Journal of Vacuum Science & Technology an Official Journal of the American Vacuum Society B, Microelectronics Processing and Phenomena

1.6(top 20%)

impact factor

12.2K(top 2%)

papers

244.4K(top 2%)

citations

143(top 5%)

h-index

1.6(top 50%)

extended IF

12.2K

all documents

252.7K

doc citations

229(top 5%)

g-index

Top Authors (by article citations)

#	Author	Articles	Citations	R ARank	R CRank
1	Stephen J Pearton	10	711	3	2
2	Maciej Gutowski	1	251	2	1
3	Marya Lieberman	1	195	1	1
4	Yoshihiko Hirai	1	166	1	1
5	Akinori Saeki	1	124	1	1
6	Demir Akin	1	112	1	2
7	Xinglong Wu	1	106	4	1
7	Paul Chu	2	108	7	4
7	Paul K Chu	2	108	4	2
10	Susanne Stemmer	1	96	4	4
11	Evangelos Gogolides	2	110	2	2
12	A Paul Alivisatos	1	92	4	7
12	J Alexander Liddle	7	214	1	2
15	Ilesanmi Adesida	1	88	1	1
16	Takayuki Hoshino	3	127	1	1
17	Ralph G Nuzzo	1	72	3	3
18	Junji Kotani	1	70	1	1
18	Hideki Hasegawa	2	94	1	3
20	Anders S Kristensen	1	66	1	2
21	Michael David Dickey	1	62	1	1
22	Petr Formanek	2	64	1	2
22	Filippo Giannazzo	3	103	1	1
22	Roland Wiesendanger	1	61	6	6
22	Thilo Glatzel	1	61	2	2
26	Hei Wong	1	58	1	1
27	Roger H. French	1	53	1	1
28	Chad A Mirkin	1	52	7	10
29	Kenji Yamazaki	1	51	2	2
29	Zbig R Wasilewski	1	51	2	4
29	Stan Veprek	1	51	2	4
32	Richard J Colton	1	50	1	1
33	Dale K Hensley	2	76	1	2
33	Michael L Simpson	2	76	1	4
35	Brian Gorman	1	47	3	1
35	Minjoo L Lee	1	47	4	3
37	Ant Ural	1	46	1	2
37	Alireza Nojeh	2	61	1	1
37	Guanzhou Zhu	2	61	1	2
37	Yongqi Fu	1	46	1	1
37	Alexander A Balandin	1	46	4	3
42	Steven George	1	45	3	8
42	Gwo-Ching Wang	1	45	3	4
44	Nicholas X. Fang	1	44	1	6
44	Katsuhisa Murakami	2	70	1	1
44	David Ferry	2	46	1	4
47	Tse Nga Ng	1	43	1	1
47	John A Marohn	1	43	1	3
49	Lucia Sorba	2	50	1	2
49	Ivana Vobornik	1	42	2	1
49	Flavio Capotondi	1	42	1	1
49	Todd L Williamson	1	42	1	1
53	Jiwang Yan	1	41	1	4
53	Zhi Liu	1	41	1	2
55	Tim D Veal	1	40	4	3
55	Louis F J Piper	1	40	2	2
55	Yogesh B Gianchandani	1	40	1	1
55	Amar S Basu	1	40	1	1
55	S Simon Wong	1	40	1	1
55	Mingyao Zhu	1	40	1	2
55	Dennis M Manos	1	40	1	2
55	Feng-Chih Chang	1	40	5	6
63	Kazumasa Okamoto	1	39	2	2
63	Ji-Myon Lee	1	39	1	1
63	Kug-Seung Lee	1	39	1	1
66	Jason D Fowlkes	2	61	1	1
66	O'Faolain Liam	1	38	1	2
66	Thomas F Krauss	1	38	1	4
69	Da-Bing Li	1	37	2	2
69	Gottlieb S Oehrlein	1	37	2	2
71	Romuald Houdré	1	36	4	4
71	Seiji Samukawa	2	52	2	2
71	Srinivasan Anand	2	44	2	5
71	Masahiko Ishida	2	45	2	3
75	Keith P Johnston	1	35	7	9
75	Jeong-Young Ji	1	35	1	1
77	Achim Trampert	1	34	3	6
77	J-M Chauveau	1	34	1	2
77	Seongil Im	1	34	1	3
77	Eric Tournié	1	34	4	3
81	Likun Pan	1	33	2	4
81	Beng Kang Tay	2	46	5	10
81	Christopher K Ober	1	33	3	11
81	Stella Pang	3	77	1	1
81	Chang Q Sun	1	33	4	9
81	Gleason Kk	1	33	2	5
87	Ralf K Heilmann	1	32	1	3
87	L I Goray	1	32	1	1
87	Masayuki Shimojo	1	32	2	3
87	Meiyong Liao	1	32	2	2
87	Chih-Hao Chang	1	32	1	1
92	Kenneth A Goldberg	2	60	2	1
92	Chuan-Pu Liu	1	31	1	1
94	Jorge A Kittl	1	30	3	3
95	Brian Bennett	1	29	2	2
95	Yordan M Georgiev	1	29	1	1
95	Seoung Gil Yoon	2	57	5	3
95	Jihoon Choi	1	29	1	1
95	Hyeong Joon Kim	1	29	3	1
100	Nils G Weimann	1	28	2	2
100	Toshimasa Fujisawa	1	28	3	3
102	Guang-Rong Li	1	27	1	1
102	Chang-Jiu Li	1	27	5	7
102	Guan-Jun Yang	1	27	1	4
102	Philip D Rack	1	27	2	1
106	Akhlesh Lakhtakia	1	26	7	9
106	Tsuyoshi Moriya	1	26	1	1
108	Richard Forbes	1	25	1	2
109	Alexander Y Polyakov	5	49	1	1
109	Steven Brueck	6	74	1	4
109	Nima Ghalichechian	1	24	1	2
109	Nobuyoshi Koshida	2	41	1	1
109	Heh-Nan Lin	1	24	1	1
109	Sara Bals	1	24	1	2
109	Nikolai B Smirnov	5	49	1	2
109	Badreddine M Assouar	1	24	2	3
109	Victor Micheli	1	24	1	1
109	Chun-Yu Lin	1	24	1	1
109	A L David Kilcoyne	1	24	2	3
109	Omar Elmazria	1	24	3	3
109	Tolek Tyliszczak	1	24	1	3
123	Thomas Schuelke	1	23	1	1
123	Celestino Padeste	1	23	1	3
123	Takahito Ono	1	23	1	3
123	Richard J Blaikie	1	23	2	4
123	Selmiye Alkan Gürsel	1	23	1	5
123	Patrick J Fay	1	23	2	2
123	Robert J Nemanich	1	23	5	7
130	Alois Lugstein	1	21	2	1
130	Jun Chen	1	21	2	5
130	Edward T Yu	2	28	2	2
130	Helmut Schift	1	21	1	2
130	Seung M Oh	1	21	1	3
130	Sunggook Park	1	21	1	3
130	Darrell G Schlom	1	21	7	10
137	Tongjun Yu	1	20	2	2
137	André Vantomme	1	20	3	5
137	Dimitrios Maroudas	1	20	1	6
137	Lars Montelius	1	20	3	5
137	Bram Hoex	1	20	1	2
137	Shengqiang Zhou	1	20	1	1
137	Eray S Aydil	1	20	2	4
137	Qiang Zhao	1	20	1	1
146	Alan C Seabaugh	1	18	2	2
146	Marcelo Davanco	1	18	1	1
146	Yasuhide Ohno	1	18	1	2
146	Vilson Rosa Almeida	1	18	2	6
146	Daniel J Bluementhal	1	18	3	3
146	steven Denbaars	1	18	6	9
146	Roberto R Panepucci	1	18	2	4
146	Toshihito Ohtake	1	18	2	2
146	Paul Ruchhoeft	1	18	1	1
155	Whikun Yi	1	17	1	1
155	Daewon Sohn	1	17	1	4
155	Yanyi Huang	1	17	4	6
155	George T Paloczi	1	17	2	4
155	Jacob Scheuer	1	17	1	5
160	David Eon	1	16	1	2
160	Panagiotis Argitis	1	16	2	4
160	Irina A Buyanova	1	16	6	5
160	David J Lockwood	1	16	2	6
160	Weimin M Chen	1	16	7	5
160	Peter J Burke	1	16	3	6
160	Christophe Cardinaud	1	16	1	3
160	Shigeki Kawai	1	16	2	1
160	Ofer Levi	1	16	1	1
169	Terry Alford	1	15	1	2
169	Valeriu Filip	2	21	1	1
169	Ai Qun Liu	1	15	3	4
169	Mathieu G Silly	1	15	1	2
169	Shin-Ichi Kanemaru	1	15	3	4
169	Masayoshi Nagao	1	15	1	2
169	Veena Misra	1	15	3	6
169	Chang-Koo Kim	1	15	1	2
169	Kazutaka Mitsuishi	1	15	2	5
169	Corrado Crotti	1	15	1	2
169	Anupama Kaul	1	15	1	1
169	Abhishek Motayed	1	15	2	2
181	Uwe R Kortshagen	1	14	2	4
181	Jinn-Kong Sheu	1	14	2	6
181	Nagahiro Saito	1	14	3	5
181	Armin Gölzhäuser	1	14	1	3
181	Masahiko Ogura	1	14	2	2
181	Hiroyuki Sugimura	1	14	2	2
181	Mantu Hudait	1	14	1	2
181	Guillaume Micouin	1	14	1	1
181	L J Brillson	1	14	2	2
190	Andrew Bettiol	1	13	2	5
190	Luis Alves	1	13	1	2
190	Byung-Teak Lee	1	13	1	2
190	Evgeny V Zavedeev	1	13	1	1
190	Fan Ren	3	31	3	4
190	Vitaly I Konov	1	13	3	6
190	Andreas A Polycarpou	1	13	3	5
190	Sergei M Pimenov	1	13	2	5
190	Mark B H Breese	1	13	3	3
199	Patrizio Candeloro	1	12	2	3
199	Massimo Tormen	1	12	1	1
199	Carlo Carraro	1	12	1	3
199	Roya Maboudian	1	12	3	7
199	Luca Businaro	1	12	2	2
199	Muthu B J Wijesundara	1	12	2	5
199	Yahachi Saito	1	12	1	1
199	Filippo Romanato	1	12	1	1
199	Soonil Lee	3	22	1	1
199	Seung-Chang Lee	1	12	1	2
199	Jong Hyuk Yim	1	12	1	1
210	Jayne Wu	1	11	2	2
210	Jeffrey Bokor	1	11	2	4
210	Arun Persaud	2	21	1	1
210	Gary H Bernstein	1	11	2	3
214	Paul A Kohl	1	10	2	2
214	KIKUO OKUYAMA	1	10	6	13
214	Oskar Jon Painter	1	10	3	6
214	Giuseppe Gigli	3	23	1	5
214	Kaiyang Zeng	1	10	4	10
214	Manabu Shimada	1	10	2	3
214	D Greg Walker	1	10	1	1
214	Timothy S. Fisher	1	10	1	3
214	Paul Barclay	1	10	2	6
214	Subodh Mhaisalkar	1	10	3	5
214	Sven Achenbach	1	10	1	2
214	Edward Y Chang	1	10	1	1
214	Dario Pisignano	3	23	1	6
214	Marc H Weber	1	10	1	1
214	Rachel Goldman	2	16	1	2
214	Kazuki Denpoh	1	10	1	2
214	K G Lynn	1	10	1	3
214	Sue Ann Bidstrup Allen	1	10	2	2
232	Shigefusa Chichibu	2	11	2	5
232	Tsuyoshi Horikawa	1	9	2	2
232	Hiroyuki Ota	1	9	1	1
232	Philipp Ebert	1	9	1	3
232	M K Mondol	1	9	1	1
232	Tomoaki Nishimura	1	9	1	1
232	Toshihide Nabatame	1	9	2	4
232	Frans Munnik	1	9	1	1
240	Guglielmo G Condorelli	1	8	2	4
240	Dai-Viet N Vo	1	8	1	1
240	Soo Young Kim	1	8	1	3
240	Ru-Shi Liu	1	8	4	4
240	Johann P Reithmaier	1	8	5	7
240	Shane Johnson	1	8	1	2
240	Kathy Lüdge	1	8	1	1
240	Joe Bennett	1	8	1	2
240	Gray Lin	1	8	1	2
240	Francesco La Via	1	8	4	4
240	Ho Won Jang	1	8	2	4
240	Martin Kamp	2	12	2	7
240	Rino Choi	1	8	4	5
240	Jonathan S Varsanik	1	8	1	1
240	Marco Lazzarino	1	8	1	1
240	Daniele Ercolani	1	8	1	1
240	Jong-Lam Lee	1	8	3	5
240	Chang Seok Kang	1	8	2	3
240	Igor L Kuskovsky	1	8	3	4
259	Bernd Jenichen	1	7	2	4
259	Giovanni Bruno	1	7	3	6
259	Euijoon Yoon	1	7	1	2
259	Gary W Rubloff	1	7	1	4
259	Dillip Kumar Satapathy	1	7	1	2
259	Ravi Bathe	1	7	1	3
259	Maria Losurdo	1	7	3	6
259	Samit K Ray	1	7	2	3
259	Werner Prost	1	7	1	5
259	Randall A Laviolette	1	7	2	2
259	Jong-Ho Lee	1	7	1	1
259	Clifford L Henderson	1	7	3	3
259	Bruce W Smith	1	7	1	1
273	Mohamed Abdel-Rahman	1	6	1	2
273	Gregory L Snider	2	10	1	1
273	Sangtae Kim	1	6	2	2
273	Ganesh Balakrishnan	1	6	2	2
273	Alexei O Orlov	2	10	1	1
273	D G Hasko	1	6	2	2
279	Kyoung-Tae Kim	1	5	6	8
279	Shinichi Egawa	1	5	2	2
279	Ivo W Rangelow	1	5	1	2
279	Rainer Adelung	1	5	1	2
279	Meng-Chyi Wu	1	5	1	1
279	Frank Ernst	1	5	2	2
279	Ray Duffy	1	5	2	4
279	Salvatore Mirabella	2	5	1	4
279	Krzysztof Domański	1	5	1	2
279	Kevin Jones	1	5	1	1
279	Kyung-Won Park	1	5	2	4
279	Daniel Wasserman	1	5	2	3
279	Chun-Yuan Huang	2	6	1	2
279	Fred Roozeboom	1	5	4	7
279	David A J Moran	1	5	1	2
279	Alberta Bonanni	1	5	2	2
279	Shuang Zhang	1	5	1	1
296	Ichiko Misumi	1	4	1	2
296	Young Joon Yoon	1	4	1	1
296	Damiano Giubertoni	1	4	2	3
296	Luiz G Jacobsohn	1	4	3	7
296	Luana Persano	1	4	3	6
296	Kijung Yong	2	4	1	5
296	Antonio R Zanatta	1	4	3	7
296	Jeffrey W Elam	1	4	1	2
296	Mark A Wistey	2	8	1	4
296	Jae Hyun Kim	1	4	1	5
296	Satoshi Gonda	1	4	1	3
307	Brunello Tirozzi	1	3	1	3
307	Lourdes G Salamanca-Riba	1	3	3	6
307	Jun Nakamura	1	3	1	6
307	Hiroaki Usui	1	3	1	2
307	Junho Kim	1	3	1	1
307	Sanjay Krishna	1	3	2	4
307	Tomoya Yoshida	1	3	2	2
307	Yves Chabal	1	3	2	4
307	Olivier Pluchery	1	3	1	1
307	Tanemasa Asano	1	3	2	3
307	Rowan M Brown	1	3	1	1
307	Joel L Plawsky	1	3	3	4
307	Yong-Chae Chung	1	3	3	4
320	Ignacio Garcia	1	2	1	2
320	Ana Conde	1	2	1	2
320	Takashi Koida	1	2	2	5
320	David E Aspnes	1	2	2	4
320	Hisato Yamaguchi	1	2	1	1
320	Valery Ray	1	2	1	1
320	Ikai Lo	1	2	2	2
320	Praveen Joseph	1	2	1	2
320	Takatoshi Yamada	1	2	2	2
320	Raúl J Martín Palma	1	2	1	10
320	Raul Gago	1	2	2	8
331	Srinivasan Mp	1	1	1	5
331	Radhakrishnan K	1	1	3	4
331	Omer Nur	1	1	1	3
331	Fu-Min Wang	1	1	1	1
331	Masatoshi Kotera	1	1	2	2
331	Hidekuni Takao	1	1	3	4
337	Jiro Nishinaga	1	0	1	2
337	Won-Jun Lee	1	0	1	4
337	Po-Tsun Liu	1	0	4	5
337	Gaspar Armelles	1	0	1	5
337	Francesca Peiro	1	0	3	4
337	Takeyoshi Sugaya	1	0	2	2

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Journal of Vacuum Science & Technology an Official Journal of the American Vacuum Society B, Microelectronics Processing and Phenomena

Top Authors (by article citations)