Journal of Vacuum Science & Technology an Official Journal of the American Vacuum Society B, Microelectronics Processing and Phenomena

1.6(top 20%)

impact factor

12.2K(top 2%)

papers

244.4K(top 2%)

citations

143(top 5%)

h-index

1.6(top 50%)

extended IF

12.2K

all documents

252.7K

doc citations

229(top 5%)

g-index

Top Authors (by article citations)

#	Author	Articles	Citations	R ARank	R CRank
1	John Robertson	4	2,059	18	7
2	Stephen Y Chou	25	4,433	2	2
3	Roya Maboudian	2	799	33	5
4	Stephen J Pearton	67	1,959	8	4
5	Mikhail Baklanov	12	936	6	2
6	Hideo Ohno	7	760	16	15
6	Hideki Hasegawa	22	1,742	3	1
8	Bharat Bhushan	4	598	36	21
8	Bharat Bhushan	3	541	45	24
11	Tu-Pei Chen	1	404	41	3
11	Andrea Notargiacomo	1	404	19	1
13	Winfried Mönch	3	581	4	2
14	Randall Feenstra	20	1,451	3	4
15	John Conley	1	314	6	1
17	Craig S Lent	2	344	11	5
18	Robert Carpick	1	304	29	15
18	D Frank F Ogletree	8	453	4	14
18	Nicolas Agrait	1	304	27	12
21	Yves Caudano	1	298	7	1
21	Yves Chabal	5	451	16	18
23	Jeffrey A Hopwood	5	410	5	6
24	Martin Stutzmann	3	355	35	19
25	Maciej Gutowski	1	251	24	12
26	Michael Zharnikov	1	249	28	14
27	Kenji Yamazaki	6	531	2	1
27	Yasuo Takahashi	4	294	4	4
29	Stan Veprek	5	480	7	4
30	Marek Skowronski	2	277	15	5
30	Joerg Neugebauer	4	339	16	16
32	Shigefusa Chichibu	5	357	9	5
32	Shuji Nakamura	1	227	15	7
34	Roger T Howe	1	226	7	5
35	Wei Wu	6	613	5	5
36	Mark A Reed	8	378	6	11
37	Alexei Gruverman	3	323	18	20
38	Chris G. Van de Walle	6	484	9	14
39	Marya Lieberman	2	199	9	5
40	Edward T Yu	19	439	3	4
41	Shirley Chiang	6	365	5	5
42	Yoshihiko Hirai	3	238	4	1
43	Hendrik C Swart	1	159	85	26
44	Jueinai Kwo	3	199	8	8
44	Babu R Chalamala	13	403	1	3
44	Kenneth A Dean	1	158	2	4
47	Richard Forbes	3	241	8	6
49	Marius Grundmann	5	229	32	23
50	Kevin L Jensen	18	526	2	2
51	Clivia M Sotomayor Torres	6	293	16	14
51	Gregory N Parsons	6	253	10	11
51	L Jay Guo	2	208	23	19
51	Chung-Yen Chao	1	153	3	4
55	Sankar Das Sarma	11	284	7	12
55	Jaroslav Fabian	1	151	14	12
55	Andre Anders	2	186	20	18
55	Klaus Leifer	1	151	28	8
59	Fernando A. Ponce	9	355	5	6
59	Saw Wai Hla	1	149	8	4
61	Terry G Ireland	1	147	14	4
61	Jack Silver	1	147	37	13
61	Juan Jose Saenz	3	184	16	14
64	Daniel L Flamm	1	146	3	3
65	Stella Pang	57	1,451	1	1
65	Xing Cheng	4	333	4	2
67	Shinji Okazaki	1	141	2	1
68	Maarten P De Boer	1	137	11	11
69	David McKenzie	1	135	67	34
70	Uzi Landman	2	164	29	22
71	Yordan M Georgiev	4	172	1	1
71	A Majumdar	1	133	13	15
71	James P Mcvittie	1	133	4	3
74	Demetre J Economou	2	146	9	7
74	Richard A Register	1	132	23	14
76	Gil U Lee	3	142	6	8
76	Richard J Colton	3	211	5	8
78	H M Pollock	2	192	3	4
79	Ralf B Wehrspohn	1	126	36	19
79	Kornelius Nielsch	1	126	62	31
81	Akinori Saeki	4	247	21	15
82	Cees Dekker	2	133	29	33
82	Alexey Bezryadin	1	123	16	9
82	A Bezryadin	1	123	9	6
85	George M Whitesides	2	164	30	42
86	Chris Jacobsen	4	204	12	19
86	Takayuki Hoshino	6	340	3	1
86	Masahiko Ishida	4	217	2	4
89	Lars Montelius	7	243	4	7
89	Junghoon Yeom	1	117	7	4
89	Tae-Yeon Seong	1	117	36	12
89	Ivan Maximov	4	195	7	5
89	John C Selby	1	117	5	2
94	Lewis Johnson	3	149	1	1
94	Oliver Kühn	1	116	39	16
94	Ole Hansen	5	186	11	20
94	Gabriel Abadal	2	129	11	5
94	Anja Mz Boisen	2	149	31	25
94	Martin Albrecht	1	116	35	19
100	Demir Akin	1	112	10	8
101	Clive J Roberts	6	161	12	26
101	Philip M Williams	5	149	2	11
101	Gottlieb S Oehrlein	13	424	8	6
104	Ernst Meyer	11	522	8	14
105	Stefan Zollner	1	106	15	7
105	Xinglong Wu	3	139	61	45
105	Paul Chu	11	204	39	72
105	Alexander A Demkov	3	156	13	8
105	Paul K Chu	5	136	61	79
110	David F Bocian	1	105	16	16
110	Daniel Gryko	1	105	58	34
110	Jonathan S Lindsey	1	105	32	24
110	William Palmer	4	166	1	1
110	Werner G Kuhr	1	105	13	13
115	Falco C M J M Van Delft	3	153	3	3
115	M S Hegde	1	104	22	16
117	Wladyslaw	2	195	24	13
117	Evangelos Gogolides	14	480	2	5
117	W Walukiewicz	2	195	12	12
120	Robert F Davis	6	185	16	17
120	Christian Schönenberger	2	147	23	24
120	Hidetaka Asoh	1	101	21	8
123	Steven Brueck	16	459	4	6
123	steven Denbaars	7	268	18	21
126	Alberto Garcia	1	99	10	10
126	Wilfried Vandervorst	4	179	3	1
126	Shin-Ichi Kanemaru	26	549	2	1
126	Wim M Arnoldbik	1	99	9	5
126	Mauritius C M Van De Sanden	3	184	30	19
126	W M M Erwin Kessels	1	99	48	30
132	Evelyn K F Yim	1	98	15	13
132	Kam Leong	1	98	67	69
134	Ioannis Kymissis	2	119	13	8
134	Christos D Dimitrakopoulos	1	97	12	16
136	Robert M Wallace	7	218	13	23
136	Albert Polman	1	96	32	28
136	Susanne Stemmer	1	96	28	23
136	Michiel J A De Dood	1	96	11	5
136	Fred Roozeboom	3	115	12	15
141	John S Villarrubia	3	111	4	8
141	Tony F Heinz	3	123	20	29
141	G Andrew D Briggs	3	147	27	23
144	Carlton Grant Willson	7	197	4	6
144	Egbert Oesterschulze	7	211	2	2
146	A Paul Alivisatos	1	92	42	53
146	J Alexander Liddle	42	579	1	3
149	Jayr Amorim	1	91	21	3
150	Detlev A Grützmacher	4	159	14	15
150	Samit K Ray	3	111	22	15
150	Bert Müller	2	97	20	18
153	Lourdes G Salamanca-Riba	4	149	9	8
153	Marjorie A Olmstead	3	143	4	3
155	Andrew J Steckl	25	432	3	7
155	Valeriy Sukharev	2	89	8	5
155	R Jürgen Behm	6	194	28	37
155	Ilesanmi Adesida	3	145	3	4
159	Julia W P Hsu	2	134	19	14
160	H Kumar Wickramasinghe	4	200	4	8
160	Hiroshi Hiroshima	10	236	4	2
160	Mohamed Henini	9	165	19	17
160	Simon Bending	1	86	20	11
164	S Y Tong	3	132	9	7
165	Zhi Liu	7	304	9	15
165	Michael S Shur	3	118	35	31
167	Dietrich R.T. Zahn	18	403	10	8
167	Oleg Kolosov	1	81	23	15
167	L J Brillson	9	221	6	8
170	Stacey F Bent	1	80	41	40
170	Paul Berger	4	148	7	6
170	Marcus Andre Worsley	1	80	32	30
170	Willi Volksen	1	80	8	6
174	C-S Lee	2	101	79	72
174	Ning Wang	2	101	31	35
174	Yf Zheng	2	83	63	81
177	Zoltán L Horváth	1	78	6	3
177	Michael S Fuhrer	1	78	27	27
177	Scott A Barnett	1	78	27	25
177	Robert Sherman	1	78	1	2
181	Po-Tsun Liu	5	165	12	8
181	Nava Setter	1	77	23	23
181	Seungbum Hong	2	82	15	9
181	Hyunjung Shin	2	82	23	27
181	E Di Fabrizio	2	99	4	11
186	Jongsuck Bae	1	76	8	4
186	Jason D Fowlkes	3	137	14	12
186	Philip D Rack	3	103	20	27
186	Robert J Hamers	3	151	22	36
190	Hyunsoo Kim	1	75	18	5
190	Shane Johnson	6	111	3	3
190	Seong-Ju Park	6	202	5	8
190	Jürgen P Rabe	2	96	36	42
190	Masaaki A Tanaka	1	75	21	15
190	Hyunsang Hwang	2	86	13	17
197	Valeriu Filip	18	252	1	2
197	Masayoshi Nagao	19	378	2	1
197	Yoshihiro Aiura	2	105	13	8
197	Franz Giessibl	1	73	16	15
197	Thomas E Murphy	4	119	7	15
197	Joseph J Kopanski	1	73	3	2
203	Euclydes Marega Jr	2	78	14	9
203	Hajime Okumura	7	179	10	8
203	Yuuki Ishida	2	119	10	5
203	Pedro Pablo González-Borrero	1	72	9	3
203	Ralph G Nuzzo	1	72	44	41
203	Shujuan Huang	3	142	19	18
203	Shoso Shingubara	3	142	5	3
210	Seiji Akita	3	147	14	11
210	Jeffrey T Glass	1	71	19	11
212	Yang-Kyu Choi	1	70	45	26
212	Junji Kotani	1	70	1	1
212	Ángel Rubio Secades	1	70	68	56
215	Per Persson	1	69	37	36
215	Hans G Högberg	1	69	20	12
215	Lars Hultman	5	126	26	44
215	Silvio Modesti	1	69	13	7
215	Jens Birch	1	69	38	17
215	Christophe Cardinaud	7	233	5	5
215	Per Eklund	1	69	35	34
215	Nathan Newman	2	85	14	10
223	Yukio Hasegawa	9	212	4	6
223	Joan M Redwing	2	76	24	28
223	Max C Lemme	2	77	22	26
223	Kok-Keong Lew	1	68	3	6
227	Jose Menendez	4	98	13	12
227	Anders S Kristensen	2	108	23	20
227	Yael Nemirovsky	1	66	14	8
230	L Howald	1	65	21	20
230	Andreas Fissel	1	65	24	9
232	Alexander Zunger	6	123	9	26
232	Luke Hanley	1	64	21	16
232	Dale K Hensley	3	140	8	9
232	Mikhail Lebedev	4	113	5	3
232	Michael L Simpson	6	226	4	8
232	Joel Cibert	1	64	35	17
232	Paul Mirkarimi	6	132	2	6
239	Qiang Wang	1	63	6	6
239	Peter B Lerner	3	111	3	3
239	Siegfried Hofmann	1	63	6	7
239	Allen J Bard	1	63	30	35
239	Seiji Samukawa	20	432	4	5
244	Michael David Dickey	3	115	14	33
244	C Grant Willson	3	149	8	12
246	J David Carey	2	69	9	10
246	Petr Formanek	2	64	12	14
246	Filippo Giannazzo	4	116	17	16
246	S Ravi P Silva	9	180	11	30
246	Roland Wiesendanger	13	259	11	20
246	Thilo Glatzel	1	61	21	18
246	John P Lafemina	3	99	6	6
253	Stephen Garoff	2	76	14	16
253	Carmen Ocal	1	60	24	23
253	Yoich Uehara	1	60	18	7
253	Oliver Brandt	5	144	14	13
253	Peter W T Yuen	1	60	11	5
258	Jaroslaw Z Domagala	1	59	32	11
258	Maciej Sawicki	2	78	21	14
258	Ratno Nuryadi	1	59	5	2
258	Armin Gölzhäuser	3	108	12	15
258	Markus Sauer	1	59	64	64
258	Gyu Chul Yi	3	84	14	23
258	Janusz Sadowski	1	59	34	9
258	Nick Lavrik	1	59	30	25
258	Guillaume Micouin	2	73	1	1
258	Panos Datskos	1	59	17	21
258	Hiroyuki Tanaka	1	59	4	5
269	Kenneth A Goldberg	19	315	2	3
269	Wen-Chi Liu	1	58	20	34
269	Miquel B Salmerón	1	58	27	31
269	Jeffrey Bokor	5	108	7	19
269	Miquel Salmeron	1	58	22	27
269	Hei Wong	3	92	10	8
275	Kai Henrik Nordlund	1	57	51	36
275	Panagiotis Argitis	9	173	2	9
275	Ana I Teixeira	1	57	3	8
275	Eray S Aydil	6	161	9	24
275	Arkady Krasheninnikov	1	57	36	36
275	Paul F Nealey	3	83	18	27
275	Christopher J Murphy	1	57	30	29
283	Wolfgang Husinsky	1	56	9	10
283	Javier Tejada	1	56	34	28
283	Ivo W Rangelow	3	75	8	11
283	Nobuhiko P Kobayashi	1	56	37	24
283	A L Chuvilin	1	56	58	52
283	Xi-Cheng Zhang	1	56	51	44
283	David Cumming	4	75	9	21
283	Joan Esteve	1	56	13	12
283	Elena D Obraztsova	1	56	35	23
292	Trevor Anderson	1	55	4	2
292	Tetsuji Yasuda	13	303	6	5
292	Fan Ren	7	136	12	21
292	Yukinori Morita	1	55	16	10
292	Yunhwan Park	1	55	5	6
292	Jerzy Kanicki	1	55	28	24
292	Masakazu Nakamura	1	55	21	15
292	Maritza Gj Veprek-Heijman	1	55	3	4
292	Masato Okano	1	55	3	2
292	Huanting Wang	1	55	62	69
292	Steven George	5	202	17	32
292	Darrell G Schlom	7	168	17	32
292	John F Wager	1	55	15	16
305	I-Nan Lin	10	117	7	9
305	Philippe Allongue	2	61	14	16
307	Bruce E Koel	1	53	41	36
307	Tadatomo T Suga	5	174	14	12
307	Roger H. French	1	53	26	26
307	Vincent Ch Lee	3	82	30	46
307	Itaru Kamiya	3	113	11	7
312	Chad A Mirkin	1	52	64	64
312	Eugene A Fitzgerald	2	82	10	6
312	Andrew Y Kim	1	52	1	1
312	Todd L Williamson	2	94	2	1
316	Piotr Perlin	1	51	25	9
316	Kyohei Okubo	1	51	10	5
316	Zbig R Wasilewski	4	117	11	14
316	Takanori Ichiki	2	72	9	10
316	Takashi Matsukawa	11	161	3	4
316	Walter Arnold	1	51	38	31
322	Jabez J Mcclelland	3	77	7	11
322	Yasin Ekinci	1	50	23	21
322	W Gero Schmidt	3	110	14	9
322	Ting-Chang Chang	1	50	34	25
322	Markus Pristovsek	2	57	14	9
322	Jerry Bernholc	3	88	9	19
322	Norbert Esser	10	250	6	6
322	Steven L Rolston	1	50	17	21
322	J D Gillaspy	2	87	8	9
331	Sean L Rommel	2	64	5	4
331	Shige H Yoshimura	1	49	14	18
331	Weiyi Li	2	83	2	2
331	Karen L Kavanagh	12	216	4	9
331	Daniel E Bürgler	2	62	13	11
331	Mark Freeman	2	55	13	17
331	M Alexander Schneider	1	49	13	11
331	Alexander Bietsch	1	49	3	8
339	Aldo Di Carlo	1	48	84	85
339	Ralf K Heilmann	13	304	2	1
339	Chulmin Joo	3	77	6	5
339	Angela Rizzi	1	48	6	4
339	Fabio Della Sala	1	48	34	27
339	Chih-Hao Chang	4	131	3	5
345	Valeri V Afanas'ev	2	58	23	18
345	Andre Stesmans	2	58	13	15
345	Brian Gorman	2	49	16	21
345	Minjoo L Lee	1	47	22	22
345	Chee Won Chung	1	47	12	5
345	Wataru Mizutani	4	79	7	8
345	Heng-Yong Nie	1	47	14	7
345	Richard Martel	2	54	22	30
345	Vincent L Bouchiat	2	67	11	17
345	Robert J Nemanich	3	79	17	26
345	Barry C Arkles	4	105	3	4
356	Ant Ural	1	46	10	11
356	Alireza Nojeh	2	61	6	6
356	Guanzhou Zhu	2	61	15	40
356	Yongqi Fu	3	69	2	6
356	Alexander A Balandin	1	46	36	41
356	Tanemasa Asano	7	74	3	5
362	Sven Achenbach	2	55	2	2
362	Gwo-Ching Wang	1	45	19	16
362	Arun Persaud	6	121	2	3
362	Niek F Van Hulst	1	45	49	53
362	R Ramesh	1	45	45	48
367	Nicholas X. Fang	1	44	42	41
367	Katsuhisa Murakami	7	122	4	3
367	Katsumi Midorikawa	2	61	29	27
367	David Ferry	10	151	7	9
367	Greg Hughes	2	83	10	5
367	Xuegong Deng	5	125	2	3
367	David Tomanek	1	44	22	25
374	Dong Qin	1	43	17	23
374	Tse Nga Ng	1	43	18	24
374	Hiroshi Fukuda	3	49	4	4
374	Nobuyuki N Matsuzawa	2	51	5	6
374	Joe Bennett	3	73	3	4
374	Joan R Morante	8	101	22	55
374	Hiroshi Fukuda	1	43	4	2
374	Peter J Heard	2	48	12	16
374	Roman R Sobolewski	1	43	29	13
374	John A Marohn	1	43	11	10
374	Younan Xia	1	43	54	84
386	Daniel K Schwartz	1	42	39	40
386	Jonathan Pelz	2	51	3	3
386	Lucia Sorba	13	183	7	10
386	Ivana Vobornik	1	42	26	20
386	Sol Gruner	1	42	37	51
386	John J Boland	2	43	22	34
386	Jonas O Tegenfeldt	2	75	10	18
386	H N Chapman	4	117	24	37
386	Flavio Capotondi	1	42	18	17
396	Alex K Zettl	1	41	41	43
396	Li-Chyong Chen	2	60	42	53
396	Sadao Masamune	1	41	7	6
396	Donald E Savage	1	41	23	19
396	Makoto Miyoshi	1	41	15	6
396	Ai Qun Liu	2	56	21	31
396	Brian D Gerardot	1	41	19	25
396	Ataç İmamoğlu	2	60	15	20
396	Gilles Ledoux	1	41	23	29
396	Christopher L Soles	5	137	6	11
396	Brian Bennett	12	299	5	8
396	Jiwang Yan	1	41	47	32
396	K-H Chen	2	60	53	58
396	Michael Seibt	1	41	28	20
396	Bruno Gayral	2	47	13	14
396	Hyun Wook Ro	1	41	10	12
396	Eric K Lin	6	143	6	9
396	A Zettl	1	41	17	20
416	Kentaro Totsu	1	40	4	4
416	Albert Chin	4	94	13	10
416	Tim D Veal	2	43	16	20
416	Louis F J Piper	1	40	33	40
416	Uwe Rossow	11	194	6	6
416	Yasumasa Tanishiro	1	40	16	11
416	Yogesh B Gianchandani	2	65	7	6
416	Amar S Basu	1	40	4	6
416	Peter I Belobrov	3	91	1	1
416	S Simon Wong	1	40	8	10
416	Mingyao Zhu	1	40	8	7
416	Dennis M Manos	1	40	3	4
416	Feng-Chih Chang	1	40	29	36
429	Jinn-Kong Sheu	2	53	21	21
429	Mark M Banaszak Holl	1	39	31	50
429	Mark D Stiles	1	39	13	17
429	Gary W Rubloff	17	210	2	21
429	Elaine D Haberer	2	54	4	4
429	Sanjay Krishna	4	65	15	26
429	Kazumasa Okamoto	3	78	7	5
429	Ji-Myon Lee	2	76	6	4
429	Kug-Seung Lee	1	39	30	31
429	Amadeo L Vazquez De Parga	1	39	22	18
429	Yifeng Wu	1	39	1	6
429	Andrei Kabashin	1	39	27	39
429	Alex L De Lozanne	11	174	2	6
443	Lin Zhou	2	49	12	24
443	David J Smith	5	77	22	45
443	Alexander N Obraztsov	1	38	28	17
443	Brian J Skromme	3	52	7	7
443	Lloyd J Whitman	1	38	12	18
443	Hiroshi Masuhara	3	103	30	29
443	Kathy Lüdge	6	82	4	8
443	Fabio Beltram	4	59	16	39
443	Anthony Levi	2	41	7	9
443	Martin Kamp	8	116	12	26
443	David J Smith	7	108	17	28
443	O'Faolain Liam	1	38	18	18
443	Lin Zhou	2	49	18	22
443	Thomas F Krauss	1	38	33	39
443	Srinivasan Anand	9	180	2	4
443	D S Katzer	1	38	6	6
443	D G Hasko	7	131	4	7
460	Da-Bing Li	1	37	19	20
460	佐久間芳樹	2	54	11	10
460	Daisuke Fujita	2	43	20	22
460	Thorsten Hesjedal	2	41	20	18
460	Jeramy D Zimmerman	1	37	9	14
460	Samuel Granjeaud	2	43	10	21
460	Hideo Hosono	2	58	89	102
460	Jyoti Mohanty	1	37	14	13
460	Uthirakumar Periyayya	1	37	39	25
460	Rebecca Cheung	5	97	3	8
460	Friedrich Schäffler	4	75	14	20
460	Andrea Locatelli	2	65	24	23
460	Salia Cherifi-Hertel	2	65	5	6
460	Stefan Heun	6	105	5	9
460	Leonidas E Ocola	4	98	6	12
475	Petr Zeman	1	36	10	12
475	Gregory L Snider	5	70	6	12
475	Eleftherios Iliopoulos	1	36	12	9
475	Sung-Ho Hahm	3	40	6	4
475	John Hedley	1	36	7	9
475	Rajesh Menon	2	64	10	12
475	Jung-Hee Lee	3	40	10	12
475	Choi, Hw	3	64	8	11
475	Marc Gailhanou	2	46	6	13
475	Anirban Bhattacharyya	1	36	14	8
475	Soonil Lee	8	119	2	5
475	Alexei O Orlov	5	70	4	9
475	John M Girkin	1	36	20	25
475	Romuald Houdré	2	55	20	21
475	Charles A Clifford	1	36	6	8
475	Jindrich Musil	1	36	22	22
475	Christophe Coupeau	1	36	20	10
475	Gary H Bernstein	6	94	4	10
493	Sergei V. Kalinin	1	35	60	72
493	Paul S Weiss	2	65	25	34
493	Alan C Seabaugh	6	80	4	14
493	Arthur P Baddorf	1	35	16	25
493	Shojiro Miyake	1	35	21	12
493	Brian J Rodriguez	1	35	28	45
493	Hyung-Tak Seo	1	35	32	30
493	Keith P Johnston	1	35	49	65
493	Vitaly I Konov	2	48	32	21
493	Leo Miglio	2	46	21	18
493	Blake Alexander Simmons	1	35	57	77
493	Victor Ralchenko	2	42	18	17
493	Hirofumi Tanaka	2	65	11	10
493	Olga E Glukhova	1	35	29	9
493	Dario Anselmetti	3	76	9	21
493	Jeong-Young Ji	1	35	10	8
493	Yangdo Kim	1	35	30	22
493	Joe Charest	1	35	4	8
493	Yang Lu	1	35	41	45
493	Manfred Buck	1	35	22	22
493	Derrick C Mancini	5	105	2	3
493	Hyeongtag Jeon	1	35	32	30
493	Wen-Chang Chen	1	35	57	53
493	Y C Kao	2	53	4	3
493	Cheng-Tyng Yen	1	35	2	4
493	Ronald L Jones	4	96	2	10
493	K L Wang	12	214	5	5
493	Wen-Li Wu	5	102	7	11
521	José María Kenny	1	34	86	104
521	Charles Michael Greenlief	1	34	10	14
521	Won-Jun Lee	2	34	11	11
521	Achim Trampert	1	34	29	24
521	Carl-Mikael G Zetterling	1	34	13	10
521	Luca Lozzi	1	34	27	34
521	Takayuki Uchihashi	4	56	12	35
521	Alain Cappy	2	36	13	13
521	Cristina Buzea	1	34	6	8
521	Philipp Ebert	2	43	8	8
521	Soon-Ku Hong	3	79	11	9
521	Shaoyun Huang	1	34	11	10
521	Isodiana Crupi	1	34	19	18
521	Fabio Iacona	2	48	12	14
521	Harold G Craighead	1	34	9	13
521	Mikael Östling	1	34	31	33
521	J-M Chauveau	2	49	9	6
521	Joseph H Thywissen	2	48	6	7
521	Giuseppe Nicotra	1	34	30	30
521	Nikolai B Zhitenev	2	40	9	15
521	Seongil Im	3	68	13	16
521	Shunri Oda	2	42	15	16
521	Eric Tournié	3	62	13	15
521	Hong Lu	2	39	16	19
521	Kazuhito Hashimoto	2	45	53	99
521	María Teresa Cuberes	5	102	2	4
521	Martin Hegner	1	34	15	24
521	Luigi Mariucci	1	34	20	13
521	Giovanni Mannino	2	43	11	13
521	Hajime Takano	2	55	4	18
521	Mineharu Suzuki	1	34	9	8
521	Ray Ashoori	1	34	7	10
521	Kevin Robbie	1	34	4	11
521	Robert D Allen	1	34	2	4
521	Tim Brown	1	34	1	3
556	Alois Lugstein	3	78	6	9
556	Eric Ganz	1	33	22	24
556	Tadashi Iwamatsu	1	33	3	1
556	Brian P Borovsky	1	33	3	4
556	Likun Pan	1	33	54	71
556	Yoshihiro Kobayashi	1	33	23	22
556	Amanda K Petford-Long	1	33	19	16
556	Feng Zhang	3	53	26	60
556	Beng Kang Tay	5	84	18	42
556	Christopher K Ober	2	37	37	60
556	Paul koenraad	1	33	25	23
556	Jeff T H Tsai	2	35	3	7
556	Rodney S Ruoff	1	33	57	88
556	Richard I Masel	1	33	39	46
556	Stefano Frabboni	1	33	26	20
556	Alfred Forchel	2	39	14	22
556	Keh-Yung Cheng	13	115	2	3
556	Chang Q Sun	2	42	44	67
556	Yizhong Huang	1	33	48	55
556	Miroslav Micovic	2	39	8	11
556	Sergio Lozano-Perez	1	33	30	22
556	Emmerich Bertagnolli	2	57	9	9
556	Gleason Kk	2	44	32	65
556	Paul Ruchhoeft	5	111	1	2
580	Yimin Zou	2	42	22	33
580	William Alan Doolittle	1	32	14	11
580	Koji Ishibashi	1	32	20	9
580	David N Mcilroy	2	37	9	18
580	Kunihiko Oka	1	32	18	11
580	L I Goray	1	32	11	6
580	Li-Jun Wan	1	32	59	75
580	Mats Eriksson	1	32	10	14
580	Benno Margesin	1	32	17	12
580	Daiju Tsuya	1	32	11	9
580	Dong Wang	1	32	24	32
580	Adele Sassella	1	32	30	25
580	Peter A Dowben	2	37	28	40
580	Masayuki Shimojo	1	32	24	17
580	Ilana Bar	1	32	23	22
580	Abdulmecit Turut	2	59	27	29
580	Chun-Li Bai	2	42	9	15
580	Flavio Giacomozzi	1	32	14	10
580	Donato Vincenzi	1	32	10	10
580	Walter Meyer	1	32	18	12
580	Kimberley Elcess	1	32	4	4
580	Tetsuya Ida	1	32	11	7
580	Meiyong Liao	1	32	35	38
580	Maria Angela Butturi	1	32	6	7
580	Young-Ho Kim	2	38	7	7
580	Qing-dao Zeng	1	32	31	29
580	Walter E Henderson	1	32	6	5
607	Zhanguo Wang	1	31	27	20
607	Mark J Kushner	1	31	10	16
607	Jyh-Ming Wu	1	31	21	22
607	Anders Gustafsson	3	53	9	11
607	Steven J Eppell	3	53	3	10
607	Antonio C Ting	1	31	21	18
607	Xiao Hu	1	31	64	76
607	Eric Stach	1	31	56	66
607	Chuan-Pu Liu	1	31	23	23
607	Leigh M Smith	2	48	11	10
607	Karsten Fleischer	1	31	17	16
607	Olivier J F Martin	2	36	22	35
607	Edward H Sargent	2	52	51	65
607	María Alonso	4	61	3	3
607	J E Rowe	1	31	8	12
607	Ding Ding	1	31	2	4
607	Tsuyoshi Moriya	2	57	2	3
607	Zhian He	1	31	2	6
625	Karen L Carleton	1	30	14	31
625	Qing Ji	3	48	2	2
625	Julio Gomez-Herrero	1	30	33	44
625	Gvido Bratina	6	110	4	6
625	Ketul C Popat	1	30	28	45
625	Akihiro Ohtake	4	61	7	6
625	Dimitri A Antoniadis	2	47	5	9
625	Javier Méndez	1	30	17	18
625	Jose Ignacio Pascual	2	60	14	21
625	Christian Mitterer	1	30	41	35
625	Naomi J Halas	1	30	40	68
625	Carl E Bonner	1	30	12	12
625	Bruce W Wessels	3	74	11	16
625	Angelo Antonini	1	30	66	102
625	Jorge A Kittl	1	30	17	18
625	Ulf Gennser	3	51	9	8
625	G S Cargill Iii	1	30	4	4
625	Will Conley	2	42	2	4
625	N J Halas	1	30	8	15
625	Kenneth E Goodson	1	30	25	33
645	David Eon	2	45	8	13
645	Terry Alford	6	87	6	6
645	Manfred Radmacher	1	29	19	38
645	Henning Sirringhaus	2	40	31	43
645	Raymond Browning	1	29	3	4
645	Peter Beton	6	94	10	25
645	Nobuyoshi Koshida	3	70	6	3
645	Friedhelm Bechstedt	1	29	41	39
645	Seoung Gil Yoon	8	90	9	15
645	Bernard Hao-Chih Liu	1	29	14	10
645	Yoji Saito	1	29	12	5
645	Eric S Hellman	3	79	6	4
645	J Nathan Hohman	1	29	8	16
645	Philip J Moriarty	3	72	10	10
645	Robert Claude Woods	1	29	10	11
645	Sven Tougaard	1	29	19	20
645	Jihoon Choi	1	29	17	19
645	Jennifer R Hampton	1	29	4	5
645	Massimiliano Labardi	4	50	5	12
645	Marco Salerno	1	29	20	40
645	Hyeong Joon Kim	1	29	25	20
645	W Ted Masselink	1	29	9	6
668	Yuh-Lin Wang	6	90	5	16
668	Nils G Weimann	2	37	13	12
668	Jun Chen	6	86	12	27
668	Thibaut Devolder	1	28	18	18
668	Richard E Palmer	4	62	27	34
668	Hisao Makino	4	70	13	13
668	Toshimasa Fujisawa	2	32	11	17
668	Fred L Terry	2	50	10	15
668	Takashi Hanada	4	57	10	10
668	Maxime Darnon	1	28	14	11
668	Tapio Mäkelä	1	28	6	12
668	Giorgio Rossi	2	56	17	14
668	Li-Xin Chen	1	28	20	27
668	Hideki Fujiwara	1	28	12	10
668	Othmar Marti	1	28	30	38
668	Keiji Sasaki	1	28	30	32
668	Won-Bin Im	2	43	25	31
668	Toyoko Arai	2	31	7	7
668	Hiroshi Itoh	3	64	4	4
668	Dan M Goebel	1	28	8	12
688	Yong Ding	1	27	32	60
688	Sang Ho Oh	3	54	9	23
688	Christoph Grein	2	36	5	4
688	Douglas J Paul	5	52	9	23
688	Guang-Rong Li	1	27	15	20
688	Chang-Jiu Li	1	27	33	38
688	Satoshi Yamasaki	2	31	18	24
688	Toshio Kamiya	1	27	38	51
688	Paul A Crowell	2	50	5	10
688	Matthew J Goeckner	2	28	8	13
688	David M Villeneuve	1	27	23	26
688	Francesca Iacopi	1	27	20	23
688	Vincent LaBella	4	55	2	4
688	Paolo Visconti	3	58	9	8
688	Xue-Sen Wang	4	52	6	10
688	Charles Tu	6	65	4	5
688	Guan-Jun Yang	1	27	33	41
688	Toshio Kamiya	1	27	61	65
688	William Goddard	1	27	71	87
688	Xu Jianbin	8	68	9	62
688	Seiya Kasai	2	44	8	7
688	Vladimir A Gritsenko	1	27	23	23
688	Jun-Young Park	1	27	21	26
688	Mark J Hagmann	6	110	2	2
712	Hans-Juergen Butt	1	26	66	86
712	Eva Monroy	1	26	39	32
712	Zexiang Shen	4	35	34	87
712	Jordan C Poler	1	26	8	5
712	Fernando Calle	1	26	28	28
712	George K Celler	9	95	2	8
712	Hermis Iatrou	1	26	15	29
712	Hongxing Jiang	3	47	12	18
712	Axel Lorke	2	48	21	23
712	Johann P Reithmaier	5	55	17	20
712	Akhlesh Lakhtakia	2	49	60	64
712	Paul Maguire	1	26	24	30
712	D Andrew Evans	3	37	6	7
712	Jeffrey Lince	2	50	8	11
712	Karsten Hinrichs	2	34	21	29
712	Shuo Chen	1	26	29	52
712	Sasa Bajt	1	26	41	49
712	Jose Maria Gomez Rodriguez	2	41	10	18
712	R Stanley Williams	2	43	26	44
712	Jiro Matsuo	4	62	12	14
712	Detlef Schmitz	1	26	11	10
712	Tetsuya Suemitsu	1	26	18	14
712	Jingyu Lin	3	47	11	19
712	Victor Milman	1	26	28	34
712	Jun Kameoka	1	26	15	17
712	Noriaki Toyoda	1	26	7	8
712	David A J Moran	4	65	3	5
712	Shuang Zhang	2	31	26	38
712	Stephane Evoy	1	26	19	23
712	Songphol Kanjanachuchai	1	26	12	7
712	M Holland	2	28	3	8
712	Brent A Morgan	1	26	1	2
712	Z F Ren	1	26	15	26
746	Markku Leskela	1	25	98	115
746	Luis F Vazquez	4	54	11	36
746	Hiroaki Imai	1	25	52	59
746	Gerd Bacher	3	32	17	23
746	Klavs Hansen	1	25	17	24
746	Christian A Zorman	1	25	23	36
746	Sotirios E Kakabakos	1	25	16	18
746	David E Aspnes	11	140	7	14
746	Vaclav Holy	3	53	22	25
746	Daniel Erni	1	25	32	32
746	Tien Khee Ng	5	54	9	29
746	J Jussi Toppari	1	25	14	23
746	Koichi Awazu	1	25	23	24
746	Makoto Fujimaki	1	25	17	21
746	Peter Strasser	1	25	55	73
746	Xi Hui Liang	1	25	2	2
746	Takeru Amano	1	25	9	11
746	Mikko Ritala	1	25	62	80
746	Philippe Sautet	1	25	44	54
746	C K Inoki	1	25	4	8
746	Hiroki Hibino	1	25	28	32
746	Yeshaiahu Fainman	1	25	12	15
746	Mehran Mehregany	1	25	16	30
746	Cheol-Woong Yang	1	25	30	27
746	Jukka P Pekola	1	25	16	17
746	Isabelle Berbezier	2	33	17	23
746	Ming-Chieh Lin	2	44	5	1
746	Wei-Jun Fan	5	54	7	8
746	Detlef Hommel	3	45	24	26
746	Takeyoshi Sugaya	4	28	7	16
746	Bongkoo Kang	1	25	9	4
746	Sharadha Sambasivan	2	36	2	8
746	Dario L Goldfarb	1	25	3	4
746	Chyong-Hua Chen	1	25	6	6
780	Yoshiyuki Miyamoto	1	24	18	18
780	Alexander Y Polyakov	9	116	6	11
780	Carlos Zaldo	2	26	29	33
780	Michael J Aziz	1	24	33	46
780	Enrique Vasco	2	26	8	7
780	Takahiko Sasaki	1	24	37	32
780	Omar Teschke	3	45	10	14
780	Marc Heyns	1	24	36	39
780	Nima Ghalichechian	1	24	9	9
780	Satoru Fujisawa	2	39	4	6
780	Heh-Nan Lin	4	67	4	11
780	Alessandra Alberti	3	28	9	18
780	Sara Bals	1	24	52	73
780	Nikolai B Smirnov	9	116	6	8
780	Takashi Ikuno	1	24	9	10
780	Badreddine M Assouar	1	24	17	27
780	Victor Micheli	1	24	10	11
780	Chun-Yu Lin	1	24	3	8
780	Francesco La Via	10	102	7	12
780	Osamu Sugino	1	24	16	17
780	A L David Kilcoyne	2	40	25	51
780	Jae-Min Myoung	2	32	16	22
780	Juan Rubio-Zuazo	1	24	16	17
780	Jesus A Del Alamo	2	29	11	18
780	Omar Elmazria	1	24	20	19
780	Sigurd Wagner	2	26	9	29
780	Tolek Tyliszczak	1	24	29	46
807	Yong Lei	1	23	42	67
807	Luc G. Fréchette	1	23	13	19
807	Thomas Schuelke	1	23	5	9
807	Celestino Padeste	1	23	15	24
807	Stephen Buckman	1	23	22	25
807	Yuri L Lyubchenko	1	23	25	45
807	Astushi Takahara	3	43	33	52
807	Takahito Ono	1	23	41	43
807	Kenneth G H Baldwin	1	23	17	24
807	Jeffry A Kelber	1	23	20	21
807	Won Jong Yoo	6	51	8	23
807	Mark Blamire	2	25	21	33
807	Efthimios Kaxiras	1	23	38	64
807	Christoph Adelmann	1	23	40	34
807	Fernando M Teran Arce	1	23	10	24
807	Richard J Blaikie	2	36	13	17
807	Xiaopeng Shi	1	23	6	8
807	Selmiye Alkan Gürsel	1	23	21	35
807	Joerg J Schneider	1	23	38	46
807	David Keith	1	23	21	36
807	Victor Y Aristov	3	36	10	15
807	Gregory Rohrer	2	41	29	39
807	Ikuo Suemune	1	23	28	17
807	John Durrell	1	23	13	14
807	Serge Palacin	1	23	24	41
807	Patrick J Fay	5	31	7	24
807	Tilman Pfau	1	23	25	28
807	Michel J Rossi	1	23	25	28
807	John F Geisz	1	23	15	22
807	Hideki Sato	1	23	6	3
807	Richard Haight	1	23	7	16
838	Tsutomu Minegishi	1	22	38	49
838	Orlando Auciello	2	29	11	26
838	Ka Lun Michael Man	1	22	7	12
838	Ki Tae Nam	1	22	39	61
838	Edmund H Linfield	3	28	25	42
838	Won Il Park	1	22	30	33
838	Ping Sheng	1	22	51	69
838	Alexey B Pavolotsky	1	22	9	11
838	Seunghwan Lee	2	26	10	29
838	Jodi M Szarko	1	22	8	15
838	Shangjr Gwo	4	50	15	27
838	Yoon-Ho Song	5	48	1	5
838	Tobias Reich	1	22	17	28
838	Ken Okano	1	22	14	14
838	Yasushi Maeda	3	38	4	10
838	Hansjoerg Scherer	2	40	8	8
838	Theo Rasing	1	22	50	70
838	Hajime Fujikura	1	22	5	6
838	Alexander B Zorin	2	40	11	12
838	James C Hone	1	22	48	58
838	Jinkyoung Yoo	1	22	16	17
838	David A Ritchie	16	115	14	37
838	Giacomo Torzo	2	30	6	9
838	Xudong Xiao	1	22	15	17
838	Vladimir A Krupenin	2	25	6	7
838	Michael S Altman	1	22	4	5
838	Paul M Thibado	3	28	3	8
838	Javier Garrido	1	22	11	15
838	Takatoshi Yamada	3	37	10	12
838	soo-hyun Kim	1	22	30	36
838	Günter Müller	2	30	4	8
838	Wei-Kan Chu	1	22	7	6
838	Scott S Perry	2	29	8	18
838	Hanchen Huang	1	22	24	23
872	Suresh Valiyaveettil	1	21	43	63
872	Linards Skuja	1	21	14	15
872	Ching-Ting Lee	1	21	42	34
872	Johan Hoefnagels	1	21	25	27
872	M W Holtz	1	21	13	15
872	Andreas D Wieck	3	27	31	45
872	Wolf-Dieter Schneider	2	23	14	34
872	Andrey S Zubrilov	1	21	13	9
872	Steven De Feyter	1	21	46	52
872	Phan Ngoc Minh	1	21	11	14
872	Ivan G Petrov	3	33	17	43
872	Yiping Zhao	1	21	49	70
872	Marino Marsi	1	21	22	23
872	Richard Mirin	4	40	10	22
872	Roger J Narayan	1	21	43	61
872	Simon A Brown	1	21	17	21
872	Helmut Schift	1	21	11	18
872	Tomas Roch	1	21	19	24
872	Conrad Becker	1	21	11	20
872	Seung M Oh	1	21	18	24
872	John Budai	1	21	29	51
872	Sergey Rumyantsev	1	21	23	22
872	Nickolai I Klyui	2	42	9	7
872	Cheng-Liang Huang	2	25	15	15
872	Yi Luo	1	21	16	20
872	Sunggook Park	1	21	14	26
872	Mark Hagmann	6	70	2	4
872	Iulian Gherasoiu	1	21	6	6
872	Régis Andre	1	21	22	18
872	Gunther Springholz	1	21	32	31
872	David A Muller	1	21	40	66
872	Philippe Renaud	1	21	39	73
872	Ludo Froyen	1	21	8	13
905	Francesco Barreca	1	20	2	9
905	Paul A Kohl	2	30	22	34
905	Ioan Lucian Prejbeanu	1	20	12	20
905	Sebastiano Trusso	2	33	13	20
905	James Kolodzey	1	20	6	5
905	Tatsuo Yoshinobu	1	20	22	27
905	Nobuyuki Sugii	1	20	20	16
905	Greg Bridges	3	36	5	14
905	Andy Thomas	1	20	14	19
905	Tongjun Yu	1	20	18	20
905	Enza Fazio	1	20	39	54
905	André Vantomme	3	41	19	31
905	Dimitrios Maroudas	2	29	12	26
905	Ingo Manke	3	37	30	54
905	Jiyoul Lee	2	34	10	16
905	Dusan Losic	1	20	72	121
905	Bram Hoex	1	20	23	25
905	Joe George Shapter	1	20	55	85
905	Matteo Ferroni	2	39	13	31
905	Shengqiang Zhou	1	20	62	55
905	J Justin Gooding	1	20	113	100
905	Hubert Brueckl	2	37	3	4
905	Yutaka Matsumi	1	20	26	32
905	D Greg Walker	2	30	6	18
905	Yoshimi Kubo	1	20	24	33
905	Kwang-Ryeol Lee	1	20	32	46
905	Akira Sugawara	1	20	12	13
905	Timothy S. Fisher	4	61	16	41
905	Fortunato Neri	1	20	14	24
905	Katayun Barmak	1	20	29	40
905	Yaowu Hao	1	20	4	11
905	Qiang Zhao	1	20	2	2
905	Su-Huai Wei	1	20	49	61
905	Matthias Schreck	2	33	11	24
905	Yia-Chung Chang	3	37	18	24
905	Elisabetta Comini	3	58	21	39
905	Gyula Eres	5	50	5	25
905	Alberto Vomiero	3	42	15	53
905	Eric Rolfe Waclawik	1	20	31	48
905	Anthony D Rollett	1	20	48	64
905	Rachel Goldman	9	91	3	5
905	Hartmut Höchst	1	20	11	9
905	William R Harrell	1	20	3	3
905	Sue Ann Bidstrup Allen	2	30	6	8
951	Yuzuru Takamura	1	19	33	44
951	Masao Morita	2	22	7	14
951	Patrizio Candeloro	2	31	7	24
951	Bing-Hung Chen	1	19	20	35
951	José Cotrino Bautista	1	19	20	34
951	James G Kempf	1	19	8	10
951	Jeffrey Terry	1	19	13	22
951	Isabelle Sagnes	1	19	54	51
951	Marc Cahay	4	39	7	8
951	Rajesh Shukla	2	28	6	5
951	Kohei Uosaki	1	19	55	80
951	Yasuhide Ohno	3	42	4	10
951	Paul J Kelly	1	19	7	14
951	Meyya Meyyappan	2	36	39	70
951	Wensyang Hsu	1	19	13	10
951	Alberto Palmero	1	19	12	19
951	Juan P Espinós	1	19	33	45
951	Mathias Göken	1	19	30	40
951	Andrey S Baturin	2	22	9	7
951	Gilles Patriarche	2	23	47	66
951	Guido Faglia	1	19	21	40
951	David D Nolte	3	32	14	23
951	Victor J Rico	1	19	13	26
951	Alessandro Carpentiero	4	45	2	4
951	Toshiyuki Fujimoto	1	19	11	8
951	Agustín R. González-Elipe	1	19	76	89
951	Watson Loh	1	19	23	35
951	Angel Barranco	1	19	33	44
951	Teiko Seki	1	19	1	2
951	David V Tsu	1	19	6	9
951	Kevin Edmonds	1	19	14	22
951	Alexander A Puretzky	1	19	35	54
951	M W Fay	1	19	20	34
951	Giorgio Sberveglieri	2	38	30	64
951	David B Geohegan	1	19	37	52
951	Hiroshi Okada	1	19	21	15
951	Roland Brock	1	19	29	54
951	Chennupati Jagadish	2	29	54	66
951	Aristide Lemaitre	1	19	50	46
951	Lay Kee Ang	1	19	32	52
951	Masataka Higashiwaki	3	27	11	20
951	Camilla Baratto	1	19	15	27
951	Mark S Hybertsen	2	37	14	31
951	Lothar Bischoff	2	23	7	15
951	P Boolchand	1	19	21	24
951	Eric Gullikson	2	22	2	5
951	B N Dev	1	19	10	9
999	Giovanni Bruno	3	29	9	24
999	Igor V Shvets	2	32	22	30

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Journal of Vacuum Science & Technology an Official Journal of the American Vacuum Society B, Microelectronics Processing and Phenomena

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