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Silicon-integrated uncooled infrared detectors: Perspectives on thin films and microstructures

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Abstract

Uncooled infrared (IR) photodetectors for telecommunications, optical processor interconnects, and focal plane arrays are advantageously integrated into systems that are silicon based through advanced thin-film technologies. This paper reviews challenges of materials, microstructures, interfaces, and reactions of thin-film materials and technologies posed by such applications.

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Authors and Affiliations

  1. Department of Physics, New Jersey Institute of Technology, 07102, Newark, NJ

    V. R. Mehta, S. Shet, N. M. Ravindra & A. T. Fiory

  2. BTL Fellows, Inc., 07901, Summit, NJ

    M. P. Lepselter

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  1. V. R. Mehta
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  2. S. Shet
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  3. N. M. Ravindra
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  4. A. T. Fiory
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  5. M. P. Lepselter
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Mehta, V.R., Shet, S., Ravindra, N.M. et al. Silicon-integrated uncooled infrared detectors: Perspectives on thin films and microstructures. J. Electron. Mater. 34, 484–490 (2005). https://doi.org/10.1007/s11664-005-0055-z

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  • DOI: https://doi.org/10.1007/s11664-005-0055-z

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