Journal of Micro/ Nanolithography, MEMS, and MOEMS

0.9(top 50%)

impact factor

1.6K(top 20%)

papers

12.2K(top 20%)

citations

35(top 20%)

h-index

0.9(top 50%)

extended IF

1.7K

all documents

12.6K

doc citations

50(top 20%)

g-index

Top Authors (by citations)

#	Author	Articles	Citations	R ARank	R CRank
1	Yasin Ekinci	20	354	2	4
2	Bei Yu	8	187	2	3
3	Andreas Erdmann	19	186	2	1
4	Roger H. French	5	173	7	9
5	Vincent Ch Lee	3	167	30	32
6	Chris A Mack	8	122	1	3
7	Yuri Granik	2	108	1	1
8	Paul F Nealey	6	96	11	24
9	Susumu Iida	10	95	1	1
10	Ivo W Rangelow	3	94	8	9
10	Sonia Castellanos	4	94	1	5
12	R Joseph Kline	7	91	3	18
13	Daniel F Sunday	6	85	2	2
14	Albert Brouwer	3	83	14	18
15	Shiyuan Liu	5	81	9	13
16	Marcus Kaestner	2	78	4	2
17	Laura Heyderman	1	75	22	19
18	Herbert R Shea	3	72	11	29
19	Haoyu Yang	1	68	2	2
19	Luyang Luo	1	68	3	2
21	Dimitrios Kazazis	6	65	1	4
22	James W Thackeray	2	62	2	3
23	Michael Murphy	2	60	3	1
24	Serhiy Danylyuk	3	59	2	3
24	Larissa Juschkin	3	59	3	2
26	Andriy Kovalskiy	1	58	12	4
27	Sivanandan S Harilal	2	57	18	26
28	Cornelis W Hagen	6	56	1	7
28	Alex P G Robinson	3	56	3	5
30	Evangelos Gogolides	5	53	12	27
31	Raluca Tiron	5	52	3	6
31	Christophe Navarro	5	52	2	4
33	Nikolay Chkhalo	3	51	9	9
34	Maurizio Dapor	1	49	21	15
34	Lianjia Wu	2	49	1	1
34	Christopher K Ober	3	49	28	53
34	Iacopo Mochi	7	49	3	4
38	Xavier Chevalier	4	48	1	3
38	John S Villarrubia	3	48	4	12
40	Xiuguo Chen	2	47	10	8
40	Roberto Fallica	2	47	1	1
42	Yuriko Seino	1	45	5	1
43	Taher E Kagalwala	3	44	2	1
44	Tero S Kulmala	2	43	1	5
44	Patrick Helfenstein	4	43	1	1
46	Tim Fühner	4	42	2	3
47	Ahmed Hassanein	1	41	8	5
47	Vicky Philipsen	3	41	2	3
49	Hong Xu	2	39	9	19
50	Deepak Bansal	4	38	2	2
50	Shahrom Mahmud	1	38	13	17
50	Francesc Perez-Murano	4	38	7	26
50	Kakooei S, Saeid Kakooei	1	38	8	10
50	Sabar D Hutagalung	1	38	10	9
55	Jinkui Chu	3	37	4	9
55	Diaa Khalil	4	37	10	16
55	Gila E Stein	2	37	6	10
58	Gonzalo R Arce	2	36	11	16
59	Martin Foldyna	1	34	20	17
59	David Z Pan	4	34	5	10
59	Sandeep Singh Manhas	1	34	4	5
59	Xuan Zeng	1	34	4	4
59	Tatiana Novikova	1	34	10	15
59	Clément Fallet	1	34	5	4
59	Zhiwen Wang	2	34	3	5
59	Peng Yu	1	34	6	6
67	J Andrew Yeh	2	33	8	12
67	Wen-Li Wu	1	33	15	18
69	David R Myers	1	32	8	15
69	Panos S Shiakolas	1	32	10	8
69	Le Guan	4	32	1	2
72	Sikun Li	8	31	1	2
72	Patrick Naulleau	4	31	3	7
74	Lei Wan	1	30	6	9
74	Gabriel Zeltzer	1	30	3	7
74	Pietro Ferraro	4	30	23	53
74	Gaoliang Dai	1	30	7	5
74	Ricardo Ruiz	4	30	2	24
74	Hao Jiang	1	30	12	11
74	Hao Jiang	1	30	17	23
81	Andrew J Peters	4	29	2	4
81	Yasser M Sabry	2	29	8	14
81	Valentyn Ishchuk	1	29	4	3
81	Clifford L Henderson	4	29	6	16
81	Steve Lenk	1	29	3	3
86	Cees J M Van Rijn	1	28	17	27
86	Xie Zhuo	1	28	2	1
86	Toshihisa Tomie	1	28	1	3
86	Idriss Blakey	2	28	9	22
86	Thomas G Bifano	2	28	11	20
91	Elizabeth Buitrago	3	27	4	6
91	Frank Dimroth	1	27	16	25
91	Jan Benick	1	27	8	10
91	Benedikt Bläsi	1	27	10	16
91	Tarik Bourouina	2	27	10	18
91	Andrea Z Giovannini	1	27	2	1
91	Hubert Hauser	1	27	8	9
98	Amit Kumar	3	26	51	249
98	Nathan Jackson	1	26	10	12
98	Xiaomeng Liu	1	26	1	2
98	Oskar Z Olszewski	1	26	5	6
98	Amit Kumar	3	26	3	3
98	Prem Kumar	2	26	2	3
98	Fredrik Johansson	1	26	8	6
98	Andreas Lindblad	1	26	20	21
98	Alan Mathewson	1	26	19	25
107	Shin-ya Koshihara	1	25	32	37
107	Guillaume Fleury	1	25	15	19
107	Hiroaki Misawa	1	25	62	73
107	Saulius Juodkazis	1	25	88	97
107	Egidijus Vanagas	1	25	1	2
107	Wen Lv	2	25	1	6
113	Jianglei Di	1	24	15	10
113	Frank Scholze	2	24	11	27
113	Xiaobang Shang	2	24	9	11
113	Michael J Lancaster	2	24	8	14
113	Hiroshi Fukuda	4	24	2	7
113	Xueye Chen	1	24	24	29
113	Yingtao Tian	2	24	4	17
113	Jianlin Zhao	1	24	30	34
113	Wenbo Han	1	24	4	7
113	Adam F Hannon	1	24	6	10
113	Hiroshi Fukuda	4	24	2	3
113	Jiwei Zhang	1	24	7	4
113	Teli Xi	1	24	5	5
126	Alain C Diebold	2	23	5	9
126	Satoshi Takei	3	23	4	7
126	Huiliang Cao	2	23	8	15
126	Ran Zhang	1	23	2	4
126	Ze Liu	1	23	3	2
126	Jeong-Bong Lee	2	23	9	25
126	Nicholas Keller	2	23	1	2
126	Rongshun Chen	2	23	3	4
126	ZhangRan	1	23	1	1
126	Joseph Braat	2	23	1	3
136	Felipe Kessler	1	22	4	8
136	Jinyang Liang	1	22	14	21
136	Matthias Petzold	1	22	7	9
136	Nikola Batina	1	22	13	21
136	Seung Min Han	1	22	15	21
136	Yibo Lin	3	22	2	6
136	Kenneth Gonsalves	1	22	9	9
136	Jérémy Odent	1	22	10	15
136	Israel Morales-Reyes	1	22	1	2
136	Kazuaki Sakoda	1	22	31	26
136	Subrata Ghosh	1	22	13	11
136	Huikai Xie	1	22	24	28
136	Masanobu Iwanaga	1	22	10	14
136	Daniel Eduardo Weibel	1	22	13	21
136	Jae Hyun Kim	1	22	45	55
136	Hideki T Miyazaki	1	22	12	16
136	Lei Wu	1	22	3	7
136	Sebastian Brand	1	22	4	5
154	Pascal E Meyer	3	21	4	13
154	Edmund Y Lam	2	21	18	36
154	Andrzej Andrejczuk	1	21	12	14
154	Jerzy B Pelka	1	21	10	10
154	Milos Baljozovic	1	21	5	8
154	Robert Nietubyć	1	21	7	10
154	Peter J Ludovice	4	21	2	4
154	Giuseppe Portale	1	21	35	54
154	Janusz Mikolajczyk	1	21	13	11
154	Serap A Savari	2	21	2	2
154	Pavel Kubát	1	21	27	45
154	Daniel Fan	1	21	4	5
154	Libor Juha	1	21	44	39
167	Lisa Miccio	1	20	18	27
167	Eric L Shirley	1	20	16	16
167	Kim Vu Luong	1	20	1	3
167	Kristofer J Thurecht	1	20	32	46
167	Han-Hao Cheng	1	20	3	7
167	Thomas M Bennett	1	20	3	4
167	Vito Pagliarulo	1	20	12	19
167	Kevin Jack	1	20	16	32
167	Praveen Joseph	1	20	3	8
167	Christian Reuter	1	20	13	16
167	Jaewon Hahn	3	20	2	7
167	Hiroshi Yoshida	1	20	8	14
179	Neha Thakur	1	19	2	2
179	Kenneth A Goldberg	5	19	6	13
179	Robert L Jackson	1	19	12	22
179	Aaron R Hawkins	2	19	21	30
179	Wei Min Huang	1	19	33	61
179	Sascha Brose	1	19	3	3
179	Sasa Bajt	1	19	41	58
179	Michael J Eller	3	19	2	10
179	Jan Doise	4	19	1	2
179	Muthu B J Wijesundara	1	19	7	14
179	Holger Schmidt	1	19	19	25
179	Emile Albert Schweikert	3	19	11	26
179	Philip Measor	1	19	4	6
193	Julien Arcamone	1	18	6	10
193	Cheng-Yao Lo	1	18	10	12
193	Narendra Chaudhary	1	18	2	1
193	Hiroshi Itoh	1	18	9	12
197	Emmanuel P Giannelis	1	17	19	35
197	Kareem Khirallah	1	17	2	2
197	Richard E Palmer	2	17	41	62
197	Mohammed A Swillam	1	17	19	26
197	Herman L Offerhaus	1	17	19	27
197	Frieder Mugele	1	17	36	51
197	Dilan Ratnayake	1	17	1	1
197	Kevin M Walsh	1	17	3	4
197	James Loomis	1	17	5	11
207	Zheng Xiong	1	16	3	5
207	Akinori Saeki	1	16	54	68
207	Seok-Min Kim	2	16	8	15
207	Andreas Ostendorf	1	16	22	35
207	Bryan M Barnes	2	16	2	8
207	Puneet Gupta	4	16	4	16
207	Xavier Borrisé	2	16	5	12
207	Boris Chichkov	1	16	66	100
207	Antoine Wojdyla	4	16	2	3
207	Daniel Poitras	1	16	9	12
207	Hui Zhou	2	16	1	4
207	Jasmeet S Chawla	1	16	1	2
219	Domingo Garcia-Gutierrez	1	15	11	20
219	Per Magnus Kristiansen	1	15	7	13
219	Peter Baumgart	1	15	4	5
219	Hemant Sankar Dutta	1	15	4	10
219	Helmut Schift	1	15	11	21
219	Prabitha Urwyler	1	15	13	18
219	Paul Mirkarimi	1	15	16	21
219	Amit Kumar Goyal	1	15	5	11
219	Xiaomin Yang	1	15	2	6
219	Suchandan Pal	1	15	10	16
219	Paul B Mirkarimi	1	15	3	7
230	Yuzuru Takamura	1	14	33	51
230	Alexander V Vodopyanov	1	14	19	17
230	Davide Curreli	1	14	6	12
230	Kingsley A Ogudo	1	14	3	6
230	Ankur Gupta	1	14	16	36
230	Farhad Larki	1	14	6	9
230	Rishi Kant	1	14	3	10
230	Shantanu Bhattacharya	1	14	25	39
230	Avinash Kumar	1	14	1	7
230	Lukas Snyman	1	14	8	17
230	Somashekara Bhat	1	14	3	5
230	Marc Fouchier	2	14	2	5
230	Peter Debacker	1	14	3	4
230	Muhamad Ramdzan Buyong	1	14	5	7
230	Ivan Lalović	1	14	1	1
230	Shubham Saxena	1	14	1	2
246	benoit Charlot	1	13	9	25
246	Ulrike A Dauderstädt	2	13	3	5
246	Yanqiu Li	1	13	6	4
246	Hidenori Sakanashi	1	13	4	7
246	Chang-Hsiao Chen	1	13	10	20
246	Roland Teissier	1	13	15	18
246	Jing Jiang	2	13	3	5
246	Francesco Pedaci	1	13	10	16
246	Rajesh Menon	1	13	15	23
246	Youngsoo Shin	1	13	5	7
246	Masahiro Murakawa	1	13	5	5
246	András E Vladár	2	13	2	8
246	Hirokazu Nosato	1	13	4	3
246	Eiichi Takahashi	1	13	1	1
246	Shangliang Jiang	1	13	1	2
261	Suhas S Joshi	2	12	20	42
261	Hongsheng Li	2	12	4	10
261	Vadim Banine	1	12	6	12
261	Mark Van de Kerkhof	2	12	2	2
261	Gianluca Grenci	1	12	13	30
261	Yu-Feng Guo	1	12	11	20
261	Maolin Zhang	1	12	6	6
261	Mohamed Baker Alawieh	1	12	2	6
261	Ashiqur Rahaman	1	12	2	7
261	Anuroop Bajpai	1	12	3	3
261	Asif Ishfaque	1	12	2	5
261	Byungki Kim	1	12	7	17
261	Raphael Ramos	1	12	8	14
261	Bryan D Vogt	1	12	31	51
261	Richard Schroedter	1	12	2	2
261	Thomas E Wilson	1	12	2	2
261	Bruce W Smith	1	12	1	3
278	Matteo Lorenzoni	2	11	4	13
278	Prem Kumar	1	11	3	3
278	Wu Zhou	3	11	1	9
278	Bernhard Roth	2	11	19	35
278	Marta Fernandez-Regulez	2	11	3	16
278	Joost W M Frenken	1	11	25	42
278	Stella Pang	1	11	22	33
278	Sangeetha Hari	1	11	1	2
278	Valeriy Sukharev	2	11	8	17
278	Dzung Viet Dao	1	11	40	61
278	Muharrem Bayraktar	1	11	6	11
278	Yi Wang	1	11	19	24
278	Long-Fang Tsai	2	11	1	2
278	Ronaldo D Mansano	1	11	18	20
278	Kari Tapio Niemi	1	11	11	20
278	Atsushi Hiraiwa	2	11	8	10
278	Evgueni V Bordatchev	2	11	6	15
278	Chia-Chin Chiang	2	11	10	17
278	Fei Liu	1	11	1	2
278	Ronald L Jones	1	11	12	18
278	Steven G Hansen	1	11	2	2
278	Thomas Verduin	1	11	1	1
278	Amir Rahafrooz	1	11	3	3
301	Zhenyu Li	1	10	28	63
301	Danays Kunka	1	10	5	11
301	Michael Vervaeke	2	10	5	12
301	Jurgen Van Erps	2	10	9	31
301	Stefan Sinzinger	1	10	15	15
301	Fred Bijkerk	2	10	10	24
301	Harutaka Mekaru	2	10	10	15
301	Gary J Cheng	1	10	30	68
301	Jiajing Li	2	10	1	2
301	Carlton Grant Willson	2	10	10	24
301	Marcus Zuber	1	10	7	21
301	Michael O Thompson	1	10	18	34
301	Nilesh J Vasa	2	10	9	27
301	Zhenyu Li	1	10	8	20
301	Patrick Pons	1	10	19	21
301	Sangho Cho	1	10	11	24
301	Nalinikanth Kotagiri	1	10	2	12
301	Hugo Thienpont	2	10	38	90
301	Alan G Jacobs	1	10	3	10
301	Vittorino Lanzio	1	10	1	1
301	Pinaki Sarder	1	10	9	18
301	Karen L Wooley	1	10	46	77
301	Frieder J Koch	1	10	5	11
301	Martin Hoffmann	1	10	19	33
301	Marina Y Timmermans	1	10	3	9
301	Byungki Jung	1	10	3	7
301	Guorong Sun	1	10	5	16
301	Corrie Clark	1	10	2	6
329	Ichiko Misumi	2	9	6	8
329	Kentaro Totsu	1	9	4	6
329	Svetlana N Khonina	1	9	46	65
329	Jordi Llobet	1	9	7	14
329	Yuan Jia	1	9	4	16
329	Alexandra Mougin	1	9	14	24
329	Masayoshi Esashi	1	9	3	9
329	Nikolay Kazanskiy	1	9	32	56
329	David B Miller	1	9	1	1
329	Shanky Saxena	1	9	3	4
329	Jan-Uwe Schmidt	1	9	2	4
329	George Papavieros	2	9	1	2
329	Leeya Engel	1	9	3	5
329	Assad A Oberai	1	9	21	39
329	Lawrence Pileggi	1	9	7	9
329	Pierre-Alexandre Blanche	1	9	11	23
329	Vadakke M Murukeshan	1	9	42	51
329	Zhixiong Guo	1	9	23	47
329	Xianfan Xu	1	9	29	51
329	Haogang Cai	1	9	5	19
329	Bruce D Terris	1	9	14	29
329	Yosi Shacham-Diamand	1	9	26	49
329	Andreas Dietzel	1	9	30	40
329	Borivoje Nikolic	1	9	13	19
329	Richard M Silver	1	9	2	9
329	Joan Bausells	1	9	23	35
329	Slava Krylov	1	9	25	35
329	Marc Sansa	1	9	5	11
329	Angelo Gaitas	1	9	5	10
329	Sin-Doo Lee	1	9	17	24
329	Kenji Yoshimoto	1	9	2	1
329	Kerri L Cahoy	1	9	4	6
329	Eytan Barouch	1	9	7	10
329	Benjamin Potsaid	1	9	9	19
329	Taher Kagalwala	1	9	1	1
365	Andrew J Fleming	1	8	20	29
365	Devin E Burns	1	8	3	7
365	Chih-Kung Lee	1	8	19	26
365	Srinagalakshmi Nammi	1	8	1	3
365	Guillaume Freychet	1	8	1	8
365	Erik Beckert	2	8	3	19
365	Casey M Schwarz	1	8	2	11
365	Hiroyuki Miyazoe	1	8	10	15
365	Hongbo Zhang	1	8	5	9
365	Nerea Alayo	1	8	3	5
365	Romain Duru	1	8	3	5
365	Miles Wilklow-Marnell	1	8	2	7
365	Balaganesan Gurusamy	1	8	1	5
365	Chih-Ting Lin	1	8	16	24
365	Eric A Joseph	1	8	6	14
365	Xiaoqing Xu	1	8	2	2
365	Mohammad Behshad Shafii	1	8	25	68
365	Kyowon Kim	1	8	2	3
365	ChaeHo Shin	1	8	3	9
365	Geyu Lu	1	8	11	22
365	Omid Tayefeh ghalehbeygi	1	8	1	1
365	Ali Salari	1	8	5	12
365	Adrian Wills	1	8	8	11
365	Armen Kteyan	1	8	2	3
365	Sigitas Tamulevicius	2	8	18	54
365	Peter W M Tsang	1	8	11	13
365	Ronald J Pandolfi	1	8	2	7
365	Xin Yang	1	8	6	6
365	Roger T Bonnecaze	2	8	12	34
365	Eugen Pavel	1	8	7	9
365	Florian Delachat	1	8	1	1
365	Takashi Nagase	1	8	14	21
365	Myungkoo Kang	1	8	13	21
365	Hsinyu Tsai	1	8	2	12
365	Laurent Pain	1	8	1	3
401	Kiyoshi Takamasu	1	7	18	19
401	Yoshio Hayasaki	1	7	13	20
401	Young-Mi Bahk	1	7	8	13
401	Shiv Govind Singh	1	7	11	49
401	Heidi Ottevaere	1	7	22	46
401	Chun Zhou	2	7	3	11
401	Michael A Cullinan	1	7	5	13
401	Sunghwan Kim	1	7	16	33
401	Hyungjun Jang	1	7	1	4
401	Kunihiro Asada	1	7	9	9
401	Geunchang Choi	1	7	4	8
401	Jordi Fraxedas	1	7	31	54
401	Mohsin Ali Badshah	1	7	4	15
401	Sylvia E Gebhardt	1	7	10	14
401	Seunghun Hong	1	7	12	26
401	René Hübner	1	7	52	79
401	Kerim Tugrul Arat	1	7	2	2
401	Min Yu	2	7	1	5
401	Jose Joseph	1	7	1	5
401	Satoru Takahashi	1	7	15	13
401	Dingrong Yi	1	7	5	9
401	Jonathon L Schad	1	7	1	8
401	Dai-Sik Kim	1	7	13	18
401	Jun Zou	1	7	5	17
401	Ryosuke Kizu	1	7	2	3
401	Jeeyoon Jeong	1	7	6	7
401	Dukhyung Lee	1	7	3	5
401	Yoshio Mita	1	7	6	15
401	Jong-Woong Kim	2	7	22	36
401	Hans Zappe	1	7	23	44
401	Yiqiang Fan	2	7	7	15
401	Davide Bleiner	1	7	15	32
401	Leonidas E Ocola	1	7	16	41
401	Patta Supraja	1	7	6	17
401	Timothy A Brunner	1	7	3	5
401	Tsung-Fu Yao	1	7	3	3
401	Makoto Ikeda	1	7	7	9
401	Greg Denbeaux	1	7	4	6
401	Viviana Agudelo	1	7	1	2
401	Henry Herbol	1	7	2	2
443	Erwin Peiner	1	6	24	41
443	Bruce K. Gale	1	6	26	55
443	Siddhartha Sen	3	6	4	31
443	Chung-Yuen Hui	1	6	39	62
443	Yan-Feng Chen	1	6	34	64
443	Victor Soltwisch	1	6	6	13
443	Michael Krumrey	1	6	25	61
443	Ivan S Mukhin	1	6	24	42
443	Zhanqiang Hou	1	6	6	11
443	Andrej Stranz	1	6	4	12
443	Lingkuan Meng	1	6	1	2
443	Tu-Pei Chen	1	6	41	71
443	Banibrata Mukherjee	3	6	1	6
443	Jelena Skorucak	1	6	3	5
443	Andreas Waag	1	6	28	54
443	Zuhal Tasdemir	1	6	1	9
443	Peng Zhan	1	6	9	19
443	Alexander Koshelev	1	6	4	6
443	Raju Patel	1	6	1	6
443	Wei Wang	1	6	12	30
443	Filipp E Komissarenko	1	6	8	14
443	Roy Kelner	1	6	4	8
443	Glenn H Fredrickson	2	6	13	35
443	Siyuan He	1	6	7	8
443	Hui Zuo	1	6	4	5
443	Richard J Blaikie	1	6	21	38
443	Andrea Notargiacomo	1	6	19	41
443	Mika Pflüger	1	6	5	11
443	Nikolay I Nikolaev	1	6	5	12
443	Bakir Babic	1	6	4	6
443	Ioannis Karageorgos	1	6	2	2
443	George K Knopf	1	6	8	26
443	Emmanuel Delamarche	1	6	20	39
443	Andreas Tortschanoff	1	6	14	25
443	Sumit Kumar Jindal	1	6	6	10
443	Joseph Rosen	1	6	13	26
443	Alexander S Grushin	1	6	4	6
443	Kris T Delaney	2	6	14	31
443	Zhen-Lin Wang	1	6	18	31
443	Chris Clifford	2	6	1	1
443	Sanjeev Kumar Raghuwanshi	1	6	24	27
443	Analía Fernández Herrero	1	6	3	4
443	C Grant Willson	1	6	19	36
443	Hyo Seon Suh	1	6	5	14
443	Michael R Padgen	1	6	2	5
443	Sean J Bentley	1	6	3	6
443	Nabil Laachi	2	6	5	12
443	Vladimir Yankov	1	6	2	4
443	Li-Ting Tseng	1	6	4	11
443	Carlos Pina-Hernandez	1	6	3	9
493	Hadi Veladi	1	5	1	2
493	Ichiro Yamada	1	5	14	22
493	Yiin-Kuen Fuh	4	5	2	34
493	Chunqing Wang	1	5	32	55
493	Chong Liu	1	5	9	14
493	Li Tao	1	5	8	40
493	Paul A Kohl	1	5	33	66
493	Stephan Ruttloff	1	5	1	4
493	Umapathy Magalanadan	1	5	2	7
493	Deepak Marla	1	5	4	14
493	Gianfranco Coppola	1	5	25	54
493	K Mawatari	1	5	26	50
493	Siavash Zargari	1	5	1	4
493	Jon C Geist	1	5	15	25
493	Dieter Nees	1	5	3	12
493	Benedetta Marmiroli	1	5	12	38
493	Przemyslaw W Wachulak	1	5	26	36
493	Bowen Li	1	5	12	16
493	Daniel Nieto	1	5	7	16
493	Mathias Rommel	1	5	16	32
493	Sujan Yenuganti	1	5	3	6
493	Teruaki Hayakawa	1	5	32	51
493	Jean Jacques Delaunay	1	5	24	44
493	Yiliu Tu	1	5	14	19
493	Marco Matteucci	1	5	6	14
493	Shayan Valijam	1	5	1	2
493	Benjamin Thierry	1	5	25	61
493	Fu-Bin Wang	1	5	3	4
493	Jin-Goo Park	2	5	16	33
493	Michael P Bachmann	1	5	56	117
493	María T Flores-Arias	1	5	7	16
493	Justo Arines	1	5	16	18
493	Assoc Prof Craig Priest	1	5	18	44
493	Maria Capeluto	1	5	7	16
493	Philippe Matagne	1	5	8	12
493	Meng-Ju Lin	1	5	2	3
493	Leonid Sinev	1	5	1	2
493	Takehiko Kitamori	1	5	48	88
493	Nicolas Posseme	1	5	5	5
493	Hamed Baghban	1	5	10	18
493	Yu-Chih Lin	1	5	4	7
493	Ronald Dixson	1	5	2	5
493	Ahmed Sharkawy	1	5	6	7
541	Rajesh Kumar Burra	1	4	1	3
541	Han Wang	1	4	24	60
541	M N Hasan	1	4	2	6
541	Simsek Demir	1	4	8	12
541	Hiroshi Morita	1	4	10	20
541	John C Jarman	1	4	3	8
541	Tayfun Akin	1	4	13	26
541	Yung-Chun Lee	2	4	13	28
541	Alvaro San Paulo	1	4	10	28
541	Y Q Fu	1	4	101	172
541	Di Chen	2	4	10	37
541	Xuanxuan Chen	1	4	6	8
541	Tadatomo T Suga	1	4	46	79
541	Ulrich Mescheder	1	4	6	11
541	Stavros Iezekiel	1	4	11	12
541	S Farshid Chini	1	4	3	11
541	Manolis Doxastakis	1	4	7	18
541	Gemma Rius	1	4	8	23
541	David Prendergast	1	4	32	59
541	George Xereas	1	4	1	4
541	Jonathan Trisno	1	4	2	5
541	Lidai Wang	1	4	16	45
541	Bongtae Han	1	4	22	42
541	Jyothi Vankara	1	4	1	2
541	Henne Van Heeren	1	4	2	3
541	Abde Ali Kagalwalla	1	4	1	4
541	Yogendra Narayan Pandey	1	4	1	2
541	Min-Su Kim	1	4	2	4
570	Ondřej Novák	1	3	39	68
570	Dick Jan Broer	1	3	44	94
570	Bahram Azizollah Ganji	2	3	3	11
570	Menelaos K Poutous	1	3	10	14
570	Sandra Van Vlierberghe	1	3	30	82
570	Ondrej Novak	1	3	6	12
570	Arunn Narasimhan	1	3	8	15
570	Mohammad Hossein Naderi	1	3	12	23
570	Jinho Ahn	1	3	19	31
570	Ludovico Cademartiri	1	3	17	29
570	Jessica M De Ruiter	1	3	2	5
570	Louis W Y Liu	1	3	5	12
570	Alberto Roncaglia	1	3	7	24
570	Mohammad Malekmohammad	1	3	3	8
570	Jiří Mužík	1	3	5	11
570	Narayanan Ramakrishnan	1	3	7	17
570	Luca Belsito	1	3	3	18
570	Amos Bardea	1	3	7	13
570	S Anantha Ramakrishna	1	3	22	45
570	Shih-Hao Huang	1	3	7	12
570	Simonetta Grilli	1	3	22	42
570	Paolo De Natale	1	3	45	64
570	Janakarajan Ramkumar	1	3	30	61
570	Martin Smrz	1	3	12	21
570	Chang-Hao Yang	1	3	24	49
570	Zeev Zalevsky	1	3	30	51
570	Michal Chyla	1	3	7	9
570	Chris L Moore	1	3	19	42
570	Peter Dubruel	1	3	46	111
570	Zvika Afik	1	3	2	6
570	Roy Avrahamy	1	3	2	6
570	Reza Ansari	1	3	98	141
570	Myun-Sik Kim	2	3	3	16
570	Viphretuo Mere	1	3	2	6
570	Changqing Xie	1	3	12	27
570	Xiaoli Zhu	1	3	4	12
570	Jui-che Tsai	1	3	11	16
570	Juergen Boemmels	1	3	7	11
570	Julien L Colaux	1	3	5	14
570	Varghese Swamy	1	3	8	34
570	Tomas Mocek	1	3	41	60
570	Moshe Zohar	1	3	4	10
570	Sanjay Govindjee	2	3	6	32
570	Stephen J Bauman	1	3	3	13
570	Ahmad Aziz Darweesh	1	3	1	10
570	Santosh Shaw	1	3	3	9
570	Ying Yi	1	3	6	20
570	Narayan Krishnaswamy	1	3	7	8
570	Joseph B Herzog	1	3	4	22
570	Desalegn T Debu	1	3	2	9
570	Shankar Kumar Selvaraja	1	3	12	25
570	Balasubramanian Malayappan	1	3	1	3
570	Wolfgang Osten	1	3	3	11
570	Tamar Segal-Peretz	1	3	10	26
570	Chung-May Yang	1	3	28	43
570	Ta-Ching Chen	1	3	10	19
570	George Kokkoris	1	3	15	36
570	Stephane Evoy	1	3	19	34
570	Chin-Tai Chen	1	3	3	7
570	Poorna Lakshmi Uppalapati	1	3	1	1
570	Seong Ju Wi	1	3	1	3
570	Jing Guo	1	3	1	5
570	Wataru Nakagawa	1	3	7	9
570	Yung-Chiang Chung	1	3	3	10
570	Yong-Hwa Park	1	3	2	7
570	Reza Yadipour	1	3	1	9
637	Liang Wang	1	2	71	194
637	Junjie Li	1	2	10	19
637	Lebedev, Vadim Lebedev	1	2	5	10
637	Antonia Neels	1	2	47	98
637	Yang Gao	1	2	9	51
637	Pietro Russo	1	2	14	43
637	Xukai Ding	1	2	4	6
637	Ahmed F Abdou	1	2	3	9
637	Fernando Calle	1	2	28	55
637	Meriem Akin	1	2	2	3
637	Ahmed S Bahgat	1	2	1	1
637	Chun-An Liao	1	2	1	4
637	Yasser H Anis	1	2	4	9
637	Michael Kolbe	1	2	12	21
637	Xiaoping He	1	2	6	11
637	Qing-An Huang	1	2	21	44
637	Jacobus Sturm	1	2	6	13
637	Shanti Bhattacharya	2	2	7	16
637	Asta Guobiene	1	2	12	23
637	Margarita Tecpoyotl Torres	1	2	10	14
637	Tao-Hsing Chen	1	2	25	51
637	Makaram Singaperumal	1	2	10	35
637	Rafał Kasztelanic	1	2	13	20
637	Yi-Chang Lu	2	2	2	13
637	Toshiyuki Tsuchiya	1	2	23	40
637	Yang Chen	1	2	8	12
637	Ilyas A H Farhat	1	2	2	4
637	Tomomi Matsui	1	2	14	23
637	Evanthia Papadopoulou	1	2	6	8
637	Elwy E El-Kholy	1	2	1	11
637	Giuseppe Nasti	1	2	6	24
637	Martin Letz	2	2	6	23
637	Jia Jia	1	2	3	5
637	Bharat S Chaudhari	1	2	9	13
637	Liang Wang	1	2	5	11
637	Bei Peng	1	2	10	39
637	Jun Liu	1	2	22	50
637	Moshe Dolejsi	1	2	2	12
637	Gonzalo Fuentes Iriarte	1	2	2	7
637	Atsushi Takahashi	1	2	3	7
637	Li Ding	1	2	2	7
637	Murat Kaya Yapici	1	2	4	19
637	Yang Bu	2	2	1	4
637	Jae Yeon Baek	1	2	1	2
682	Jayne Wu	1	1	29	63
682	Jun Cai	1	1	13	37
682	Toshiyuki Oyama	1	1	8	14
682	Pieter Kruit	1	1	17	34
682	Jorge Sanchez	1	1	4	8
682	Xiaolin Wang	1	1	8	18
682	Hyoungsub Kim	1	1	13	28
682	Azam Iraji zad	1	1	34	93
682	Michael J Mcshane	1	1	28	57
682	Dwk Neo	1	1	7	11
682	Henry Kar Hang Chu	1	1	6	13
682	Gregory P Nordin	1	1	7	20
682	Karthik Shankar	1	1	32	70
682	Bin Yang	1	1	28	66
682	Ho-Chiao Chuang	1	1	9	24
682	Shiuh-Hua Wood Chiang	1	1	7	9
682	Larry L Howell	1	1	21	42
682	Annamalai Senthil Kumar	1	1	28	77
682	Javeed Mohammed	1	1	5	20
682	Jean-François Bardeau	1	1	12	53
682	Hamed Keramati	1	1	2	5
682	Benno Margesin	1	1	17	40
682	Francesc Moll	1	1	8	26
682	Donyau Chiang	1	1	13	21
682	Mithlesh Kumar	1	1	1	5
682	Johnny F Dias	1	1	23	65
682	Mojtaba Joodaki	1	1	11	22
682	Elnaz Afshari Pour	1	1	2	5
682	Bingsen Zhang	1	1	43	74
682	Sergio Gómez	1	1	7	11
682	Saeed Mohammadi	1	1	12	32
682	Minvydas Ragulskis	1	1	41	64
682	Mruthyunjaya Swamy K B	1	1	1	2
682	Adrián Fernández Gavela	1	1	5	13
682	Deyuan Zhang	1	1	38	88
682	Boyan Penkov	1	1	2	5
682	Gottlieb S Oehrlein	1	1	24	40
682	Seyed Peyman Shariatpanahi	1	1	3	21
682	Kamlesh M Alti	1	1	5	18
682	Bibhudutta Rout	1	1	10	27
682	Viviana Mulloni	1	1	10	31
682	Enakshi Bhattacharya	1	1	11	29
682	Senthil Kumar Anantharajan	1	1	19	59
682	Rahul Shukla	1	1	2	7
682	Jian-Ming Lu	1	1	6	19
682	Yeonsang Park	1	1	13	23
682	Ramin Soltanzadeh	1	1	1	8
682	Chang-Won Lee	1	1	10	36
682	Liang-Cheng Tu	1	1	20	45
682	Khairudin Mohamed	1	1	8	23
682	Jingquan Liu	1	1	16	42
682	Tianrui Zhai	1	1	24	39
682	Yonggang Jiang	1	1	11	32
682	D Bruce Burckel	1	1	8	26
682	El-Mostafa Bourim	1	1	9	19
682	Kok Swee Sim	1	1	1	4
682	Jorge Garcia-Sucerquia	1	1	15	24
682	Hwansoo Suh	1	1	4	13
682	Joel L Plawsky	1	1	18	41
682	Chen-Kuei Chung	2	1	12	32
682	Wen-Tse Hsiao	1	1	14	24
682	Delorme Nicolas	1	1	10	33
682	Byoungyoul Park	1	1	3	5
682	Cyrus Shafai	1	1	9	31
682	Ming C Wu	1	1	29	64
682	Isabel Álvarez-Martos	1	1	4	14
682	Eui-Hyeok Yang	1	1	17	38
682	Kevin T Turner	1	1	14	41
682	Yu-Cheng Lin	1	1	9	17
682	Oluwadamilola Phillips	1	1	3	10
682	Samira Farsinezhad	1	1	6	18
682	Yow-Gwo Wang	1	1	2	4
682	Stephen Mclaughlin	1	1	1	2
682	Nicolas Delorme	1	1	6	18
756	Zhen-Jie Zhao	1	0	22	59
756	Jung-San Chen	1	0	4	11
756	Jungkwun Kim	1	0	4	13
756	Nandita DasGupta	1	0	10	19
756	Erik S Hamilton	1	0	1	7
756	David L Dickensheets	1	0	5	13
756	Robert H Schmitt	1	0	40	81
756	Philip Drake	1	0	2	13
756	Sheel Aditya	1	0	19	33
756	Dmitri E Nikonov	1	0	26	47
756	Kamarulazizi Ibrahim	1	0	30	61
756	Konstantins Jefimovs	1	0	17	57
756	Ruey-Hwang Chou	1	0	11	43
756	Arnan Mitchell	1	0	46	97
756	David Nguyen	1	0	3	7
756	Kenneth E Strawhecker	1	0	6	24
756	Brian A Mazzeo	1	0	10	23
756	Aron Michael	1	0	9	15
756	Yu-Bin Chen	1	0	7	25
756	Peter Bøggild	1	0	38	61
756	Robin Scheibler	1	0	1	7
756	Kin-Fong Lei	1	0	21	47
756	Zhixiang Yin	1	0	6	18
756	Zhidong Du	1	0	1	12
756	Sami Myllymäki	1	0	8	34
756	Joung-Man Park	1	0	12	32
756	Liang Pan	1	0	8	28
756	Fauzia Khatkhatay	1	0	9	19
756	Firouz Ghaderi-Pakdel	1	0	4	25
756	Yong-Kyu Yoon	1	0	5	23
756	Ryan Christopher Toonen	1	0	2	10
756	Larry Ming-Cheung Chow	1	0	8	44
756	Tianbo Liu	1	0	1	3
756	Chin-Tsan Wang	1	0	19	39
756	Toralf Scharf	2	0	3	14
756	Edward Y Chang	1	0	22	41
756	Dhananjay Bodas	1	0	13	36
756	Georg von Freymann	1	0	24	59
756	Javad Frounchi	1	0	4	20
756	Guido Groeseneken	1	0	43	71
756	Ingrid De Wolf	1	0	30	60
756	Jakob Kjelstrup-Hansen	1	0	14	41
756	Songphol Kanjanachuchai	1	0	12	22
756	Zhao Chen	1	0	1	0
756	Emil J Geiger	1	0	2	6
756	Ali Naqavi	1	0	2	6

Scientometrics

Overviews

Citing Bodies

Journal of Micro/ Nanolithography, MEMS, and MOEMS

Top Authors (by citations)