2.8(top 20%)
impact factor
16.9K(top 1%)
papers
340.0K(top 1%)
citations
162(top 2%)
h-index
2.8(top 20%)
impact factor
17.4K
all documents
349.0K
doc citations
261(top 2%)
g-index
Top Articles
# | Title | Journal | Year | Citations |
---|---|---|---|---|
1 | Microstructural evolution during film growth | Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films | 2003 | 1,466 |
2 | Nanosphere lithography: A materials general fabrication process for periodic particle array surfaces | Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films | 1995 | 1,332 |
3 | Structural analysis of Si(111)‐7×7 by UHV‐transmission electron diffraction and microscopy | Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films | 1985 | 1,275 |
4 | Theory of ripple topography induced by ion bombardment | Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films | 1988 | 1,244 |
5 | The microstructure of sputter‐deposited coatings | Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films | 1986 | 1,135 |
6 | The search for novel, superhard materials | Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films | 1999 | 1,112 |
7 | Material selection for hard coatings | Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films | 1986 | 1,054 |
8 | Sculptured thin films and glancing angle deposition: Growth mechanics and applications | Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films | 1997 | 871 |
9 | Titanium aluminum nitride films: A new alternative to TiN coatings | Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films | 1986 | 853 |
10 | Revised structure zone model for thin film physical structure | Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films | 1984 | 831 |
11 | Characterization of diamondlike carbon films and their application as overcoats on thin‐film media for magnetic recording | Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films | 1987 | 825 |
12 | Glancing angle deposition: Fabrication, properties, and applications of micro- and nanostructured thin films | Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films | 2007 | 758 |
13 | Infrared spectroscopic study of SiOx films produced by plasma enhanced chemical vapor deposition | Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films | 1986 | 756 |
14 | Plasma-Assisted Atomic Layer Deposition: Basics, Opportunities, and Challenges | Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films | 2011 | 678 |
15 | Raman scattering characterization of carbon bonding in diamond and diamondlike thin films | Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films | 1988 | 662 |
16 | Status and prospects of Al2O3-based surface passivation schemes for silicon solar cells | Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films | 2012 | 659 |
17 | GexSi1−x/Si strained‐layer superlattice grown by molecular beam epitaxy | Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films | 1984 | 656 |
18 | Microfabrication of cantilever styli for the atomic force microscope | Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films | 1990 | 644 |
19 | Infrared spectroscopy of Si(111) and Si(100) surfaces after HF treatment: Hydrogen termination and surface morphology | Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films | 1989 | 638 |
20 | Nature of the use of adventitious carbon as a binding energy standard | Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films | 1995 | 620 |
21 | Gas-phase production of carbon single-walled nanotubes from carbon monoxide via the HiPco process: A parametric study | Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films | 2001 | 584 |
22 | UV/ozone cleaning of surfaces | Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films | 1985 | 583 |
23 | High power impulse magnetron sputtering discharge | Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films | 2012 | 568 |
24 | Measuring the nanomechanical properties and surface forces of materials using an atomic force microscope | Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films | 1989 | 567 |
25 | Plasma etching: Yesterday, today, and tomorrow | Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films | 2013 | 557 |
26 | Application of reflectance difference spectroscopy to molecular‐beam epitaxy growth of GaAs and AlAs | Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films | 1988 | 499 |
27 | Thin films from energetic cluster impact: A feasibility study | Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films | 1992 | 487 |
28 | Review Article: Stress in thin films and coatings: Current status, challenges, and prospects | Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films | 2018 | 482 |
29 | Plasma deposition of optical films and coatings: A review | Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films | 2000 | 480 |
30 | Global model of Ar, O2, Cl2, and Ar/O2 high‐density plasma discharges | Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films | 1995 | 469 |
31 | A review of the present state of art in hard coatings grown from the vapor phase | Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films | 1986 | 462 |
32 | In situ laser diagnostic studies of plasma‐generated particulate contamination | Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films | 1989 | 438 |
33 | Atomic structure of GaAs(100)‐(2×1) and (2×4) reconstructed surfaces | Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films | 1987 | 437 |
34 | Overview of atomic layer etching in the semiconductor industry | Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films | 2015 | 420 |
35 | Charged particle fluxes from planar magnetron sputtering sources | Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films | 1986 | 384 |
36 | Determination of the local electronic structure of atomic‐sized defects on Si(001) by tunneling spectroscopy | Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films | 1989 | 382 |
37 | Filling of micron‐sized contact holes with copper by energetic cluster impact | Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films | 1994 | 364 |
38 | On structure and properties of sputtered Ti and Al based hard compound films | Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films | 1986 | 360 |
39 | Interaction of water, oxygen, and hydrogen with TiO2(110) surfaces having different defect densities | Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films | 1992 | 360 |
40 | Scanning tunneling microscopy studies of structural disorder and steps on Si surfaces | Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films | 1989 | 358 |
41 | Growth of cubic phase gallium nitride by modified molecular‐beam epitaxy | Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films | 1989 | 354 |
42 | On the electrochemical etching of tips for scanning tunneling microscopy | Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films | 1990 | 351 |
43 | Electron cyclotron resonance microwave discharges for etching and thin‐film deposition | Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films | 1989 | 337 |
44 | Modeling of reactive sputtering of compound materials | Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films | 1987 | 336 |
45 | Density changes upon crystallization of Ge2Sb2.04Te4.74 films | Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films | 2002 | 331 |
46 | Metal–organic interface and charge injection in organic electronic devices | Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films | 2003 | 331 |
47 | Pulsed electron-beam technology for surface modification of metallic materials | Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films | 1998 | 329 |
48 | Search for improved transparent conducting oxides: A fundamental investigation of CdO, Cd2SnO4, and Zn2SnO4 | Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films | 2000 | 314 |
49 | Thermal stability of arc evaporated high aluminum-content Ti1−xAlxN thin films | Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films | 2002 | 314 |
50 | Synthesis of diamondlike carbon films with superlow friction and wear properties | Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films | 2000 | 312 |