Citation of paper, Chemical amplification in the design of dry developing resist materials

Authors Citing This Paper

AuthorCiting PapersAuthor's PapersAuthor's CitationsAuthor's IF
Kazumasa Okamoto20911,5081.2
Christopher K Ober1651225,9963.4
Akinori Saeki1035013,8464.9
Michael O Thompson81945,0231.4
Takahiro Kozawa6912,4062.1
Olivier Coulembier51544,4473.7
Charles E Diesendruck5703,2847.6
Armin Knoll4894,1834.1
Toshiyuki Oyama4374771.1
Julien De Winter31412,4452.9
Philippe Dubois369539,2474.9
Shu Seki351219,9584.6
Paul A Kohl32206,2663.7
Urs Duerig2431,4813.8
Amir2132314.2
Eriko Sato2631,0521.8
Alex P G Robinson2465731
Jane Frommer2755,3273.6
Ireneusz Janik2348061.7
William Dichtel218819,84117
Michael B Larsen2128049.8
Ayusman Sen235125,0135.6
Anzar Khan2823,0694.5
Stefan Düsterer11466,9853.8
Alexander Föhlisch12126,0663.2
Ramakrishnan Ganesan1661,1533
Carlos SÁnchez1852,7173.5
Tsuyohiko Fujigaya11524,6303.7
Bo Fan1244274.9
Jian Zhang19891.7
William T A Harrison11271,1440.8
Andrea Raab1904,8895.7
Georgiy V Malkov1361300.8
Bryan D Vogt11995,3173.4
Nikolai Salashchenko11591,2371
Gabriela Albara Lando14332.6
Jerome Peter1261932.3
Feng Wang191363.4
Frederick L Beyer1784,5054.6
Michael John Plater1831,4971
Ryoichi Suzuki13154,6990.9
Christopher L Plantz13453.7
Lionel Buchaillot11011,5201.1
Alexey Pestov14362.4
Daniel Eduardo Weibel1742,1062.6
Sergey D Zaitsev1361610.6
Paul Scheier149410,6891.7
Alexander A Mikhailovsky1718,6218.7
Christopher Barner-Kowollik179932,4944.8
Shinji Yamakawa14110.8

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Japanese Journal of Applied Physics551.4
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Applied Physics Express62.4★★
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Frontiers of Nanoscience50.7
Macromolecular Rapid Communications54.8★★
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Polymers for Advanced Technologies33.2★★
Polymer Journal32.7★★
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Polymer Engineering and Science32.3★★
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Advanced Materials324★★★
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Langmuir34★★
Advanced Materials for Optics and Electronics2
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Russian Chemical Reviews26.8
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Radiation Physics and Chemistry22.5★★
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Radioisotopes10.1
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