Name: List of Top Schools of Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films sorted by citations
Creator: exaly.com
Published: 2026-01-17T13:50:59Z
License: https://creativecommons.org/licenses/by-sa/4.0/

2.2(top 20%)

impact factor

16.3K(top 1%)

papers

363.2K(top 1%)

citations

169(top 2%)

h-index

2.4(top 20%)

extended IF

17.9K

all documents

375.2K

doc citations

273(top 2%)

g-index

Top Schools (by citations)

#	School	Articles	Citations	R ARank	R CRank
1	Materials Science	11	1.5K	4	2
2	Solar Energy	50	926	15	25
3	Computer Engineering	7	925	7	2
4	Nanotechnology	6	879	28	13
5	Materials Science	13	769	13	7
5	Chemical Engineering	13	769	13	7
7	Electronics	34	647	6	20
8	Computer Science	10	473	10	11
8	Electrical Engineering	10	473	10	11
10	Electronics	3	406	13	4
11	Electronics	6	348	23	24
11	Electrical Engineering	6	348	22	22
13	Chemical Engineering	11	345	16	20
13	Electronics	24	345	39	53
13	Telecommunications	24	345	39	53
16	Computer Engineering	4	336	9	8
17	Film	12	333	2	6
18	Chemical Engineering	6	321	2	3
19	Materials Science	7	314	12	13
19	Materials Science	7	314	4	6
21	Chemistry	9	300	5	10
22	Materials Science	28	286	91	197
23	Materials Science	8	281	10	11
24	Chemical Engineering	4	280	12	9
24	Electrical Engineering	5	280	258	103
26	Optics	11	275	2	2
27	Materials Science	12	273	6	13
28	Chemical Engineering	12	256	7	16
29	Materials Science	6	250	8	10
30	Astronomy	1	238	6	2
31	Mechanical Engineering	2	235	32	8
32	Materials Engineering	9	225	2	3
33	Materials Science	2	215	27	11
34	Computer Engineering	4	210	14	11
35	Materials Science	9	196	11	16
36	Electrical Engineering	3	194	20	16
37	Computer Engineering	7	189	3	4
38	Materials Science	4	184	12	7
39	Electrical Engineering	9	181	5	11
39	Energy Conversion	4	181	4	4
41	Materials Science	7	180	21	28
42	Industrial Engineering	2	178	5	2
43	Materials Science	20	174	8	15
44	Materials Science	7	173	21	23
45	Biomedical Engineering	3	167	17	9
46	Materials Science	8	165	7	9
46	Surface Engineering	13	165	3	10
48	Metallurgy	2	164	6	4
49	Materials Science	4	159	13	11
50	Electronics	4	157	39	18
51	Mathematics	1	156	16	9
52	Materials Processing	3	154	34	33
53	Chemical Engineering	1	151	42	20
54	Electrical Engineering	10	150	3	7
54	Materials Processing	3	150	6	5
56	Computer Engineering	1	149	58	23
56	Nanotechnology	1	149	43	22
58	Materials Science	6	144	6	10
59	Mechanical Engineering	5	141	4	3
60	Chemistry	10	138	36	87
61	Chemical Engineering	3	136	18	16
62	Chemistry	5	135	25	31
63	Computer Science	6	133	3	3
63	Electrical Engineering	6	133	4	3
65	Aerospace Engineering	2	130	10	8
66	Electrical Engineering	8	128	15	38
67	Chemistry	5	123	34	50
68	Materials Science	3	122	7	4
68	Chemistry	3	122	17	8
70	Materials Science	2	121	1	1
71	Film	2	120	3	4
72	Chemistry	1	119	29	27
72	Nanotechnology	4	119	1	1
74	Chemistry	6	117	51	94
75	Materials Science	4	116	23	31
76	Chemistry	2	115	57	36
77	Astronomy	4	114	18	22
77	Aerospace Engineering	1	114	10	5
77	Materials Engineering	5	114	5	6
80	Chemical Engineering	4	113	22	37
81	Electronics	5	111	17	16
82	Mechanical Engineering	3	110	11	13
82	Semiconductor	2	110	10	8
84	Chemical Engineering	7	108	13	34
84	Chemistry	3	108	3	4
84	Chemistry	3	108	28	11
87	Computer Science	4	106	19	39
87	Electrical Engineering	4	106	16	31
89	Propulsion	3	103	108	126
90	Chemistry	3	100	17	20
91	Materials Science	7	98	14	17
92	Computer Engineering	8	96	6	21
92	Chemical Engineering	5	96	5	17
94	Electrical Engineering	2	95	5	3
95	Film	1	93	15	6
96	Chemical Engineering	2	92	1	1
97	Materials Science	1	87	23	14
98	Chemistry	2	85	92	101
99	Materials Science	11	84	24	55
100	Chemistry	1	83	1	2
101	Nanotechnology	3	81	1	2
102	Renewable Energy	5	80	40	68
102	Energy Systems	5	80	40	68
104	Optics	1	79	6	3
104	Nanotechnology	1	79	1	1
104	Education	1	79	1	1
104	Nanomaterials	1	79	1	1
108	Propulsion	2	78	129	147
108	Electronics	4	78	13	16
108	Nanotechnology	1	78	3	3
111	Computer Science	1	76	40	29
111	Materials Science	4	76	26	27
111	Photonics	2	76	17	19
114	Chemistry	1	75	101	43
114	Semiconductor	1	75	3	2
114	Materials Engineering	2	75	6	6
114	Nanotechnology	3	75	2	4
118	Semiconductor	2	73	3	5
119	Solar Energy	2	71	113	118
119	Energy Systems	2	71	113	118
121	Chemistry	5	70	11	20
121	Instrumentation	7	70	1	1
121	Nanotechnology	2	70	36	36
124	Mechanical Engineering	1	69	12	2
124	Chemical Engineering	2	69	3	9
124	Mechatronics	3	69	2	1
124	Manufacturing Technology	3	69	1	1
128	Astronomy	1	68	7	4
128	Laser	1	68	8	4
130	Chemistry	1	67	42	45
130	Optics	4	67	249	271
130	Nuclear Engineering	2	67	1	1
133	Mechanical Engineering	2	66	38	36
133	Electronics	3	66	2	1
135	Mechanical Engineering	4	65	18	31
135	Materials Science	7	65	5	15
137	Mechanical Engineering	4	64	23	55
137	Chemistry	4	64	46	89
137	Chemistry	7	64	11	28
137	Computer Engineering	1	64	20	18
137	Chemical Engineering	3	64	19	37
142	Bioengineering	3	63	7	21
142	Computer Engineering	5	63	12	20
144	Astronomy	5	62	1	3
144	Chemistry	1	62	12	8
144	Chemistry	3	62	95	171
147	Computer Engineering	1	61	39	29
147	Materials Science	3	61	21	34
147	Chemical Engineering	4	61	5	15
147	Chemical Engineering	4	61	12	28
147	Surface Engineering	7	61	6	26
152	Chemistry	2	60	29	34
152	Chemistry	3	60	20	33
152	Surface Engineering	1	60	9	8
155	Computer Engineering	2	59	15	19
155	Computer Engineering	3	59	3	6
157	Materials Science	4	58	8	13
158	Materials Science	2	56	48	59
158	Mechanical Engineering	3	56	7	13
158	Nuclear Engineering	2	56	5	5
158	Electronics	2	56	15	21
162	Chemistry	1	55	82	68
162	Electronics	1	55	6	6
162	Ceramics	1	55	3	3
162	Electronics	5	55	7	11
162	Nanotechnology	7	55	11	27
162	Chemistry	5	55	29	44
168	Aerospace Engineering	3	54	19	26
168	Astronomy	2	54	24	35
168	Computer Engineering	3	54	6	8
168	Chemistry	2	54	9	15
168	Laser	3	54	5	7
173	Mechanical Engineering	5	53	1	6
173	Catalysis	1	53	53	47
173	Electronics	2	53	5	7
176	Materials Science	1	52	31	34
177	Astronomy	1	51	28	24
177	Chemistry	1	51	64	49
177	Semiconductor	4	51	15	21
180	Electronic Materials	4	50	9	12
180	Materials Engineering	4	50	10	19
182	Chemical Engineering	1	49	16	11
182	Renewable Energy	2	49	2	2
182	Energy Systems	2	49	2	2
182	Surface Engineering	2	49	1	2
186	Electrical Engineering	2	48	2	1
186	Chemistry	5	48	1	16
186	Astronomy	5	48	3	11
186	Chemistry	2	48	23	30
186	Electrical Engineering	1	48	49	28
186	Information Technology	2	48	1	1
186	Metallurgy	2	48	3	5
193	Chemistry	3	47	25	60
193	Chemistry	3	47	24	49
193	Electrical Engineering	2	47	6	10
193	Chemistry	2	47	19	42
193	Nanotechnology	4	47	12	30
193	Materials Science	4	47	10	23
199	Computer Engineering	3	46	6	8
199	Materials Science	4	46	23	43
199	Chemical Engineering	1	46	14	18
199	Electrical Engineering	2	46	102	72
199	Chemistry	1	46	10	5
199	Manufacturing Engineering	1	46	317	259
199	Chemistry	1	46	2	2
206	Materials Science	3	45	30	58
206	Design Engineering	2	45	4	5
206	Design Engineering	2	45	2	4
209	Electrical Engineering	2	44	19	22
209	Chemical Engineering	2	44	4	8
211	Materials Science	6	43	13	47
211	Chemistry	1	43	9	6
211	Semiconductor	4	43	12	22
211	Materials Engineering	1	43	5	4
215	Nuclear Engineering	2	42	14	18
215	Semiconductor	2	42	13	15
215	Surface Engineering	2	42	4	3
218	Chemical Engineering	2	41	2	11
218	Astronomy	1	41	55	52
218	Electrical Engineering	4	41	3	14
218	Chemistry	5	41	35	80
218	Chemistry	5	41	42	97
218	Chemical Engineering	4	41	8	18
218	Computer Engineering	1	41	1	1
218	Chemistry	3	41	10	17
226	Electrical Engineering	4	40	15	19
226	Biotechnology	1	40	112	129
228	Computer Science	2	39	3	18
228	Electrical Engineering	2	39	3	17
228	Chemistry	2	39	34	36
228	Electrical Engineering	3	39	1	2
228	Materials Processing	1	39	2	4
233	Mechanical Engineering	4	38	12	24
233	Astronomy	1	38	4	4
233	Chemistry	1	38	18	19
236	Electrical Engineering	3	37	11	22
236	Electronics	3	37	12	24
236	Information Technology	3	37	764	1101
236	Materials Science	1	37	8	10
240	Materials Science	3	36	15	32
240	Chemistry	2	36	39	60
240	Chemical Engineering	3	36	15	29
243	Chemistry	2	35	49	90
243	Chemistry	2	35	13	22
243	Materials Science	2	35	165	241
243	Electronics	1	35	8	9
243	Nanotechnology	2	35	42	82
243	Semiconductor	1	35	5	5
243	Nanotechnology	2	35	2	3
243	Chemistry	2	35	20	30
251	Education	1	34	14	9
251	Chemical Engineering	1	34	2	3
251	Aerospace Engineering	1	34	33	33
251	Materials Science	1	34	53	62
251	Chemistry	1	34	39	37
251	Chemistry	2	34	21	35
251	Chemistry	1	34	19	24
251	Chemistry	2	34	26	29
251	Aerospace Engineering	1	34	41	52
260	Chemistry	1	33	100	94
260	Materials Science	3	33	19	24
260	Materials Science	2	33	37	51
260	Materials Science	1	33	61	66
260	Mechanical Engineering	3	33	7	16
260	Nanotechnology	5	33	10	34
266	Mechanical Engineering	2	32	29	48
266	Materials Science	2	32	14	19
266	Dentistry	1	32	42	49
266	Chemistry	2	32	1	2
266	Materials Engineering	2	32	53	64
266	Nanotechnology	2	32	34	76
266	Electronics	2	32	5	4
266	Materials Science	1	32	17	11
266	Electrical Engineering	2	32	2	1
266	Nanotechnology	2	32	15	18
266	Metallurgy	4	32	45	108
266	Optics	1	32	3	4
266	Photonics	1	32	15	10
266	Opera	1	32	1	1
280	Materials Science	4	31	27	54
280	Chemical Engineering	1	31	26	24
280	Materials Science	1	31	15	14
280	Chemistry	1	31	39	45
280	Chemistry	1	31	32	42
280	Metallurgy	1	31	28	28
280	Sustainable Energy	1	31	6	9
280	Energy Systems	1	31	6	8
280	Photonics	2	31	1	4
280	Robotics	1	31	13	18
280	Robotics	1	31	44	78
291	Chemistry	2	30	16	32
291	Chemistry	1	30	18	26
291	Chemistry	3	30	2	9
291	Systems Engineering	1	30	14	15
291	Materials Science	1	30	189	191
291	Nanotechnology	1	30	186	205
297	Chemistry	3	29	18	44
297	Mechanical Engineering	1	29	22	20
297	Mathematics	1	29	3	6
297	Electronics	5	29	4	9
297	Materials Science	2	29	1	3
297	Energy Storage	1	29	52	65
297	Computer Engineering	1	29	2	2
304	Astronomy	1	28	20	18
304	Chemistry	1	28	1	1
304	Electronics	1	28	3	2
304	Ceramics	1	28	91	100
304	Ceramics	1	28	8	10
304	Materials Science	1	28	11	14
304	Nanotechnology	2	28	39	47
304	Biomedical Engineering	1	28	2	3
304	Biomedical Engineering	1	28	10	3
304	Materials Science	1	28	11	11
304	Metallurgy	1	28	9	9
315	Materials Science	2	27	3	4
316	Materials Science	2	26	23	37
316	Computer Science	1	26	8	19
316	Chemistry	1	26	21	21
316	Nuclear Engineering	2	26	1	2
316	Materials Engineering	1	26	6	7
316	Materials Science	1	26	5	3
322	Manufacturing Engineering	2	25	7	17
322	Electrical Engineering	1	25	37	53
322	Chemistry	1	25	57	97
322	Chemistry	1	25	390	544
322	Mechanical Engineering	1	25	6	12
322	Aerospace Engineering	1	25	5	4
322	Engineering Management	2	25	15	35
322	Semiconductor	4	25	8	12
322	Materials Engineering	1	25	2	2
322	Electronic Materials	2	25	1	1
322	Materials Processing	2	25	1	2
333	Materials Science	1	24	56	66
333	Chemistry	1	24	26	35
333	Materials Science	1	24	9	8
333	Materials Science	3	24	119	190
333	Electronics	2	24	10	13
333	Materials Science	1	24	55	52
333	Chemical Engineering	1	24	14	11
333	Chemistry	3	24	47	111
333	Mechanical Engineering	1	24	15	16
333	Computer Engineering	2	24	11	33
333	Nanotechnology	2	24	15	41
333	Automation	1	24	37	27
333	Mechatronics Engineering	1	24	8	2
333	Manufacturing Technology	1	24	10	13
333	Automation	1	24	20	11
333	Materials Science	2	24	4	6
349	Electrical Engineering	2	23	7	10
349	Chemistry	1	23	88	105
349	Education	3	23	2	7
349	Education	3	23	46	137
349	Chemistry	1	23	2	4
349	Materials Engineering	2	23	14	29
349	Materials Science	2	23	12	19
349	Nanomaterials	1	23	34	34
349	Chemistry	5	23	1	2
349	Photonics	3	23	13	35
349	Materials Science	2	23	19	27
349	Biology	5	23	1	1
349	Materials Science	1	23	2	3
362	Nanomaterials	1	22	2	12
362	Astronomy	2	22	20	34
362	Astronomy	2	22	2	7
362	Astronomy	2	22	18	35
362	Electronics	2	22	9	18
362	Materials Engineering	2	22	4	5
362	Materials Science	1	22	12	17
362	Nanomechanics	1	22	10	8
370	Astronomy	4	21	25	56
370	Materials Science	1	21	16	21
370	Chemical Engineering	1	21	19	31
370	Chemistry	3	21	20	55
370	Chemistry	2	21	11	19
370	Chemistry	1	21	8	15
370	Semiconductor	1	21	10	14
370	Materials Science	2	21	19	27
370	Materials Science	1	21	39	36
370	Mineralogy	1	21	4	8
370	Energy Systems	1	21	136	163
370	Surface Engineering	7	21	9	34
382	Chemistry	3	20	69	124
382	Computer Science	1	20	9	19
382	Electrical Engineering	1	20	9	15
382	Materials Science	3	20	16	42
382	Electrical Engineering	1	20	34	25
382	Chemistry	1	20	20	26
382	Energy Systems	2	20	13	34
382	Materials Science	2	20	34	57
382	Electronics	2	20	1	2
382	Materials Science	1	20	1	1
392	Materials Engineering	1	19	4	7
392	Mathematics	2	19	39	59
392	Materials Science	2	19	20	28
392	Chemistry	1	19	64	77
392	Astronomy	3	19	1	4
392	Astronomy	2	19	4	9
392	Chemistry	1	19	9	10
392	Chemistry	1	19	17	29
392	Electronics	1	19	18	22
392	Chemistry	1	19	25	28
392	Chemical Engineering	3	19	4	16
392	Materials Science	1	19	54	60
392	Chemical Engineering	2	19	43	74
392	Nanomaterials	1	19	3	3
406	Materials Science	1	18	35	46
406	Mechanical Engineering	3	18	37	100
406	Environmental Engineering	3	18	8	26
406	Education	1	18	44	47
406	Electronics	2	18	19	23
406	Electronics	2	18	15	26
406	Control Engineering	1	18	6	9
406	Computer Science	1	18	1	1
406	Electrical Engineering	1	18	5	4
406	Pharmacy	1	18	11	12
406	Electrical Engineering	1	18	3	2
406	Photonics	1	18	4	3
406	Nanomaterials	1	18	31	37
419	Materials Science	1	17	24	30
419	Materials Science	1	17	27	41
419	Chemistry	1	17	28	52
419	Avionics	1	17	1	2
419	Chemistry	4	17	4	25
419	Chemistry	1	17	35	36
419	Film	2	17	3	8
419	Systems Engineering	1	17	15	17
419	Materials Science	1	17	4	5
419	Photonics	1	17	2	2
419	Materials Science	3	17	1	1
419	Materials Engineering	1	17	6	6
419	Electronics	2	17	1	2
432	Materials Science	2	16	10	17
432	Manufacturing Engineering	1	16	12	20
432	Materials Science	1	16	4	6
432	Astronomy	2	16	13	34
432	Chemistry	1	16	45	72
432	Mechanical Engineering	1	16	4	7
432	Computer Engineering	1	16	4	5
432	Materials Science	1	16	10	12
432	Materials Engineering	1	16	11	19
432	Chemistry	1	16	9	13
432	Chemistry	1	16	2	4
432	Computer Engineering	1	16	9	9
444	Materials Science	3	15	30	71
444	Reliability Engineering	1	15	1	2
444	Electrical Engineering	1	15	7	3
444	Information Technology	1	15	32	37
444	Materials Science	3	15	30	57
444	Ceramics	1	15	22	29
444	Electronics	2	15	14	21
444	Laser	2	15	11	15
444	Chemistry	3	15	1	3
444	Semiconductor	1	15	1	1
444	Semiconductor	1	15	13	16
444	Materials Science	2	15	26	44
444	Tribology	1	15	1	2
444	Materials Science	1	15	49	63
458	Materials Science	2	14	65	111
458	Electrical Engineering	1	14	4	15
458	Chemistry	1	14	116	145
458	Mechanical Engineering	2	14	201	404
458	Electronics	5	14	82	350
458	Astronomy	1	14	1	2
458	Chemistry	1	14	3	11
458	Electrical Engineering	1	14	2	1
458	Materials Science	1	14	1	1
458	Optics	2	14	6	10
458	Photonics	2	14	6	10
458	Electrical Engineering	1	14	1	2
458	Mechanical Engineering	1	14	3	5
471	Materials Science	1	13	34	37
471	Chemistry	1	13	38	39
471	Materials Science	2	13	16	30
471	Materials Science	2	13	4	7
471	Materials Science	1	13	29	44
471	Mechanical Engineering	1	13	4	4
471	Ceramics	3	13	3	7
471	Nuclear Engineering	2	13	19	42
471	Metallurgy	3	13	3	7
471	Semiconductor	1	13	49	55
471	Materials Engineering	1	13	9	16
471	Laser	1	13	12	14
471	Semiconductor	1	13	48	54
471	Surface Engineering	1	13	1	2
471	Materials Science	1	13	14	24
471	Electrical Engineering	1	13	1	1
471	Energy Engineering	2	13	21	52
488	Mechanical Engineering	1	12	76	92
488	Biology	1	12	178	296
488	Chemical Engineering	2	12	16	47
488	Materials Science	1	12	56	66
488	Chemistry	1	12	70	106
488	Computer Engineering	2	12	8	24
488	Chemical Engineering	2	12	27	83
488	Chemistry	1	12	19	34
488	Electrical Engineering	2	12	17	31
488	Photonics	1	12	79	123
488	Biology	1	12	234	430
488	Chemistry	1	12	219	296
488	Chemistry	1	12	146	229
488	Pharmacy	1	12	734	1118
488	Computer Engineering	2	12	7	21
488	Renewable Energy	3	12	30	93
488	Regenerative Medicine	1	12	47	110
488	Electrical Engineering	2	12	1	1
488	Advanced Manufacturing	1	12	3	5
488	Regenerative Medicine	1	12	257	452
488	Optical Communications	1	12	76	121
488	Computer Engineering	1	12	1	2
510	Mechanical Engineering	1	11	51	81
510	Chemistry	1	11	89	157
510	Materials Science	1	11	33	58
510	Computer Engineering	1	11	23	42
510	Computer Engineering	2	11	13	37
510	Chemistry	1	11	123	179
510	Chemical Engineering	1	11	115	149
510	Mathematics	1	11	4	3
510	Astronomy	1	11	19	27
510	Electronics	1	11	20	27
510	Semiconductor	1	11	3	6
510	Computer Engineering	1	11	17	29
510	Semiconductor	1	11	4	6
510	Electronics	1	11	26	31
510	Chemical Engineering	1	11	51	73
510	Electrical Engineering	3	11	99	261
510	Materials Science	1	11	41	59
510	Mechanical Engineering	2	11	3	6
510	Electronics	1	11	2	4
510	Catalysis	1	11	89	122
510	Materials Science	1	11	1	2
510	Nanotechnology	1	11	64	107
510	Semiconductor	1	11	5	5
510	Materials Science	1	11	17	24
510	Electrical Engineering	1	11	1	2
510	Nanotechnology	2	11	4	8
510	Electronics	1	11	25	43
510	Catalysis	1	11	13	19
510	Materials Engineering	1	11	22	28
510	Energy Engineering	1	11	1	1
540	Chemistry	1	10	75	113
540	Materials Science	1	10	11	17
540	Mechanical Engineering	1	10	39	70
540	Chemistry	2	10	16	48
540	Mechanical Engineering	1	10	9	12
540	Biomedical Sciences	1	10	7808	7543
540	Chemistry	2	10	31	94
540	Biomedical Sciences	1	10	63	98
540	Computer Engineering	2	10	7	19
540	Telecommunications	1	10	133	155
540	Chemistry	3	10	507	1065
540	Materials Science	1	10	19	31
540	Systems Engineering	1	10	1	1
540	Electronics	2	10	5	9
540	Materials Science	1	10	12	16
540	Photonics	2	10	12	22
540	Nanotechnology	2	10	191	398
540	Materials Processing	1	10	3	3
540	Systems Engineering	1	10	2	1
540	Semiconductor	2	10	9	26
560	Computer Science	1	9	11	11
560	Astronomy	2	9	7	22
560	Optics	1	9	128	160
560	Materials Science	1	9	88	149
560	Electrical Engineering	2	9	5	18
560	Electrical Engineering	1	9	9	10
560	Chemistry	1	9	25	44
560	Nuclear Engineering	1	9	18	26
560	Chemistry	1	9	341	406
560	Materials Science	1	9	6	15
560	Computer Engineering	1	9	17	17
560	Materials Science	1	9	58	77
560	Materials Engineering	2	9	4	11
560	Catalysis	1	9	75	107
560	Computer Engineering	1	9	9	17
560	Electronics	2	9	7	20
560	Nanomaterials	1	9	369	491
560	Chemical Engineering	1	9	1	5
560	Catalysis	2	9	1	3
560	Electronics	1	9	4	7
560	Materials Science	1	9	47	76
560	Renewable Energy	1	9	81	145
560	Energy Storage	1	9	58	109
560	Energy Materials	1	9	10	21
560	Power Systems	1	9	80	133
585	Astronomy	1	8	23	24
585	Electrical Engineering	1	8	10	14
585	Chemistry	1	8	60	99
585	Chemistry	2	8	31	80
585	Mechanical Engineering	1	8	28	37
585	Computer Engineering	1	8	62	85
585	Chemistry	2	8	31	102
585	Chemistry	1	8	59	113
585	Astronomy	1	8	22	37
585	Chemical Engineering	1	8	19	40
585	Systems Engineering	1	8	5	5
585	Dentistry	1	8	86	149
585	Civil Engineering	1	8	277	378
585	Food Science	1	8	3	11
585	Electronics	1	8	17	20
585	Mechanical Engineering	1	8	76	123
585	Chemistry	1	8	76	135
585	Materials Science	1	8	5	10
585	Chemical Engineering	1	8	49	67
585	Electronics	1	8	4	8
585	Chemistry	1	8	12	15
585	Electronic Materials	1	8	47	66
585	Nutrition	1	8	7	13
585	Telecommunications	1	8	3	7
585	Mechanical Engineering	1	8	2	10
585	Electronic Materials	1	8	4	7
585	Electronics	1	8	1	1
585	Materials Science	1	8	21	31
585	Telecommunications	1	8	18	27
585	Control Systems	1	8	2	1
585	Materials Science	1	8	1	3
616	Biology	1	7	346	606
616	Chemistry	1	7	120	223
616	Electrical Engineering	3	7	11	45
616	Materials Science	1	7	4	8
616	Materials Engineering	1	7	7	13
616	Biotechnology	1	7	23	44
616	Astronomy	1	7	8	14
616	Optics	1	7	1	2
616	Chemical Engineering	1	7	2	5
616	Nuclear Engineering	1	7	15	19
616	Chemical Engineering	1	7	9	14
616	Mathematics	1	7	125	164
616	Dynamics	2	7	58	187
616	Chemistry	2	7	24	76
616	Solar Energy	1	7	12	32
616	Chemistry	1	7	5	11
616	Instrumentation	1	7	1	4
616	Electronics	1	7	6	18
616	Materials Science	1	7	63	85
616	Electronic Materials	1	7	7	13
616	Electrical Engineering	2	7	11	30
616	Computer Engineering	1	7	11	22
616	Materials Engineering	1	7	4	6
616	Photonics	1	7	3	3
616	Materials Science	1	7	5	5
616	Chemistry	1	7	49	71
616	Nanotechnology	1	7	45	83
616	Photonics	3	7	99	214
616	Materials Science	1	7	2	4
616	Semiconductor	1	7	3	6
616	Materials Engineering	1	7	12	18
616	Surface Engineering	2	7	2	5
616	Materials Science	1	7	2	2
616	Chemistry	1	7	4	11
616	Chemistry	1	7	5	11
651	Chemistry	1	6	58	83
651	Biology	1	6	176	286
651	Chemistry	1	6	56	121
651	Biomedical Engineering	1	6	69	143
651	Electrical Engineering	2	6	12	13
651	Chemistry	1	6	45	92
651	Astronomy	1	6	28	49
651	Chemistry	1	6	32	51
651	Computer Science	1	6	3	6
651	Electrical Engineering	1	6	14	16
651	Astronomy	1	6	3	5
651	Chemistry	1	6	10	29
651	Electrical Engineering	1	6	28	40
651	Electronics	1	6	3	6
651	Chemical Engineering	1	6	14	28
651	Nuclear Energy	1	6	13	29
651	Computer Engineering	2	6	9	19
651	Electronics	1	6	3	7
651	Photonics	1	6	3	3
651	Mechanical Engineering	1	6	14	31
651	Complex Systems	1	6	168	279
651	Mechanical Engineering	1	6	4	11
651	Materials Science	1	6	3	4
651	Nanotechnology	1	6	42	82
651	Materials Engineering	1	6	1	1
676	Chemistry	1	5	42	90
676	Materials Science	1	5	54	118
676	Astronomy	1	5	32	59
676	Chemistry	1	5	8	16
676	Aerospace Engineering	1	5	80	135
676	Optics	2	5	3	5
676	Mechanical Engineering	1	5	4	8
676	Chemistry	1	5	11	46
676	Electrical Engineering	1	5	164	265
676	Nuclear Engineering	1	5	11	26
676	Chemistry	1	5	12	28
676	Materials Science	1	5	6	10
676	Semiconductor	1	5	8	23
676	Nanotechnology	1	5	379	603
676	Nanotechnology	1	5	17	33
676	Semiconductor	1	5	5	7
676	Aerospace Engineering	1	5	7	14
676	Education	1	5	344	537
694	Chemistry	1	4	68	127
694	Chemistry	1	4	39	96
694	Astronomy	1	4	4	7
694	Civil Engineering	1	4	21	49
694	Electronics	1	4	9	13
694	Chemistry	1	4	14	36
694	Metallurgy	1	4	4	9
694	Electrical Engineering	1	4	17	33
694	Polymer Engineering	1	4	38	67
694	Materials Science	1	4	13	25
694	Chemistry	1	4	7	22
694	Chemical Engineering	1	4	16	29
694	Electronics	1	4	25	53
694	Computer Engineering	1	4	17	28
694	Phenomenology	1	4	3	7
694	Electronics	1	4	157	263
694	Radiation Protection	1	4	2	6
694	Nanomaterials	1	4	1	3
712	Electrical Engineering	1	3	41	68
712	Computer Engineering	1	3	21	43
712	Mechanical Engineering	1	3	21	33
712	Materials Engineering	1	3	7	10
712	Chemical Engineering	1	3	17	48
712	Information Technology	1	3	1	3
712	Dentistry	1	3	12	36
712	Mechanical Engineering	1	3	1	3
712	Computer Science	1	3	15	47
712	Astronomy	1	3	3	8
712	Mechanical Engineering	2	3	359	813
712	Chemistry	1	3	19	47
712	Chemistry	1	3	38	73
712	Electronics	1	3	13	25
712	Electronics	1	3	2	3
712	Mechanical Engineering	1	3	5	15
712	Computer Engineering	1	3	6	6
712	Materials Science	1	3	1	2
712	Materials Science	1	3	22	46
712	Photonics	1	3	1	3
712	Electronics	1	3	7	18
712	Electronics	1	3	19	35
712	Mechanical Engineering	1	3	1	1
712	Materials Science	1	3	10	14
712	Materials Engineering	1	3	21	51
712	Information Technology	1	3	1	2
712	Rhinology	1	3	1	1
739	Electrical Engineering	1	2	25	46
739	Chemical Engineering	1	2	15	40
739	Computer Science	1	2	17	41
739	Electrical Engineering	1	2	15	36
739	Materials Science	1	2	34	80
739	Materials Science	1	2	11	20
739	Materials Science	1	2	50	88
739	Chemical Engineering	1	2	49	102
739	Mechanical Engineering	1	2	150	297
739	Electrical Engineering	1	2	22	49
739	Nuclear Engineering	1	2	17	30
739	Chemical Engineering	1	2	28	48
739	Chemistry	1	2	31	53
739	Semiconductor	1	2	19	30
739	Electronics	1	2	19	30
739	Materials Engineering	1	2	15	33
739	Renewable Energy	1	2	14	28
739	Materials Engineering	1	2	28	55
739	Composites	1	2	5	7
739	Chemistry	1	2	48	137
739	Mechatronics	1	2	63	160
739	Electronics	1	2	6	20
739	Photonics	1	2	5	19
739	Electronics	1	2	3	3
739	Automation	1	2	78	155
739	Environmental Engineering	1	2	3	15
739	Materials Engineering	1	2	1	7
739	Mechanical Engineering	1	2	2	11
739	Materials Engineering	1	2	13	26
739	Chemistry	1	2	1	1
739	Materials Science	1	2	1	5
739	Chemistry	1	2	2	3
739	Electronics	1	2	5	13
739	Information Systems	1	2	2	8
773	Astronomy	1	1	30	54
773	Chemical Engineering	1	1	37	83
773	Chemistry	1	1	106	244
773	Materials Science	1	1	28	65
773	Materials Science	1	1	21	44
773	Mechanical Engineering	1	1	12	29
773	Chemical Engineering	1	1	12	38
773	Computer Engineering	1	1	15	34
773	Astronomy	1	1	31	54
773	Chemistry	1	1	23	53
773	Astronomy	1	1	7	14
773	Astronomy	1	1	5	13
773	Electrical Engineering	1	1	18	29
773	Astronomy	1	1	19	42
773	Polymers	1	1	13	26
773	Energy Conversion	1	1	9	25
773	Chemical Engineering	1	1	5	15
773	Chemical Engineering	1	1	8	11
773	Laser	1	1	17	37
773	Chemistry	1	1	2	7
773	Chemistry	1	1	29	73
773	Chemistry	1	1	5	22
773	Energy Conversion	1	1	6	19
773	Computer Engineering	1	1	43	99
773	Systems Engineering	1	1	12	25
773	Nanotechnology	1	1	630	1136
773	Chemistry	2	1	4	28
773	Computer Engineering	1	1	1	11
773	Nanotechnology	1	1	217	465
773	Nanotechnology	1	1	139	303
773	Materials Science	1	1	1	2
773	Photonics	1	1	9	20
805	Chemical Engineering	1	0	6	22
805	Astronomy	1	0	20	31
805	Computer Engineering	1	0	22	56
805	Astronomy	1	0	4	15
805	Chemistry	1	0	33	84
805	Astronomy	1	0	1	2
805	Astronomy	1	0	113	203
805	Computer Engineering	1	0	22	48
805	Chemistry	1	0	38	79
805	Information Technology	1	0	6	17
805	Semiconductor	1	0	3	8
805	Materials Engineering	1	0	3	5
805	Electronics	1	0	6	12
805	Photonics	1	0	5	10
805	Materials Engineering	1	0	1	8
805	Materials Science	1	0	2	7
805	Electromagnetics	1	0	12	31
805	Nanotechnology	1	0	1	3
805	Quantum Mechanics	1	0	3	5
805	Automation	1	0	7	20
805	Mechanical Engineering	1	0	2	10

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Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

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