Journal of Vacuum Science & Technology an Official Journal of the American Vacuum Society B, Microelectronics Processing and Phenomena

1.6(top 20%)

impact factor

12.2K(top 2%)

papers

244.4K(top 2%)

citations

143(top 5%)

h-index

1.6(top 50%)

extended IF

12.2K

all documents

252.7K

doc citations

229(top 5%)

g-index

Top Authors (by articles)

#	Author	Articles	Citations	R ARank	R CRank
1	Shin-Ichi Kanemaru	6	115	1	1
2	I-Nan Lin	5	42	1	2
2	Stephen J Pearton	5	165	6	6
2	Evangelos Gogolides	5	227	1	1
2	Masayoshi Nagao	5	88	1	1
6	Jun Chen	4	37	1	7
6	Valeriu Filip	4	52	1	1
6	S Ravi P Silva	4	46	1	4
6	Takashi Matsukawa	4	74	1	1
10	Randall Feenstra	3	157	1	2
10	Ralf K Heilmann	3	90	1	1
10	Kenneth A Goldberg	3	12	1	3
10	David Ferry	3	6	1	5
10	Stella Pang	3	66	1	2
10	Paul Chu	3	39	3	5
10	Timothy S. Fisher	3	51	1	2
10	Stephen Y Chou	3	357	2	1
10	Hideki Hasegawa	3	420	1	1
19	Kenji Yamazaki	2	66	2	2
19	Jian Chen	2	5	1	2
19	Jin-Hua Huang	2	16	1	1
19	Wei Wu	2	275	1	1
19	Kevin L Jensen	2	178	1	1
19	Jung Ho Je	2	16	1	4
19	Euijoon Yoon	2	14	2	3
19	J Alexander Liddle	2	28	1	4
19	Rebecca Cheung	2	49	1	4
19	Xinglong Wu	2	33	2	5
19	Yordan M Georgiev	2	142	1	1
19	Andrey S Baturin	2	22	2	2
19	Heh-Nan Lin	2	36	1	1
19	Mauritius C M Van De Sanden	2	126	3	3
19	Kathy Lüdge	2	5	1	1
19	Hisato Yamaguchi	2	23	1	1
19	Zhi Liu	2	106	1	1
19	Jae-Min Myoung	2	32	1	1
19	Babu R Chalamala	2	57	1	1
19	Soonil Lee	2	34	1	1
19	Egbert Oesterschulze	2	20	1	1
19	David A J Moran	2	38	1	1
19	Chih-Hao Chang	2	86	1	1
19	Jong-Lam Lee	2	11	4	5
19	Max C Lemme	2	77	1	1
19	Seiji Samukawa	2	59	2	1
19	Clifford L Henderson	2	10	1	3
19	Gary H Bernstein	2	26	1	4
47	Orlando Auciello	1	7	4	4
47	David Eon	1	29	1	1
47	Yang-Kyu Choi	1	70	2	3
47	Bharat Bhushan	1	437	4	2
47	Alexander Zunger	1	11	4	6
47	Paul S Weiss	1	30	1	5
47	Robert M Wallace	1	96	1	2
47	Alois Lugstein	1	33	4	4
47	Kyohei Okubo	1	51	1	1
47	Sang Ho Oh	1	24	1	2
47	Pieter Kruit	1	13	1	2
47	Katsuhisa Murakami	1	11	1	2
47	Taku T Suzuki	1	1	2	11
47	Demetre J Economou	1	14	2	3
47	José María Kenny	1	34	11	14
47	Ki Tae Nam	1	22	1	1
47	Qing Ji	1	14	1	2
47	Irena Knezevic	1	4	1	2
47	Alexander Y Polyakov	1	19	3	4
47	Panagiotis Argitis	1	12	2	3
47	Bharat Bhushan	1	437	5	2
47	Ioannis Kymissis	1	22	1	2
47	Akinori Saeki	1	62	1	1
47	Zexiang Shen	1	26	3	6
47	Shojiro Miyake	1	35	1	1
47	S Joe Qin	1	5	2	7
47	Frederic Houze	1	1	1	2
47	Marc Cahay	1	1	1	2
47	Hiroshi Hiroshima	1	3	2	2
47	Ana I Teixeira	1	57	1	2
47	Zhifeng Ren	1	14	3	3
47	Whikun Yi	1	9	1	1
47	Chris Jacobsen	1	10	2	7
47	Andy Thomas	1	20	2	2
47	Wolfgang H Krautschneider	1	2	1	1
47	Steven Brueck	1	57	1	3
47	Vivek M Prabhu	1	6	1	1
47	Shirley Chiang	1	0	1	2
47	Maria Vasilopoulou	1	12	1	1
47	Veroniki P Vidali	1	12	1	1
47	Gregory L Snider	1	14	2	6
47	Carla Andreani	1	5	1	5
47	Shigefusa Chichibu	1	47	6	3
47	Edward T Yu	1	6	2	3
47	Gregory N Parsons	1	21	1	4
47	David E Aspnes	1	9	1	2
47	Themis Matsoukas	1	13	1	1
47	Ai Qun Liu	1	41	2	3
47	Luca Lozzi	1	34	8	9
47	Wensyang Hsu	1	19	2	3
47	Thomas F Kuech	1	9	3	3
47	Roland Wiesendanger	1	6	8	10
47	Toshio Kamiya	1	27	4	8
47	Ataç İmamoğlu	1	19	1	5
47	Jiyoul Lee	1	20	2	2
47	Cornelis W Hagen	1	13	1	2
47	Andreas Fissel	1	65	1	2
47	Sung-Ho Hahm	1	0	2	4
47	Kristiaan Temst	1	7	1	5
47	Roland Teissier	1	6	1	3
47	Tien Khee Ng	1	13	1	2
47	Jorge Hernando	1	3	1	1
47	Chulmin Joo	1	48	1	1
47	Gary W Rubloff	1	6	2	2
47	Phan Ngoc Minh	1	21	1	1
47	Victor Ralchenko	1	7	1	1
47	Maria C Salvadori	1	5	2	3
47	Yasuhito Gotoh	1	3	2	3
47	Ketul C Popat	1	30	1	1
47	Brian Bennett	1	21	1	2
47	Paul Berger	1	80	2	1
47	Yuichi Kurashima	1	3	2	2
47	Masakazu Ichikawa	1	0	1	2
47	Ivan G Petrov	1	9	4	10
47	Byung-Gook Park	1	3	2	2
47	Peter B Lerner	1	0	1	0
47	Yilong Lu	1	0	1	3
47	Jeffry A Kelber	1	23	2	2
47	Wim M Arnoldbik	1	99	1	1
47	Hajime Okumura	1	47	5	3
47	xixiang Zhang	1	5	4	9
47	Feng Zhang	1	33	1	1
47	Gerald T Fraser	1	6	2	3
47	Vincent LaBella	1	0	1	0
47	Si-Chen Lee	1	7	1	3
47	Takanori Ichiki	1	51	2	2
47	Michael L Simpson	1	19	2	9
47	Xi Hui Liang	1	25	1	1
47	Eli Rotenberg	1	6	3	5
47	Changshun Wang	1	4	1	2
47	Matteo Ferroni	1	20	2	4
47	Hirofumi Tanaka	1	30	1	1
47	Kun-Wei Lin	1	8	2	5
47	Jung-Hee Lee	1	0	2	6
47	Ignacio Mártil	1	9	3	2
47	Nikolai B Smirnov	1	19	4	5
47	Ooi Kiang Tan	1	14	4	5
47	Jone F Chen	1	10	1	1
47	Luca Businaro	1	5	4	6
47	Takashi Ikuno	1	24	4	3
47	Woo Young Choi	1	3	1	3
47	Hubert Brueckl	1	20	3	2
47	Andrew Wee	1	13	3	8
47	D Greg Walker	1	20	1	2
47	Hansjoerg Scherer	1	18	1	1
47	Jae-Hoon Lee	1	0	2	3
47	Yuuki Ishida	1	47	2	2
47	Ralf B Wehrspohn	1	126	6	6
47	steven Denbaars	1	47	7	6
47	Jung-Ho Lee	1	0	1	0
47	Michael J Naughton	1	14	2	3
47	Shoou Jinn Chang	1	10	4	5
47	Ho Won Jang	1	9	5	6
47	Jonathan Bird	1	4	4	8
47	Richard J Blaikie	1	13	1	2
47	Choi, Hw	1	13	4	7
47	Félix L Martínez	1	9	2	3
47	Yan-Kuin Su	1	10	1	4
47	Suguru Noda	1	16	3	3
47	Yashowanta Mohapatra	1	2	2	2
47	Jose Manuel G Tijero	1	3	1	3
47	Haiwon Lee	1	9	1	2
47	W M M Erwin Kessels	1	99	4	3
47	Eiichi Tamiya	1	12	2	7
47	Margriet J Van Bael	1	7	3	6
47	Gyu Chul Yi	1	59	3	3
47	Alexander B Zorin	1	18	2	3
47	Christian Mitterer	1	30	4	6
47	Hark Hoe Tan	1	10	4	6
47	Julia W P Hsu	1	47	4	2
47	David Cumming	1	13	1	3
47	Seongil Im	1	20	2	2
47	Jeong Young Park	1	11	1	1
47	Toshio Kamiya	1	27	8	10
47	Dietrich R.T. Zahn	1	17	4	10
47	Jacek Marczewski	1	6	1	3
47	C K Inoki	1	25	1	2
47	Yoshihiko Hirai	1	17	1	1
47	Chan Woo Park	1	2	1	3
47	Kazuhiro Ohkawa	1	6	2	2
47	Seong-Ju Park	1	11	2	3
47	Oliver Brandt	1	60	5	3
47	Victor Y Aristov	1	0	1	2
47	Mikhail Baklanov	1	42	2	4
47	Cheng-Liang Huang	1	4	2	8
47	Valery Ray	1	8	1	1
47	Christophe Cardinaud	1	29	1	1
47	David A Ritchie	1	0	5	16
47	Philip D Rack	1	0	3	3
47	Alexander A Puretzky	1	19	1	3
47	Steven George	1	47	2	7
47	David B Geohegan	1	19	1	4
47	Xu Jianbin	1	27	2	3
47	Álvaro del Prado	1	9	3	3
47	Alistair C Rowe	1	17	1	3
47	Guillaume Micouin	1	59	1	1
47	Roland Brock	1	19	1	2
47	Chennupati Jagadish	1	10	6	10
47	Tetsuya Suemitsu	1	26	1	1
47	Massimo De Vittorio	1	5	2	5
47	Jong Kyu Kim	1	9	2	3
47	Vladimir A Gritsenko	1	27	1	2
47	Julien Barjon	1	0	2	3
47	Randall A Laviolette	1	3	2	5
47	Paul Mirkarimi	1	7	1	1
47	Jun-Young Park	1	27	1	1
47	Charles E Reece	1	9	1	1
47	Paul M Thibado	1	0	1	2
47	Lars Samuelson	1	5	4	6
47	Meishoku Masahara	1	3	2	4
47	Kornelius Nielsch	1	126	1	2
47	Alexei O Orlov	1	14	1	3
47	Elisabetta Comini	1	20	2	2
47	Kanad Mallik	1	0	1	3
47	Wei-Jun Fan	1	13	3	3
47	Gyula Eres	1	19	1	3
47	Young-Ho Kim	1	32	1	1
47	Lay Kee Ang	1	19	1	2
47	Takatoshi Yamada	1	13	1	1
47	Tanemasa Asano	1	6	3	3
47	Sushil Kumar	1	4	1	5
47	Alberto Vomiero	1	20	1	3
47	Rita Magri	1	11	1	2
47	Arun Persaud	1	45	1	2
47	Enrique S San Andres	1	9	3	3
47	Jun Kameoka	1	26	2	5
47	L J Brillson	1	47	2	2
47	Jong-Ho Lee	1	12	1	2
47	soo-hyun Kim	1	22	1	2
47	Paul F Nealey	1	57	1	2
47	Alİ Yildiz	1	1	1	1
47	Volodimir G Litovchenko	1	4	1	1
47	Joel L Plawsky	1	9	2	1
47	Marya Lieberman	1	4	2	5
47	Günter Müller	1	22	1	1
47	Emmerich Bertagnolli	1	33	3	2
47	Takayuki Hoshino	1	119	1	1
47	Alberta Bonanni	1	9	1	3
47	Rachel Goldman	1	7	1	1
47	Yuri A Pashkin	1	17	2	2
47	Chris J Palmstrøm	1	3	1	4
47	A N Baranov	1	6	1	1
47	Srinivasan Anand	1	37	2	2
47	Philippe Renaud	1	21	1	2
47	Jong Min Kim	1	9	1	2
47	Hideki Sato	1	23	1	1
47	Sharadha Sambasivan	1	11	1	2
47	Christopher J Murphy	1	57	1	4
47	W G Sloof	1	12	1	2
47	Paul B Mirkarimi	1	2	1	2
47	Thomas Kailath	1	6	1	1
47	William R Harrell	1	20	1	1
47	J E Rowe	1	31	1	1
47	Paul K Chu	1	17	4	5
47	Sang Youn Han	1	7	2	2
47	Yoshitaka Nakano	1	7	2	2
47	Wen-Li Wu	1	6	2	8
47	Hei Wong	1	27	2	5
47	P Soukiassian	1	6	1	2
47	D H Zhang	1	0	1	2
47	Eric K Lin	1	6	2	3
47	Eric Gullikson	1	3	1	2
47	Shoou-Jinn Chang	1	10	2	7
47	Alexander N Korotkov	1	14	2	2
47	Kameshwar K Yadavalli	1	14	1	1
47	M Holland	1	26	1	1
47	Masahiko Ishida	1	119	1	1

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Journal of Vacuum Science & Technology an Official Journal of the American Vacuum Society B, Microelectronics Processing and Phenomena

Top Authors (by articles)