Abstract
The purpose of this work is a stereometric analysis of Pt Schottky contacts on the quaternary n-Al0.08In0.08Ga0.84N thin film to obtain the three-dimensional (3-D) micro-texture surface based on the atomic force microscopy (AFM). The thermal annealing processes were performed in the thermal ranges 300–500 ℃ on the Pt Schottky contacts grown on nanostructure Al0.08In0.08Ga0.84N thin film grown on a sapphire substrate using molecular beam epitaxy (MBE) technique. The samples were divided into three analysis groups, in correlation with the thermal annealing treatments applied, as follows: group I (as deposited samples); group II (samples after thermal annealing at 400 ℃); group III (samples after thermal annealing at 500 ℃). AFM images with a size of 9.96 μm × 9.96 μm were recorded with a scanning resolution of 256 × 256 pixels in contact mode. The AFM data of the samples were analyzed stereometrically, and the surface microtexture was characterized according to the definition of the related parameters in the ISO 25178-2: 2012 and ASME B46.1-2009 standards. The surface of group I was characterized by the highest value of the fractal dimension (D = 2.20 ± 0.01) and the lowest value of root mean square height Sq (Sq = 6.7 ± 0.1 nm); while the smallest value of the fractal dimension (D = 2.13 ± 0.01) was determined in group II. Furthermore, the highest value of Sq (Sq = 10.2 ± 0.1 nm) was determined in group III. All the characteristics of the micro-texture can be implemented in numerical programs to simulate advanced micro-texture models under specific composition and microstructure conditions.
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Acknowledgements
The authors would like to express their appreciation to Asst. Prof. Dr. Alaa Jabbar Ghazai, Al-Nahrain University, Science College, Physics Dept., Iraq, for providing AFM data.
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Ţălu, Ş., Ţălu, M., Vintilă, D., Grigorie, L.D., Romanescu, A. (2020). Stereometric Analysis of Pt Schottky Contacts on Quaternary n-Al0.08In0.08Ga0.84N Thin Film. In: Dumitru, I., Covaciu, D., Racila, L., Rosca, A. (eds) The 30th SIAR International Congress of Automotive and Transport Engineering. SMAT 2019. Springer, Cham. https://doi.org/10.1007/978-3-030-32564-0_77
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