2.8(top 20%)
impact factor
16.9K(top 1%)
papers
340.0K(top 1%)
citations
162(top 2%)
h-index
2.8(top 20%)
impact factor
17.4K
all documents
349.0K
doc citations
261(top 2%)
g-index

Top Articles

#TitleJournalYearCitations
1Microstructural evolution during film growthJournal of Vacuum Science and Technology A: Vacuum, Surfaces and Films20031,466
2Nanosphere lithography: A materials general fabrication process for periodic particle array surfacesJournal of Vacuum Science and Technology A: Vacuum, Surfaces and Films19951,332
3Structural analysis of Si(111)‐7×7 by UHV‐transmission electron diffraction and microscopyJournal of Vacuum Science and Technology A: Vacuum, Surfaces and Films19851,275
4Theory of ripple topography induced by ion bombardmentJournal of Vacuum Science and Technology A: Vacuum, Surfaces and Films19881,244
5The microstructure of sputter‐deposited coatingsJournal of Vacuum Science and Technology A: Vacuum, Surfaces and Films19861,135
6The search for novel, superhard materialsJournal of Vacuum Science and Technology A: Vacuum, Surfaces and Films19991,112
7Material selection for hard coatingsJournal of Vacuum Science and Technology A: Vacuum, Surfaces and Films19861,054
8Sculptured thin films and glancing angle deposition: Growth mechanics and applicationsJournal of Vacuum Science and Technology A: Vacuum, Surfaces and Films1997871
9Titanium aluminum nitride films: A new alternative to TiN coatingsJournal of Vacuum Science and Technology A: Vacuum, Surfaces and Films1986853
10Revised structure zone model for thin film physical structureJournal of Vacuum Science and Technology A: Vacuum, Surfaces and Films1984831
11Characterization of diamondlike carbon films and their application as overcoats on thin‐film media for magnetic recordingJournal of Vacuum Science and Technology A: Vacuum, Surfaces and Films1987825
12Glancing angle deposition: Fabrication, properties, and applications of micro- and nanostructured thin filmsJournal of Vacuum Science and Technology A: Vacuum, Surfaces and Films2007758
13Infrared spectroscopic study of SiOx films produced by plasma enhanced chemical vapor depositionJournal of Vacuum Science and Technology A: Vacuum, Surfaces and Films1986756
14Plasma-Assisted Atomic Layer Deposition: Basics, Opportunities, and ChallengesJournal of Vacuum Science and Technology A: Vacuum, Surfaces and Films2011678
15Raman scattering characterization of carbon bonding in diamond and diamondlike thin filmsJournal of Vacuum Science and Technology A: Vacuum, Surfaces and Films1988662
16Status and prospects of Al2O3-based surface passivation schemes for silicon solar cellsJournal of Vacuum Science and Technology A: Vacuum, Surfaces and Films2012659
17GexSi1−x/Si strained‐layer superlattice grown by molecular beam epitaxyJournal of Vacuum Science and Technology A: Vacuum, Surfaces and Films1984656
18Microfabrication of cantilever styli for the atomic force microscopeJournal of Vacuum Science and Technology A: Vacuum, Surfaces and Films1990644
19Infrared spectroscopy of Si(111) and Si(100) surfaces after HF treatment: Hydrogen termination and surface morphologyJournal of Vacuum Science and Technology A: Vacuum, Surfaces and Films1989638
20Nature of the use of adventitious carbon as a binding energy standardJournal of Vacuum Science and Technology A: Vacuum, Surfaces and Films1995620
21Gas-phase production of carbon single-walled nanotubes from carbon monoxide via the HiPco process: A parametric studyJournal of Vacuum Science and Technology A: Vacuum, Surfaces and Films2001584
22UV/ozone cleaning of surfacesJournal of Vacuum Science and Technology A: Vacuum, Surfaces and Films1985583
23High power impulse magnetron sputtering dischargeJournal of Vacuum Science and Technology A: Vacuum, Surfaces and Films2012568
24Measuring the nanomechanical properties and surface forces of materials using an atomic force microscopeJournal of Vacuum Science and Technology A: Vacuum, Surfaces and Films1989567
25Plasma etching: Yesterday, today, and tomorrowJournal of Vacuum Science and Technology A: Vacuum, Surfaces and Films2013557
26Application of reflectance difference spectroscopy to molecular‐beam epitaxy growth of GaAs and AlAsJournal of Vacuum Science and Technology A: Vacuum, Surfaces and Films1988499
27Thin films from energetic cluster impact: A feasibility studyJournal of Vacuum Science and Technology A: Vacuum, Surfaces and Films1992487
28Review Article: Stress in thin films and coatings: Current status, challenges, and prospectsJournal of Vacuum Science and Technology A: Vacuum, Surfaces and Films2018482
29Plasma deposition of optical films and coatings: A reviewJournal of Vacuum Science and Technology A: Vacuum, Surfaces and Films2000480
30Global model of Ar, O2, Cl2, and Ar/O2 high‐density plasma dischargesJournal of Vacuum Science and Technology A: Vacuum, Surfaces and Films1995469
31A review of the present state of art in hard coatings grown from the vapor phaseJournal of Vacuum Science and Technology A: Vacuum, Surfaces and Films1986462
32In situ laser diagnostic studies of plasma‐generated particulate contaminationJournal of Vacuum Science and Technology A: Vacuum, Surfaces and Films1989438
33Atomic structure of GaAs(100)‐(2×1) and (2×4) reconstructed surfacesJournal of Vacuum Science and Technology A: Vacuum, Surfaces and Films1987437
34Overview of atomic layer etching in the semiconductor industryJournal of Vacuum Science and Technology A: Vacuum, Surfaces and Films2015420
35Charged particle fluxes from planar magnetron sputtering sourcesJournal of Vacuum Science and Technology A: Vacuum, Surfaces and Films1986384
36Determination of the local electronic structure of atomic‐sized defects on Si(001) by tunneling spectroscopyJournal of Vacuum Science and Technology A: Vacuum, Surfaces and Films1989382
37Filling of micron‐sized contact holes with copper by energetic cluster impactJournal of Vacuum Science and Technology A: Vacuum, Surfaces and Films1994364
38On structure and properties of sputtered Ti and Al based hard compound filmsJournal of Vacuum Science and Technology A: Vacuum, Surfaces and Films1986360
39Interaction of water, oxygen, and hydrogen with TiO2(110) surfaces having different defect densitiesJournal of Vacuum Science and Technology A: Vacuum, Surfaces and Films1992360
40Scanning tunneling microscopy studies of structural disorder and steps on Si surfacesJournal of Vacuum Science and Technology A: Vacuum, Surfaces and Films1989358
41Growth of cubic phase gallium nitride by modified molecular‐beam epitaxyJournal of Vacuum Science and Technology A: Vacuum, Surfaces and Films1989354
42On the electrochemical etching of tips for scanning tunneling microscopyJournal of Vacuum Science and Technology A: Vacuum, Surfaces and Films1990351
43Electron cyclotron resonance microwave discharges for etching and thin‐film depositionJournal of Vacuum Science and Technology A: Vacuum, Surfaces and Films1989337
44Modeling of reactive sputtering of compound materialsJournal of Vacuum Science and Technology A: Vacuum, Surfaces and Films1987336
45Density changes upon crystallization of Ge2Sb2.04Te4.74 filmsJournal of Vacuum Science and Technology A: Vacuum, Surfaces and Films2002331
46Metal–organic interface and charge injection in organic electronic devicesJournal of Vacuum Science and Technology A: Vacuum, Surfaces and Films2003331
47Pulsed electron-beam technology for surface modification of metallic materialsJournal of Vacuum Science and Technology A: Vacuum, Surfaces and Films1998329
48Search for improved transparent conducting oxides: A fundamental investigation of CdO, Cd2SnO4, and Zn2SnO4Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films2000314
49Thermal stability of arc evaporated high aluminum-content Ti1−xAlxN thin filmsJournal of Vacuum Science and Technology A: Vacuum, Surfaces and Films2002314
50Synthesis of diamondlike carbon films with superlow friction and wear propertiesJournal of Vacuum Science and Technology A: Vacuum, Surfaces and Films2000312