1.3(top 13%)
Impact Factor
1.4(top 13%)
extended IF
43(top 9%)
H-Index
2.4K
authors
3.6K
papers
26.9K
citations
1.3K
citing journals
17.8K
citing authors

Most Cited Articles of Journal of Vacuum Science and Technology B:Nanotechnology and Microelectronics

TitleYearCitations
Phase change memory technology2010638
Access devices for 3D crosspoint memorya)2014220
Plasma-polymer interactions: A review of progress in understanding polymer resist mask durability during plasma etching for nanoscale fabrication2011144
Helium ion microscopy2014137
Synthesis, properties, and applications of silicon nanocrystals201397
Review Article: FePt heat assisted magnetic recording media201696
Low-dimensional oxide nanostructures on metals: Hybrid systems with novel properties201091
Ferroelectric phenomena in Si-doped HfO2 thin films with TiN and Ir electrodes201488
Wafer-scale epitaxial graphene growth on the Si-face of hexagonal SiC (0001) for high frequency transistors201086
Electron beam lithography writing strategies for low loss, high confinement silicon optical waveguides201186
Recent developments and design challenges in continuous roller micro- and nanoimprinting201283
Electrical behavior of β-Ga2O3 Schottky diodes with different Schottky metals201776
Atomic diffusion bonding of wafers with thin nanocrystalline metal films201076
Sub-10-nm half-pitch electron-beam lithography by using poly(methyl methacrylate) as a negative resist201076
Multilayer MoS2 transistors enabled by a facile dry-transfer technique and thermal annealing201474
New method for determining flat-band voltage in high mobility semiconductors201371
Review Article: Progress in fabrication of transition metal dichalcogenides heterostructure systems201767
Combined helium ion beam and nanoimprint lithography attains 4 nm half-pitch dense patterns201266
Monolithic integration of silicon CMOS and GaN transistors in a current mirror circuit201263
Large-area fabrication of high aspect ratio tantalum photonic crystals for high-temperature selective emitters201362
Review Article: Synthesis, properties, and applications of fluorescent diamond particles201961
Low-temperature plasmas in carbon nanostructure synthesis201360
Design and focused ion beam fabrication of single crystal diamond nanobeam cavities201159
Vertical and lateral drift corrections of scanning probe microscopy images201058
Reducing damage to Si substrates during gate etching processes by synchronous plasma pulsing201058