Journal of Vacuum Science & Technology an Official Journal of the American Vacuum Society B, Microelectronics Processing and Phenomena

1.6(top 50%)

impact factor

12.2K(top 2%)

papers

244.2K(top 2%)

citations

143(top 5%)

h-index

1.6(top 50%)

impact factor

12.2K

all documents

252.7K

doc citations

229(top 5%)

g-index

Top Schools (by citations)

#	School	Articles	Citations	R ARank	R CRank
1	Department of Physics	24	715	20	29
2	Department of Electrical and Computer Engineering	27	635	48	85
3	Department of Electrical Engineering and Computer Science	39	627	24	80
4	Department of Electrical Engineering and Computer Science	17	537	52	106
5	Department of Electrical Engineering	4	491	14	1
6	Department of Electrical Engineering	8	459	90	93
7	Faculty of Engineering	2	450	548	75
8	Department of Electrical Engineering	3	435	23	5
9	Department of Electrical Engineering	12	391	23	30
10	Department of Materials Science and Engineering	13	362	41	51
11	Department of Electrical Engineering	13	357	86	141
12	Department of Chemical Engineering	7	301	116	153
13	School of Applied and Engineering Physics	12	300	32	59
14	Department of Materials Science and Engineering	2	275	167	71
15	Department of Electronics and Electrical Engineering	17	232	15	45
16	Faculty of Engineering	5	217	6	3
17	Department of Chemical Engineering	6	203	85	146
18	Department of Materials Science and Engineering	12	202	57	117
19	Department of Electrical Engineering and Computer Sciences	19	199	32	164
20	Department of Chemical Engineering	3	184	54	56
21	Department of Chemistry	3	173	576	476
22	Faculty of Engineering	4	172	153	93
23	Department of Electrical and Computer Engineering	7	170	85	121
24	Department of Electrical and Computer Engineering	9	169	40	86
25	Department of Chemistry and Chemical Biology	2	164	223	218
25	Department of Electrical and Computer Engineering	3	164	219	152
27	Department of Electrical Engineering and Computer Sciences	11	160	13	72
28	Institute for Research in Electronics and Applied Physics	1	154	86	42
29	Department of Electrical Engineering	4	153	35	30
30	School of Electrical Engineering	7	152	39	60
31	Department of Physics	3	147	21	16
31	Department of Physics	2	147	90	54
33	Department of Electrical Engineering	14	146	18	79
34	Department of Electrical Engineering	8	143	52	112
35	Department of Materials Science and Engineering	3	139	218	215
36	Department of Chemistry and Biochemistry	7	137	84	191
37	Department of Electrical Engineering	11	135	30	69
38	Department of Electrical and Computer Engineering	7	134	52	89
39	Department of Chemistry	7	131	71	146
40	Department of Physics and Materials Science	2	128	244	163
41	Department of Electrical Engineering	2	127	162	96
41	Department of Electronics	4	127	44	45
43	Department of Electrical and Computer Engineering	13	125	50	164
44	Department of Physics	8	124	91	145
45	Department of Applied Physics	6	123	23	37
46	Department of Electrical and Computer Engineering	5	122	59	63
47	Semiconductor Electronics Division	5	120	14	22
47	Department of Physics	15	120	58	139
49	Department of Chemistry	2	119	162	111
50	Department of Engineering	10	118	198	499
51	Department of Electrical Engineering and Computer Science	6	117	25	65
52	Department of Materials Science and Engineering	2	107	241	216
53	Department of Electrical Engineering	12	105	20	33
54	Department of Electrical Engineering	7	104	100	185
54	Graduate School of Engineering Science	13	104	129	259
56	Department of Chemistry	2	103	285	240
57	Division of Engineering	5	102	104	183
58	Department of Chemistry	3	98	188	182
59	School of Electrical Engineering	10	96	23	73
60	Department of Chemistry	2	92	213	173
61	Department of Materials Science and Engineering	2	91	137	142
61	School of Electrical and Computer Engineering	9	91	84	225
63	School of Electrical Engineering	10	90	32	76
64	School of Electrical and Electronic Engineering	13	87	204	462
65	Department of Materials Science and Engineering	2	86	67	60
66	Wafer Process Engineering Development Division	1	85	2	1
66	Department of Electrical and Computer Engineering	2	85	55	47
68	Department of Materials Science and Engineering	7	83	93	136
68	Department of Physics	3	83	381	432
70	Department of Electrical and Computer Engineering	1	80	212	112
71	Department of Materials Science and Engineering and Center for Electronic Materials Research	3	79	2	2
71	Department of Electrical and Electronic Engineering	2	79	26	13
73	Center for X-ray Optics	6	77	6	22
74	Department of Electrical Engineering	7	75	136	211
75	Department of Electronics Engineering	6	72	75	90
75	Department of Chemical Engineering	3	72	258	422
75	Department of Electrical and Computer Engineering	1	72	207	145
75	School of Electrical and Computer Engineering	4	72	227	309
79	Department of Physics and Electronics	1	71	109	49
80	Department of Physics	4	69	25	45
81	Department of Chemical Engineering	2	67	51	57
82	Department of Electrical and Electronic Engineering	3	65	40	57
83	Department of Chemical Engineering and Materials Science	7	64	129	317
83	Department of Physics	3	64	190	205
83	Department of Chemistry	1	64	223	157
86	School of Mechanical and Production Engineering	3	63	172	227
87	Institute of Electro-Optical Engineering	1	61	31	16
87	School of Physics	2	61	168	180
89	School of Engineering	2	60	621	482
89	Department of Electrical Engineering and Computer Science	6	60	69	200
91	Institute of Physics and Applied Physics	3	57	58	65
92	Department of Electrical Engineering	3	56	43	53
93	Department of Physics	1	53	91	65
93	Center for Advanced Electronic Materials Processing	2	53	2	2
95	School of Chemical Engineering and Institute of Chemical Processes	6	52	5	32
95	Department of Manufacturing Engineering	2	52	25	38
95	Department of Chemical Engineering	4	52	86	186
98	Stanford Electronics Laboratories	3	51	31	39
98	Department of Physics	2	51	188	200
98	School of Electronics and Physical Sciences	3	51	19	45
101	Department of Mechanical Engineering	1	50	143	144
102	Department of Physics	2	48	43	41
102	Department of Physics	3	48	117	173
102	Chemistry Division	2	48	96	133
105	Department of Materials Science and Engineering	6	47	109	202
105	Department of Chemical Engineering	2	47	93	107
105	Faculty of Engineering	5	47	221	340
108	Department of Physics	2	46	34	52
108	Department of Chemistry	1	46	372	377
108	Department of Engineering Science and Mechanics	3	46	110	202
108	Department of Chemistry	2	46	303	374
112	Department of Electrical and Computer Engineering	6	45	102	276
112	Department of Electronics	4	45	16	25
112	Department of Chemical Engineering	1	45	97	101
115	Department of Chemistry	1	44	258	267
115	Department of Electrical and Computer Engineering	2	44	160	202
115	Department of Electrical and Computer Engineering	2	44	177	184
118	Graduate School of Engineering	3	43	444	478
119	The Institute of Optics	5	42	37	101
119	Department of Electronic Science and Engineering	5	42	54	89
119	Department of Materials Science and Engineering	1	42	205	148
122	Department of Electrical and Computer Engineering	2	41	41	49
122	Department of Electrical and Electronic Engineering	6	41	8	19
122	Graduate School of Engineering	2	41	832	768
122	Department of Electrical and Computer Engineering	3	41	22	39
122	Department of Physics	1	41	55	61
122	Department of Electrical and Electronic Engineering	2	41	34	20
122	Department of Physics	1	41	145	140
129	Department of Electronics and Computer Science	4	40	54	168
129	Department of Chemistry	1	40	282	270
131	Department of Physics	1	39	147	142
131	Department of Physics	1	39	195	176
131	School of Physics and Astronomy	2	39	161	179
131	Department of Chemistry	1	39	255	233
131	Department of Physics	2	39	85	88
131	Department of Physics	2	39	150	167
131	Department of Civil and Environmental Engineering	1	39	139	133
131	Department of Electronic Engineering	4	39	103	215
139	Department of Electrical Engineering	2	38	31	34
139	Department of Applied Physics	2	38	133	157
139	Department of Physics and Astronomy	2	38	18	20
142	Department of Electrical and Computer Engineering	1	37	102	87
142	Department of Electrical Engineering and Computer Science	1	37	120	138
142	Department of Electrical and Electronic Engineering	5	37	28	51
145	Department of Electrical and Computer Engineering	5	36	26	71
146	Department of Chemical Engineering	1	35	389	342
146	School of Chemical Engineering	3	35	64	111
146	Department of Metallurgical Engineering	2	35	41	52
146	Department of Physics	3	35	165	233
146	Department of Electrical and Electronic Engineering	2	35	21	30
146	Department of Electronic Engineering	1	35	346	291
146	School of Chemical Engineering	3	35	62	137
153	Institute of Applied Physics	2	34	17	42
153	Department of Chemistry	1	34	290	268
153	Department of Materials Science and Engineering	2	34	86	116
153	Department of Chemical and Materials Engineering	3	34	20	68
153	Institute of Physics	1	34	196	117
158	Department of Electrical Engineering	2	33	64	71
158	Department of Electronic Engineering	3	33	49	62
160	Department of Electrical and Computer Engineering	3	32	7	21
160	Institute of Chemistry	1	32	609	530
160	Department of Physics	1	32	182	139
160	Department of Physics	1	32	102	87
160	Department of Physics	1	32	74	59
160	Department of Physics and Astronomy	1	32	33	19
166	Department of Applied Physics	3	31	24	69
166	Department of Physics	1	31	355	337
166	Department of Physics and Astronomy	1	31	196	178
166	Computational Mechanics Center	7	31	2	2
166	Department of Electrical and Electronic Engineering	2	31	34	36
166	Plasma Physics Division	1	31	74	66
166	Department of Chemistry and Biochemistry	3	31	11	33
173	Department of Materials Science and Engineering	2	30	101	146
173	Faculty of Engineering Science	4	30	183	295
173	Department of Electronics and Mechanical Engineering	2	30	31	35
176	Materials Science and Technology Division	2	29	128	188
176	Department of Electrical and Computer Engineering	4	29	29	113
176	Faculty of Engineering	3	29	160	235
176	Department of Physics and Astronomy	1	29	145	126
180	Department of Physics	1	28	207	217
180	Thin Film Physics Division	2	28	47	82
180	Department of Physics	3	28	56	108
180	Department of Physics	2	28	43	36
184	Department of Physics	2	27	206	340
184	Department of Chemical Engineering	2	27	37	61
184	Department of Applied Physics	1	27	258	246
184	Department of Chemistry	1	27	239	260
188	Department of Physics	5	26	84	183
188	Department of Electrical Engineering	3	26	76	109
188	Department of Physics	3	26	66	114
188	Department of Applied Chemistry	1	26	112	109
188	Faculty of Science and Engineering	1	26	258	194
188	Department of Mechanical Engineering	1	26	121	107
188	School of Electrical and Mechanical Engineering	1	26	14	25
195	School of Materials Engineering	3	25	117	239
195	Department of Physics	1	25	161	164
195	Department of Electrical Engineering and Applied Physics	1	25	41	41
195	Department of Chemistry	2	25	229	349
195	Department of Physics	1	25	24	31
200	Department of Electronics Engineering	3	24	6	12
200	Department of Electrical Engineering	7	24	64	290
200	Department of Electrical and Computer Engineering	3	24	101	236
203	Department of Physics and Astronomy	1	23	168	209
203	Department of Electrical Engineering	1	23	127	109
203	Electronics Development Center	3	23	1	1
203	Department of Electrical and Electronic Engineering	1	23	39	35
203	Institute of Ion Beam Physics and Materials Research	1	23	98	110
203	Faculty of Engineering	1	23	188	159
209	Department of Physics	1	22	164	151
209	Department of Physics	2	22	106	182
209	Applied Physics Program	1	22	40	59
209	Department of Applied Physics	1	22	6	7
209	Department of Physics and Astronomy	1	22	159	161
209	Department of Electrical and Computer Engineering	1	22	74	104
215	Department of Electrical Engineering	1	21	49	67
215	School of Engineering Science	1	21	204	223
215	Department of Physics and Astronomy	1	21	86	103
215	Department of Materials Science and Engineering	1	21	357	411
215	Department of Physics and Astronomy	1	21	139	146
215	Department of Physics	1	21	90	106
215	Department of Electrical Engineering	1	21	50	40
222	School of Physics	1	20	443	447
222	Department of Physics	3	20	187	405
222	Department of Electrical and Computer Engineering and Computer Science	2	20	25	66
225	Department of Mechanical Engineering	1	19	232	242
225	Department of Biomedical Engineering	1	19	35	92
225	School of Engineering	1	19	28	36
225	Department of Electronic and Electrical Engineering	2	19	43	58
225	Center for Composite Materials	1	19	107	113
225	Department of Electrical Engineering	4	19	192	328
225	Department of Chemistry	1	19	151	201
225	Department of Zoology and Genetics	1	19	79	126
225	Department of Electrical and Computer Engineering	1	19	40	62
234	Department of Chemistry	2	18	152	278
234	Department of Ceramic Engineering	3	18	17	34
234	Department of Computer Science	1	18	242	392
234	Department of Engineering and Systems Science	1	18	5	10
234	Department of Electronic and Electrical Engineering	3	18	112	243
234	Department of Physics	5	18	56	191
234	Department of Electrical and Computer Engineering	4	18	52	178
234	Department of Condensed Matter Physics	1	18	16	29
234	Department of Physics	1	18	118	125
234	Department of Physics	2	18	163	282
234	School of Materials Engineering	3	18	39	88
234	Institute of Materials Science	1	18	211	232
246	Department of Physics	1	17	73	71
246	Institute of Condensed Matter Physics	2	17	3	6
246	School of Chemistry	1	17	284	325
246	Department of Materials Engineering	4	17	13	32
246	Department of Electrical and Computer Engineering	2	17	404	577
246	Department of Materials Science and Engineering	1	17	189	184
246	Department of Physics and Astronomy	1	17	12	21
253	Division of Chemistry and Chemical Engineering	2	16	260	511
253	Department of Electrical Engineering and Systems Science	1	16	15	23
253	Institute of Physics	3	16	356	530
253	Division of Electronic and Information Engineering	1	16	12	16
253	Department of Electrical Engineering	2	16	47	76
258	Department of Applied Physics	2	15	113	236
258	Department of Electrical and Computer Engineering	2	15	194	385
258	Department of Physics	1	15	123	152
258	Department of Physics	1	15	17	11
258	Department of Chemical Engineering	1	15	31	55
258	Department of Electrical Engineering and Electronics	2	15	17	33
258	Department of Physics and Astronomy	2	15	81	143
258	Department of Applied Chemistry	1	15	292	314
258	Faculty of Engineering	1	15	641	669
258	Department of Physics	2	15	166	281
258	Department of Chemical Engineering	2	15	64	120
258	Department of Electrical and Computer Engineering	1	15	57	83
270	Department of Materials Science and Metallurgy	1	14	362	441
270	Department of Physics	1	14	159	149
270	Department of Materials Science and Engineering	3	14	122	284
270	Department of Physics	1	14	133	151
270	Department of Physics	1	14	7	10
270	Faculty of Physics	2	14	134	198
270	Department of Electrical and Computer Engineering	2	14	118	223
270	Department of Chemistry and Biochemistry	1	14	219	336
270	Department of Physics	1	14	252	283
270	Department of Electrical and Computer Engineering	3	14	30	123
270	Department of Electrical Engineering	1	14	26	22
270	Department of Electrical Engineering	1	14	6	12
270	Department of Physics	1	14	128	166
270	Department of Electrical Engineering	1	14	118	98
270	Center of Excellence for Microelectronics and Photonics	1	14	2	1
285	Department of Chemical Engineering	2	13	242	409
285	Research School of Physical Sciences and Engineering	1	13	85	134
285	Department of Chemistry and Biochemistry	1	13	716	962
285	Department of Physics	2	13	339	459
285	Faculty of Applied Sciences	1	13	315	457
285	Department of Electronics	2	13	94	172
285	School of Electronics and Information Engineering	1	13	120	133
292	Department of Physics	1	12	132	172
292	Department of Applied Physics	1	12	96	157
292	Institute of Applied Physics	2	12	28	58
292	Department of Physics	1	12	97	149
292	Department of Materials Science and Engineering	3	12	2	11
292	Department of Physics	2	12	99	161
292	School of Materials Science	2	12	172	327
292	Department of Electrical Engineering	1	12	96	128
292	Institute of Energy Conversion	1	12	28	41
292	Department of Advanced Materials Science and Engineering	2	12	30	75
292	Department of Electrical Engineering and Computer Sciences	1	12	1	3
292	Materials Science Division	2	12	54	136
292	Department of Electrical and Computer Engineering	1	12	66	71
292	Department of Materials Science and Engineering	1	12	151	204
306	Department of Mechanical Engineering	1	11	376	580
306	Department of Physics	1	11	141	183
306	Department of Physics	1	11	86	100
306	Department of Materials Science and Engineering	1	11	220	232
306	Department of Electronic and Electrical Engineering	3	11	122	295
306	Department of Chemistry	1	11	190	305
312	School of Materials Science and Engineering	1	10	162	207
312	Department of Ceramic Engineering	2	10	36	70
312	Department of Physics and Astronomy	1	10	90	118
312	Graduate School of Engineering	1	10	555	630
312	Department of Chemical Engineering	1	10	131	164
312	Department of Physics and Astronomy	1	10	197	241
312	School of Physics	1	10	284	352
312	Department of Physics	1	10	117	190
312	Department of Chemical Engineering	1	10	69	119
312	Department of Electrical and Computer Engineering	2	10	148	302
312	Department of Physics	1	10	86	129
312	Department of Materials Science and Technology	1	10	134	165
312	Department of Computer Science	1	10	68	147
312	Department of Applied Physics	1	10	12	14
326	Institute of Physical Chemistry	2	9	45	132
326	Department of Chemistry and Biochemistry	1	9	12	21
326	School of Physics and Astronomy	1	9	234	363
326	Department of Electrical and Computer Engineering	1	9	146	221
326	Graduate School of Pure and Applied Sciences	1	9	312	398
326	Institute of Applied Physics	1	9	218	277
326	Department of Electrical and Computer Engineering	1	9	25	46
326	Department of Biology and Biochemistry	1	9	228	418
326	Department of Materials Engineering	1	9	74	101
326	Institute of Electronics	1	9	14	16
326	Department of Physics	2	9	78	189
337	Department of Chemistry	1	8	343	467
337	Department of Materials Science and Engineering	1	8	250	332
337	Institute of Electronics Engineering	1	8	58	80
337	Department of Electrical and Computer Engineering	1	8	168	273
337	Department of Theoretical and Applied Mechanics	1	8	111	161
337	Center for Integrated Electronics	4	8	16	50
337	Materials Science Division	3	8	168	355
337	Department of Physics	1	8	134	190
337	Department of Physics	1	8	159	179
337	Department of Chemistry	1	8	217	342
337	Department of Electrical and Electronic Engineering	1	8	51	62
337	Department of Electrical Engineering	1	8	126	188
337	Department of Physics and Astronomy	1	8	53	93
337	Department of Physics	1	8	70	97
337	Department of Physics and Astronomy	1	8	143	198
337	Department of Electrical and Electronic Engineering	1	8	1	3
337	Department of Chemistry	1	8	15	33
354	Department of Mechanical Materials Engineering	1	7	2	5
354	Materials Engineering Department	1	7	37	54
354	Department of Electronics Engineering	2	7	12	30
354	School of Engineering	1	7	492	772
354	School of Science and Engineering	1	7	357	504
354	Department of Chemistry	1	7	429	632
354	Department of Electrical Engineering	1	7	202	238
354	Department of Chemistry	1	7	128	238
354	School of Materials Science and Engineering	1	7	360	508
354	Department of Physical Electronics	1	7	5	5
354	Department of Applied Physics	1	7	113	146
354	Graduate School of Engineering	1	7	372	446
354	Department of Physics	1	7	92	133
354	Department of Chemistry	1	7	108	164
354	Department of Materials Engineering	1	7	7	8
354	Department of Electrical Engineering	2	7	25	72
354	Department of Electrical and Computer Engineering	1	7	57	90
371	Division of Materials Science and Engineering	1	6	147	185
371	Department of Pure and Applied Physics	1	6	17	34
371	Graduate School of Information Science and Technology	1	6	277	380
371	Department of Information Systems Engineering	1	6	33	42
371	Department of Electrical Engineering and Center for Solid State Electronics Research	3	6	16	47
371	Department of Electrical and Computer Engineering	1	6	21	41
371	School of Chemistry and Biochemistry	1	6	345	563
371	Department of Chemical Engineering	1	6	75	126
371	Department of Materials Science and Engineering	1	6	100	146
371	Department of Physics	1	6	85	125
371	Department of Physics	1	6	87	159
371	Department of Physics	1	6	38	64
371	Department of Physics	1	6	102	174
371	Department of Pure and Applied Physics	1	6	30	55
385	Department of Physics	1	5	183	278
385	Department of Chemistry and Biochemistry	1	5	280	456
385	Department of Electrical and Computer Engineering	1	5	15	28
385	Department of Chemistry	1	5	457	698
385	Department of Electronic Engineering	1	5	134	210
385	Department of Electronic Engineering	1	5	15	16
385	Department of Electrical and Electronic Engineering	1	5	125	166
385	Materials Science Centre	1	5	169	250
385	School of Materials Science and Engineering	1	5	365	485
385	School of Electrical and Computer Engineering	1	5	104	191
385	Department of Physics	1	5	63	93
385	Institute of Physics	1	5	181	353
385	Department of Chemical Engineering	1	5	97	162
385	Department of Electrical Engineering	1	5	47	81
385	Department of Materials Physics and Chemistry	1	5	41	67
385	Department of Electrical and Computer Engineering	1	5	45	91
385	Department of Physics	1	5	84	139
385	Institute of Electrical Engineering	2	5	5	5
385	Department of Physics and Astronomy	1	5	147	188
385	Department of Chemistry	1	5	29	56
405	Graduate Institute of Electronics Engineering	1	4	120	171
405	Department of Chemical Engineering	1	4	207	330
405	Department of Materials Science and Engineering	1	4	265	466
405	Faculty of Engineering	2	4	239	479
405	Department of Electronic Materials Engineering	1	4	82	142
405	Department of Physics	1	4	342	550
405	School of Electronic and Electrical Engineering	1	4	63	83
405	Department of Physics	1	4	271	400
405	Institute of Electrical Engineering	1	4	209	327
405	Institute of Solid State Physics	1	4	301	412
405	Physics Department	1	4	119	171
405	Section of Solid State Physics	1	4	25	67
405	Department of Physics	1	4	143	206
405	Department of Physics	2	4	273	543
405	Institute of Physics	1	4	179	274
405	School of Electronic and Information Engineering	1	4	284	444
405	Department of Electronic Engineering	1	4	14	19
405	Department of Chemical Engineering	1	4	199	343
405	Department of Physics	1	4	203	314
405	Center for Bio/Molecular Science and Engineering	1	4	96	229
405	Department of Materials Engineering	1	4	65	124
426	Department of Pure and Applied Sciences	1	3	112	167
426	Department of Applied Chemistry	2	3	196	390
426	Faculty of Engineering	2	3	380	745
426	Department of Physics	1	3	131	219
426	Department of Chemical and Petroleum Engineering	1	3	95	202
426	Department of Physics	1	3	145	235
426	Department of Chemistry	1	3	345	578
426	Department of Chemistry	1	3	271	461
426	Department of Physics	1	3	131	253
426	Department of Electrical Engineering	1	3	30	54
426	Department of Physics	1	3	156	278
426	Department of Electrical Engineering	1	3	24	55
426	Computer Science and Mathematics Division	1	3	146	301
426	Department of Mechanical Engineering	3	3	29	94
426	Department of Physics and Astronomy	1	3	123	230
426	Department of Mechanical Engineering	1	3	155	227
426	Department of Electronic Engineering	1	3	31	81
426	Complex Systems Theory Branch	1	3	24	35
426	Department of Engineering	1	3	1	4
426	Department of Electrical Engineering	1	3	1	3
426	Division of Physics	1	3	63	99
426	Department of Electrical Engineering and Computer Science	1	3	63	168
426	Department of Materials Science and Engineering	1	3	98	205
426	Department of Electrical and Computer Engineering	1	3	150	302
426	Department of Electrical Engineering	1	3	6	28
451	Department of Materials Science and Engineering	2	2	109	247
451	Department of Electrical Engineering	1	2	247	400
451	Department of Materials Science and Engineering	1	2	317	529
451	Department of Materials Science and Engineering	2	2	158	422
451	Department of Electrical Engineering	1	2	29	59
451	Department of Electrical and Computer Engineering	1	2	155	285
451	Department of Opto-Mechatronics	1	2	26	39
451	Faculty of Systems Engineering	1	2	130	208
451	Graduate School of Life Science and Systems Engineering	1	2	215	404
451	Department of Physics	1	2	168	298
451	Applied Physics Operation	1	2	1	5
462	Department of Materials Science and Engineering	1	1	200	344
462	Department of Mathematics	1	1	719	1.2K
462	Department of Physics	1	1	263	449
462	Department of Electrical Engineering	1	1	251	495
462	Department of Electronic Engineering	1	1	8	17
462	Department of Materials Science and Engineering	1	1	99	214
462	Department of Electrical and Computer Engineering	1	1	270	492
462	Electrical Engineering Department	2	1	39	112
462	Department of Physics	3	1	206	502
462	Institute of Theoretical Physics	1	1	48	78
462	Department of Materials Science and Engineering	1	1	44	79
462	Department of Electronics	1	1	17	31
462	Department of Electrical and Electronic Engineering	1	1	48	75
462	Institute of Electrical Engineering	1	1	108	178
462	Department of Materials Science and Engineering	1	1	59	102
477	Department of Applied Physics	1	0	252	388
477	Department of Physics	1	0	85	153
477	Department of Electrical Engineering	1	0	61	114
477	Department of Physics	1	0	179	345
477	Department of Chemistry	1	0	311	588
477	Surface Science Center	1	0	22	41
477	Institute of Physics	1	0	69	139
477	Institute of Solid State Physics	1	0	14	26
477	School of Materials Engineering	1	0	18	39
477	Department of Electrical Engineering and Computer Science	1	0	39	94
477	Department of Physics	1	0	80	170

Scientometrics

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Citing Bodies

Journal of Vacuum Science & Technology an Official Journal of the American Vacuum Society B, Microelectronics Processing and Phenomena

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