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Journal of Vacuum Science and Technology B:Nanotechnology and Microelectronics
›
Top Articles
Journal of Vacuum Science and Technology B:Nanotechnology and Microelectronics
Electrical Engineering
,
Chemical Engineering
,
Physics
,
Materials Science
,
Chemistry
,
Inorganic Chemistry
,
Condensed Matter Physics
,
Materials Chemistry
1.3
(top 13%)
Impact Factor
1.4
(top 13%)
extended IF
43
(top 9%)
H-Index
2.4K
authors
3.6K
papers
26.9K
citations
1.3K
citing journals
17.8K
citing authors
Most Cited Articles of Journal of Vacuum Science and Technology B:Nanotechnology and Microelectronics
Title
Year
Citations
Phase change memory technology
2010
638
Access devices for 3D crosspoint memorya)
2014
220
Plasma-polymer interactions: A review of progress in understanding polymer resist mask durability during plasma etching for nanoscale fabrication
2011
144
Helium ion microscopy
2014
137
Synthesis, properties, and applications of silicon nanocrystals
2013
97
Review Article: FePt heat assisted magnetic recording media
2016
96
Low-dimensional oxide nanostructures on metals: Hybrid systems with novel properties
2010
91
Ferroelectric phenomena in Si-doped HfO2 thin films with TiN and Ir electrodes
2014
88
Wafer-scale epitaxial graphene growth on the Si-face of hexagonal SiC (0001) for high frequency transistors
2010
86
Electron beam lithography writing strategies for low loss, high confinement silicon optical waveguides
2011
86
Recent developments and design challenges in continuous roller micro- and nanoimprinting
2012
83
Electrical behavior of β-Ga2O3 Schottky diodes with different Schottky metals
2017
76
Atomic diffusion bonding of wafers with thin nanocrystalline metal films
2010
76
Sub-10-nm half-pitch electron-beam lithography by using poly(methyl methacrylate) as a negative resist
2010
76
Multilayer MoS2 transistors enabled by a facile dry-transfer technique and thermal annealing
2014
74
New method for determining flat-band voltage in high mobility semiconductors
2013
71
Review Article: Progress in fabrication of transition metal dichalcogenides heterostructure systems
2017
67
Combined helium ion beam and nanoimprint lithography attains 4 nm half-pitch dense patterns
2012
66
Monolithic integration of silicon CMOS and GaN transistors in a current mirror circuit
2012
63
Large-area fabrication of high aspect ratio tantalum photonic crystals for high-temperature selective emitters
2013
62
Review Article: Synthesis, properties, and applications of fluorescent diamond particles
2019
61
Low-temperature plasmas in carbon nanostructure synthesis
2013
60
Design and focused ion beam fabrication of single crystal diamond nanobeam cavities
2011
59
Vertical and lateral drift corrections of scanning probe microscopy images
2010
58
Reducing damage to Si substrates during gate etching processes by synchronous plasma pulsing
2010
58
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How are inpact factors calculated?
The impact factor (IF) is calculated by counting citations from peer-reviewed journals only.
extended IF
also counts citations from books and conference papers. However, no patent, abstract, working papers, online documents, etc., are covered.
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