2.5(top 7%)
Impact Factor
2.8(top 7%)
extended IF
98(top 4%)
H-Index
4.4K
authors
12.3K
papers
142.8K
citations
3.5K
citing journals
51.5K
citing authors

Most Cited Articles of Microelectronic Engineering

TitleYearCitations
Fabrication of microstructures with high aspect ratios and great structural heights by synchrotron radiation lithography, galvanoforming, and plastic moulding (LIGA process)1986885
Carbon nanotubes in interconnect applications2002468
Nanofabrication by electron beam lithography and its applications: A review2015354
Towards implementation of a nickel silicide process for CMOS technologies2003349
Lab-on-a-chip devices: How to close and plug the lab?2015326
PDMS-based microfluidic devices for biomedical applications2002326
Point-of-care testing (POCT) diagnostic systems using microfluidic lab-on-a-chip technologies2015315
Optimization of poly-di-methyl-siloxane (PDMS) substrates for studying cellular adhesion and motility2008307
Flow behaviour of thin polymer films used for hot embossing lithography2000306
Ultrathin high-K metal oxides on silicon: processing, characterization and integration issues2001304
Imprint lithography with sub-10 nm feature size and high throughput1997303
Novel hydrogen gas sensor based on single ZnO nanorod2008270
Nanotribology and nanomechanics of MEMS/NEMS and BioMEMS/BioNEMS materials and devices2007269
On the scaling issues and high-κ replacement of ultrathin gate dielectrics for nanoscale MOS transistors2006262
Formation of more stable hydrophilic surfaces of PDMS by plasma and chemical treatments2006261
Ultrathin HfO2 films grown on silicon by atomic layer deposition for advanced gate dielectrics applications2003246
Measurement of nonlinear mechanical properties of PDMS elastomer2011231
NiSi salicide technology for scaled CMOS2002230
Hierarchical roughness makes superhydrophobic states stable2007223
Improving stamps for 10 nm level wafer scale nanoimprint lithography2002214
Roadmap for 22 nm and beyond (Invited Paper)2009207
Gold cleaning methods for electrochemical detection applications2009202
Direct laser writing: Principles and materials for scaffold 3D printing2015198
Fabrication and characterization of heterostructures with subnanometer thickness1984195
High-k dielectrics for future generation memory devices (Invited Paper)2009184