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Journal of Vacuum Science & Technology an Official Journal of the American Vacuum Society B, Microelectronics Processing and Phenomena
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top-authors
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most-cited
Journal of Vacuum Science & Technology an Official Journal of the American Vacuum Society B, Microelectronics Processing and Phenomena
1.6
(top 20%)
impact factor
12.2K
(top 2%)
papers
244.4K
(top 2%)
citations
143
(top 5%)
h
-index
1.6
(top 50%)
extended IF
12.2K
all documents
252.7K
doc citations
229
(top 5%)
g
-index
Top Authors (by article citations)
#
Author
Articles
Citations
R ARank
R CRank
1
Stephen Y Chou
3
1,093
2
1
2
Roya Maboudian
1
787
2
1
3
Yves Caudano
1
298
1
1
3
Yves Chabal
1
298
1
1
5
A Majumdar
1
133
2
4
6
Cees Dekker
2
133
2
3
6
Alexey Bezryadin
1
123
1
2
6
A Bezryadin
1
123
1
2
9
Chris Jacobsen
1
119
1
2
10
Zoltán L Horváth
1
78
1
1
11
Robert J Hamers
1
76
2
3
12
Hiroyuki Tanaka
1
59
1
1
13
Bruce E Koel
1
53
3
3
13
Tadatomo T Suga
3
82
1
1
13
Vincent Ch Lee
3
82
1
1
16
Hideki Hasegawa
2
88
2
1
17
Walter Arnold
1
51
1
4
18
Jabez J Mcclelland
1
50
1
2
18
Steven L Rolston
1
50
2
2
18
J D Gillaspy
1
50
3
4
21
Peter B Lerner
1
48
1
1
23
Kenneth A Goldberg
1
39
1
1
24
Olga E Glukhova
1
35
1
2
25
Takayuki Uchihashi
2
43
1
2
25
Yukio Hasegawa
5
98
1
2
25
Joseph H Thywissen
1
34
1
1
25
Nikolai B Zhitenev
1
34
2
2
25
Mineharu Suzuki
1
34
1
2
25
Ray Ashoori
1
34
2
2
31
Ilana Bar
1
32
2
3
32
Tetsuji Yasuda
3
47
2
3
32
Sankar Das Sarma
1
30
4
4
32
Evangelos Gogolides
1
30
1
1
32
Akihiro Ohtake
3
47
1
1
36
Bruce W Wessels
1
29
3
2
37
Hiroshi Masuhara
1
28
6
9
37
Hideki Fujiwara
1
28
1
2
37
Keiji Sasaki
1
28
2
5
40
Hongxing Jiang
2
35
2
3
40
Jingyu Lin
2
35
2
3
42
David E Aspnes
2
50
2
2
42
Uwe Rossow
3
58
1
1
44
Christophe Cardinaud
1
24
2
4
45
Tilman Pfau
1
23
3
8
46
Ken Okano
1
22
1
1
46
Giacomo Torzo
1
22
1
1
46
Takatoshi Yamada
1
22
1
2
49
Suresh Valiyaveettil
1
21
1
3
49
Steven De Feyter
1
21
3
5
49
R Jürgen Behm
1
21
7
8
49
Mark J Hagmann
2
41
1
1
53
Kwang-Ryeol Lee
1
20
2
2
53
Mark Hagmann
1
20
1
2
55
Yuzuru Takamura
1
19
1
1
55
Randall Feenstra
1
19
1
2
55
Ole Hansen
2
26
1
1
55
Rachel Goldman
1
19
1
1
59
Gregory N Parsons
1
18
3
3
59
Gary W Rubloff
1
18
2
1
59
John Bowers
1
18
3
4
62
Matthias Bode
1
17
2
4
62
Roland Wiesendanger
2
30
3
6
62
J Alexander Liddle
4
31
1
3
62
Jeffrey Bokor
1
17
3
3
62
Joan R Morante
2
26
7
5
67
Stephen J Pearton
3
36
7
10
67
Sam Fong-Yau Li
1
16
2
5
67
Omer Nur
1
16
1
1
67
Shunji Goto
1
16
1
1
67
Karthik Ramakrishnan Vaidyanathan
1
16
1
1
72
Satoru Fujisawa
1
15
1
1
72
Fabio Beltram
1
15
2
1
72
Ciro Cecconi
1
15
1
1
72
Xu Jianbin
1
15
4
2
76
Hiroshi Hiroshima
2
21
1
3
76
Paul Chu
1
14
3
7
76
Konstantinos P Giapis
1
14
4
5
76
Ioannis G Karafyllidis
1
14
1
4
80
Stella Pang
6
56
1
1
80
David A Ritchie
2
19
6
6
80
M Pepper
1
13
5
6
83
steven Denbaars
1
11
9
13
83
D G Hasko
1
11
2
4
85
Kyu Chang Park
1
10
1
3
85
Lucia Sorba
1
10
3
3
85
Gregory L Snider
1
10
1
3
85
Edward T Yu
1
10
3
6
85
Steven J Eppell
1
10
1
2
85
Fredy R Zypman
1
10
1
1
85
Jin Jang
1
10
3
3
85
Stefan Heun
1
10
1
3
85
Alexei O Orlov
1
10
1
2
85
Gary H Bernstein
1
10
1
2
95
Masayuki Abe
1
9
1
1
95
Mattias Beck
1
9
1
1
95
Francesca Peiro
1
9
3
2
95
Jerry Bernholc
1
9
2
6
95
Marco Buongiorno Nardelli
1
9
2
4
100
Toshishige Yamada
1
8
1
2
100
Antonella Poggi
1
8
1
2
100
Karsten Hinrichs
1
8
1
2
100
Keh-Yung Cheng
1
8
1
1
100
Hans M Hertz
1
8
1
2
105
Dietrich R.T. Zahn
1
7
6
7
105
Nicola Lisi
1
7
3
5
105
Satoshi Haraichi
1
7
1
1
105
Martin Kristensen
1
7
1
1
105
Leonidas E Ocola
1
7
1
1
110
Ivan Kostic ̌
1
6
1
1
110
Wataru Mizutani
1
6
3
5
110
Patrik Schmuki
1
6
2
4
110
Javier Jiménez-Leube
2
7
1
1
110
Kin M Yu
1
6
2
4
115
Gerd Bacher
1
5
3
7
115
Michael L Myrick
1
5
1
3
115
Detlef Hommel
1
5
7
7
118
Liming Dai
1
4
2
5
118
Thorsten Hesjedal
1
4
1
4
118
Luiz Cury
1
4
1
2
118
Gilles Patriarche
1
4
2
7
118
Manuel Ignacio Marques
1
4
1
3
118
Hadis Morkoç
1
4
2
4
124
Panagiotis Argitis
1
3
1
2
124
Katsuhiko Higuchi
1
3
1
1
124
Michael Rieth
1
3
1
2
124
Peng Zhang
1
3
2
3
128
Thirumalai Venkatesan
1
2
6
12
128
Mikhail Lebedev
1
2
2
5
128
Alain Cappy
1
2
2
2
128
Michael H Hecht
1
2
1
6
128
Alexander M Mintairov
1
2
1
1
128
Bruce D Terris
1
2
1
2
128
Ivan Maximov
1
2
1
3
135
Jonder Morais
1
1
2
5
135
Juraj Darmo
1
1
1
4
135
Jose Javier Serrano Olmedo
1
1
1
2
135
Dongxia Shi
1
1
1
2
135
Patrick J Fay
1
1
3
6
135
Gyula Eres
1
1
1
1
135
Jan Kuzmik
1
1
1
1
142
Hongqi Xu
1
0
2
3
142
N Goldsman
1
0
1
2
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