2.3(top 20%)
impact factor
12.5K(top 2%)
papers
166.7K(top 5%)
citations
109(top 5%)
h-index
2.3(top 20%)
impact factor
13.3K
all documents
173.3K
doc citations
162(top 5%)
g-index

Top Articles

#TitleJournalYearCitations
1Fabrication of microstructures with high aspect ratios and great structural heights by synchrotron radiation lithography, galvanoforming, and plastic moulding (LIGA process)Microelectronic Engineering19861,058
2Carbon nanotubes in interconnect applicationsMicroelectronic Engineering2002566
3Nanofabrication by electron beam lithography and its applications: A reviewMicroelectronic Engineering2015509
4Point-of-care testing (POCT) diagnostic systems using microfluidic lab-on-a-chip technologiesMicroelectronic Engineering2015403
5PDMS-based microfluidic devices for biomedical applicationsMicroelectronic Engineering2002399
6Lab-on-a-chip devices: How to close and plug the lab?Microelectronic Engineering2015388
7Towards implementation of a nickel silicide process for CMOS technologiesMicroelectronic Engineering2003387
8Optimization of poly-di-methyl-siloxane (PDMS) substrates for studying cellular adhesion and motilityMicroelectronic Engineering2008367
9Imprint lithography with sub-10 nm feature size and high throughputMicroelectronic Engineering1997353
10Ultrathin high-K metal oxides on silicon: processing, characterization and integration issuesMicroelectronic Engineering2001346
11Flow behaviour of thin polymer films used for hot embossing lithographyMicroelectronic Engineering2000344
12Formation of more stable hydrophilic surfaces of PDMS by plasma and chemical treatmentsMicroelectronic Engineering2006331
13Emerging trends in wide band gap semiconductors (SiC and GaN) technology for power devicesMicroelectronic Engineering2018329
14On the scaling issues and high-κ replacement of ultrathin gate dielectrics for nanoscale MOS transistorsMicroelectronic Engineering2006325
15Nanotribology and nanomechanics of MEMS/NEMS and BioMEMS/BioNEMS materials and devicesMicroelectronic Engineering2007320
16Novel hydrogen gas sensor based on single ZnO nanorodMicroelectronic Engineering2008320
17Measurement of nonlinear mechanical properties of PDMS elastomerMicroelectronic Engineering2011302
18NiSi salicide technology for scaled CMOSMicroelectronic Engineering2002283
19Ultrathin HfO2 films grown on silicon by atomic layer deposition for advanced gate dielectrics applicationsMicroelectronic Engineering2003275
20Direct laser writing: Principles and materials for scaffold 3D printingMicroelectronic Engineering2015272
21Hierarchical roughness makes superhydrophobic states stableMicroelectronic Engineering2007258
22Gold cleaning methods for electrochemical detection applicationsMicroelectronic Engineering2009257
23A comparative study of Pd/Sn/Au, Au/Ge/Au/Ni/Au, Au-Ge/Ni and Ni/Au-Ge/Ni ohmic contacts to n-GaAsMicroelectronic Engineering1998250
24Improving stamps for 10 nm level wafer scale nanoimprint lithographyMicroelectronic Engineering2002250
25Roadmap for 22nm and beyond (Invited Paper)Microelectronic Engineering2009245
26Brain-inspired computing with resistive switching memory (RRAM): Devices, synapses and neural networksMicroelectronic Engineering2018231
27Beyond the lateral flow assay: A review of paper-based microfluidicsMicroelectronic Engineering2019230
28Fabrication and characterization of heterostructures with subnanometer thicknessMicroelectronic Engineering1984219
29High-k dielectrics for future generation memory devices (Invited Paper)Microelectronic Engineering2009218
30Development of a flexible PDMS capacitive pressure sensor for plantar pressure measurementMicroelectronic Engineering2012213
31Multi-gate SOI MOSFETsMicroelectronic Engineering2007207
32Superhydrophobic surfaces fabricated by nanoimprint lithographyMicroelectronic Engineering2006204
33Fabrication of diffraction gratings for hard X-ray phase contrast imagingMicroelectronic Engineering2007204
34A contribution to the flow behaviour of thin polymer films during hot embossing lithographyMicroelectronic Engineering2001194
35Design and dynamics of a 3-DOF flexure-based parallel mechanism for micro/nano manipulationMicroelectronic Engineering2010194
36Influence of the electron mean free path on the resistivity of thin metal filmsMicroelectronic Engineering2004193
37Graphene and carbon nanotube (CNT) in MEMS/NEMS applicationsMicroelectronic Engineering2015191
38An overview of through-silicon-via technology and manufacturing challengesMicroelectronic Engineering2015190
39Pattern transfer: Self-assembled monolayers as ultrathin resistsMicroelectronic Engineering1996187
40Hierarchical micro and nano structured, hydrophilic, superhydrophobic and superoleophobic surfaces incorporated in microfluidics, microarrays and lab on chip microsystemsMicroelectronic Engineering2015187
41Electron beam lithography—Resolution limitsMicroelectronic Engineering1996184
42Challenges, developments and applications of silicon deep reactive ion etchingMicroelectronic Engineering2003180
43An overview of supercritical CO2 applications in microelectronics processingMicroelectronic Engineering2003180
44One-step 3D shaping using a gray-tone mask for optical and microelectronic applicationsMicroelectronic Engineering1994179
45Ultrahigh density, high-data-rate NEMS-based AFM data storage systemMicroelectronic Engineering1999179
46Micropumps and biomedical applications – A reviewMicroelectronic Engineering2018178
47Temperature and frequency dependent electrical and dielectric properties of Al/SiO2/p-Si (MOS) structureMicroelectronic Engineering2005170
48Sub-50 nm period patterns with EUV interference lithographyMicroelectronic Engineering2003168
49Dielectric spectroscopy studies on (PVP+PVA) polyblend filmMicroelectronic Engineering2006168
50High-temperature lead-free solder alternativesMicroelectronic Engineering2011167