2.2(top 20%)
impact factor
16.3K(top 1%)
papers
363.2K(top 1%)
citations
169(top 2%)
h-index
2.4(top 20%)
extended IF
17.9K
all documents
374.8K
doc citations
273(top 2%)
g-index

Top Articles

#TitleJournalYearCitations
1Microstructural evolution during film growthJournal of Vacuum Science and Technology A: Vacuum, Surfaces and Films20031,622
2Nanosphere lithography: A materials general fabrication process for periodic particle array surfacesJournal of Vacuum Science and Technology A: Vacuum, Surfaces and Films19951,370
3Theory of ripple topography induced by ion bombardmentJournal of Vacuum Science and Technology A: Vacuum, Surfaces and Films19881,332
4Structural analysis of Si(111)‐7×7 by UHV‐transmission electron diffraction and microscopyJournal of Vacuum Science and Technology A: Vacuum, Surfaces and Films19851,289
5The microstructure of sputter‐deposited coatingsJournal of Vacuum Science and Technology A: Vacuum, Surfaces and Films19861,211
6The search for novel, superhard materialsJournal of Vacuum Science and Technology A: Vacuum, Surfaces and Films19991,144
7Material selection for hard coatingsJournal of Vacuum Science and Technology A: Vacuum, Surfaces and Films19861,114
8Sculptured thin films and glancing angle deposition: Growth mechanics and applicationsJournal of Vacuum Science and Technology A: Vacuum, Surfaces and Films1997896
9Titanium aluminum nitride films: A new alternative to TiN coatingsJournal of Vacuum Science and Technology A: Vacuum, Surfaces and Films1986882
10Revised structure zone model for thin film physical structureJournal of Vacuum Science and Technology A: Vacuum, Surfaces and Films1984880
11Characterization of diamondlike carbon films and their application as overcoats on thin‐film media for magnetic recordingJournal of Vacuum Science and Technology A: Vacuum, Surfaces and Films1987833
12Glancing angle deposition: Fabrication, properties, and applications of micro- and nanostructured thin filmsJournal of Vacuum Science and Technology A: Vacuum, Surfaces and Films2007819
13Plasma-Assisted Atomic Layer Deposition: Basics, Opportunities, and ChallengesJournal of Vacuum Science and Technology A: Vacuum, Surfaces and Films2011795
14Infrared spectroscopic study of SiOx films produced by plasma enhanced chemical vapor depositionJournal of Vacuum Science and Technology A: Vacuum, Surfaces and Films1986778
15Plasma etching: Yesterday, today, and tomorrowJournal of Vacuum Science and Technology A: Vacuum, Surfaces and Films2013753
16Status and prospects of Al2O3-based surface passivation schemes for silicon solar cellsJournal of Vacuum Science and Technology A: Vacuum, Surfaces and Films2012715
17Nature of the use of adventitious carbon as a binding energy standardJournal of Vacuum Science and Technology A: Vacuum, Surfaces and Films1995701
18Review Article: Stress in thin films and coatings: Current status, challenges, and prospectsJournal of Vacuum Science and Technology A: Vacuum, Surfaces and Films2018690
19Raman scattering characterization of carbon bonding in diamond and diamondlike thin filmsJournal of Vacuum Science and Technology A: Vacuum, Surfaces and Films1988676
20GexSi1−x/Si strained‐layer superlattice grown by molecular beam epitaxyJournal of Vacuum Science and Technology A: Vacuum, Surfaces and Films1984665
21High power impulse magnetron sputtering dischargeJournal of Vacuum Science and Technology A: Vacuum, Surfaces and Films2012654
22Microfabrication of cantilever styli for the atomic force microscopeJournal of Vacuum Science and Technology A: Vacuum, Surfaces and Films1990651
23Infrared spectroscopy of Si(111) and Si(100) surfaces after HF treatment: Hydrogen termination and surface morphologyJournal of Vacuum Science and Technology A: Vacuum, Surfaces and Films1989648
24UV/ozone cleaning of surfacesJournal of Vacuum Science and Technology A: Vacuum, Surfaces and Films1985623
25Gas-phase production of carbon single-walled nanotubes from carbon monoxide via the HiPco process: A parametric studyJournal of Vacuum Science and Technology A: Vacuum, Surfaces and Films2001604
26Measuring the nanomechanical properties and surface forces of materials using an atomic force microscopeJournal of Vacuum Science and Technology A: Vacuum, Surfaces and Films1989583
27Overview of atomic layer etching in the semiconductor industryJournal of Vacuum Science and Technology A: Vacuum, Surfaces and Films2015547
28Thin films from energetic cluster impact: A feasibility studyJournal of Vacuum Science and Technology A: Vacuum, Surfaces and Films1992516
29Global model of Ar, O2, Cl2, and Ar/O2 high‐density plasma dischargesJournal of Vacuum Science and Technology A: Vacuum, Surfaces and Films1995511
30Plasma deposition of optical films and coatings: A reviewJournal of Vacuum Science and Technology A: Vacuum, Surfaces and Films2000511
31Application of reflectance difference spectroscopy to molecular‐beam epitaxy growth of GaAs and AlAsJournal of Vacuum Science and Technology A: Vacuum, Surfaces and Films1988505
32A review of the present state of art in hard coatings grown from the vapor phaseJournal of Vacuum Science and Technology A: Vacuum, Surfaces and Films1986473
33In situ laser diagnostic studies of plasma‐generated particulate contaminationJournal of Vacuum Science and Technology A: Vacuum, Surfaces and Films1989465
34Practical guide for curve fitting in x-ray photoelectron spectroscopyJournal of Vacuum Science and Technology A: Vacuum, Surfaces and Films2020463
35Practical guides for x-ray photoelectron spectroscopy (XPS): Interpreting the carbon 1s spectrumJournal of Vacuum Science and Technology A: Vacuum, Surfaces and Films2021461
36Atomic structure of GaAs(100)‐(2×1) and (2×4) reconstructed surfacesJournal of Vacuum Science and Technology A: Vacuum, Surfaces and Films1987447
37Introduction to x-ray photoelectron spectroscopyJournal of Vacuum Science and Technology A: Vacuum, Surfaces and Films2020419
38Charged particle fluxes from planar magnetron sputtering sourcesJournal of Vacuum Science and Technology A: Vacuum, Surfaces and Films1986395
39Determination of the local electronic structure of atomic‐sized defects on Si(001) by tunneling spectroscopyJournal of Vacuum Science and Technology A: Vacuum, Surfaces and Films1989385
40On structure and properties of sputtered Ti and Al based hard compound filmsJournal of Vacuum Science and Technology A: Vacuum, Surfaces and Films1986378
41Filling of micron‐sized contact holes with copper by energetic cluster impactJournal of Vacuum Science and Technology A: Vacuum, Surfaces and Films1994376
42Interaction of water, oxygen, and hydrogen with TiO2(110) surfaces having different defect densitiesJournal of Vacuum Science and Technology A: Vacuum, Surfaces and Films1992366
43On the electrochemical etching of tips for scanning tunneling microscopyJournal of Vacuum Science and Technology A: Vacuum, Surfaces and Films1990362
44Density changes upon crystallization of Ge2Sb2.04Te4.74 filmsJournal of Vacuum Science and Technology A: Vacuum, Surfaces and Films2002362
45Pulsed electron-beam technology for surface modification of metallic materialsJournal of Vacuum Science and Technology A: Vacuum, Surfaces and Films1998360
46Scanning tunneling microscopy studies of structural disorder and steps on Si surfacesJournal of Vacuum Science and Technology A: Vacuum, Surfaces and Films1989359
47Growth of cubic phase gallium nitride by modified molecular‐beam epitaxyJournal of Vacuum Science and Technology A: Vacuum, Surfaces and Films1989358
48Electron cyclotron resonance microwave discharges for etching and thin‐film depositionJournal of Vacuum Science and Technology A: Vacuum, Surfaces and Films1989352
49Metal–organic interface and charge injection in organic electronic devicesJournal of Vacuum Science and Technology A: Vacuum, Surfaces and Films2003350
50Modeling of reactive sputtering of compound materialsJournal of Vacuum Science and Technology A: Vacuum, Surfaces and Films1987346