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Journals
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Journal of Microelectromechanical Systems
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top-articles
Journal of Microelectromechanical Systems
2.8
(top 20%)
impact factor
3.6K
(top 5%)
papers
141.0K
(top 5%)
citations
151
(top 2%)
h
-index
2.8
(top 20%)
impact factor
4.3K
all documents
147.7K
doc citations
230
(top 5%)
g
-index
Top Articles
#
Title
Journal
Year
Citations
1
What is the Young's Modulus of Silicon?
Journal of Microelectromechanical Systems
2010
1,762
2
Creating, transporting, cutting, and merging liquid droplets by electrowetting-based actuation for digital microfluidic circuits
Journal of Microelectromechanical Systems
2003
1,308
3
Passive mixing in a three-dimensional serpentine microchannel
Journal of Microelectromechanical Systems
2000
1,052
4
Three-dimensional micro-channel fabrication in polydimethylsiloxane (PDMS) elastomer
Journal of Microelectromechanical Systems
2000
973
5
Etch rates for micromachining processing-part II
Journal of Microelectromechanical Systems
2003
790
6
Studies on surface wettability of poly(dimethyl) siloxane (PDMS) and glass under oxygen-plasma treatment and correlation with bond strength
Journal of Microelectromechanical Systems
2005
688
7
M-TEST: A test chip for MEMS material property measurement using electrostatically actuated test structures
Journal of Microelectromechanical Systems
1997
659
8
Characterization of Nontoxic Liquid-Metal Alloy Galinstan for Applications in Microdevices
Journal of Microelectromechanical Systems
2012
626
9
Quality factors in micron- and submicron-thick cantilevers
Journal of Microelectromechanical Systems
2000
621
10
Gaseous slip flow in long microchannels
Journal of Microelectromechanical Systems
1997
603
11
Architectures for Vibration-Driven Micropower Generators
Journal of Microelectromechanical Systems
2004
594
12
A Curved-Beam Bistable Mechanism
Journal of Microelectromechanical Systems
2004
550
13
Piezoelectric Aluminum Nitride Vibrating Contour-Mode MEMS Resonators
Journal of Microelectromechanical Systems
2006
515
14
Ink-jet printed nanoparticle microelectromechanical systems
Journal of Microelectromechanical Systems
2002
513
15
A reduced-order model for electrically actuated microbeam-based MEMS
Journal of Microelectromechanical Systems
2003
506
16
There's plenty of room at the bottom [data storage]
Journal of Microelectromechanical Systems
1992
492
17
Etch rates for micromachining processing
Journal of Microelectromechanical Systems
1996
483
18
Thin film shape memory alloy microactuators
Journal of Microelectromechanical Systems
1996
466
19
Design and fabrication of compliant micromechanisms and structures with negative Poisson's ratio
Journal of Microelectromechanical Systems
1997
457
20
Mechanical stability and adhesion of microstructures under capillary forces. I. Basic theory
Journal of Microelectromechanical Systems
1993
417
21
Nanoenergetic Materials for MEMS: A Review
Journal of Microelectromechanical Systems
2007
416
22
Alkyltrichlorosilane-based self-assembled monolayer films for stiction reduction in silicon micromachines
Journal of Microelectromechanical Systems
1998
396
23
Extending the travel range of analog-tuned electrostatic actuators
Journal of Microelectromechanical Systems
1999
389
24
Equilibrium swelling and kinetics of pH-responsive hydrogels: models, experiments, and simulations
Journal of Microelectromechanical Systems
2002
376
25
A magnetic microstirrer and array for microfluidic mixing
Journal of Microelectromechanical Systems
2002
375
26
Microstructure to substrate self-assembly using capillary forces
Journal of Microelectromechanical Systems
2001
365
27
MEMS Laser Scanners: A Review
Journal of Microelectromechanical Systems
2014
365
28
A Flexible Polymer Tactile Sensor: Fabrication and Modular Expandability for Large Area Deployment
Journal of Microelectromechanical Systems
2006
354
29
A new technique for measuring the mechanical properties of thin films
Journal of Microelectromechanical Systems
1997
352
30
Evaluation of size effect on mechanical properties of single crystal silicon by nanoscale bending test using AFM
Journal of Microelectromechanical Systems
2000
348
31
Electrothermally activated SU-8 microgripper for single cell manipulation in solution
Journal of Microelectromechanical Systems
2005
337
32
Specimen size effect on tensile strength of surface-micromachined polycrystalline silicon thin films
Journal of Microelectromechanical Systems
1998
335
33
Nonlinear Limits for Single-Crystal Silicon Microresonators
Journal of Microelectromechanical Systems
2004
335
34
Micromachined low-loss microwave switches
Journal of Microelectromechanical Systems
1999
334
35
New thermoelectric components using microsystem technologies
Journal of Microelectromechanical Systems
2004
328
36
Piezoelectric MEMS Energy Harvester for Low-Frequency Vibrations With Wideband Operation Range and Steadily Increased Output Power
Journal of Microelectromechanical Systems
2011
327
37
Electrostatic micro torsion mirrors for an optical switch matrix
Journal of Microelectromechanical Systems
1996
326
38
A HARPSS polysilicon vibrating ring gyroscope
Journal of Microelectromechanical Systems
2001
322
39
Monolithically Fabricated Microgripper With Integrated Force Sensor for Manipulating Microobjects and Biological Cells Aligned in an Ultrasonic Field
Journal of Microelectromechanical Systems
2007
322
40
Silicon micromachined hollow microneedles for transdermal liquid transport
Journal of Microelectromechanical Systems
2003
319
41
Thin-film shape-memory alloy actuated micropumps
Journal of Microelectromechanical Systems
1998
318
42
VHF free-free beam high-Q micromechanical resonators
Journal of Microelectromechanical Systems
2000
307
43
Surface-tension-driven microactuation based on continuous electrowetting
Journal of Microelectromechanical Systems
2000
303
44
Bent-beam electrothermal actuators-Part I: Single beam and cascaded devices
Journal of Microelectromechanical Systems
2001
301
45
Two-Axis Electromagnetic Microscanner for High Resolution Displays
Journal of Microelectromechanical Systems
2006
293
46
Modeling and optimal design of piezoelectric cantilever microactuators
Journal of Microelectromechanical Systems
1997
290
47
A vacuum packaged surface micromachined resonant accelerometer
Journal of Microelectromechanical Systems
2002
290
48
Surface tension-powered self-assembly of microstructures - The state-of-the-art
Journal of Microelectromechanical Systems
2003
289
49
Normal and Shear Force Measurement Using a Flexible Polymer Tactile Sensor With Embedded Multiple Capacitors
Journal of Microelectromechanical Systems
2008
287
50
Mechanical stability and adhesion of microstructures under capillary forces. II. Experiments
Journal of Microelectromechanical Systems
1993
285
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