1.6(top 50%)
impact factor
12.2K(top 2%)
papers
244.2K(top 2%)
citations
143(top 5%)
h-index
1.6(top 50%)
impact factor
12.2K
all documents
252.7K
doc citations
229(top 5%)
g-index
distribution
The graph shows the number of publications with a given number of citations of Journal of Vacuum Science & Technology an Official Journal of the American Vacuum Society B, Microelectronics Processing and Phenomena. The data are presented on a logarithmic scale for the sake of clarity.