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Top Articles

#TitleJournalYearCitations
1Broad beam ion source for ion implantationReview of Scientific Instruments19904
2Low‐energy extraction with simple two grid accelerator systemReview of Scientific Instruments19904
3Performance investigation of a focused ion beam for sputter depositionReview of Scientific Instruments19923
4An ion source with good beam current density uniformity for assisted depositionReview of Scientific Instruments19940
5Deposition of cubic boron nitride thin films by IBEDMaterials Chemistry and Physics19980