Microsystem Technologies

1.9(top 20%)

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6.0K(top 5%)

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65.1K(top 5%)

citations

71(top 10%)

h-index

2.0(top 20%)

impact factor

6.4K

all documents

69.1K

doc citations

100(top 10%)

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Top Articles

#	Title	Journal	Year	Citations
1	Hot embossing - The molding technique for plastic microstructures	Microsystem Technologies	1998	304
2	Current micropump technologies and their biomedical applications	Microsystem Technologies	2009	278
3	Roughness optimization for biomimetic superhydrophobic surfaces	Microsystem Technologies	2005	270
4	An overview of additive manufacturing (3D printing) for microfabrication	Microsystem Technologies	2017	226
5	Micromolded easy-assembly multi fiber connector: RibCon ®	Microsystem Technologies	2002	198
6	Fabrication of photoplastic high-aspect ratio microparts and micromolds using SU-8 UV resist	Microsystem Technologies	1998	192
7	Hot embossing of high performance polymers	Microsystem Technologies	2011	186
8	Casimir effect on the pull-in parameters of nanometer switches	Microsystem Technologies	2005	175
9	Design principles and considerations for the ‘ideal’ silicon piezoresistive pressure sensor: a focused review	Microsystem Technologies	2014	172
10	Mems inertial power generators for biomedical applications	Microsystem Technologies	2006	171
11	Vibration energy scavenging via piezoelectric bimorphs of optimized shapes	Microsystem Technologies	2010	170
12	Microstereophotolithography using a liquid crystal display as dynamic mask-generator	Microsystem Technologies	1997	163
13	Glass frit bonding: an universal technology for wafer level encapsulation and packaging	Microsystem Technologies	2005	163
14	Application of piezoelectric layers in electrostatic MEM actuators: controlling of pull-in voltage	Microsystem Technologies	2006	163
15	A micro electromagnetic low level vibration energy harvester based on MEMS technology	Microsystem Technologies	2009	162
16	Interlayer cooling potential in vertically integrated packages	Microsystem Technologies	2009	154
17	Polymer microfabrication technologies	Microsystem Technologies	2002	151
18	Performance and simulation of thermoplastic micro injection molding	Microsystem Technologies	2002	150
19	Development of a piezoelectric polymer-based sensorized microgripper for microassembly and micromanipulation	Microsystem Technologies	2004	134
20	A new S-shaped MEMS PZT cantilever for energy harvesting from low frequency vibrations below 30 Hz	Microsystem Technologies	2012	130
21	Super-fine ink-jet printing: toward the minimal manufacturing system	Microsystem Technologies	2005	123
22	Power processing circuits for electromagnetic, electrostatic and piezoelectric inertial energy scavengers	Microsystem Technologies	2007	123
23	Shrinkage ratio of PDMS and its alignment method for the wafer level process	Microsystem Technologies	2007	122
24	Injection molding of microstructured components from plastics, metals and ceramics	Microsystem Technologies	2002	119
25	Lab-on-a-chip: a component view	Microsystem Technologies	2010	119
26	Highly sensitive nonlinear photonic crystal fiber based sensor for chemical sensing applications	Microsystem Technologies	2021	114
27	Patterned media for future magnetic data storage	Microsystem Technologies	2006	113
28	Replication of microlens arrays by injection molding	Microsystem Technologies	2004	111
29	Reduction of diffraction effect of UV exposure on SU-8 negative thick photoresist by air gap elimination	Microsystem Technologies	2002	107
30	Exploring the applicability of gradient elasticity to certain micro/nano reliability problems	Microsystem Technologies	2009	106
31	A review on pH sensitive materials for sensors and detection methods	Microsystem Technologies	2017	104
32	Enhanced sensitivity of cancer cell using one dimensional nano composite material coated photonic crystal	Microsystem Technologies	2019	104
33	Wide bandgap semiconductor thin films for piezoelectric and piezoresistive MEMS sensors applied at high temperatures: an overview	Microsystem Technologies	2014	103
34	Injection molding and related techniques for fabrication of microstructures	Microsystem Technologies	1997	101
35	New plastification concepts for micro injection moulding	Microsystem Technologies	2002	101
36	Injection molding of polymeric LIGA HARMs	Microsystem Technologies	1999	100
37	A roller embossing process for rapid fabrication of microlens arrays on glass substrates	Microsystem Technologies	2006	100
38	An optimal analysis of radiated nanomaterial flow with viscous dissipation and heat source	Microsystem Technologies	2019	100
39	Electromechanical model of RF MEMS switches	Microsystem Technologies	2003	99
40	Polymeric microneedle fabrication using a microinjection molding technique	Microsystem Technologies	2007	98
41	High-resolution eddy current sensor system for quality assessment of carbon fiber materials	Microsystem Technologies	2010	97
42	Injection molding of components for microsystems	Microsystem Technologies	2001	96
43	Fabrication of microneedle array using LIGA and hot embossing process	Microsystem Technologies	2005	95
44	A multipurpose electrothermal microgripper for biological micro-manipulation	Microsystem Technologies	2013	95
45	Thermal buckling and forced vibration characteristics of a porous GNP reinforced nanocomposite cylindrical shell	Microsystem Technologies	2020	93
46	Silicon hotplates for metal oxide gas sensor elements	Microsystem Technologies	1997	92
47	Soft X-ray lithography of high aspect ratio SU8 submicron structures	Microsystem Technologies	2008	92
48	Control tribological and mechanical properties of MEMS surfaces. Part 1: critical review	Microsystem Technologies	1999	91
49	Rapid replication of polymeric and metallic high aspect ratio microstructures using PDMS and LIGA technology	Microsystem Technologies	2002	91
50	Research development of silicon MEMS gyroscopes: a review	Microsystem Technologies	2015	91

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