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exaly › Journals › Journal of Vacuum Science & Technology an Official Journal of the American Vacuum Society B, Microelectronics Processing and Phenomena

Journal of Vacuum Science & Technology an Official Journal of the American Vacuum Society B, Microelectronics Processing and Phenomena

1.6(top 50%)

impact factor

12.2K(top 2%)

papers

244.2K(top 2%)

citations

143(top 5%)

h-index

1.6(top 50%)

impact factor

12.2K

all documents

252.7K

doc citations

229(top 5%)

g-index

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