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exaly
›
Journals
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Journal of Micromechanics and Microengineering
›
top-articles
Journal of Micromechanics and Microengineering
2.2
(top 20%)
impact factor
7.0K
(top 5%)
papers
195.6K
(top 2%)
citations
144
(top 2%)
h
-index
2.3
(top 20%)
impact factor
7.2K
all documents
204.3K
doc citations
236
(top 2%)
g
-index
Top Articles
#
Title
Journal
Year
Citations
1
A review of micropumps
Journal of Micromechanics and Microengineering
2004
1,656
2
Micromixers—a review
Journal of Micromechanics and Microengineering
2005
1,458
3
A micro electromagnetic generator for vibration energy harvesting
Journal of Micromechanics and Microengineering
2007
1,203
4
Mechanical characterization of bulk Sylgard 184 for microfluidics and microengineering
Journal of Micromechanics and Microengineering
2014
1,146
5
SU-8: a low-cost negative resist for MEMS
Journal of Micromechanics and Microengineering
1997
965
6
Bernoulli–Euler beam model based on a modified couple stress theory
Journal of Micromechanics and Microengineering
2006
953
7
Microfluidics-a review
Journal of Micromechanics and Microengineering
1993
934
8
A review of microvalves
Journal of Micromechanics and Microengineering
2006
877
9
Ferroelectric thin films for micro-sensors and actuators: a review
Journal of Micromechanics and Microengineering
2000
836
10
Review on micro molding of thermoplastic polymers
Journal of Micromechanics and Microengineering
2004
818
11
SU-8: a photoresist for high-aspect-ratio and 3D submicron lithography
Journal of Micromechanics and Microengineering
2007
763
12
Role of material microstructure in plate stiffness with relevance to microcantilever sensors
Journal of Micromechanics and Microengineering
2005
737
13
The mechanical properties of the rubber elastic polymer polydimethylsiloxane for sensor applications
Journal of Micromechanics and Microengineering
1997
728
14
A review of focused ion beam applications in microsystem technology
Journal of Micromechanics and Microengineering
2001
592
15
Micro instrumentation for characterizing thermoelectric properties of nanomaterials
Journal of Micromechanics and Microengineering
2005
573
16
The black silicon method: a universal method for determining the parameter setting of a fluorine-based reactive ion etcher in deep silicon trench etching with profile control
Journal of Micromechanics and Microengineering
1995
564
17
The centrifugal microfluidic Bio-Disk platform
Journal of Micromechanics and Microengineering
2007
521
18
Comb-drive actuators for large displacements
Journal of Micromechanics and Microengineering
1996
506
19
Stiction in surface micromachining
Journal of Micromechanics and Microengineering
1996
497
20
Lab-on-chip technologies: making a microfluidic network and coupling it into a complete microsystem—a review
Journal of Micromechanics and Microengineering
2007
466
21
Microflow devices and systems
Journal of Micromechanics and Microengineering
1994
453
22
Determining the optimal PDMS–PDMS bonding technique for microfluidic devices
Journal of Micromechanics and Microengineering
2008
448
23
RF MEMS from a device perspective
Journal of Micromechanics and Microengineering
2000
447
24
Microinjection molding of thermoplastic polymers: a review
Journal of Micromechanics and Microengineering
2007
447
25
Hyperelastic pressure sensing with a liquid-embedded elastomer
Journal of Micromechanics and Microengineering
2010
418
26
Vibration energy harvesting with aluminum nitride-based piezoelectric devices
Journal of Micromechanics and Microengineering
2009
390
27
A survey on the reactive ion etching of silicon in microtechnology
Journal of Micromechanics and Microengineering
1996
389
28
Characterization of the mechanical behavior of an electrically actuated microbeam
Journal of Micromechanics and Microengineering
2002
386
29
PDMS-based micro PCR chip with Parylene coating
Journal of Micromechanics and Microengineering
2003
356
30
Recent developments in micromilling using focused ion beam technology
Journal of Micromechanics and Microengineering
2004
356
31
Mechanical properties of silicones for MEMS
Journal of Micromechanics and Microengineering
2008
347
32
A review of MEMS oscillators for frequency reference and timing applications
Journal of Micromechanics and Microengineering
2012
328
33
The design, fabrication and evaluation of a MEMS PZT cantilever with an integrated Si proof mass for vibration energy harvesting
Journal of Micromechanics and Microengineering
2008
325
34
Micromachining of SrTiO3steps for high-Tcstep edge junction dc SQUIDs
Journal of Micromechanics and Microengineering
2004
321
35
Pull-in voltage analysis of electrostatically actuated beam structures with fixed$ndash$fixed and fixed$ndash$free end conditions
Journal of Micromechanics and Microengineering
2002
320
36
Bioprinting of a mechanically enhanced three-dimensional dual cell-laden construct for osteochondral tissue engineering using a multi-head tissue/organ building system
Journal of Micromechanics and Microengineering
2012
318
37
MEMS actuators and sensors: observations on their performance and selection for purpose
Journal of Micromechanics and Microengineering
2005
314
38
Analysis and design of polysilicon thermal flexure actuator
Journal of Micromechanics and Microengineering
1999
309
39
Determining mean and gradient residual stresses in thin films using micromachined cantilevers
Journal of Micromechanics and Microengineering
1996
305
40
Wafer level packaging of MEMS
Journal of Micromechanics and Microengineering
2008
304
41
Mixing characteristics of T-type microfluidic mixers
Journal of Micromechanics and Microengineering
2001
301
42
Influence of processing conditions on the thermal and mechanical properties of SU8 negative photoresist coatings
Journal of Micromechanics and Microengineering
2003
300
43
Microfabrication of PPy microactuators and other conjugated polymer devices
Journal of Micromechanics and Microengineering
1999
298
44
Implementation and analysis of polymeric microstructure replication by micro injection molding
Journal of Micromechanics and Microengineering
2004
298
45
Equivalent circuit representation of electromechanical transducers: I. Lumped-parameter systems
Journal of Micromechanics and Microengineering
1996
295
46
Electromagnetic energy harvesting from vibrations of multiple frequencies
Journal of Micromechanics and Microengineering
2009
294
47
Mixing in microfluidic devices and enhancement methods
Journal of Micromechanics and Microengineering
2015
290
48
Silicon electro-optic micro-modulator fabricated in standard CMOS technology as components for all silicon monolithic integrated optoelectronic systems
*
Journal of Micromechanics and Microengineering
2021
287
49
Resonant silicon sensors
Journal of Micromechanics and Microengineering
1991
283
50
Efficiency of energy conversion for a piezoelectric power harvesting system
Journal of Micromechanics and Microengineering
2006
283
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