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Top Articles

#TitleJournalYearCitations
1What is the Young's Modulus of Silicon?Journal of Microelectromechanical Systems20101,762
2Creating, transporting, cutting, and merging liquid droplets by electrowetting-based actuation for digital microfluidic circuitsJournal of Microelectromechanical Systems20031,308
3Passive mixing in a three-dimensional serpentine microchannelJournal of Microelectromechanical Systems20001,052
4Three-dimensional micro-channel fabrication in polydimethylsiloxane (PDMS) elastomerJournal of Microelectromechanical Systems2000973
5Etch rates for micromachining processing-part IIJournal of Microelectromechanical Systems2003790
6Studies on surface wettability of poly(dimethyl) siloxane (PDMS) and glass under oxygen-plasma treatment and correlation with bond strengthJournal of Microelectromechanical Systems2005688
7M-TEST: A test chip for MEMS material property measurement using electrostatically actuated test structuresJournal of Microelectromechanical Systems1997659
8Characterization of Nontoxic Liquid-Metal Alloy Galinstan for Applications in MicrodevicesJournal of Microelectromechanical Systems2012626
9Quality factors in micron- and submicron-thick cantileversJournal of Microelectromechanical Systems2000621
10Gaseous slip flow in long microchannelsJournal of Microelectromechanical Systems1997603
11Architectures for Vibration-Driven Micropower GeneratorsJournal of Microelectromechanical Systems2004594
12A Curved-Beam Bistable MechanismJournal of Microelectromechanical Systems2004550
13Piezoelectric Aluminum Nitride Vibrating Contour-Mode MEMS ResonatorsJournal of Microelectromechanical Systems2006515
14Ink-jet printed nanoparticle microelectromechanical systemsJournal of Microelectromechanical Systems2002513
15A reduced-order model for electrically actuated microbeam-based MEMSJournal of Microelectromechanical Systems2003506
16There's plenty of room at the bottom [data storage]Journal of Microelectromechanical Systems1992492
17Etch rates for micromachining processingJournal of Microelectromechanical Systems1996483
18Thin film shape memory alloy microactuatorsJournal of Microelectromechanical Systems1996466
19Design and fabrication of compliant micromechanisms and structures with negative Poisson's ratioJournal of Microelectromechanical Systems1997457
20Mechanical stability and adhesion of microstructures under capillary forces. I. Basic theoryJournal of Microelectromechanical Systems1993417
21Nanoenergetic Materials for MEMS: A ReviewJournal of Microelectromechanical Systems2007416
22Alkyltrichlorosilane-based self-assembled monolayer films for stiction reduction in silicon micromachinesJournal of Microelectromechanical Systems1998396
23Extending the travel range of analog-tuned electrostatic actuatorsJournal of Microelectromechanical Systems1999389
24Equilibrium swelling and kinetics of pH-responsive hydrogels: models, experiments, and simulationsJournal of Microelectromechanical Systems2002376
25A magnetic microstirrer and array for microfluidic mixingJournal of Microelectromechanical Systems2002375
26Microstructure to substrate self-assembly using capillary forcesJournal of Microelectromechanical Systems2001365
27MEMS Laser Scanners: A ReviewJournal of Microelectromechanical Systems2014365
28A Flexible Polymer Tactile Sensor: Fabrication and Modular Expandability for Large Area DeploymentJournal of Microelectromechanical Systems2006354
29A new technique for measuring the mechanical properties of thin filmsJournal of Microelectromechanical Systems1997352
30Evaluation of size effect on mechanical properties of single crystal silicon by nanoscale bending test using AFMJournal of Microelectromechanical Systems2000348
31Electrothermally activated SU-8 microgripper for single cell manipulation in solutionJournal of Microelectromechanical Systems2005337
32Specimen size effect on tensile strength of surface-micromachined polycrystalline silicon thin filmsJournal of Microelectromechanical Systems1998335
33Nonlinear Limits for Single-Crystal Silicon MicroresonatorsJournal of Microelectromechanical Systems2004335
34Micromachined low-loss microwave switchesJournal of Microelectromechanical Systems1999334
35New thermoelectric components using microsystem technologiesJournal of Microelectromechanical Systems2004328
36Piezoelectric MEMS Energy Harvester for Low-Frequency Vibrations With Wideband Operation Range and Steadily Increased Output PowerJournal of Microelectromechanical Systems2011327
37Electrostatic micro torsion mirrors for an optical switch matrixJournal of Microelectromechanical Systems1996326
38A HARPSS polysilicon vibrating ring gyroscopeJournal of Microelectromechanical Systems2001322
39Monolithically Fabricated Microgripper With Integrated Force Sensor for Manipulating Microobjects and Biological Cells Aligned in an Ultrasonic FieldJournal of Microelectromechanical Systems2007322
40Silicon micromachined hollow microneedles for transdermal liquid transportJournal of Microelectromechanical Systems2003319
41Thin-film shape-memory alloy actuated micropumpsJournal of Microelectromechanical Systems1998318
42VHF free-free beam high-Q micromechanical resonatorsJournal of Microelectromechanical Systems2000307
43Surface-tension-driven microactuation based on continuous electrowettingJournal of Microelectromechanical Systems2000303
44Bent-beam electrothermal actuators-Part I: Single beam and cascaded devicesJournal of Microelectromechanical Systems2001301
45Two-Axis Electromagnetic Microscanner for High Resolution DisplaysJournal of Microelectromechanical Systems2006293
46Modeling and optimal design of piezoelectric cantilever microactuatorsJournal of Microelectromechanical Systems1997290
47A vacuum packaged surface micromachined resonant accelerometerJournal of Microelectromechanical Systems2002290
48Surface tension-powered self-assembly of microstructures - The state-of-the-artJournal of Microelectromechanical Systems2003289
49Normal and Shear Force Measurement Using a Flexible Polymer Tactile Sensor With Embedded Multiple CapacitorsJournal of Microelectromechanical Systems2008287
50Mechanical stability and adhesion of microstructures under capillary forces. II. ExperimentsJournal of Microelectromechanical Systems1993285