	Julita Smalc-Koziorowska	1	29	1	1
56	Rm Gwilliam	1	4	3	7
56	Alexei V Tivanski	1	12	1	1
56	Xuegong Deng	1	2	2	4
56	Aidong Shen	1	2	3	3
56	Cormac Corr	1	35	1	1
56	Brian Gorman	1	8	2	3
56	Evangelos Gogolides	1	27	2	4
56	Christopher L Soles	1	22	1	2
56	Amir Khajepour	1	2	1	6
56	Sarbajit Banerjee	1	62	1	5
56	Marek Skowronski	1	2	6	11
56	Sergio J Jiménez-Sandoval	1	5	3	7
56	Soon-Ku Hong	1	3	2	7
56	Antonio Della Torre	1	1	1	3
56	In-Sung Park	1	11	2	2
56	Jonathan Cooper	1	3	2	11
56	Marcin Siekacz	1	29	3	2
56	Andreas Ney	1	9	2	4
56	Brian Bennett	1	10	1	3
56	Matthew J Goeckner	1	32	2	1
56	Seungbum Hong	1	6	3	5
56	Chang-Zhi Gu	1	3	1	4
56	David J Lockwood	1	17	3	6
56	Karen L Kavanagh	1	19	2	5
56	Alon Hoffman	1	5	4	6
56	Susanne Stemmer	1	42	3	5
56	Seetharaman Ramachandran	1	32	1	1
56	Mohammad S M Saifullah	1	14	1	1
56	Falco C M J M Van Delft	1	2	1	1
56	Jin-Pyo Hong	1	3	1	2
56	Nikolaj Gadegaard	1	5	4	8
56	Srinivasan Mp	1	2	2	5
56	Matteo Cocuzza	1	78	1	1
56	Shiv Shankar Sangaru	1	1	1	1
56	Hiromitsu Kato	1	12	2	5
56	Miguel Angel Vidal Borbolla	1	5	1	2
56	David A B Miller	1	4	2	7
56	Roberto C Myers	1	9	3	5
56	Yiping Zhao	1	9	2	11
56	Won Jong Yoo	1	11	4	4
56	Cedrik Meier	1	15	2	5
56	Christopher K Ober	1	35	4	10
56	Haeyeon Yang	1	6	1	1
56	Sanjay Krishna	1	28	5	7
56	Yang Zhao	1	198	1	1
56	Niels de Jonge	1	15	1	3
56	Peter Bøggild	1	32	3	4
56	Jeong-Bong Lee	1	3	2	4
56	Francesc Perez-Murano	1	11	3	6
56	Eleanor Campbell	1	10	3	10
56	Byoung-Gon Yu	1	35	1	3
56	Lin Hsiu Fen	1	21	1	1
56	Czeslaw Skierbiszewski	1	29	3	2
56	Rajesh Menon	1	9	2	3
56	James Butler	1	32	2	2
56	Robert J Wild	1	2	1	1
56	Zenglin Wang	1	21	1	2
56	Ali Bahari	1	20	1	2
56	Christoph Stampfer	1	26	5	6
56	Tim J Echtermeyer	1	11	1	3
56	Luca Businaro	1	5	1	5
56	Brad R Weiner	1	14	1	1
56	Lifeng Dong	1	3	2	2
56	Paul Chu	1	1	18	33
56	Jihyun Kim	1	15	1	2
56	Seth Bank	1	8	2	3
56	Shi-Jin Ding	1	11	1	2
56	Charles Tu	1	9	2	3
56	Maxime Darnon	1	37	1	1
56	Tomoya Yoshida	1	7	1	1
56	Weimin M Chen	1	15	5	4
56	Nikolaos E Vourdas	1	27	1	2
56	Xavier Borrisé	1	11	1	1
56	Nae-Eung Lee	1	11	2	3
56	Mark Freeman	1	4	1	4
56	Hisato Yamaguchi	1	7	2	3
56	Kjeld Pedersen	1	20	1	1
56	Francesc Alzina	1	3	1	2
56	Choi, Hw	1	16	1	3
56	Susan E Trolier-Mckinstry	1	9	5	8
56	Simona Maria Cristina Boninelli	1	7	3	3
56	Paul C Mcintyre	1	7	2	2
56	Marc Zelsmann	1	21	1	2
56	Mark Ming-Cheng Cheng	1	3	2	7
56	Jürgen Brugger	1	4	2	6
56	Donna Stokes	1	3	1	3
56	Christian Mitterer	1	48	3	10
56	David Cumming	1	3	1	5
56	Khaled Ahmed	1	2	1	2
56	Maria Losurdo	1	8	5	8
56	Daniel B Turner-Evans	1	30	1	1
56	Alessandro Benedetti	1	90	2	3
56	James C Hone	1	12	3	6
56	Takahiro Matsumoto	1	21	2	2
56	Chang-Koo Kim	1	6	1	1
56	Jeong Young Park	1	50	1	5
56	Amiran Bibilashvili	1	15	1	1
56	Avtandil Tavkhelidze	1	15	1	1
56	Leonid Bolotov	1	18	1	1
56	Hong Lu	1	2	3	3
56	Teri W Odom	1	36	1	5
56	C K Inoki	1	60	1	1
56	Gehan A J Amaratunga	1	7	1	1
56	Jaehyun Moon, 문제현	1	2	2	4
56	Subramanian Krv	1	14	1	1
56	Cheng Luo	1	9	1	4
56	Kouichi Akahane	1	6	3	4
56	Peter J Heard	1	12	1	6
56	Bruce W Wessels	1	28	2	2
56	Zhi Liu	1	14	2	2
56	Young-Je Kwark	1	35	1	1
56	Jin-Seong Park	1	20	1	1
56	Yu-Fen Chang	1	11	1	2
56	Saifullah Idris	1	14	1	2
56	Luis A Marqués	1	6	2	4
56	Mircea D Guina	1	0	3	6
56	Mark A Wistey	1	8	3	5
56	Anthony Linden	1	26	10	9
56	Oscar Vazquez Mena	1	4	1	1
56	Jinjun Feng	1	5	1	1
56	Jung-Sub Wi	1	9	1	1
56	Werner J Blau	1	28	6	14
56	Chin-Lung Cheng	1	10	1	3
56	So-Jung Yoon	1	35	1	3
56	Johnson K Efavi	1	11	2	5
56	Mark D Losego	1	6	1	1
56	David A Ritchie	1	18	7	13
56	Pedro López Martín	1	6	1	3
56	Katayun Barmak	1	109	1	1
56	Takashi Matsukawa	1	0	2	5
56	Peter L G Ventzek	1	3	1	1
56	Milton Feng	1	3	1	1
56	Scott T Dunham	1	12	1	1
56	Yahachi Saito	1	1	2	5
56	R Stanley Williams	1	6	5	6
56	Marina Voronova	1	32	2	2
56	Josh D Caldwell	1	10	4	3
56	Luc Stafford	1	25	3	2
56	Pawel Prystawko	1	29	3	2
56	Michael Spencer	1	26	1	2
56	Liwen Yang	1	1	2	2
56	Marco Lazzarino	1	3	1	6
56	Vlad Stolojan	1	17	2	4
56	O'Faolain Liam	1	19	2	5
56	Biswarup Satpati	1	1	3	11
56	Patrick J Fay	1	11	1	2
56	Hyunjung Shin	1	6	1	6
56	Seiya Kasai	1	11	1	3
56	Meiyong Liao	1	14	3	4
56	Kuei-Shu Chang-Liao	1	10	2	4
56	Shin-ichiro Gozu	1	6	3	3
56	Ki-Bum Kim	1	9	3	3
56	Jorge A Kittl	1	3	4	4
56	Darren M Bagnall	1	27	1	2
56	Sen-Yeu Yang	1	19	1	2
56	Fabrice Piazza	1	14	2	3
56	Soonil Lee	1	3	1	2
56	Hilmi Volkan Demir	1	4	1	2
56	Stephen R Leone	1	12	1	3
56	Martin Albrecht	1	29	4	5
56	Bryan D Vogt	1	8	2	6
56	Jing Wang	1	32	2	3
56	Meishoku Masahara	1	0	3	5
56	Jihoon Choi	1	15	3	1
56	Hyeongtag Jeon	1	15	3	2
56	Chien-Liang Lee	1	0	2	6
56	Hans M Hertz	1	8	1	2
56	Yue Kuo	1	17	3	6
56	Jiyoung Kim	1	6	1	2
56	Rosaria Rinaldi	1	1	1	5
56	El-Mostafa Bourim	1	1	1	4
56	Jae Hyun Kim	1	5	2	3
56	Tanemasa Asano	1	7	2	2
56	Hong Yee Low	1	4	3	7
56	Vaithiyalingam Shutthanandan	1	16	4	5
56	Daniel den Engelsen	1	4	2	4
56	Steven Durbin	1	5	2	2
56	Limin Huang	1	62	2	5
56	Arun Persaud	1	10	1	4
56	Young-min Kim	1	0	1	3
56	Joel K W Yang	1	19	1	4
56	Dale R Harshman	1	7	1	1
56	L J Brillson	1	14	2	2
56	Ching Ping Wong	1	24	4	17
56	Jose Alvarez	1	14	2	3
56	Elisa Mele	1	10	2	8
56	Grzegorz Cywinski	1	29	2	1
56	Marzia Quaglio	1	12	1	2
56	soo-hyun Kim	1	1	1	3
56	Sean M Casey	1	4	1	1
56	Dario Pisignano	1	10	3	10
56	Ching-Fuh Lin	1	27	1	2
56	Akira Saito	1	51	2	1
56	Mykola O Semenenko	1	12	1	2
56	Joel L Plawsky	1	5	1	2
56	Kungen Teii	1	10	1	2
56	Maria Tchernycheva	1	29	5	6
56	Emmerich Bertagnolli	1	14	1	1
56	James Davis	1	6	2	8
56	Thomas F Krauss	1	19	4	5
56	Takayuki Hoshino	1	14	1	2
56	Aaron Stein	1	0	1	0
56	Stephane Evoy	1	3	2	5
56	Songphol Kanjanachuchai	1	9	1	2
56	Stuart Parkin	1	9	6	9
56	Anton Barty	1	28	1	3
56	Gerardo Morell	1	14	3	3
56	Edwin P Chan	1	16	1	3
56	Chris J Palmstrøm	1	2	2	6
56	Leonidas E Ocola	1	94	2	1
56	Candido Fabrizio Pirri	1	78	1	1
56	Ivan I Kravchenko	1	13	2	2
56	Yong-Chae Chung	1	11	3	9
56	Lon A Wang	1	19	1	1
56	Erion Gjonaj	1	25	1	1
56	George Barbastathis	1	21	1	1
56	Janusz Murakowski	1	1	1	2
56	Yukiharu Uraoka	1	18	2	3
56	Xin Hu	1	12	1	1
56	Kishore Uppireddi	1	14	1	1
56	Dong-Ki Min	1	6	1	2
56	Sungdong Kim	1	6	1	1
56	Rohit Khanna	1	13	2	2
56	C Grant Willson	1	77	1	1
56	Yaser M Haddara	1	9	1	1
56	Bahgat G Sammakia	1	4	1	1
56	Paul K Chu	1	1	13	24
56	O Marinov	1	24	1	1
56	Hyun Wook Ro	1	22	1	1
56	Kazumasa Hiramatsu	1	1	2	4
56	Sang-Joon Park	1	48	1	1
56	Eric K Lin	1	8	1	9
56	Lin Zhu	1	7	2	4
56	Deepanjan Datta	1	2	1	1
56	L A Coldren	1	2	1	2
56	John A Notte	1	363	1	1
56	Merritt P Miller	1	4	1	1
56	Jeffrey W Baldwin	1	32	2	3

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Journal of Vacuum Science & Technology B

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