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exaly
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Journals
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Journal of Vacuum Science & Technology B
›
top-articles
Journal of Vacuum Science & Technology B
1.3
(top 50%)
impact factor
2.2K
(top 10%)
papers
32.6K
(top 10%)
citations
60
(top 10%)
h
-index
1.3
(top 50%)
impact factor
2.2K
all documents
33.3K
doc citations
103
(top 10%)
g
-index
Top Articles
#
Title
Journal
Year
Citations
1
Mechanical properties of suspended graphene sheets
Journal of Vacuum Science & Technology B
2007
996
2
Gas-assisted focused electron beam and ion beam processing and fabrication
Journal of Vacuum Science & Technology B
2008
883
3
Nanoimprint lithography: An old story in modern times? A review
Journal of Vacuum Science & Technology B
2008
639
4
Helium ion microscope: A new tool for nanoscale microscopy and metrology
Journal of Vacuum Science & Technology B
2006
363
5
Extreme ultraviolet lithography: A review
Journal of Vacuum Science & Technology B
2007
304
6
Raman study of multiwalled carbon nanotubes functionalized with oxygen groups
Journal of Vacuum Science & Technology B
2006
220
7
Interfacial energy and strength of multiwalled-carbon-nanotube-based dry adhesive
Journal of Vacuum Science & Technology B
2006
198
8
Subsurface damage from helium ions as a function of dose, beam energy, and dose rate
Journal of Vacuum Science & Technology B
2009
184
9
Using high-contrast salty development of hydrogen silsesquioxane for sub-10-nm half-pitch lithography
Journal of Vacuum Science & Technology B
2007
167
10
Understanding of hydrogen silsesquioxane electron resist for sub-5-nm-half-pitch lithography
Journal of Vacuum Science & Technology B
2009
148
11
Acid distribution in chemically amplified extreme ultraviolet resist
Journal of Vacuum Science & Technology B
2007
141
12
Acid generation efficiency in a model system of chemically amplified extreme ultraviolet resist
Journal of Vacuum Science & Technology B
2006
120
13
High brightness inductively coupled plasma source for high current focused ion beam applications
Journal of Vacuum Science & Technology B
2006
120
14
Deep reactive ion etching as a tool for nanostructure fabrication
Journal of Vacuum Science & Technology B
2009
119
15
Sub-10-nm nanolithography with a scanning helium beam
Journal of Vacuum Science & Technology B
2009
116
16
Aligned carbon nanotubes/fibers for applications in vacuum microwave amplifiers
Journal of Vacuum Science & Technology B
2006
111
17
Bilayer metal wire-grid polarizer fabricated by roll-to-roll nanoimprint lithography on flexible plastic substrate
Journal of Vacuum Science & Technology B
2007
110
18
On the use of alloying elements for Cu interconnect applications
Journal of Vacuum Science & Technology B
2006
109
19
Highly efficient vertical outgassing channels for low-temperature InP-to-silicon direct wafer bonding on the silicon-on-insulator substrate
Journal of Vacuum Science & Technology B
2008
105
20
Modeling radiation-induced carbon contamination of extreme ultraviolet optics
Journal of Vacuum Science & Technology B
2006
102
21
Imprinted large-scale high density polymer nanopillars for organic solar cells
Journal of Vacuum Science & Technology B
2008
97
22
Analysis of acid yield generated in chemically amplified electron beam resist
Journal of Vacuum Science & Technology B
2006
96
23
Optical and electrical properties of amorphous zinc tin oxide thin films examined for thin film transistor application
Journal of Vacuum Science & Technology B
2008
96
24
Talbot lithography: Self-imaging of complex structures
Journal of Vacuum Science & Technology B
2009
96
25
Scanning-helium-ion-beam lithography with hydrogen silsesquioxane resist
Journal of Vacuum Science & Technology B
2009
95
26
Effect of cold development on improvement in electron-beam nanopatterning resolution and line roughness
Journal of Vacuum Science & Technology B
2006
94
27
Area selective atomic layer deposition of titanium dioxide: Effect of precursor chemistry
Journal of Vacuum Science & Technology B
2006
93
28
Control of an electrospinning jet using electric focusing and jet-steering fields
Journal of Vacuum Science & Technology B
2006
93
29
Thermal infrared detection using dipole antenna-coupled metal-oxide-metal diodes
Journal of Vacuum Science & Technology B
2009
92
30
Challenges in 1 Teradot∕in.[sup 2] dot patterning using electron beam lithography for bit-patterned media
Journal of Vacuum Science & Technology B
2007
91
31
P implantation doping of Ge: Diffusion, activation, and recrystallization
Journal of Vacuum Science & Technology B
2006
90
32
Mechanistic study of plasma damage of low k dielectric surfaces
Journal of Vacuum Science & Technology B
2008
89
33
Nanofabrication of high aspect ratio 24nm x-ray zone plates for x-ray imaging applications
Journal of Vacuum Science & Technology B
2007
88
34
Physics of generalized Fowler-Nordheim-type equations
Journal of Vacuum Science & Technology B
2008
86
35
Effects of nanolubricant on performance of hydrocarbon refrigerant system
Journal of Vacuum Science & Technology B
2009
84
36
Plasma etch removal of poly(methyl methacrylate) in block copolymer lithography
Journal of Vacuum Science & Technology B
2008
83
37
Si-containing block copolymers for self-assembled nanolithography
Journal of Vacuum Science & Technology B
2008
82
38
Silicon resonant microcantilevers for absolute pressure measurement
Journal of Vacuum Science & Technology B
2006
78
39
Implementation of an imprint damascene process for interconnect fabrication
Journal of Vacuum Science & Technology B
2006
77
40
Highly reliable growth process of carbon nanowalls using radical injection plasma-enhanced chemical vapor deposition
Journal of Vacuum Science & Technology B
2008
77
41
Optimal temperature for development of poly(methylmethacrylate)
Journal of Vacuum Science & Technology B
2007
75
42
Mechanisms of porous dielectric film modification induced by reducing and oxidizing ash plasmas
Journal of Vacuum Science & Technology B
2007
74
43
Transport properties of InAs nanowire field effect transistors: The effects of surface states
Journal of Vacuum Science & Technology B
2007
74
44
Properties of reactively sputtered Ag, Au, Pd, and Pt Schottky contacts on n-type ZnO
Journal of Vacuum Science & Technology B
2009
73
45
Extreme ultraviolet lithography: Status and prospects
Journal of Vacuum Science & Technology B
2008
70
46
Photon-beam lithography reaches 12.5 nm half-pitch resolution
Journal of Vacuum Science & Technology B
2007
67
47
Plasma-surface interactions of model polymers for advanced photoresists using C[sub 4]F[sub 8]∕Ar discharges and energetic ion beams
Journal of Vacuum Science & Technology B
2007
66
48
Adhesion between template materials and UV-cured nanoimprint resists
Journal of Vacuum Science & Technology B
2007
66
49
Stable room temperature deposited amorphous InGaZnO[sub 4] thin film transistors
Journal of Vacuum Science & Technology B
2008
66
50
Fabrication of ultrahigh aspect ratio freestanding gratings on silicon-on-insulator wafers
Journal of Vacuum Science & Technology B
2007
65
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