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Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
›
Top Articles
Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Physics
,
Materials Science
,
Chemistry
,
Physical Chemistry
,
Condensed Matter Physics
2.9
(top 6%)
Impact Factor
3
(top 6%)
extended IF
152
(top 2%)
H-Index
3.9K
authors
16.7K
papers
309.8K
citations
3.3K
citing journals
58.8K
citing authors
Most Cited Articles of Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Title
Year
Citations
Microstructural evolution during film growth
2003
1.3K
Structural analysis of Si(111)‐7×7 by UHV‐transmission electron diffraction and microscopy
1985
1.2K
Nanosphere lithography: A materials general fabrication process for periodic particle array surfaces
1995
1.2K
Theory of ripple topography induced by ion bombardment
1988
1.1K
The search for novel, superhard materials
1999
1K
The microstructure of sputter‐deposited coatings
1986
1K
Material selection for hard coatings
1986
962
Titanium aluminum nitride films: A new alternative to TiN coatings
1986
794
Sculptured thin films and glancing angle deposition: Growth mechanics and applications
1997
776
Characterization of diamondlike carbon films and their application as overcoats on thin‐film media for magnetic recording
1987
775
Revised structure zone model for thin film physical structure
1984
749
Infrared spectroscopic study of SiOx films produced by plasma enhanced chemical vapor deposition
1986
699
Glancing angle deposition: Fabrication, properties, and applications of micro- and nanostructured thin films
2007
658
Raman scattering characterization of carbon bonding in diamond and diamondlike thin films
1988
627
GexSi1−x/Si strained‐layer superlattice grown by molecular beam epitaxy
1984
617
Infrared spectroscopy of Si(111) and Si(100) surfaces after HF treatment: Hydrogen termination and surface morphology
1989
613
Plasma-Assisted Atomic Layer Deposition: Basics, Opportunities, and Challenges
2011
565
Status and prospects of Al2O3-based surface passivation schemes for silicon solar cells
2012
535
Microfabrication of cantilever styli for the atomic force microscope
1990
535
UV/ozone cleaning of surfaces
1985
526
Gas-phase production of carbon single-walled nanotubes from carbon monoxide via the HiPco process: A parametric study
2001
520
Nature of the use of adventitious carbon as a binding energy standard
1995
509
Measuring the nanomechanical properties and surface forces of materials using an atomic force microscope
1989
501
High power impulse magnetron sputtering discharge
2012
477
Application of reflectance difference spectroscopy to molecular‐beam epitaxy growth of GaAs and AlAs
1988
473
0
1
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How are inpact factors calculated?
The impact factor (IF) is calculated by counting citations from peer-reviewed journals only.
extended IF
also counts citations from books and conference papers. However, no patent, abstract, working papers, online documents, etc., are covered.
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